ES2610804T3 - Dispositivo de medición de la posición - Google Patents

Dispositivo de medición de la posición Download PDF

Info

Publication number
ES2610804T3
ES2610804T3 ES06012138.1T ES06012138T ES2610804T3 ES 2610804 T3 ES2610804 T3 ES 2610804T3 ES 06012138 T ES06012138 T ES 06012138T ES 2610804 T3 ES2610804 T3 ES 2610804T3
Authority
ES
Spain
Prior art keywords
action
pass
scanning unit
measurement
grating structures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES06012138.1T
Other languages
English (en)
Spanish (es)
Inventor
Wolfgang Holzapfel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Application granted granted Critical
Publication of ES2610804T3 publication Critical patent/ES2610804T3/es
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
ES06012138.1T 2005-06-28 2006-06-13 Dispositivo de medición de la posición Active ES2610804T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005029917 2005-06-28
DE102005029917A DE102005029917A1 (de) 2005-06-28 2005-06-28 Positionsmesseinrichtung

Publications (1)

Publication Number Publication Date
ES2610804T3 true ES2610804T3 (es) 2017-05-03

Family

ID=37110275

Family Applications (1)

Application Number Title Priority Date Filing Date
ES06012138.1T Active ES2610804T3 (es) 2005-06-28 2006-06-13 Dispositivo de medición de la posición

Country Status (6)

Country Link
US (1) US7471397B2 (OSRAM)
EP (1) EP1739395B1 (OSRAM)
JP (1) JP5005969B2 (OSRAM)
CN (1) CN100554868C (OSRAM)
DE (1) DE102005029917A1 (OSRAM)
ES (1) ES2610804T3 (OSRAM)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7641856B2 (en) * 2004-05-14 2010-01-05 Honeywell International Inc. Portable sample analyzer with removable cartridge
DE102005029917A1 (de) * 2005-06-28 2007-01-04 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102006042743A1 (de) 2006-09-12 2008-03-27 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102008008873A1 (de) * 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102007023300A1 (de) 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung derselben
DE102008007319A1 (de) 2008-02-02 2009-08-06 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
US7864336B2 (en) * 2008-04-28 2011-01-04 Agilent Technologies, Inc. Compact Littrow encoder
KR20110086025A (ko) * 2008-10-23 2011-07-27 가부시키가이샤 니콘 인코더
EP3006902B1 (en) 2010-03-30 2018-04-11 Zygo Corporation Lithography method and lithography system
DE102010029211A1 (de) 2010-05-21 2011-11-24 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
NL2006743A (en) * 2010-06-09 2011-12-12 Asml Netherlands Bv Position sensor and lithographic apparatus.
DE102011081879A1 (de) * 2010-11-03 2012-05-03 Dr. Johannes Heidenhain Gmbh Optische Winkelmesseinrichtung
DE102010043469A1 (de) * 2010-11-05 2012-05-10 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102011082156A1 (de) * 2010-12-16 2012-06-21 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
WO2012106246A2 (en) 2011-02-01 2012-08-09 Zygo Corporation Interferometric heterodyne optical encoder system
DE102011005937B4 (de) * 2011-03-23 2020-10-22 Dr. Johannes Heidenhain Gmbh Vorrichtung zur interferentiellen Abstandsmessung
DE102011076178B4 (de) * 2011-05-20 2022-03-31 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
WO2013036498A1 (en) * 2011-09-06 2013-03-14 Nikon Corporation High contrast encoder head
JP5890531B2 (ja) * 2011-11-09 2016-03-22 ザイゴ コーポレーションＺｙｇｏ Ｃｏｒｐｏｒａｔｉｏｎ 干渉方式エンコーダシステムのための小型エンコーダヘッド
KR101521146B1 (ko) 2011-11-09 2015-05-18 지고 코포레이션 이중 패스 간섭측정식 인코더 시스템
DE102012204572A1 (de) * 2012-03-22 2013-09-26 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung mit einer derartigen Positionsmesseinrichtung
TWI516746B (zh) 2012-04-20 2016-01-11 賽格股份有限公司 在干涉編碼系統中執行非諧循環錯誤補償的方法、裝置及計算機程式產品，以及微影系統
DE102012210309A1 (de) * 2012-06-19 2013-12-19 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102013222383A1 (de) * 2013-02-06 2014-08-07 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102013211758A1 (de) * 2013-06-21 2014-12-24 Dr. Johannes Heidenhain Gmbh Interferometer
TWI627379B (zh) 2013-10-07 2018-06-21 德商強那斯海登翰博士有限公司 光學位置測量裝置
DE102013220190B4 (de) * 2013-10-07 2021-08-12 Dr. Johannes Heidenhain Gmbh Messteilung und lichtelektrische Positionsmesseinrichtung mit dieser Messteilung
JP6593868B2 (ja) * 2015-07-28 2019-10-23 株式会社ミツトヨ 変位検出装置
CN106813578B (zh) * 2015-11-30 2019-02-22 上海微电子装备（集团）股份有限公司 一种二维光栅测量系统
DE102016200847A1 (de) * 2016-01-21 2017-07-27 Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung Optische Positionsmesseinrichtung
JP2018066629A (ja) * 2016-10-19 2018-04-26 太陽誘電株式会社 ロードセル
JP6957088B2 (ja) * 2017-04-19 2021-11-02 株式会社ミツトヨ 光学式エンコーダ
US10648838B2 (en) 2017-06-29 2020-05-12 Mitutoyo Corporation Contamination and defect resistant rotary optical encoder configuration including a rotary scale with yawed scale grating bars and structured illumination generating arrangement with a beam deflector configuration
CN114322817A (zh) * 2022-01-21 2022-04-12 东莞创视自动化科技有限公司 可变光栅组合模组及检测方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02504553A (ja) * 1987-12-15 1990-12-20 レニショウ パブリック リミテッド カンパニー 光電スケール読取装置
DE3905730C2 (de) 1989-02-24 1995-06-14 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
US5079418A (en) * 1990-02-20 1992-01-07 Dr. Johannes Heidenhain Gmbh Position measuring apparatus with reflection
JP3478567B2 (ja) * 1992-09-25 2003-12-15 キヤノン株式会社 回転情報検出装置
JP3028716B2 (ja) * 1993-09-29 2000-04-04 キヤノン株式会社 光学式変位センサ
JP3530573B2 (ja) * 1994-04-27 2004-05-24 キヤノン株式会社 光学式変位センサ
DE19748802B4 (de) * 1996-11-20 2010-09-09 Dr. Johannes Heidenhain Gmbh Optische Positionsmeßeinrichtung
EP1319170B1 (de) * 2000-09-14 2005-03-09 Dr. Johannes Heidenhain GmbH Positionsmesseinrichtung
CN1253699C (zh) 2002-03-18 2006-04-26 株式会社三丰 对偏移具有低灵敏度的光学位移传感装置
US20030174343A1 (en) * 2002-03-18 2003-09-18 Mitutoyo Corporation Optical displacement sensing device with reduced sensitivity to misalignment
JP4722474B2 (ja) * 2004-12-24 2011-07-13 株式会社ミツトヨ 変位検出装置
DE102005029917A1 (de) * 2005-06-28 2007-01-04 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US7858922B2 (en) * 2006-11-20 2010-12-28 Dr. Johannes Heidenhain Gmbh Position-measuring device

