FI116469B - Liekkiruiskutusmenetelmä ja -laitteisto monikomponenttilasin valmistamiseksi - Google Patents

Liekkiruiskutusmenetelmä ja -laitteisto monikomponenttilasin valmistamiseksi Download PDF

Info

Publication number
FI116469B
FI116469B FI982154A FI982154A FI116469B FI 116469 B FI116469 B FI 116469B FI 982154 A FI982154 A FI 982154A FI 982154 A FI982154 A FI 982154A FI 116469 B FI116469 B FI 116469B
Authority
FI
Finland
Prior art keywords
flame
component
gas
liquid
glass
Prior art date
Application number
FI982154A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI982154A0 (fi
FI982154A (fi
Inventor
Juha Tikkanen
Markus Eerola
Ville Pitkaenen
Markku Rajala
Original Assignee
Liekki Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Liekki Oy filed Critical Liekki Oy
Publication of FI982154A0 publication Critical patent/FI982154A0/fi
Priority to FI982154A priority Critical patent/FI116469B/fi
Priority to CNB998117587A priority patent/CN1165492C/zh
Priority to DK99947495T priority patent/DK1133453T3/da
Priority to JP2000574469A priority patent/JP4504569B2/ja
Priority to AT99947495T priority patent/ATE340773T1/de
Priority to CA002346457A priority patent/CA2346457C/en
Priority to EP06121161A priority patent/EP1752423A3/de
Priority to EP99947495A priority patent/EP1133453B1/de
Priority to PCT/FI1999/000818 priority patent/WO2000020346A1/en
Priority to KR1020017004331A priority patent/KR100646471B1/ko
Priority to DE69933384T priority patent/DE69933384T2/de
Priority to AU60915/99A priority patent/AU6091599A/en
Publication of FI982154A publication Critical patent/FI982154A/fi
Priority to HK02103852.9A priority patent/HK1042076A1/zh
Application granted granted Critical
Publication of FI116469B publication Critical patent/FI116469B/fi

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/10—Forming beads
    • C03B19/1005—Forming solid beads
    • C03B19/106—Forming solid beads by chemical vapour deposition; by liquid phase reaction
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C03B19/1423—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/123—Spraying molten metal
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/129—Flame spraying
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23D—ENAMELLING OF, OR APPLYING A VITREOUS LAYER TO, METALS
    • C23D5/00—Coating with enamels or vitreous layers
    • C23D5/04—Coating with enamels or vitreous layers by dry methods
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/34—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers
    • C03B2201/36—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers doped with rare earth metals and aluminium, e.g. Er-Al co-doped
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/06—Concentric circular ports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/12—Nozzle or orifice plates
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/34—Liquid, e.g. mist or aerosol
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/42—Assembly details; Material or dimensions of burner; Manifolds or supports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/46—Comprising performance enhancing means, e.g. electrostatic charge or built-in heater

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Nozzles (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Glass Compositions (AREA)
FI982154A 1998-10-05 1998-10-05 Liekkiruiskutusmenetelmä ja -laitteisto monikomponenttilasin valmistamiseksi FI116469B (fi)

Priority Applications (13)

Application Number Priority Date Filing Date Title
FI982154A FI116469B (fi) 1998-10-05 1998-10-05 Liekkiruiskutusmenetelmä ja -laitteisto monikomponenttilasin valmistamiseksi
EP06121161A EP1752423A3 (de) 1998-10-05 1999-10-05 Verfahren zum Sprühen von Glaspartikeln
PCT/FI1999/000818 WO2000020346A1 (en) 1998-10-05 1999-10-05 Method and device for spraying of a material
JP2000574469A JP4504569B2 (ja) 1998-10-05 1999-10-05 原料を噴霧する方法および装置
AT99947495T ATE340773T1 (de) 1998-10-05 1999-10-05 Verfahren zur herstellung von partikeln aus multikomponentenglas
CA002346457A CA2346457C (en) 1998-10-05 1999-10-05 Method for manufacturing a preform of an active fiber
CNB998117587A CN1165492C (zh) 1998-10-05 1999-10-05 喷射物料的方法和装置
EP99947495A EP1133453B1 (de) 1998-10-05 1999-10-05 Verfahren zur herstellung von partikeln aus multikomponentenglas
DK99947495T DK1133453T3 (da) 1998-10-05 1999-10-05 Fremgangsmåde til dannelse af flerkomponent glaspartikler
KR1020017004331A KR100646471B1 (ko) 1998-10-05 1999-10-05 물질을 분무시키는 방법 및 장치
DE69933384T DE69933384T2 (de) 1998-10-05 1999-10-05 Verfahren zur herstellung von partikeln aus multikomponentenglas
AU60915/99A AU6091599A (en) 1998-10-05 1999-10-05 Method and device for spraying of a material
HK02103852.9A HK1042076A1 (zh) 1998-10-05 2002-05-22 噴射物料的方法和裝置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI982154A FI116469B (fi) 1998-10-05 1998-10-05 Liekkiruiskutusmenetelmä ja -laitteisto monikomponenttilasin valmistamiseksi
FI982154 1998-10-05

