FI118930B - Menetelmä kiihtyvyyden mikromekaaniseen mittaamiseen ja mikromekaaninen kiihtyvyysanturi - Google Patents

Menetelmä kiihtyvyyden mikromekaaniseen mittaamiseen ja mikromekaaninen kiihtyvyysanturi Download PDF

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Publication number
FI118930B
FI118930B FI20055497A FI20055497A FI118930B FI 118930 B FI118930 B FI 118930B FI 20055497 A FI20055497 A FI 20055497A FI 20055497 A FI20055497 A FI 20055497A FI 118930 B FI118930 B FI 118930B
Authority
FI
Finland
Prior art keywords
sensor
measuring
value
acceleration
segment
Prior art date
Application number
FI20055497A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI20055497A0 (fi
Inventor
Tuomo Lehtonen
Risto Mourujaervi
Teemu Salo
Jens Thurau
Original Assignee
Vti Technologies Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vti Technologies Oy filed Critical Vti Technologies Oy
Publication of FI20055497A0 publication Critical patent/FI20055497A0/fi
Priority to FI20055497A priority Critical patent/FI118930B/fi
Priority to US11/438,590 priority patent/US7516038B2/en
Priority to KR1020087001796A priority patent/KR101300478B1/ko
Priority to JP2008530556A priority patent/JP2009508133A/ja
Priority to EP13152164.3A priority patent/EP2587266B1/fr
Priority to EP06778576.6A priority patent/EP1957991B1/fr
Priority to CN2006800280769A priority patent/CN101278200B/zh
Priority to PCT/FI2006/050393 priority patent/WO2007031606A1/fr
Application granted granted Critical
Publication of FI118930B publication Critical patent/FI118930B/fi
Priority to JP2013018248A priority patent/JP5486097B2/ja

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00Testing or calibrating of apparatus or devices covered by the preceding groups

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
  • Pressure Sensors (AREA)
FI20055497A 2005-09-16 2005-09-16 Menetelmä kiihtyvyyden mikromekaaniseen mittaamiseen ja mikromekaaninen kiihtyvyysanturi FI118930B (fi)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FI20055497A FI118930B (fi) 2005-09-16 2005-09-16 Menetelmä kiihtyvyyden mikromekaaniseen mittaamiseen ja mikromekaaninen kiihtyvyysanturi
US11/438,590 US7516038B2 (en) 2005-09-16 2006-05-23 Method for the mircomechanical measurement of acceleration and a micromechanical acceleration sensor
EP13152164.3A EP2587266B1 (fr) 2005-09-16 2006-09-15 Procédé pour la mesure d'accélération micromécanique et un capteur micromécanique
JP2008530556A JP2009508133A (ja) 2005-09-16 2006-09-15 加速度の微小機械式計測方法および微小機械式加速度センサー
KR1020087001796A KR101300478B1 (ko) 2005-09-16 2006-09-15 마이크로기계 가속 측정 방법 및 마이크로기계 가속 센서
EP06778576.6A EP1957991B1 (fr) 2005-09-16 2006-09-15 Procede de mesure micromecanique d'acceleration et capteur d'acceleration micromecanique
CN2006800280769A CN101278200B (zh) 2005-09-16 2006-09-15 用于微机械测量加速度的方法和微机械加速度传感器
PCT/FI2006/050393 WO2007031606A1 (fr) 2005-09-16 2006-09-15 Procede de mesure micromecanique d'acceleration et capteur d'acceleration micromecanique
JP2013018248A JP5486097B2 (ja) 2005-09-16 2013-02-01 加速度の微小機械式計測方法および微小機械式加速度センサー

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20055497A FI118930B (fi) 2005-09-16 2005-09-16 Menetelmä kiihtyvyyden mikromekaaniseen mittaamiseen ja mikromekaaninen kiihtyvyysanturi
FI20055497 2005-09-16

Publications (2)

Publication Number Publication Date
FI20055497A0 FI20055497A0 (fi) 2005-09-16
FI118930B true FI118930B (fi) 2008-05-15

Family

ID=35151464

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20055497A FI118930B (fi) 2005-09-16 2005-09-16 Menetelmä kiihtyvyyden mikromekaaniseen mittaamiseen ja mikromekaaninen kiihtyvyysanturi

Country Status (7)

Country Link
US (1) US7516038B2 (fr)
EP (2) EP1957991B1 (fr)
JP (2) JP2009508133A (fr)
KR (1) KR101300478B1 (fr)
CN (1) CN101278200B (fr)
FI (1) FI118930B (fr)
WO (1) WO2007031606A1 (fr)

