FI116544B - Värähtelevä mikromekaaninen kulmanopeusanturi - Google Patents

Värähtelevä mikromekaaninen kulmanopeusanturi Download PDF

Info

Publication number
FI116544B
FI116544B FI20041709A FI20041709A FI116544B FI 116544 B FI116544 B FI 116544B FI 20041709 A FI20041709 A FI 20041709A FI 20041709 A FI20041709 A FI 20041709A FI 116544 B FI116544 B FI 116544B
Authority
FI
Finland
Prior art keywords
angular velocity
mass
motion
detection
springs
Prior art date
Application number
FI20041709A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI20041709A0 (fi
Inventor
Anssi Blomqvist
Original Assignee
Vti Technologies Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vti Technologies Oy filed Critical Vti Technologies Oy
Priority to FI20041709A priority Critical patent/FI116544B/fi
Publication of FI20041709A0 publication Critical patent/FI20041709A0/fi
Application granted granted Critical
Publication of FI116544B publication Critical patent/FI116544B/fi
Priority to US11/318,435 priority patent/US7325451B2/en
Priority to EP05823430.3A priority patent/EP1831644B1/de
Priority to PCT/FI2005/000558 priority patent/WO2006070060A1/en
Priority to KR1020077016092A priority patent/KR100936640B1/ko
Priority to EP13162065.0A priority patent/EP2653832B1/de
Priority to CA2586549A priority patent/CA2586549C/en
Priority to JP2007548850A priority patent/JP4719751B2/ja
Priority to CN2005800448623A priority patent/CN101151507B/zh
Priority to IL183574A priority patent/IL183574A/en
Priority to NO20073687A priority patent/NO340780B1/no
Priority to JP2011015785A priority patent/JP2011141281A/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Gyroscopes (AREA)
FI20041709A 2004-12-31 2004-12-31 Värähtelevä mikromekaaninen kulmanopeusanturi FI116544B (fi)

Priority Applications (12)

Application Number Priority Date Filing Date Title
FI20041709A FI116544B (fi) 2004-12-31 2004-12-31 Värähtelevä mikromekaaninen kulmanopeusanturi
US11/318,435 US7325451B2 (en) 2004-12-31 2005-12-28 Oscillating micro-mechanical sensor of angular velocity
CN2005800448623A CN101151507B (zh) 2004-12-31 2005-12-30 振荡微机械角速度传感器
JP2007548850A JP4719751B2 (ja) 2004-12-31 2005-12-30 角速度のための振動マイクロ−メカニカルセンサー
KR1020077016092A KR100936640B1 (ko) 2004-12-31 2005-12-30 발진 마이크로-기계 각속도 센서
PCT/FI2005/000558 WO2006070060A1 (en) 2004-12-31 2005-12-30 Oscillating micro-mechanical sensor of angular velocity
EP05823430.3A EP1831644B1 (de) 2004-12-31 2005-12-30 Oszillierender mikromechanischer winkelgeschwindigkeitssensor
EP13162065.0A EP2653832B1 (de) 2004-12-31 2005-12-30 Oszillierender mikromechanischer Winkelgeschwindigkeitssensor
CA2586549A CA2586549C (en) 2004-12-31 2005-12-30 Oscillating micro-mechanical sensor of angular velocity
IL183574A IL183574A (en) 2004-12-31 2007-05-31 Oscillating micro-mechanical sensor of angular velocity
NO20073687A NO340780B1 (no) 2004-12-31 2007-07-17 Oscillerende mikro-mekanisk vinkelhastighetssensor
JP2011015785A JP2011141281A (ja) 2004-12-31 2011-01-27 角速度のための振動マイクロ−メカニカルセンサー

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20041709 2004-12-31
FI20041709A FI116544B (fi) 2004-12-31 2004-12-31 Värähtelevä mikromekaaninen kulmanopeusanturi

Publications (2)

Publication Number Publication Date
FI20041709A0 FI20041709A0 (fi) 2004-12-31
FI116544B true FI116544B (fi) 2005-12-15

Family

ID=33548066

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20041709A FI116544B (fi) 2004-12-31 2004-12-31 Värähtelevä mikromekaaninen kulmanopeusanturi

Country Status (10)