Publications (3)

Publication Number Publication Date
FI982154A0 FI982154A0 (fi) 1998-10-05
FI982154A FI982154A (fi) 2000-04-06
FI116469B true FI116469B (fi) 2005-11-30

Family

ID=8552642

Family Applications (1)

Application Number Title Priority Date Filing Date
FI982154A FI116469B (fi) 1998-10-05 1998-10-05 Liekkiruiskutusmenetelmä ja -laitteisto monikomponenttilasin valmistamiseksi

Country Status (12)

Country Link
EP (2) EP1133453B1 (de)
JP (1) JP4504569B2 (de)
KR (1) KR100646471B1 (de)
CN (1) CN1165492C (de)
AT (1) ATE340773T1 (de)
AU (1) AU6091599A (de)
CA (1) CA2346457C (de)
DE (1) DE69933384T2 (de)
DK (1) DK1133453T3 (de)
FI (1) FI116469B (de)
HK (1) HK1042076A1 (de)
WO (1) WO2000020346A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1106582A3 (de) * 1999-12-10 2001-10-24 Corning Incorporated Siliciumdioxid-Russ und Verfahren zu seiner Herstellung
FI20010556A (fi) * 2001-03-19 2002-09-20 Liekki Oy Valokuitu ja menetelmä valokuituaihion valmistamiseksi
FI115134B (fi) 2002-06-28 2005-03-15 Liekki Oy Menetelmä seostetun lasimateriaalin valmistamiseksi
US8679580B2 (en) 2003-07-18 2014-03-25 Ppg Industries Ohio, Inc. Nanostructured coatings and related methods
WO2004035496A2 (en) 2002-07-19 2004-04-29 Ppg Industries Ohio, Inc. Article having nano-scaled structures and a process for making such article
FI116619B (fi) * 2004-07-02 2006-01-13 Liekki Oy Menetelmä ja laite optisen materiaalin tuottamiseksi sekä optinen aaltojohde
FR2890958B1 (fr) * 2005-09-16 2010-09-17 Cit Alcatel Preforme destinee a la fabrication d'une fibre optique comprenant des nanoparticules et procede de fabrication d'une fibre optique mettant en oeuvre une telle preforme
US8069690B2 (en) * 2005-12-16 2011-12-06 Ofs Fitel, Llc Apparatus and method for fabricating glass bodies using an aerosol delivery system
US20070240454A1 (en) 2006-01-30 2007-10-18 Brown David P Method and apparatus for continuous or batch optical fiber preform and optical fiber production
JP2009224405A (ja) 2008-03-13 2009-10-01 Fujikura Ltd 希土類添加光ファイバとその製造方法及びファイバレーザ
FR2939246B1 (fr) * 2008-12-02 2010-12-24 Draka Comteq France Fibre optique amplificatrice et procede de fabrication
FI123122B (fi) 2009-02-16 2012-11-15 Optogear Oy Laitteisto lasimateriaalin valmistamiseksi
US9540822B2 (en) 2009-11-24 2017-01-10 Certainteed Corporation Composite nanoparticles for roofing granules, roofing shingles containing such granules, and process for producing same
CN105271648A (zh) * 2015-11-05 2016-01-27 中国建材国际工程集团有限公司 用于玻璃微珠制备的燃烧器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3883336A (en) * 1974-01-11 1975-05-13 Corning Glass Works Method of producing glass in a flame
CA1166527A (en) * 1979-09-26 1984-05-01 Shiro Takahashi Method and apparatus for producing multi-component glass fiber preform
EP0223853A1 (de) * 1985-06-03 1987-06-03 Hughes Aircraft Company Verfahren zur einführung von dotiermitteln in optischen wellenleitern
JPH0421536A (ja) * 1990-05-16 1992-01-24 Hitachi Cable Ltd 希土類元素ドープガラスの製造方法
US5110335A (en) * 1990-06-25 1992-05-05 At&T Bell Laboratories Method of glass soot deposition using ultrasonic nozzle
JP2599511B2 (ja) * 1991-03-28 1997-04-09 国際電信電話株式会社 希土類元素ド−プ石英ガラスの製造方法
FI98832C (fi) * 1995-09-15 1997-08-25 Juha Tikkanen Menetelmä ja laite materiaalin ruiskuttamiseksi
DE19725955C1 (de) * 1997-06-19 1999-01-21 Heraeus Quarzglas Verfahren zur Herstellung eines Quarzglasrohlings und dafür geeignete Vorrichtung

