ES335297A1 - Procedimiento para la obtencion de capas delgadas de un producto dado por vaporizacion bajo vacio y condensacion so-bre un soporte pasivo. - Google Patents
Procedimiento para la obtencion de capas delgadas de un producto dado por vaporizacion bajo vacio y condensacion so-bre un soporte pasivo.Info
- Publication number
- ES335297A1 ES335297A1 ES335297A ES335297A ES335297A1 ES 335297 A1 ES335297 A1 ES 335297A1 ES 335297 A ES335297 A ES 335297A ES 335297 A ES335297 A ES 335297A ES 335297 A1 ES335297 A1 ES 335297A1
- Authority
- ES
- Spain
- Prior art keywords
- vacuo
- evaporation
- product
- thin layers
- obtaining thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000008020 evaporation Effects 0.000 title 1
- 238000001704 evaporation Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000007800 oxidant agent Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR46341 | 1966-01-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES335297A1 true ES335297A1 (es) | 1968-08-16 |
Family
ID=8599048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES335297A Expired ES335297A1 (es) | 1966-01-18 | 1967-01-05 | Procedimiento para la obtencion de capas delgadas de un producto dado por vaporizacion bajo vacio y condensacion so-bre un soporte pasivo. |
Country Status (5)
| Country | Link |
|---|---|
| BE (1) | BE691418A (en, 2012) |
| CH (1) | CH467873A (en, 2012) |
| ES (1) | ES335297A1 (en, 2012) |
| GB (1) | GB1148188A (en, 2012) |
| LU (1) | LU52832A1 (en, 2012) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2308921A1 (fr) * | 1975-04-25 | 1976-11-19 | Anvar | Perfectionnements apportes aux jauges de mesure ou de detection de contraintes et procede et installation pour la realisation d'une telle jauge. |
| DE3627151A1 (de) * | 1986-08-11 | 1988-02-18 | Leybold Heraeus Gmbh & Co Kg | Verfahren und vorrichtung zum reaktiven aufdampfen von metallverbindungen |
-
1966
- 1966-12-19 BE BE691418D patent/BE691418A/xx unknown
- 1966-12-27 CH CH1859066A patent/CH467873A/fr unknown
-
1967
- 1967-01-05 ES ES335297A patent/ES335297A1/es not_active Expired
- 1967-01-17 GB GB238267A patent/GB1148188A/en not_active Expired
- 1967-01-17 LU LU52832D patent/LU52832A1/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| GB1148188A (en) | 1969-04-10 |
| BE691418A (en, 2012) | 1967-05-29 |
| LU52832A1 (en, 2012) | 1967-03-17 |
| CH467873A (fr) | 1969-01-31 |
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