FI119785B - Kapasitiivinen anturi ja menetelmä kapasitiivisen anturin valmistamiseksi - Google Patents

Kapasitiivinen anturi ja menetelmä kapasitiivisen anturin valmistamiseksi Download PDF

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Publication number
FI119785B
FI119785B FI20041229A FI20041229A FI119785B FI 119785 B FI119785 B FI 119785B FI 20041229 A FI20041229 A FI 20041229A FI 20041229 A FI20041229 A FI 20041229A FI 119785 B FI119785 B FI 119785B
Authority
FI
Finland
Prior art keywords
sensor
electrode
fixed electrode
capacitive
sensor according
Prior art date
Application number
FI20041229A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI20041229A0 (fi
FI20041229A (fi
Inventor
Jaakko Ruohio
Risto Mutikainen
Original Assignee
Vti Technologies Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vti Technologies Oy filed Critical Vti Technologies Oy
Priority to FI20041229A priority Critical patent/FI119785B/fi
Publication of FI20041229A0 publication Critical patent/FI20041229A0/fi
Priority to CNA2005800322663A priority patent/CN101027542A/zh
Priority to EP05787808A priority patent/EP1809997A4/fr
Priority to JP2007532914A priority patent/JP2008513800A/ja
Priority to PCT/FI2005/050318 priority patent/WO2006032729A1/fr
Priority to US11/232,922 priority patent/US7555950B2/en
Publication of FI20041229A publication Critical patent/FI20041229A/fi
Application granted granted Critical
Publication of FI119785B publication Critical patent/FI119785B/fi

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
    • G01P3/48—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage
    • G01P3/481—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals
    • G01P3/483—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals delivered by variable capacitance detectors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Gyroscopes (AREA)
FI20041229A 2004-09-23 2004-09-23 Kapasitiivinen anturi ja menetelmä kapasitiivisen anturin valmistamiseksi FI119785B (fi)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FI20041229A FI119785B (fi) 2004-09-23 2004-09-23 Kapasitiivinen anturi ja menetelmä kapasitiivisen anturin valmistamiseksi
CNA2005800322663A CN101027542A (zh) 2004-09-23 2005-09-15 电容性传感器和用于制造电容性传感器的方法
EP05787808A EP1809997A4 (fr) 2004-09-23 2005-09-15 Capteur capacitif et procede de production du capteur capacitif
JP2007532914A JP2008513800A (ja) 2004-09-23 2005-09-15 容量性センサーおよび該容量性センサーを製造する方法
PCT/FI2005/050318 WO2006032729A1 (fr) 2004-09-23 2005-09-15 Capteur capacitif et procede de production du capteur capacitif
US11/232,922 US7555950B2 (en) 2004-09-23 2005-09-23 Capacitive sensor and a method for manufacturing the capacitive sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20041229 2004-09-23
FI20041229A FI119785B (fi) 2004-09-23 2004-09-23 Kapasitiivinen anturi ja menetelmä kapasitiivisen anturin valmistamiseksi

Publications (3)

Publication Number Publication Date
FI20041229A0 FI20041229A0 (fi) 2004-09-23
FI20041229A FI20041229A (fi) 2006-03-24
FI119785B true FI119785B (fi) 2009-03-13

Family

ID=33041562

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20041229A FI119785B (fi) 2004-09-23 2004-09-23 Kapasitiivinen anturi ja menetelmä kapasitiivisen anturin valmistamiseksi

Country Status (6)

Country Link
US (1) US7555950B2 (fr)
EP (1) EP1809997A4 (fr)
JP (1) JP2008513800A (fr)
CN (1) CN101027542A (fr)
FI (1) FI119785B (fr)
WO (1) WO2006032729A1 (fr)

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US8018009B2 (en) * 2007-12-07 2011-09-13 METAMEMS Corp. Forming large planar structures from substrates using edge Coulomb forces
US20090149038A1 (en) * 2007-12-07 2009-06-11 Metamems Llc Forming edge metallic contacts and using coulomb forces to improve ohmic contact
US7965489B2 (en) * 2007-12-07 2011-06-21 METAMEMS Corp. Using coulomb forces to form 3-D reconfigurable antenna structures
US7946174B2 (en) * 2007-12-07 2011-05-24 METAMEMS Corp. Decelerometer formed by levitating a substrate into equilibrium
US8008070B2 (en) * 2007-12-07 2011-08-30 METAMEMS Corp. Using coulomb forces to study charateristics of fluids and biological samples
US8531848B2 (en) * 2007-12-07 2013-09-10 METAMEMS Corp. Coulomb island and Faraday shield used to create adjustable Coulomb forces
US7812336B2 (en) * 2007-12-07 2010-10-12 METAMEMS Corp. Levitating substrate being charged by a non-volatile device and powered by a charged capacitor or bonding wire
US7728427B2 (en) * 2007-12-07 2010-06-01 Lctank Llc Assembling stacked substrates that can form cylindrical inductors and adjustable transformers
US7863651B2 (en) * 2007-12-07 2011-01-04 METAMEMS Corp. Using multiple coulomb islands to reduce voltage stress
US8159809B2 (en) * 2007-12-07 2012-04-17 METAMEMS Corp. Reconfigurable system that exchanges substrates using coulomb forces to optimize a parameter
US20100317124A1 (en) * 2008-08-25 2010-12-16 Yong Hyup Kim Metal-containing nanomembranes for molecular sensing
DE102009001924A1 (de) * 2009-03-27 2010-09-30 Robert Bosch Gmbh Drucksensor
US8567495B2 (en) * 2010-10-20 2013-10-29 Chevron U.S.A. Inc. System and method for detecting pressure in a subterranean environment
KR101999720B1 (ko) * 2012-11-20 2019-07-16 삼성디스플레이 주식회사 기판 정전기 검사 장치 및 기판 제조 방법
KR101489302B1 (ko) 2013-07-31 2015-02-04 전자부품연구원 압력센서
US9464951B2 (en) * 2013-10-16 2016-10-11 Sercel Inc. Method and apparatus for electrical gap setting for a piezoelectric pressure sensor
JP6330055B2 (ja) * 2014-11-11 2018-05-23 株式会社日立製作所 加速度センサ
US10101230B2 (en) * 2015-09-16 2018-10-16 Sensata Technologies, Inc. Reduction of non-linearity errors in automotive pressure sensors
GB2567017A (en) * 2017-09-29 2019-04-03 Cirrus Logic Int Semiconductor Ltd MEMS devices and processes

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Also Published As

Publication number Publication date
EP1809997A1 (fr) 2007-07-25
JP2008513800A (ja) 2008-05-01
WO2006032729A1 (fr) 2006-03-30
FI20041229A0 (fi) 2004-09-23
US7555950B2 (en) 2009-07-07
EP1809997A4 (fr) 2010-06-02
CN101027542A (zh) 2007-08-29
FI20041229A (fi) 2006-03-24
US20060213269A1 (en) 2006-09-28

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