Country Link
US (1) US7325451B2 (de)
EP (2) EP1831644B1 (de)
JP (2) JP4719751B2 (de)
KR (1) KR100936640B1 (de)
CN (1) CN101151507B (de)
CA (1) CA2586549C (de)
FI (1) FI116544B (de)
IL (1) IL183574A (de)
NO (1) NO340780B1 (de)
WO (1) WO2006070060A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009043967A1 (en) 2007-10-05 2009-04-09 Vti Technologies Oy Vibrating micromechanical sensor of angular velocity

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009530603A (ja) * 2006-03-13 2009-08-27 イシャイ センソールス エル ティー デー． 二軸振動ジャイロスコープ
DE202009007836U1 (de) * 2009-06-03 2009-08-20 Sensordynamics Ag MEMS-Sensor
EP2378246A1 (de) 2010-04-16 2011-10-19 SensoNor Technologies AS MEMS-Struktur für einen Winkelgeschwindigkeitssensor
FI125696B (en) 2013-09-11 2016-01-15 Murata Manufacturing Co Gyroscope structure and gyroscope with improved quadrature compensation
FI125695B (en) * 2013-09-11 2016-01-15 Murata Manufacturing Co Improved gyroscope construction and gyroscope
FI20146153A (fi) 2014-12-29 2016-06-30 Murata Manufacturing Co Mikromekaaninen gyroskooppirakenne
DE102015213450A1 (de) * 2015-07-17 2017-01-19 Robert Bosch Gmbh MEMS Drehratensensor mit kombiniertem Antrieb und Detektion
FI127042B (en) 2015-09-09 2017-10-13 Murata Manufacturing Co Electrode of a microelectromechanical device
JP6558466B2 (ja) * 2017-05-08 2019-08-14 株式会社村田製作所 容量性微小電気機械加速度計
JP6696530B2 (ja) * 2017-05-24 2020-05-20 株式会社村田製作所 圧電ジャイロスコープにおける連結懸架
JP6610706B2 (ja) * 2017-05-24 2019-11-27 株式会社村田製作所 横駆動変換器を備える圧電ジャイロスコープ
CN113175923A (zh) * 2021-05-19 2021-07-27 瑞声开泰科技(武汉)有限公司 一种mems波动陀螺仪
GB2624843A (en) 2022-07-08 2024-06-05 Autorient Tech As Micromechanical devices and methods of manufacturing thereof

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5481914A (en) 1994-03-28 1996-01-09 The Charles Stark Draper Laboratory, Inc. Electronics for coriolis force and other sensors
GB2301669B (en) 1995-05-30 1999-11-10 Allied Signal Inc Angular rate sensor misalignment correction
DE19523895A1 (de) * 1995-06-30 1997-01-02 Bosch Gmbh Robert Beschleunigungssensor
US5600065A (en) * 1995-10-25 1997-02-04 Motorola, Inc. Angular velocity sensor
US5992233A (en) 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
DE69634571D1 (de) * 1996-07-10 2005-05-12 Wako Kk Drehgeschwindigkeitssensor
US5945599A (en) * 1996-12-13 1999-08-31 Kabushiki Kaisha Toyota Chuo Kenkyusho Resonance type angular velocity sensor
US5831162A (en) * 1997-01-21 1998-11-03 Delco Electronics Corporation Silicon micromachined motion sensor and method of making
US6105427A (en) * 1998-07-31 2000-08-22 Litton Systems, Inc. Micro-mechanical semiconductor accelerometer
AU5241599A (en) 1998-07-31 2000-02-21 Litton Systems, Incorporated Micromachined rotation sensor with modular sensor elements
JP3796991B2 (ja) * 1998-12-10 2006-07-12 株式会社デンソー 角速度センサ
US6481285B1 (en) * 1999-04-21 2002-11-19 Andrei M. Shkel Micro-machined angle-measuring gyroscope
DE19937747C2 (de) * 1999-08-10 2001-10-31 Siemens Ag Mechanischer Resonator für Rotationssensor
JP2001183138A (ja) * 1999-12-22 2001-07-06 Ngk Spark Plug Co Ltd 角速度センサ
US6443008B1 (en) * 2000-02-19 2002-09-03 Robert Bosch Gmbh Decoupled multi-disk gyroscope
JP2001264069A (ja) * 2000-03-16 2001-09-26 Aisin Seiki Co Ltd 角速度センサ
WO2001071364A1 (en) 2000-03-17 2001-09-27 Microsensors, Inc. Method of canceling quadrature error in an angular rate sensor
JP2002148048A (ja) * 2000-11-08 2002-05-22 Murata Mfg Co Ltd 角速度検出素子
DE10108198A1 (de) * 2001-02-21 2002-09-12 Bosch Gmbh Robert Drehratensensor
FI113704B (fi) * 2001-03-21 2004-05-31 Vti Technologies Oy Menetelmä piianturin valmistamiseksi sekä piianturi
JP2002296038A (ja) * 2001-03-30 2002-10-09 Mitsubishi Electric Corp 角速度センサ
US6619121B1 (en) * 2001-07-25 2003-09-16 Northrop Grumman Corporation Phase insensitive quadrature nulling method and apparatus for coriolis angular rate sensors
FR2834055B1 (fr) * 2001-12-20 2004-02-13 Thales Sa Capteur inertiel micro-usine pour la mesure de mouvements de rotation
KR100431004B1 (ko) 2002-02-08 2004-05-12 삼성전자주식회사 회전형 비연성 멤스 자이로스코프
US6892575B2 (en) 2003-10-20 2005-05-17 Invensense Inc. X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009043967A1 (en) 2007-10-05 2009-04-09 Vti Technologies Oy Vibrating micromechanical sensor of angular velocity

