JP6059720B2 - 差動熱量測定用センサとその製造方法 - Google Patents

差動熱量測定用センサとその製造方法 Download PDF

Info

Publication number
JP6059720B2
JP6059720B2 JP2014516471A JP2014516471A JP6059720B2 JP 6059720 B2 JP6059720 B2 JP 6059720B2 JP 2014516471 A JP2014516471 A JP 2014516471A JP 2014516471 A JP2014516471 A JP 2014516471A JP 6059720 B2 JP6059720 B2 JP 6059720B2
Authority
JP
Japan
Prior art keywords
membrane
cell
cells
active
temperature measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2014516471A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014520273A (ja
JP2014520273A5 (enExample
Inventor
ガーデン，ジャン−ルク
ムワルー，ガエル
ラッカー，ピエール
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Societe dEtudes dAutomatisation de Regulation et dAppareils de Mesures SETARAM SAS
Original Assignee
Societe dEtudes dAutomatisation de Regulation et dAppareils de Mesures SETARAM SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Societe dEtudes dAutomatisation de Regulation et dAppareils de Mesures SETARAM SAS filed Critical Societe dEtudes dAutomatisation de Regulation et dAppareils de Mesures SETARAM SAS
Publication of JP2014520273A publication Critical patent/JP2014520273A/ja
Publication of JP2014520273A5 publication Critical patent/JP2014520273A5/ja
Application granted granted Critical
Publication of JP6059720B2 publication Critical patent/JP6059720B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K17/00—Measuring quantity of heat
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K17/00—Measuring quantity of heat
    • G01K17/006—Microcalorimeters, e.g. using silicon microstructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
    • G01N25/48—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation
    • G01N25/4806—Details not adapted to a particular type of sample
    • G01N25/4813—Details not adapted to a particular type of sample concerning the measuring means
    • G01N25/482—Details not adapted to a particular type of sample concerning the measuring means concerning the temperature responsive elements

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
JP2014516471A 2011-06-21 2012-06-18 差動熱量測定用センサとその製造方法 Active JP6059720B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1155432A FR2977034B1 (fr) 2011-06-21 2011-06-21 Capteur de mesure calorimetrique differentielle et procede de fabrication
FR1155432 2011-06-21
PCT/IB2012/053057 WO2012176107A1 (fr) 2011-06-21 2012-06-18 Capteur de mesure calorimétrique différentielle et procédé de fabrication

Publications (3)

Publication Number Publication Date
JP2014520273A JP2014520273A (ja) 2014-08-21
JP2014520273A5 JP2014520273A5 (enExample) 2016-09-01
JP6059720B2 true JP6059720B2 (ja) 2017-01-11

Family

ID=46598879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014516471A Active JP6059720B2 (ja) 2011-06-21 2012-06-18 差動熱量測定用センサとその製造方法

Country Status (6)

Country Link
US (1) US9612168B2 (enExample)
EP (1) EP2724132B1 (enExample)
JP (1) JP6059720B2 (enExample)
ES (1) ES2731632T3 (enExample)
FR (1) FR2977034B1 (enExample)
WO (1) WO2012176107A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3012880B1 (fr) 2013-11-07 2023-01-13 Centre Nat Rech Scient Calorimetre a temperature stabilisee.
CN112415044B (zh) * 2020-10-14 2022-03-15 武汉大学 一种基于力学手段检测固体比热容的方法
WO2024215732A1 (en) 2023-04-13 2024-10-17 ThermoCap Laboratories Inc. Concurrent thermal measurements of a plurality of samples