Also Published As

Publication number Publication date
EP1739395A3 (de) 2015-03-25
CN100554868C (zh) 2009-10-28
EP1739395A2 (de) 2007-01-03
EP1739395B1 (de) 2016-12-14
JP2007010659A (ja) 2007-01-18
DE102005029917A1 (de) 2007-01-04
CN1892173A (zh) 2007-01-10
JP5005969B2 (ja) 2012-08-22
US7471397B2 (en) 2008-12-30
US20070013920A1 (en) 2007-01-18

Similar Documents

Publication Publication Date Title
ES2610804T3 (es) Dispositivo de medición de la posición
ATE487109T1 (de) Positionsmesseinrichtung
KR101022395B1 (ko) 위치 측정 시스템 및 리소그래피 장치
JP6322172B2 (ja) Ｘ線小角光学系装置
JP2007010659A5 (OSRAM)
JP2020516900A5 (OSRAM)
Xie et al. Toward two-dimensional nanometer resolution hard X-ray differential-interference-contrast imaging using modified photon sieves
JP2019523871A (ja) Ｘ線顕微鏡検査のための方法および装置
BR112014012683A8 (pt) indicador de distância de raios-x e métodos relacionados
CN104244828A (zh) X射线设备
JP2011122946A5 (OSRAM)
RU2014134452A (ru) Мультинаправленная фазоконтрастная рентгеновская визуализация
JP2005521061A (ja) 二次元イオン化粒子検出器
JP5915874B2 (ja) 顕微鏡装置
ES2693902T3 (es) Dispositivo óptico de medición de posición
JP6054578B2 (ja) 差動位相コントラストイメージング装置のｘ線管のためのアノード
JP2016156805A5 (OSRAM)
CN103454069B (zh) X射线组合折射透镜聚焦性能测试装置
Uhlén et al. Ronchi test for characterization of X-ray nanofocusing optics and beamlines
Chkhalo et al. Sub-micrometer resolution proximity X-ray microscope with digital image registration
ES2685679T3 (es) Dispositivo óptico de medición de la posición
WO2019034321A1 (en) Optical detector
KR102214370B1 (ko) 조리개 및 타겟의 회전된 경계선
ES2755835T3 (es) Dispositivo de medición de posición
CN103454068A (zh) 基于ccd探测的x射线组合折射透镜聚焦性能测试装置