ES2731632T3 - Sensor de medición calorimétrica diferencial y procedimiento de fabricación - Google Patents
Sensor de medición calorimétrica diferencial y procedimiento de fabricación Download PDFInfo
- Publication number
- ES2731632T3 ES2731632T3 ES12741085T ES12741085T ES2731632T3 ES 2731632 T3 ES2731632 T3 ES 2731632T3 ES 12741085 T ES12741085 T ES 12741085T ES 12741085 T ES12741085 T ES 12741085T ES 2731632 T3 ES2731632 T3 ES 2731632T3
- Authority
- ES
- Spain
- Prior art keywords
- cell
- membrane
- cells
- face
- thermometric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005259 measurement Methods 0.000 title claims abstract description 42
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000012528 membrane Substances 0.000 claims abstract description 114
- 238000010438 heat treatment Methods 0.000 claims abstract description 46
- 239000000463 material Substances 0.000 claims abstract description 30
- 238000004891 communication Methods 0.000 claims abstract description 5
- 210000004027 cell Anatomy 0.000 claims description 119
- 238000000034 method Methods 0.000 claims description 37
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- 239000011347 resin Substances 0.000 claims description 11
- 229920005989 resin Polymers 0.000 claims description 11
- 238000000151 deposition Methods 0.000 claims description 7
- 230000008569 process Effects 0.000 claims description 7
- 238000001459 lithography Methods 0.000 claims description 6
- 229910010293 ceramic material Inorganic materials 0.000 claims description 4
- 230000000295 complement effect Effects 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 4
- 210000000170 cell membrane Anatomy 0.000 claims description 3
- 238000001039 wet etching Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 239000012777 electrically insulating material Substances 0.000 claims description 2
- 239000000523 sample Substances 0.000 description 50
- 239000007789 gas Substances 0.000 description 18
- 230000035945 sensitivity Effects 0.000 description 12
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 10
- 238000007707 calorimetry Methods 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 230000008901 benefit Effects 0.000 description 6
- 230000007704 transition Effects 0.000 description 6
- 238000000113 differential scanning calorimetry Methods 0.000 description 5
- 229910052697 platinum Inorganic materials 0.000 description 5
- 239000004952 Polyamide Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229920002647 polyamide Polymers 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 230000009466 transformation Effects 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 3
- 102000004169 proteins and genes Human genes 0.000 description 3
- 108090000623 proteins and genes Proteins 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 239000007853 buffer solution Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
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- 238000000691 measurement method Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 239000006243 Fine Thermal Substances 0.000 description 1
- 239000006091 Macor Substances 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 229920001646 UPILEX Polymers 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009141 biological interaction Effects 0.000 description 1
- 239000012472 biological sample Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009510 drug design Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000002334 isothermal calorimetry Methods 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000000135 prohibitive effect Effects 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000008542 thermal sensitivity Effects 0.000 description 1
- 230000010512 thermal transition Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K17/00—Measuring quantity of heat
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K17/00—Measuring quantity of heat
- G01K17/006—Microcalorimeters, e.g. using silicon microstructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
- G01N25/48—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation
- G01N25/4806—Details not adapted to a particular type of sample
- G01N25/4813—Details not adapted to a particular type of sample concerning the measuring means
- G01N25/482—Details not adapted to a particular type of sample concerning the measuring means concerning the temperature responsive elements
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1155432A FR2977034B1 (fr) | 2011-06-21 | 2011-06-21 | Capteur de mesure calorimetrique differentielle et procede de fabrication |
| PCT/IB2012/053057 WO2012176107A1 (fr) | 2011-06-21 | 2012-06-18 | Capteur de mesure calorimétrique différentielle et procédé de fabrication |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES2731632T3 true ES2731632T3 (es) | 2019-11-18 |
Family
ID=46598879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES12741085T Active ES2731632T3 (es) | 2011-06-21 | 2012-06-18 | Sensor de medición calorimétrica diferencial y procedimiento de fabricación |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9612168B2 (enExample) |
| EP (1) | EP2724132B1 (enExample) |
| JP (1) | JP6059720B2 (enExample) |
| ES (1) | ES2731632T3 (enExample) |
| FR (1) | FR2977034B1 (enExample) |
| WO (1) | WO2012176107A1 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3012880B1 (fr) | 2013-11-07 | 2023-01-13 | Centre Nat Rech Scient | Calorimetre a temperature stabilisee. |
| CN112415044B (zh) * | 2020-10-14 | 2022-03-15 | 武汉大学 | 一种基于力学手段检测固体比热容的方法 |
| WO2024215732A1 (en) | 2023-04-13 | 2024-10-17 | ThermoCap Laboratories Inc. | Concurrent thermal measurements of a plurality of samples |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2591570B2 (ja) * | 1991-11-01 | 1997-03-19 | 三井東圧化学株式会社 | 温度波による熱分析方法および装置 |
| US6079873A (en) | 1997-10-20 | 2000-06-27 | The United States Of America As Represented By The Secretary Of Commerce | Micron-scale differential scanning calorimeter on a chip |
| US6193413B1 (en) * | 1999-06-17 | 2001-02-27 | David S. Lieberman | System and method for an improved calorimeter for determining thermodynamic properties of chemical and biological reactions |
| US7141210B2 (en) | 2002-04-01 | 2006-11-28 | Palo Alto Research Center Incorporated | Apparatus and method for a nanocalorimeter for detecting chemical reactions |
| WO2005036604A2 (en) * | 2003-10-09 | 2005-04-21 | E.I. Dupont De Nemours And Company | Apparatus and method for supporting a flexible substrate during processing |
| US6988826B2 (en) * | 2004-05-17 | 2006-01-24 | General Electric Company | Nano-calorimeter device and associated methods of fabrication and use |
| US7626144B2 (en) * | 2005-09-29 | 2009-12-01 | Mikhail Merzliakov | Method and apparatus for rapid temperature changes |
| US20070286769A1 (en) * | 2006-06-07 | 2007-12-13 | Vlassak Joost J | Parallel nano-differential scanning calorimetry |
| US9176012B2 (en) * | 2012-04-16 | 2015-11-03 | David Samuel Lieberman | Methods and systems for improved membrane based calorimeters |
-
2011
- 2011-06-21 FR FR1155432A patent/FR2977034B1/fr active Active
-
2012
- 2012-06-18 EP EP12741085.0A patent/EP2724132B1/fr active Active
- 2012-06-18 ES ES12741085T patent/ES2731632T3/es active Active
- 2012-06-18 JP JP2014516471A patent/JP6059720B2/ja active Active
- 2012-06-18 WO PCT/IB2012/053057 patent/WO2012176107A1/fr not_active Ceased
- 2012-06-18 US US14/128,413 patent/US9612168B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| EP2724132A1 (fr) | 2014-04-30 |
| FR2977034A1 (fr) | 2012-12-28 |
| FR2977034B1 (fr) | 2016-06-03 |
| US20140140365A1 (en) | 2014-05-22 |
| WO2012176107A1 (fr) | 2012-12-27 |
| US9612168B2 (en) | 2017-04-04 |
| JP2014520273A (ja) | 2014-08-21 |
| JP6059720B2 (ja) | 2017-01-11 |
| EP2724132B1 (fr) | 2019-03-20 |
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