CN109445091B - Voltage-tunable driving interference color filter and preparation method thereof - Google Patents
Voltage-tunable driving interference color filter and preparation method thereof Download PDFInfo
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- CN109445091B CN109445091B CN201811315161.4A CN201811315161A CN109445091B CN 109445091 B CN109445091 B CN 109445091B CN 201811315161 A CN201811315161 A CN 201811315161A CN 109445091 B CN109445091 B CN 109445091B
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Abstract
The invention relates to a voltage-tunable driven interference color filter and a preparation method thereof. The interference color filter comprises a substrate, a bottom electrode E1, a soft medium, a top electrode E2 with a perforated structure, a light cavity and an upper substrate which are sequentially arranged from bottom to top; the soft medium is an extrudable polymer; the soft medium extends through the perforation structure to form a columnar texture with the same protruding height at the top; the top of the columnar texture is in contact with the upper substrate. The interference color filter provided by the invention can obtain interference color in the whole visible range by regulating the air gap by utilizing the potential applied to the adjacent electrode, so that the existence of the sub-pixel is not required; and the interference color filter has simple preparation process and can realize batch production.
Description
Technical Field
The invention belongs to the field of display and intelligent windows, and particularly relates to a voltage-tunable driven interference color filter and a preparation method thereof.
Background
The field of display and intelligent windows needs to be realized by using an adjustable interference filter. One of the ways in which a low power reflective full color display can be achieved is an interferometric modulator display (IMOD) based on micro-electro-mechanical systems (MEMS) technology developed by iridig display technologies incorporated later into Qualcomm, a high traffic company. IMODs use optical interference phenomena to generate/filter color. Generally, it uses a metal (aluminum) film having two states, one being a collapsed state of black and the other being a non-collapsed state whose color depends on the space interval.
However, this gap is not tunable, and so the color is not tunable. Such a display requires that each pixel must be made up of several sub-pixels. This does not involve a complicated dual capacitor system. However, the manufacturing process is extremely complicated, resulting in low yield, and thus IMOD is not the mainstream technology.
Therefore, the interference color filter with adjustable gap has important research significance and application value.
Disclosure of Invention
The invention aims to overcome the defect and the defect that the gap of an interference color filter is not adjustable in the prior art, and provides the interference color filter driven by voltage tunable. The interference color filter provided by the invention can obtain interference color in the whole visible range by regulating the air gap by utilizing the potential applied to the adjacent electrode, so that the existence of the sub-pixel is not required; and the interference color filter has simple preparation process and can realize batch production.
Another object of the present invention is to provide a method for producing the interference color filter.
Another object of the present invention is to provide the use of the above interference filter in the field of displays or smart windows.
In order to achieve the purpose, the invention adopts the following technical scheme:
a voltage tunable driving interference color filter comprises a substrate, a bottom electrode E1, a soft medium, a top electrode E2 with a perforated structure, an optical cavity and an upper substrate which are sequentially arranged from bottom to top; the soft medium is an extrudable polymer; the soft medium extends through the perforation structure to form a columnar texture with the same protruding height at the top; the top of the columnar texture is in contact with the upper substrate.
The wavelength of the constructive/destructive interference light depends on the thickness Δ h of the optical cavity (the height difference between the top electrode E2 and the upper substrate). The inventors of the present invention have found through many studies that the air gap (i.e., the optical cavity) is not controlled by two adjacent media (i.e., the bottom electrode E1 and the top electrode E2) to which electric potentials are applied, but is regulated by electromechanical contraction of a soft substance lower/higher than one of the electrodes. Further, since the thickness of the soft material is driven by potential adjustment, the air gap can be adjusted by adjusting the voltage, and the interference color can be obtained over the entire visible range, so that the presence of the sub-pixel is not required.
According to the interference color filter driven by the tunable voltage, provided by the invention, through applying electric potential to the bottom electrode E1 and the top electrode E2, the soft medium is extruded under the action of electrostatic pressure, or due to an electrostrictive effect existing in the soft medium, so that the interference color filter has electromechanical response and changes in thickness, further the adjustment and control of the thickness delta h of the optical cavity are realized, interference color can be obtained in the whole visible range, and a spectrum of any color can be generated.
In addition, the adjustable color is provided in each pixel. This means that the display device does not necessarily need sub-pixels. Another significant advantage of the interference filter is that the polymer has a very good flexibility. The substrate and the upper substrate can be replaced by flexible materials, and other components are selected conventionally in the field (through a thin film), so that the whole device can be endowed with good flexibility. For example, the film can be made into a newspaper which can be folded in a film 'Harry potter' and has a dynamic image function.
