ES2189379T3 - Dispositivo microrrele controlado electrostaticamente. - Google Patents
Dispositivo microrrele controlado electrostaticamente.Info
- Publication number
- ES2189379T3 ES2189379T3 ES99830731T ES99830731T ES2189379T3 ES 2189379 T3 ES2189379 T3 ES 2189379T3 ES 99830731 T ES99830731 T ES 99830731T ES 99830731 T ES99830731 T ES 99830731T ES 2189379 T3 ES2189379 T3 ES 2189379T3
- Authority
- ES
- Spain
- Prior art keywords
- electrode
- petal
- support base
- pair
- mobile
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
- H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
- H01H1/20—Bridging contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
- H01H2059/0081—Electrostatic relays; Electro-adhesion relays making use of micromechanics with a tapered air-gap between fixed and movable electrodes
Landscapes
- Selective Calling Equipment (AREA)
- Push-Button Switches (AREA)
- Micromachines (AREA)
- Relay Circuits (AREA)
- Manufacture Of Switches (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITTO990072 IT1307131B1 (it) | 1999-02-02 | 1999-02-02 | Dispositivo di micro-rele' a controllo elettrostatico. |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2189379T3 true ES2189379T3 (es) | 2003-07-01 |
Family
ID=11417411
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES99830731T Expired - Lifetime ES2189379T3 (es) | 1999-02-02 | 1999-11-25 | Dispositivo microrrele controlado electrostaticamente. |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1026718B1 (fr) |
DE (1) | DE69905233T2 (fr) |
ES (1) | ES2189379T3 (fr) |
IT (1) | IT1307131B1 (fr) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10040867A1 (de) * | 2000-08-21 | 2002-05-23 | Abb Research Ltd | Mikroschalter |
FR2854726B1 (fr) * | 2003-05-09 | 2005-08-26 | St Microelectronics Sa | Microcommutateur a plusieurs positions fermees a deplacement lateral |
DE102004010150B9 (de) * | 2004-02-27 | 2012-01-26 | Eads Deutschland Gmbh | Hochfrequenz-MEMS-Schalter mit gebogenem Schaltelement und Verfahren zu seiner Herstellung |
KR100693345B1 (ko) * | 2005-11-30 | 2007-03-09 | 삼성전자주식회사 | Mems 스위치 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19730715C1 (de) * | 1996-11-12 | 1998-11-26 | Fraunhofer Ges Forschung | Verfahren zum Herstellen eines mikromechanischen Relais |
JPH10162713A (ja) * | 1996-11-29 | 1998-06-19 | Omron Corp | マイクロリレー |
DE19736674C1 (de) * | 1997-08-22 | 1998-11-26 | Siemens Ag | Mikromechanisches elektrostatisches Relais und Verfahren zu dessen Herstellung |
-
1999
- 1999-02-02 IT ITTO990072 patent/IT1307131B1/it active
- 1999-11-25 EP EP19990830731 patent/EP1026718B1/fr not_active Expired - Lifetime
- 1999-11-25 ES ES99830731T patent/ES2189379T3/es not_active Expired - Lifetime
- 1999-11-25 DE DE1999605233 patent/DE69905233T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1026718A2 (fr) | 2000-08-09 |
ITTO990072A1 (it) | 2000-08-02 |
DE69905233D1 (de) | 2003-03-13 |
DE69905233T2 (de) | 2003-11-06 |
IT1307131B1 (it) | 2001-10-29 |
EP1026718A3 (fr) | 2001-09-12 |
EP1026718B1 (fr) | 2003-02-05 |
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