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2591570B2 (ja) * 1991-11-01 1997-03-19 三井東圧化学株式会社 温度波による熱分析方法および装置
US6079873A (en) 1997-10-20 2000-06-27 The United States Of America As Represented By The Secretary Of Commerce Micron-scale differential scanning calorimeter on a chip
US6193413B1 (en) * 1999-06-17 2001-02-27 David S. Lieberman System and method for an improved calorimeter for determining thermodynamic properties of chemical and biological reactions
US7141210B2 (en) 2002-04-01 2006-11-28 Palo Alto Research Center Incorporated Apparatus and method for a nanocalorimeter for detecting chemical reactions
WO2005036604A2 (en) * 2003-10-09 2005-04-21 E.I. Dupont De Nemours And Company Apparatus and method for supporting a flexible substrate during processing
US6988826B2 (en) * 2004-05-17 2006-01-24 General Electric Company Nano-calorimeter device and associated methods of fabrication and use
US7626144B2 (en) * 2005-09-29 2009-12-01 Mikhail Merzliakov Method and apparatus for rapid temperature changes
US20070286769A1 (en) * 2006-06-07 2007-12-13 Vlassak Joost J Parallel nano-differential scanning calorimetry
US9176012B2 (en) * 2012-04-16 2015-11-03 David Samuel Lieberman Methods and systems for improved membrane based calorimeters

Also Published As

Publication number Publication date
EP2724132A1 (fr) 2014-04-30
FR2977034A1 (fr) 2012-12-28
FR2977034B1 (fr) 2016-06-03
US20140140365A1 (en) 2014-05-22
WO2012176107A1 (fr) 2012-12-27
US9612168B2 (en) 2017-04-04
JP2014520273A (ja) 2014-08-21
ES2731632T3 (es) 2019-11-18
EP2724132B1 (fr) 2019-03-20

Similar Documents

Publication Publication Date Title
US6988826B2 (en) Nano-calorimeter device and associated methods of fabrication and use
US7473031B2 (en) Resistive thermal sensing
US6096559A (en) Micromechanical calorimetric sensor
US7473030B2 (en) Thermal sensing
CN105408730A (zh) 基于mems的量热计及其制造和使用
WO2011156037A2 (en) Methods and apparatus for ultra-sensitive temperature detection using resonant devices
Völklein et al. Optimized MEMS Pirani sensor with increased pressure measurement sensitivity in the fine and high vacuum regime
JP6059720B2 (ja) 差動熱量測定用センサとその製造方法
Khaw et al. Microcalorimeter: Design considerations, materials and examples
Koh et al. High-sensitivity chip calorimeter platform for sub-nano watt thermal measurement
Garden et al. Thermodynamics of small systems by nanocalorimetry: From physical to biological nano-objects
CN112710414B (zh) 用于生化反应探测的立体微流控芯片量热计及制备方法
Inomata et al. Microfabricated temperature-sensing devices using a microfluidic chip for biological applications
Ni et al. A Sub-nL Chip Calorimeter and Its Application to the Measurement of the photothermal transduction efficiency of plasmonic nanoparticles
JP4500904B2 (ja) 熱伝達特性測定方法および装置
Sisto et al. Pressure sensing in vacuum hermetic micropackaging for MOEMS-MEMS
Horade et al. Development of a novel 2-dimensional micro-heater array device with regional selective heating
CN101475137A (zh) 双层悬空梁微结构薄膜量热计
WO2013158370A2 (en) Methods and systems for improved membrane based calorimeters
Ni et al. A compact MEMS chip for a rapid and highly accurate picoliter calorimetry
Yang et al. Simultaneous Thermal Analysis (STA) in a Silicon Microplate
Liang et al. Multifunctional thermal biosensor based on silicon thermocouple junction and suspended microfluidic channel
De Bruyker et al. Vanadium oxide thermal microprobes for nanocalorimetry
Cho et al. Fabrication and optimization of bimorph micro probes for the measurement of individual biocells
JPH11183270A5 (enExample)

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20150521

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20160314

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20160322

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20160620

A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A524

Effective date: 20160711

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160712

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20161115

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20161209

R150 Certificate of patent or registration of utility model

Ref document number: 6059720

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313117

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250