Also Published As

Publication number Publication date
JP2002526373A (ja) 2002-08-20
AU6091599A (en) 2000-04-26
DE69933384T2 (de) 2007-08-23
DK1133453T3 (da) 2007-01-15
DE69933384D1 (de) 2006-11-09
CN1165492C (zh) 2004-09-08
ATE340773T1 (de) 2006-10-15
EP1752423A2 (de) 2007-02-14
KR20010080010A (ko) 2001-08-22
FI982154A0 (fi) 1998-10-05
EP1752423A3 (de) 2009-03-11
HK1042076A1 (zh) 2002-08-02
CA2346457A1 (en) 2000-04-13
CA2346457C (en) 2009-09-22
JP4504569B2 (ja) 2010-07-14
CN1326426A (zh) 2001-12-12
WO2000020346A1 (en) 2000-04-13
EP1133453B1 (de) 2006-09-27
FI982154A (fi) 2000-04-06
EP1133453A1 (de) 2001-09-19
KR100646471B1 (ko) 2006-11-17

Similar Documents

Publication Publication Date Title
FI116469B (fi) Liekkiruiskutusmenetelmä ja -laitteisto monikomponenttilasin valmistamiseksi
US8231369B2 (en) Device and method for producing nanoparticles
US5078092A (en) Flash vaporizer system for use in manufacturing optical waveguide fiber
US6260385B1 (en) Method and burner for forming silica-containing soot
FI116619B (fi) Menetelmä ja laite optisen materiaalin tuottamiseksi sekä optinen aaltojohde
US6079225A (en) Method for the production of a quartz glass blank and apparatus suitable therefor
US20140342093A1 (en) Method for densification and spheroidization of solid and solution precursor droplets of materials using microwave generated plasma processing
AU8293098A (en) Method for forming silica by combustion of liquid reactants using oxygen
KR20080021535A (ko) 플라즈마 스프레이 장치 및 액체 전구체를 플라즈마 가스흐름에 도입시키는 방법
KR100234574B1 (ko) 유체 제트의 층류 차단 방법
CA2289765A1 (en) Method and apparatus for forming silica by combustion of liquid reactants using a heater
US20130133376A1 (en) Atomizing method for producing synthetic quartz glass
FI117971B (fi) Menetelmä ja laitteisto nanohiukkasten tuottamiseksi
FI98832B (fi) Menetelmä ja laite materiaalin ruiskuttamiseksi
US6672106B1 (en) Method and apparatus for forming soot for the manufacture of glass
US20040140380A1 (en) Device and method for pulverizing materials, especially glass
KR20010072337A (ko) 플러그 없는 시스템을 이용한 실리카 수트의 제조방법
AU759821B2 (en) Method and apparatus for forming soot for the manufacture of glass
MXPA01001383A (en) Method and apparatus for forming soot for the manufacture of glass
CA2295684A1 (en) Methods and apparatus for producing low flow rates of feedstock vapors
MXPA00001101A (en) Method for forming silica by combustion of liquid reactants using oxygen
MXPA00000586A (en) Method and apparatus for forming silica by combustion of liquid reactants using a heater
MXPA00000727A (en) Methods and apparatus for producing low flow rates of feedstock vapors

Legal Events

Date Code Title Description
FG Patent granted

Ref document number: 116469

Country of ref document: FI

MA Patent expired