FI20125495A - Fabry-Perot interferometer and process for making the same - Google Patents

Fabry-Perot interferometer and process for making the same Download PDF

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Publication number
FI20125495A
FI20125495A FI20125495A FI20125495A FI20125495A FI 20125495 A FI20125495 A FI 20125495A FI 20125495 A FI20125495 A FI 20125495A FI 20125495 A FI20125495 A FI 20125495A FI 20125495 A FI20125495 A FI 20125495A
Authority
FI
Finland
Prior art keywords
fabry
same
actuators
perot interferometer
making
Prior art date
Application number
FI20125495A
Other languages
Finnish (fi)
Swedish (sv)
Other versions
FI125612B (en
Inventor
Tapani Antila
Jussi Maekynen
Christer Holmlund
Jarkko Antila
Jyrki Ollila
Heikki Saari
Original Assignee
Teknologian Tutkimuskeskus Vtt Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teknologian Tutkimuskeskus Vtt Oy filed Critical Teknologian Tutkimuskeskus Vtt Oy
Priority to FI20125495A priority Critical patent/FI125612B/en
Priority to US14/399,956 priority patent/US9588334B2/en
Priority to PCT/FI2013/050510 priority patent/WO2013167811A1/en
Priority to JP2015510850A priority patent/JP6214631B2/en
Priority to CN201380036359.8A priority patent/CN104428642B/en
Priority to EP13787582.9A priority patent/EP2847559B1/en
Publication of FI20125495A publication Critical patent/FI20125495A/en
Application granted granted Critical
Publication of FI125612B publication Critical patent/FI125612B/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining

Abstract

The invention relates to a Fabry-Perot interferometer and a method for producing the same. More specifically, the invention relates to Fabry-Perot interferometers which are controllable with one or several actuators, such as piezoelectric, electrostrictive or flexoelectric actuators. In prior art technology there is a problem to achieve a sufficiently small and uniform gap between mirrors. In the present invention an intermediate structure (85a, 85b, 95a, 95b, 81a, 81b, 91a, 91b, 98a, 98b) is used between a mirror and an actuator or between two mirrors. The method of production also includes measuring the width distribution of the gap in several phases, and providing pre-actuation of actuators.
FI20125495A 2012-05-08 2012-05-08 Fabry-Perot interferometer FI125612B (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FI20125495A FI125612B (en) 2012-05-08 2012-05-08 Fabry-Perot interferometer
US14/399,956 US9588334B2 (en) 2012-05-08 2013-05-08 Fabry-perot interferometer and a method for producing the same with decreased bending
PCT/FI2013/050510 WO2013167811A1 (en) 2012-05-08 2013-05-08 Fabry-perot interferometer and a method for producing the same
JP2015510850A JP6214631B2 (en) 2012-05-08 2013-05-08 Fabry-Perot interferometer and method of manufacturing the same
CN201380036359.8A CN104428642B (en) 2012-05-08 2013-05-08 Fabry perot interferometer and its production method
EP13787582.9A EP2847559B1 (en) 2012-05-08 2013-05-08 Fabry-perot interferometer and a method for producing the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20125495A FI125612B (en) 2012-05-08 2012-05-08 Fabry-Perot interferometer
FI20125495 2012-05-08

Publications (2)

Publication Number Publication Date
FI20125495A true FI20125495A (en) 2013-11-09
FI125612B FI125612B (en) 2015-12-15

Family

ID=49550203

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20125495A FI125612B (en) 2012-05-08 2012-05-08 Fabry-Perot interferometer

Country Status (6)

Country Link
US (1) US9588334B2 (en)
EP (1) EP2847559B1 (en)
JP (1) JP6214631B2 (en)
CN (1) CN104428642B (en)
FI (1) FI125612B (en)
WO (1) WO2013167811A1 (en)

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FI127159B (en) 2015-03-09 2017-12-15 Teknologian Tutkimuskeskus Vtt Oy Mirror disk for Fabry-Perot interferometer and Fabry-Perot interferometer
US10168214B2 (en) * 2015-05-15 2019-01-01 Trutag Technologies, Inc. Method of assembly and manufacturing of piezo actuated Fabry-Perot interferometer
TWI581004B (en) * 2015-11-18 2017-05-01 財團法人工業技術研究院 Tunable optical device
NO20161086A1 (en) * 2016-06-29 2018-01-01 Tunable As Modular Fabry-Perot
CN106707499A (en) * 2016-11-21 2017-05-24 苏州大学 Capacitive-feedback-type tunable Fabry-Perot filter
FI128101B (en) * 2017-07-03 2019-09-30 Teknologian Tutkimuskeskus Vtt Oy Microelectromechanical (MEMS) fabry-perot interferometer, apparatus and method for manufacturing fabry-perot interferometer
CN109445091B (en) * 2018-11-06 2021-01-29 肇庆市华师大光电产业研究院 Voltage-tunable driving interference color filter and preparation method thereof
RU2726717C2 (en) * 2019-01-10 2020-07-15 Федеральное государственное бюджетное учреждение науки Физический институт им. П.Н. Лебедева Российской академии наук (ФИАН) Single-unit scanning fabry-perot interferometer
CN114868068B (en) * 2019-09-25 2023-11-17 深圳市海谱纳米光学科技有限公司 Adjustable optical filtering device
CN110989161B (en) * 2019-12-20 2022-04-05 华中科技大学鄂州工业技术研究院 FP chamber tunable filter
FI130707B1 (en) * 2020-03-31 2024-01-31 Teknologian Tutkimuskeskus Vtt Oy Fabry-Perot interferometer having supporting elements
CN113767309A (en) * 2020-05-28 2021-12-07 深圳市海谱纳米光学科技有限公司 Adjustable optical filter device and spectral imaging system
WO2022038731A1 (en) * 2020-08-20 2022-02-24 日本電信電話株式会社 Temperature measurement device
CN111880257B (en) * 2020-09-28 2021-05-07 深圳市海谱纳米光学科技有限公司 Adjustable optical filter device

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Also Published As

Publication number Publication date
US20150124263A1 (en) 2015-05-07
WO2013167811A1 (en) 2013-11-14
EP2847559A1 (en) 2015-03-18
EP2847559B1 (en) 2023-06-28
JP6214631B2 (en) 2017-10-18
EP2847559A4 (en) 2016-01-06
JP2015520868A (en) 2015-07-23
US9588334B2 (en) 2017-03-07
CN104428642B (en) 2017-03-08
FI125612B (en) 2015-12-15
CN104428642A (en) 2015-03-18

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