JPH11183270A5 - - Google Patents

Info

Publication number
JPH11183270A5
JPH11183270A5 JP1997369782A JP36978297A JPH11183270A5 JP H11183270 A5 JPH11183270 A5 JP H11183270A5 JP 1997369782 A JP1997369782 A JP 1997369782A JP 36978297 A JP36978297 A JP 36978297A JP H11183270 A5 JPH11183270 A5 JP H11183270A5
Authority
JP
Japan
Prior art keywords
substrate
thermopile
layer
membrane
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997369782A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11183270A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9369782A priority Critical patent/JPH11183270A/ja
Priority claimed from JP9369782A external-priority patent/JPH11183270A/ja
Publication of JPH11183270A publication Critical patent/JPH11183270A/ja
Publication of JPH11183270A5 publication Critical patent/JPH11183270A5/ja
Pending legal-status Critical Current

Links

JP9369782A 1997-12-10 1997-12-10 熱検知デバイスおよび方法 Pending JPH11183270A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9369782A JPH11183270A (ja) 1997-12-10 1997-12-10 熱検知デバイスおよび方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9369782A JPH11183270A (ja) 1997-12-10 1997-12-10 熱検知デバイスおよび方法

Publications (2)

Publication Number Publication Date
JPH11183270A JPH11183270A (ja) 1999-07-09
JPH11183270A5 true JPH11183270A5 (enExample) 2005-07-21

Family

ID=18495311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9369782A Pending JPH11183270A (ja) 1997-12-10 1997-12-10 熱検知デバイスおよび方法

Country Status (1)

Country Link
JP (1) JPH11183270A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005061148A1 (de) * 2005-12-21 2007-06-28 Robert Bosch Gmbh Mikromechanische Struktur mit einem Substrat und einem Thermoelement, Temperatur und/oder Strahlungssensor und Verfahren zur Herstellung einer mikromechanischen Struktur
FR3030734B1 (fr) * 2014-12-19 2017-01-27 Commissariat Energie Atomique Capteur differentiel de temperature.

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