JP6059720B2 - 差動熱量測定用センサとその製造方法 - Google Patents

差動熱量測定用センサとその製造方法 Download PDF

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Publication number
JP6059720B2
JP6059720B2 JP2014516471A JP2014516471A JP6059720B2 JP 6059720 B2 JP6059720 B2 JP 6059720B2 JP 2014516471 A JP2014516471 A JP 2014516471A JP 2014516471 A JP2014516471 A JP 2014516471A JP 6059720 B2 JP6059720 B2 JP 6059720B2
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membrane
cell
cells
active
temperature measuring
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Japanese (ja)
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JP2014520273A (ja
JP2014520273A5 (enExample
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ガーデン，ジャン−ルク
ムワルー，ガエル
ラッカー，ピエール
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Societe dEtudes dAutomatisation de Regulation et dAppareils de Mesures SETARAM SAS
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Societe dEtudes dAutomatisation de Regulation et dAppareils de Mesures SETARAM SAS
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K17/00—Measuring quantity of heat
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K17/00—Measuring quantity of heat
    • G01K17/006—Microcalorimeters, e.g. using silicon microstructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
    • G01N25/48—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation
    • G01N25/4806—Details not adapted to a particular type of sample
    • G01N25/4813—Details not adapted to a particular type of sample concerning the measuring means
    • G01N25/482—Details not adapted to a particular type of sample concerning the measuring means concerning the temperature responsive elements

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
JP2014516471A 2011-06-21 2012-06-18 差動熱量測定用センサとその製造方法 Active JP6059720B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1155432A FR2977034B1 (fr) 2011-06-21 2011-06-21 Capteur de mesure calorimetrique differentielle et procede de fabrication
FR1155432 2011-06-21
PCT/IB2012/053057 WO2012176107A1 (fr) 2011-06-21 2012-06-18 Capteur de mesure calorimétrique différentielle et procédé de fabrication

Publications (3)

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JP2014520273A JP2014520273A (ja) 2014-08-21
JP2014520273A5 JP2014520273A5 (enExample) 2016-09-01
JP6059720B2 true JP6059720B2 (ja) 2017-01-11

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JP2014516471A Active JP6059720B2 (ja) 2011-06-21 2012-06-18 差動熱量測定用センサとその製造方法

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US (1) US9612168B2 (enExample)
EP (1) EP2724132B1 (enExample)
JP (1) JP6059720B2 (enExample)
ES (1) ES2731632T3 (enExample)
FR (1) FR2977034B1 (enExample)
WO (1) WO2012176107A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3012880B1 (fr) 2013-11-07 2023-01-13 Centre Nat Rech Scient Calorimetre a temperature stabilisee.
CN112415044B (zh) * 2020-10-14 2022-03-15 武汉大学 一种基于力学手段检测固体比热容的方法
EP4695590A1 (en) 2023-04-13 2026-02-18 ThermoCap Laboratories Inc. Concurrent thermal measurements of a plurality of samples
FR3171717A1 (fr) 2025-01-24 2026-07-31 Calneos Calorimetre a temperature stabilisee

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2591570B2 (ja) * 1991-11-01 1997-03-19 三井東圧化学株式会社 温度波による熱分析方法および装置
US6079873A (en) 1997-10-20 2000-06-27 The United States Of America As Represented By The Secretary Of Commerce Micron-scale differential scanning calorimeter on a chip
US6193413B1 (en) * 1999-06-17 2001-02-27 David S. Lieberman System and method for an improved calorimeter for determining thermodynamic properties of chemical and biological reactions
US7141210B2 (en) 2002-04-01 2006-11-28 Palo Alto Research Center Incorporated Apparatus and method for a nanocalorimeter for detecting chemical reactions
WO2005036604A2 (en) * 2003-10-09 2005-04-21 E.I. Dupont De Nemours And Company Apparatus and method for supporting a flexible substrate during processing
US6988826B2 (en) * 2004-05-17 2006-01-24 General Electric Company Nano-calorimeter device and associated methods of fabrication and use
US7626144B2 (en) * 2005-09-29 2009-12-01 Mikhail Merzliakov Method and apparatus for rapid temperature changes
US20070286769A1 (en) * 2006-06-07 2007-12-13 Vlassak Joost J Parallel nano-differential scanning calorimetry
US9176012B2 (en) * 2012-04-16 2015-11-03 David Samuel Lieberman Methods and systems for improved membrane based calorimeters

Also Published As

Publication number Publication date
EP2724132B1 (fr) 2019-03-20
FR2977034B1 (fr) 2016-06-03
FR2977034A1 (fr) 2012-12-28
JP2014520273A (ja) 2014-08-21
US9612168B2 (en) 2017-04-04
ES2731632T3 (es) 2019-11-18
EP2724132A1 (fr) 2014-04-30
US20140140365A1 (en) 2014-05-22
WO2012176107A1 (fr) 2012-12-27

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