JPH11183270A - 熱検知デバイスおよび方法 - Google Patents

熱検知デバイスおよび方法

Info

Publication number
JPH11183270A
JPH11183270A JP9369782A JP36978297A JPH11183270A JP H11183270 A JPH11183270 A JP H11183270A JP 9369782 A JP9369782 A JP 9369782A JP 36978297 A JP36978297 A JP 36978297A JP H11183270 A JPH11183270 A JP H11183270A
Authority
JP
Japan
Prior art keywords
substrate
thermopile
layer
etching
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9369782A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11183270A5 (enExample
Inventor
Verhaegen Katharina
カタリーナ・フェルヘーゲン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Interuniversitair Microelektronica Centrum vzw IMEC
Original Assignee
Interuniversitair Microelektronica Centrum vzw IMEC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Interuniversitair Microelektronica Centrum vzw IMEC filed Critical Interuniversitair Microelektronica Centrum vzw IMEC
Priority to JP9369782A priority Critical patent/JPH11183270A/ja
Publication of JPH11183270A publication Critical patent/JPH11183270A/ja
Publication of JPH11183270A5 publication Critical patent/JPH11183270A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
JP9369782A 1997-12-10 1997-12-10 熱検知デバイスおよび方法 Pending JPH11183270A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9369782A JPH11183270A (ja) 1997-12-10 1997-12-10 熱検知デバイスおよび方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9369782A JPH11183270A (ja) 1997-12-10 1997-12-10 熱検知デバイスおよび方法

Publications (2)

Publication Number Publication Date
JPH11183270A true JPH11183270A (ja) 1999-07-09
JPH11183270A5 JPH11183270A5 (enExample) 2005-07-21

Family

ID=18495311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9369782A Pending JPH11183270A (ja) 1997-12-10 1997-12-10 熱検知デバイスおよび方法

Country Status (1)

Country Link
JP (1) JPH11183270A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009520961A (ja) * 2005-12-21 2009-05-28 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング 基板と熱電対とを備えたマイクロマシニング型の構造体、温度センサおよび／または放射線センサおよびマイクロマシニング型の構造体を製作するための方法
JP2016118554A (ja) * 2014-12-19 2016-06-30 コミサリア ア レネルジー アトミック エ オ ゼネルジー アルテルナティブＣｏｍｍｉｓｓａｒｉａｔ Ａ Ｌ’Ｅｎｅｒｇｉｅ Ａｔｏｍｉｑｕｅ Ｅｔ Ａｕｘ Ｅｎｅｒｇｉｅｓ Ａｌｔｅｒｎａｔｉｖｅｓ 差温センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009520961A (ja) * 2005-12-21 2009-05-28 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング 基板と熱電対とを備えたマイクロマシニング型の構造体、温度センサおよび／または放射線センサおよびマイクロマシニング型の構造体を製作するための方法
JP2016118554A (ja) * 2014-12-19 2016-06-30 コミサリア ア レネルジー アトミック エ オ ゼネルジー アルテルナティブＣｏｍｍｉｓｓａｒｉａｔ Ａ Ｌ’Ｅｎｅｒｇｉｅ Ａｔｏｍｉｑｕｅ Ｅｔ Ａｕｘ Ｅｎｅｒｇｉｅｓ Ａｌｔｅｒｎａｔｉｖｅｓ 差温センサ

Similar Documents

Publication Publication Date Title
US6843596B2 (en) Device and a method for thermal sensing
US6380605B1 (en) Device and a method for thermal sensing
US9580305B2 (en) Single silicon wafer micromachined thermal conduction sensor
US6988826B2 (en) Nano-calorimeter device and associated methods of fabrication and use
Sheng et al. A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering
US7473031B2 (en) Resistive thermal sensing
US8393785B2 (en) Nanocalorimeter based on thermal probes
US7473030B2 (en) Thermal sensing
CN114014257B (zh) 一种硅基mems气体传感器芯片的制备方法及应用
US20070286254A1 (en) Microscale Calorimeter
JPH02290524A (ja) 半導体ウエーハ及びその形成法とトランスジューサ及びその製法
WO1992010742A1 (fr) Systeme detecteur servant a mesurer une valeur caracteristique d'un element a mesurer au moyen des variations de la resistance thermique
Wang et al. Highly precise Ti/Pt/Cr/Au thin-film temperature sensor embedded in a microfluidic device
WO2009119972A2 (ko) 고감도 바이오 센서 및 이를 포함하는 바이오 칩 그리고 이를 제조하는 방법
KR100911090B1 (ko) 정확도가 향상된 마이크로칼로리미터 소자
Xue et al. Integrating micromachined fast response temperature sensor array in a glass microchannel
JPH11183270A (ja) 熱検知デバイスおよび方法
JPH11183270A5 (enExample)
WO2010140719A1 (ko) 정확도가 향상된 마이크로칼로리미터 소자
CN209651892U (zh) 一种用于微观原位观察的mems加热芯片
US20060186438A1 (en) Device for thermal sensing
JP2010192649A (ja) 温度検出基板
CN111470469B (zh) 一种mems热电堆红外探测器及其制备方法
US11480479B2 (en) Microscale thermocouple probe for intracellular temperature measurements
CN101475137A (zh) 双层悬空梁微结构薄膜量热计

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20041129

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20041129

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20050106

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20050106

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080701

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20080930

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20081003

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20081031

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20081106

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20081201

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20081204

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20081204

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20090604

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20090604

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090924

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20100323