Also Published As

Publication number Publication date
EP2653832B1 (de) 2016-08-03
JP2011141281A (ja) 2011-07-21
JP4719751B2 (ja) 2011-07-06
FI20041709A0 (fi) 2004-12-31
NO20073687L (no) 2007-10-01
EP2653832A1 (de) 2013-10-23
CA2586549C (en) 2012-03-20
KR20070092738A (ko) 2007-09-13
US7325451B2 (en) 2008-02-05
CA2586549A1 (en) 2006-07-06
WO2006070060A1 (en) 2006-07-06
US20060156813A1 (en) 2006-07-20
CN101151507B (zh) 2011-04-06
CN101151507A (zh) 2008-03-26
KR100936640B1 (ko) 2010-01-14
NO340780B1 (no) 2017-06-19
EP1831644A4 (de) 2011-08-10
JP2008527319A (ja) 2008-07-24
EP1831644B1 (de) 2013-10-16
EP1831644A1 (de) 2007-09-12
IL183574A0 (en) 2007-09-20
IL183574A (en) 2011-03-31

Similar Documents

Publication Publication Date Title
FI116543B (fi) Värähtelevä mikromekaaninen kulmanopeusanturi
FI116544B (fi) Värähtelevä mikromekaaninen kulmanopeusanturi
US8443668B2 (en) Yaw rate sensor
KR101178692B1 (ko) 코리올리 자이로스코프
EP2098823B1 (de) Beschleunigungsmesser mit Versatzkompensation
FI120921B (fi) Menetelmä kulmanopeuden mittaamiseksi ja värähtelevä mikromekaaninen kulmanopeusanturi
US6674294B2 (en) Drive feedthrough nulling system
US9897447B2 (en) Quadrature compensation
US11913808B2 (en) Inertial sensor and method of inertial sensing with tuneable mode coupling strength
WO2006099018A2 (en) Force compensated comb drive
Antonello et al. Open loop compensation of the quadrature error in MEMS vibrating gyroscopes
CN1488066A (zh) 使用调谐加速计的微机械硅陀螺仪
US5932803A (en) Counterbalanced triaxial multisensor with resonant accelerometers
US20160349053A1 (en) Micromachined Resonating Beam Gyroscopes
Apostolyuk et al. Efficient design of micromechanical gyroscopes
Choi et al. The first sub-deg/hr bias stability, silicon-microfabricated gyroscope
Maeda et al. Out-of-plane axis SOI MEMS gyroscope with initially displaced vertical sensing comb
WO2000006971A1 (en) Micromachined rotation sensor with modular sensor elements
Su et al. Micro-machined Rate Gyroscope

Legal Events

Date Code Title Description
FG Patent granted

Ref document number: 116544

Country of ref document: FI

PC Transfer of assignment of patent

Owner name: MURATA ELECTRONICS OY

PC Transfer of assignment of patent

Owner name: MURATA MANUFACTURING CO., LTD.