CN101027542A - 电容性传感器和用于制造电容性传感器的方法 - Google Patents

电容性传感器和用于制造电容性传感器的方法 Download PDF

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Publication number
CN101027542A
CN101027542A CNA2005800322663A CN200580032266A CN101027542A CN 101027542 A CN101027542 A CN 101027542A CN A2005800322663 A CNA2005800322663 A CN A2005800322663A CN 200580032266 A CN200580032266 A CN 200580032266A CN 101027542 A CN101027542 A CN 101027542A
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CN
China
Prior art keywords
sensor
fixed electorde
shape
basically
capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2005800322663A
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English (en)
Chinese (zh)
Inventor
J·罗希奥
R·蒂凯南
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Electronics Oy
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VTI Technologies Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VTI Technologies Oy filed Critical VTI Technologies Oy
Publication of CN101027542A publication Critical patent/CN101027542A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
    • G01P3/48—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage
    • G01P3/481—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals
    • G01P3/483—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals delivered by variable capacitance detectors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Gyroscopes (AREA)
CNA2005800322663A 2004-09-23 2005-09-15 电容性传感器和用于制造电容性传感器的方法 Pending CN101027542A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20041229A FI119785B (fi) 2004-09-23 2004-09-23 Kapasitiivinen anturi ja menetelmä kapasitiivisen anturin valmistamiseksi
FI20041229 2004-09-23

Publications (1)

Publication Number Publication Date
CN101027542A true CN101027542A (zh) 2007-08-29

Family

ID=33041562

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2005800322663A Pending CN101027542A (zh) 2004-09-23 2005-09-15 电容性传感器和用于制造电容性传感器的方法

Country Status (6)

Country Link
US (1) US7555950B2 (fr)
EP (1) EP1809997A4 (fr)
JP (1) JP2008513800A (fr)
CN (1) CN101027542A (fr)
FI (1) FI119785B (fr)
WO (1) WO2006032729A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103180706A (zh) * 2010-10-20 2013-06-26 雪佛龙美国公司 用于检测地下环境中的压力的系统和方法
CN104568241A (zh) * 2013-10-16 2015-04-29 瑟塞尔股份有限公司 用于压电式压力传感器的电气间隙设置的方法和设备
CN106546361A (zh) * 2015-09-16 2017-03-29 森萨塔科技公司 汽车压力传感器中非线性误差的减小

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US7965489B2 (en) * 2007-12-07 2011-06-21 METAMEMS Corp. Using coulomb forces to form 3-D reconfigurable antenna structures
US8531848B2 (en) * 2007-12-07 2013-09-10 METAMEMS Corp. Coulomb island and Faraday shield used to create adjustable Coulomb forces
US8008070B2 (en) * 2007-12-07 2011-08-30 METAMEMS Corp. Using coulomb forces to study charateristics of fluids and biological samples
US8159809B2 (en) * 2007-12-07 2012-04-17 METAMEMS Corp. Reconfigurable system that exchanges substrates using coulomb forces to optimize a parameter
US8018009B2 (en) * 2007-12-07 2011-09-13 METAMEMS Corp. Forming large planar structures from substrates using edge Coulomb forces
US7863651B2 (en) * 2007-12-07 2011-01-04 METAMEMS Corp. Using multiple coulomb islands to reduce voltage stress
US7946174B2 (en) * 2007-12-07 2011-05-24 METAMEMS Corp. Decelerometer formed by levitating a substrate into equilibrium
US20090149038A1 (en) * 2007-12-07 2009-06-11 Metamems Llc Forming edge metallic contacts and using coulomb forces to improve ohmic contact
US7728427B2 (en) * 2007-12-07 2010-06-01 Lctank Llc Assembling stacked substrates that can form cylindrical inductors and adjustable transformers
US7812336B2 (en) * 2007-12-07 2010-10-12 METAMEMS Corp. Levitating substrate being charged by a non-volatile device and powered by a charged capacitor or bonding wire
US20100317124A1 (en) * 2008-08-25 2010-12-16 Yong Hyup Kim Metal-containing nanomembranes for molecular sensing
DE102009001924A1 (de) * 2009-03-27 2010-09-30 Robert Bosch Gmbh Drucksensor
KR101999720B1 (ko) * 2012-11-20 2019-07-16 삼성디스플레이 주식회사 기판 정전기 검사 장치 및 기판 제조 방법
KR101489302B1 (ko) 2013-07-31 2015-02-04 전자부품연구원 압력센서
WO2016075761A1 (fr) * 2014-11-11 2016-05-19 株式会社日立製作所 Capteur d'accélération
GB2567017A (en) * 2017-09-29 2019-04-03 Cirrus Logic Int Semiconductor Ltd MEMS devices and processes

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103180706A (zh) * 2010-10-20 2013-06-26 雪佛龙美国公司 用于检测地下环境中的压力的系统和方法
CN103180706B (zh) * 2010-10-20 2015-11-25 雪佛龙美国公司 用于检测地下环境中的压力的系统和方法
CN104568241A (zh) * 2013-10-16 2015-04-29 瑟塞尔股份有限公司 用于压电式压力传感器的电气间隙设置的方法和设备
CN106546361A (zh) * 2015-09-16 2017-03-29 森萨塔科技公司 汽车压力传感器中非线性误差的减小

Also Published As

Publication number Publication date
JP2008513800A (ja) 2008-05-01
US20060213269A1 (en) 2006-09-28
WO2006032729A1 (fr) 2006-03-30
FI20041229A (fi) 2006-03-24
US7555950B2 (en) 2009-07-07
EP1809997A1 (fr) 2007-07-25
FI119785B (fi) 2009-03-13
EP1809997A4 (fr) 2010-06-02
FI20041229A0 (fi) 2004-09-23

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