The interference color filter can effectively improve displays and intelligent windows, and has the prospect application of full-color reflection electronic paper with extremely low power consumption (no current flow).
The substrate, bottom electrode E1, top electrode E2, optical cavity, and superstrate in the interference filter of the present invention are all conventional designs and materials in the art.
Extrudable polymers (electrically responsive polymers) of the prior art are all useful in the present invention.
Preferably, the polymer is a dielectric elastomer or gel.
The polymer in the present invention may be of any thickness.
Preferably, the thickness of the polymer is 1-20 μm.
Preferably, the polymer has a liquid crystal component.
Preferably, the polymer has one or more of nano-or micro-particles; the nano or micro particles are soft or solid.
In the present invention, the columnar texture causes the soft medium to form two distinct planes with a defined, uniform interplanar spacing. The bottom planes are connected with each other, and the top planes can be in any shape.
Preferably, the substrate is a rigid or flexible substrate. The substrate showed no optical scattering at this point.
Preferably, the bottom electrode E1 is a thin film conductive material.
The thickness of the film-like conductive material is arbitrary but not smaller than the material-dependent sheet resistance, resulting in a device that does not operate properly.
Preferably, the top electrode E2 is a conductive film.
The top electrode E2 has a perforated structure through which the soft medium can pass after the potential is applied. The shape and size of these perforations are arbitrary. Especially for reflective displays, the perforations form the pixel walls and the areas between the perforations are the pixel or sub-pixel areas that act as color filters.
The thickness of the conductive thin film can be arbitrarily selected, wherein the thickness of the thin film is arbitrary but not smaller than the material-dependent sheet resistance and mechanical properties, so that the device cannot normally operate.
In general, the optical cavity may be vacuum or transparent medium. The optical cavity is highly transparent and free of light scattering.
In some embodiments, the optical cavity is a cavity.
In some embodiments, the optical cavity contains one or more of a gaseous medium or a transparent liquid medium.
In some embodiments, the gaseous medium can be either a single gas or a mixture of gases.
Preferably, the gas is air.
In certain embodiments, the transparent liquid medium may be a single pure liquid or a mixture of liquids.
Preferably, the thickness of the optical cavity does not exceed 1000 nm.
The optical cavity may act as a Fabry-perot resonator (Fabry-perot), where λ res =2/n Δ h, and n =1, 2, 3 …. The research shows that when the delta h is more than or equal to 0 and less than 150nm and no potential is applied, the interference color filter is in an OFF state; when the electric potential is applied, the delta h is increased and is in an ON state, and when 200 nm < deltah <1000nm, the electric potential dependent strain can be generated, so that the interference effect is better.
Preferably, the upper substrate is a transparent substrate. Flexible or rigid.
The transparent substrate is free of light scattering.
Preferably, the surface of the upper substrate is coated with a conductive thin film or film system.
More preferably, the conductive film or film system is transparent or translucent.
More preferably, the conductive thin film is a transparent conductive oxide or an ultra-thin metal.
More preferably, the membrane is made of an insulating material.
The interference filter provided by the invention has a reflection or projection mode of operation. In various modes, the substrate, bottom electrode E1, soft dielectric, top electrode E2, optical cavity, and superstrate may be selected according to conventional choices in the art.
Preferably, the substrate is transparent or opaque when the interference filter is in a reflective mode of operation.
Preferably, the bottom electrode E1 is transparent or opaque when the interference filter is in a reflective mode of operation.
Preferably, the polymer is transparent or opaque when the interference filter is in a reflective mode of operation.
More preferably, when the interference filter is in a reflective mode of operation, the bottom electrode E1 is a metal, a conductive transparent oxide, or a carbon allotrope.
Preferably, the substrate is transparent when the interference filter is in a transmissive mode of operation.
Preferably, the bottom electrode E1 is transparent or translucent when the interference filter is in a transmissive mode of operation.
Preferably, the top electrode E2 is transparent or translucent when the interference filter is in a transmissive mode of operation.
More preferably, the top electrode E2 is a transparent conductive oxide when the interference filter is in a transmissive mode of operation. At this time, the top electrode E2 was not optically scattered.
Preferably, the polymer is transparent or translucent when the interference filter is in a transmissive mode of operation. The polymer does not scatter light.
