ES8708022A3 - Un metodo para controlar el movimiento de las manchas de catodo sobre la cara generadora de plasma de un electrodo sacrificatorio - Google Patents

Un metodo para controlar el movimiento de las manchas de catodo sobre la cara generadora de plasma de un electrodo sacrificatorio

Info

Publication number
ES8708022A3
ES8708022A3 ES555018A ES555018A ES8708022A3 ES 8708022 A3 ES8708022 A3 ES 8708022A3 ES 555018 A ES555018 A ES 555018A ES 555018 A ES555018 A ES 555018A ES 8708022 A3 ES8708022 A3 ES 8708022A3
Authority
ES
Spain
Prior art keywords
plasma
cathode
control
face
emitting spots
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES555018A
Other languages
English (en)
Other versions
ES555018A0 (es
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Multi-Arc Vacuum Systems Inc
Original Assignee
Multi-Arc Vacuum Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Multi-Arc Vacuum Systems Inc filed Critical Multi-Arc Vacuum Systems Inc
Priority to ES555018A priority Critical patent/ES555018A0/es
Publication of ES8708022A3 publication Critical patent/ES8708022A3/es
Publication of ES555018A0 publication Critical patent/ES555018A0/es
Granted legal-status Critical Current

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  • Plasma Technology (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

METODO PARA CONTROLAR EL MOVIMIENTO DE LAS MANCHAS DEL CATODO SOBRE LA CARA GENERADORA DE PLASMA DE UN ELECTRODO. COMPRENDE: A) GENERAR UN PLASMA DE MATERIAL DE REVESTIMIENTO DESDE UNA CARA IMPULSORA DE PLASMA DE UN ELECTRODO SACRIFICATIVAMENTE DE MATERIAL FUENTE DE PLASMA CON UNA O MAS MANCHAS DE CATODO EN UNA CAMARA DE DEPOSICION DE VAPOR POR ARCO ELECTRICO; Y B) FORMAR UN CAMPO MAGNETICO JUNTO A LA CARA IMPULSADORA DE PLASMA PARA EXTRAER LAS LINEAS DE FUERZA EN UNA POSICION INCLINADA CON RESPECTO A LA PERIFERIA DE LA CARA IMPULSORA DE PLASMA Y MOVER LAS MANCHAS CIRCULARMENTE SOBRE LA CARA IMPULSORA DE PLASMA. SE UTILIZA EN REVESTIMIENTOS METALICOS.
ES555018A 1986-05-16 1986-05-16 Un metodo para controlar el movimiento de las manchas de catodo sobre la cara generadora de plasma de un electrodo sacrificatorio Granted ES555018A0 (es)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ES555018A ES555018A0 (es) 1986-05-16 1986-05-16 Un metodo para controlar el movimiento de las manchas de catodo sobre la cara generadora de plasma de un electrodo sacrificatorio

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ES555018A ES555018A0 (es) 1986-05-16 1986-05-16 Un metodo para controlar el movimiento de las manchas de catodo sobre la cara generadora de plasma de un electrodo sacrificatorio

Publications (2)

Publication Number Publication Date
ES8708022A3 true ES8708022A3 (es) 1987-09-01
ES555018A0 ES555018A0 (es) 1987-09-01

Family

ID=8491296

Family Applications (1)

Application Number Title Priority Date Filing Date
ES555018A Granted ES555018A0 (es) 1986-05-16 1986-05-16 Un metodo para controlar el movimiento de las manchas de catodo sobre la cara generadora de plasma de un electrodo sacrificatorio

Country Status (1)

Country Link
ES (1) ES555018A0 (es)

Also Published As

Publication number Publication date
ES555018A0 (es) 1987-09-01

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