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US7805231B2 (en) * 2006-06-29 2010-09-28 Delphi Technologies, Inc. Integrated vehicle crash sensing system and method
FR2920870B1 (fr) * 2007-09-07 2009-11-27 Snecma Dispositif de validation de mesures d'une grandeur cinematique.
US20100122565A1 (en) * 2008-11-15 2010-05-20 Freescale Semiconductor, Inc. Continuous selftest for inertial sensors at 0 hz
US8266962B2 (en) 2009-01-28 2012-09-18 Infineon Technologies Ag Acceleration sensor
US8668832B2 (en) * 2010-03-19 2014-03-11 Severn Trent De Nora, Llc Wastewater treatment onboard small marine vessels
DE102012200796A1 (de) 2012-01-20 2013-07-25 Robert Bosch Gmbh System und Verfahren zur plausibilisierten Beschleunigungsmessung
DE102012222690A1 (de) 2012-12-11 2014-06-12 Robert Bosch Gmbh Redundante Sensorauswertung eines Mehrachsen-Sensors
DE102012222724A1 (de) 2012-12-11 2014-06-12 Robert Bosch Gmbh Redundante Signalerfassung
CN103048013B (zh) * 2012-12-25 2015-05-06 中北大学 可变环境下微纳传感器的自动加载平台
US9297826B2 (en) * 2013-03-08 2016-03-29 Freescale Semiconductor Inc. System and method for monitoring an accelerometer
WO2015125275A1 (fr) * 2014-02-21 2015-08-27 三菱電機株式会社 Détecteur d'accélération et dispositif d'ajustement actif du bruit

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US5103667A (en) * 1989-06-22 1992-04-14 Ic Sensors, Inc. Self-testable micro-accelerometer and method
JPH03282371A (ja) * 1990-03-30 1991-12-12 Nec Corp 加速度計
JPH04315058A (ja) 1991-04-12 1992-11-06 Toyota Motor Corp 移動物体の加速度検出装置の検出異常判定装置
JP2867103B2 (ja) * 1992-11-13 1999-03-08 リオン株式会社 振動計
JPH08285952A (ja) * 1995-04-11 1996-11-01 Japan Aviation Electron Ind Ltd 地震計
DE19541388A1 (de) * 1995-11-07 1997-05-15 Telefunken Microelectron Mikromechanischer Beschleunigungssensor
JPH1010145A (ja) * 1996-06-26 1998-01-16 Wako:Kk 加速度検出システム
JP3343878B2 (ja) * 1996-07-31 2002-11-11 日野自動車株式会社 車両用加速度検出回路の故障検出装置
US6023664A (en) * 1996-10-16 2000-02-08 Automotive Systems Laboratory, Inc. Vehicle crash sensing system
DE19852468A1 (de) 1998-11-13 2000-05-25 Siemens Ag Steueranordnung für ein Insassenschutzmittel eines Fahrzeugs
EP1149004B1 (fr) * 1999-01-12 2004-04-07 Siemens Aktiengesellschaft Procede pour verifier la fonction d'un systeme de commande pour moyens de protection des passagers dans une automobile
JP3571272B2 (ja) * 2000-03-14 2004-09-29 エスペック株式会社 運動カロリー測定方法及び装置
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FR2838828B1 (fr) * 2002-04-18 2004-07-02 Peugeot Citroen Automobiles Sa Procede pour evaluer des accelerations subies par une piece mobile, notamment un organe d'un vehicule, a mesures intrinsequement redondantes
US6829937B2 (en) * 2002-06-17 2004-12-14 Vti Holding Oy Monolithic silicon acceleration sensor
FI119528B (fi) 2003-02-11 2008-12-15 Vti Technologies Oy Kapasitiivinen kiihtyvyysanturirakenne
FI119159B (fi) 2003-02-11 2008-08-15 Vti Technologies Oy Kapasitiivinen kiihtyvyysanturirakenne
DE10308881B3 (de) * 2003-02-28 2004-09-02 Siemens Ag Steueranordnung und Verfahren zur Funktionsüberprüfung einer derartigen Steueranordnung für Insassenschutzmittel in einem Kraftfahrzeug
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CN100363851C (zh) * 2004-11-26 2008-01-23 清华大学 航天器大角度机动控制的单框架力矩陀螺群的最优控制法

Also Published As

Publication number Publication date
CN101278200A (zh) 2008-10-01
CN101278200B (zh) 2011-08-31
US7516038B2 (en) 2009-04-07
EP2587266A1 (fr) 2013-05-01
JP5486097B2 (ja) 2014-05-07
KR101300478B1 (ko) 2013-09-02
EP1957991A4 (fr) 2011-12-28
WO2007031606A1 (fr) 2007-03-22
US20070062286A1 (en) 2007-03-22
EP1957991A1 (fr) 2008-08-20
JP2009508133A (ja) 2009-02-26
EP1957991B1 (fr) 2013-08-14
EP2587266B1 (fr) 2014-05-14
KR20080056143A (ko) 2008-06-20
JP2013145237A (ja) 2013-07-25
FI20055497A0 (fi) 2005-09-16

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