The preparation method of the interference color filter comprises the following preparation steps:
s1: coating a polymer prepolymer on a substrate with a bottom electrode, and crosslinking the prepolymer into a polymer to obtain a soft medium and form a columnar texture;
s2: transferring the top electrode E2 to a soft medium; or the top electrode E2 is obtained by photoetching deposition or direct deposition on the surface of the soft medium, and the columnar texture of the polymer extends through the through hole in the top electrode E2;
s3: and covering the upper layer substrate on the columnar texture to obtain the interference color filter. The method provided by the invention is simple in preparation process and can realize batch production.
The columnar texture on the soft medium can be obtained either when the polymer is crosslinked or by methods conventional in the art.
Preferably, after the soft medium is obtained in S2, the columnar texture is obtained by plasma flat etching; or selectively thermally ablating by using a scanning probe to obtain columnar textures; or columnar texture using laser ablated interference patterns.
The columnar grains form two distinct planes with a defined, uniform interplanar spacing. The bottom planes of the columnar textures are connected with each other, and the top planes of the columnar textures can be in any shape.
When top electrode E2 was deposited, there was no electrical contact with the conductor deposited on the top surface of each pillar, since the deposition of top electrode E2 was directional and the pillar walls of the columnar texture were not coated with conductor.
Typically, the thickness of the deposited top electrode E2 does not exceed the pillar height of the columnar features.
The use of the above-described interference filters in the field of displays or smart windows is also within the scope of the present invention.
Compared with the prior art, the invention has the following beneficial effects:
the interference color filter provided by the invention can obtain interference color in the whole visible range by regulating the air gap by utilizing the potential applied to the adjacent electrode, so that the existence of the sub-pixel is not required; and the interference color filter has simple preparation process and can realize batch production.
Drawings
FIG. 1 is a schematic diagram of the structure of an interference color filter provided in example 1;
FIG. 2 is a diagram of the initial OFF state of the device when no potential is applied to the interference filter provided in example 1;
FIG. 3 is a schematic diagram of an interference filter in a reflective mode of operation;
FIG. 4 is a schematic diagram of an interference filter in a projection mode of operation;
FIG. 5 shows how different Δ h (V) result in Fabry-Perot modes (Fabry-Perot);
fig. 6 is a process flow diagram of the preparation method provided in example 1.
Detailed Description
The invention is further illustrated by the following examples. These examples are intended to illustrate the invention and are not intended to limit the scope of the invention. Experimental procedures without specific conditions noted in the examples below, generally according to conditions conventional in the art or as suggested by the manufacturer; the raw materials, reagents and the like used are, unless otherwise specified, those commercially available from the conventional markets and the like. Any insubstantial changes and substitutions made by those skilled in the art based on the present invention are intended to be covered by the claims.
Example 1
The embodiment provides a voltage-tunable driven interference color filter, as shown in fig. 1, which includes a substrate, a bottom electrode E1, a soft medium, a top electrode E2 with a perforated structure, an optical cavity, and an upper substrate, which are arranged in sequence from bottom to top; the soft medium is an extrudable polymer; the soft medium extends through the perforation structure to form a columnar texture with the same protruding height at the top; the top of the columnar texture is in contact with the upper substrate.
In particular, the substrate is covered by a planar bottom electrode E1. On the bottom electrode E1 is a thin film of a soft electroactive polymer with a thickness h. On the polymer is a top electrode E2 of a perforated conductive film. The polymer extends through the perforations in the top electrode E2 forming a columnar texture. An upper substrate is supported on these polymer columnar textures. The top electrode E2, the upper substrate and the transparent medium between them form an optical cavity with a thickness Δ h.
The interference color filter is prepared by the following preparation method, as shown in FIG. 6:
s1: coating a polymer prepolymer on a substrate with a bottom electrode, crosslinking the prepolymer into a polymer to obtain a soft medium, and etching by using a plasma flat plate to obtain a columnar texture; or selectively thermally ablating by using a scanning probe to obtain columnar textures; or obtaining columnar texture by using the interference pattern ablated by laser;
s2: transferring the top electrode E2 to a soft medium; or the top electrode E2 is obtained by photoetching deposition or direct deposition on the surface of the soft medium, and the columnar texture of the polymer extends through the through hole in the top electrode E2;
s3: and covering the upper layer substrate on the columnar texture to obtain the interference color filter. The method provided by the invention is simple in preparation process and can realize batch production. The thickness of the soft medium is driven by the potential adjustment, so that the soft medium is pressed by the electrostatic pressure when the potentials are applied to the bottom electrode E1 and the top electrode E2; or due to the electrostrictive effect existing in the soft medium, at this time, the thickness Δ h of the optical cavity changes, that is, the air gap (the thickness of the optical cavity) can be adjusted by adjusting the voltage.
Fig. 2 is an initial OFF state of the interference color filter when no potential is applied. Wherein Δ h = 0nm in fig. 2A; in FIG. 2B, 0nm <. DELTA.h <150 nm. When a potential is applied such that 200 nm < Deltah <1000nm, the interference filter is in the ON state.
Fig. 3 is a schematic structural diagram of the reflective operation mode. As can be seen, in this mode of operation, the direction of illumination and the viewing angle are co-directional.
Fig. 4 is a schematic structural diagram of the transmissive operation mode, and it can be seen that in the operation mode, the illumination direction and the viewing angle are reversed.
As shown in fig. 5, Fabry-perot modes (Fabry-perot) are obtained for different Δ h (v).
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (15)
1. The interference color filter driven by voltage tunable is characterized by comprising a substrate, a bottom electrode E1, a soft medium, a top electrode E2 with a perforated structure, an optical cavity and an upper substrate which are sequentially arranged from bottom to top; the soft medium is an extrudable polymer; the soft medium extends through the perforation structure to form a columnar texture with the same protruding height at the top; the top of the columnar texture is in contact with the upper substrate.
2. A color filter according to claim 1, characterized in that the polymer is a dielectric elastomer.
3. A color filter according to claim 1, characterized in that the polymer is a gel.
4. A color filter according to claim 1, characterized in that the thickness of the polymer is 1 to 20 μm.
5. A color filter according to claim 1, characterized in that the polymer has a liquid crystal component.
6. A color filter according to claim 1, characterized in that the polymer has nano-or microparticles; the nano-or micro-particles are soft.
7. A color filter according to claim 1, characterized in that the polymer has nano-or microparticles; the nano or micro particles are solid.
8. A color filter according to claim 1, characterized in that the substrate is a rigid or flexible substrate; the bottom electrode E1 is a film-shaped conductive material; the optical cavity is a cavity; the top electrode E2 is a conductive film; the upper substrate is a transparent substrate.
9. A color filter according to claim 1, characterized in that the surface of the upper substrate is coated with a conductive thin film.
10. A color filter according to claim 9, characterized in that the conductive film is transparent or translucent.
11. A color filter according to claim 1, characterized in that the surface of the upper substrate is coated with a film system.
12. A color filter according to claim 11, wherein the film is transparent or translucent; the membrane is made of an insulating material.
13. A interference filter as defined in claim 1, wherein the optical cavity contains a gaseous medium or a liquid medium.
14. A color filter according to claim 1, characterized in that the substrate, the bottom electrode E1, the polymer are transparent or opaque when the interference filter is in the reflective mode of operation; the top electrode E2 is a metal; when the interference color filter adopts a transmission operation mode, the substrate is transparent; the bottom electrode E1, the top electrode E2 and the polymer are transparent or semitransparent.
15. A method for producing an interference filter as claimed in any one of claims 1 to 14, comprising the steps of:
s1: a substrate with a bottom electrode; coating a polymer prepolymer, crosslinking into a polymer to obtain a soft medium, and forming a columnar texture;
s2: transferring the top electrode E2 to a soft medium; or the top electrode E2 is obtained by photoetching deposition or direct deposition on the surface of the soft medium, and the columnar texture of the polymer extends through the through hole in the top electrode E2;
s3: and covering the upper layer substrate on the columnar texture to obtain the interference color filter.
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| FI125612B (en) * | 2012-05-08 | 2015-12-15 | Teknologian Tutkimuskeskus Vtt Oy | Fabry-Perot interferometer |
| JP2015106107A (en) * | 2013-12-02 | 2015-06-08 | セイコーエプソン株式会社 | Wavelength variable interference filter, optical module, and electronic equipment |
| TWI581004B (en) * | 2015-11-18 | 2017-05-01 | 財團法人工業技術研究院 | Tunable optical device |
| JP6672805B2 (en) * | 2016-01-12 | 2020-03-25 | セイコーエプソン株式会社 | Tunable interference filter, electronic component, method for manufacturing electronic component, and electronic device |
| GB2548862B (en) * | 2016-03-31 | 2020-06-10 | De La Rue Int Ltd | Optically variable device and method of forming thereof |
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