ES2189379T3 - ELECTROSTATICALLY CONTROLLED MICRORRELE DEVICE. - Google Patents

ELECTROSTATICALLY CONTROLLED MICRORRELE DEVICE.

Info

Publication number
ES2189379T3
ES2189379T3 ES99830731T ES99830731T ES2189379T3 ES 2189379 T3 ES2189379 T3 ES 2189379T3 ES 99830731 T ES99830731 T ES 99830731T ES 99830731 T ES99830731 T ES 99830731T ES 2189379 T3 ES2189379 T3 ES 2189379T3
Authority
ES
Spain
Prior art keywords
electrode
petal
support base
pair
mobile
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES99830731T
Other languages
Spanish (es)
Inventor
Marco Pizzi
Valerian Koniachkine
Piero Perlo
Sabino Sinesi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centro Ricerche Fiat SCpA
Original Assignee
Centro Ricerche Fiat SCpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centro Ricerche Fiat SCpA filed Critical Centro Ricerche Fiat SCpA
Application granted granted Critical
Publication of ES2189379T3 publication Critical patent/ES2189379T3/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0081—Electrostatic relays; Electro-adhesion relays making use of micromechanics with a tapered air-gap between fixed and movable electrodes

Landscapes

  • Selective Calling Equipment (AREA)
  • Relay Circuits (AREA)
  • Push-Button Switches (AREA)
  • Manufacture Of Switches (AREA)
  • Micromachines (AREA)

Abstract

Dispositivo de microrrelé controlado electrostáticamente que comprende: - una base de soporte (2) que soporta por lo menos un electrodo (5) y un par de contactos eléctricos fijos (11) distanciados entre sí, situados a ambos lados del electrodo (5), - un pétalo móvil (8) formado por una delgada película de un material eléctricamente conductor que presenta por lo menos una parte extrema conectada a la base de soporte (2) y una parte móvil que soporta un contacto móvil (10) que presenta unas partes extremas que sobresalen lateralmente del pétalo (8), estando adaptado dicho pétalo para ser desplazado por efecto electrostático hacia dicho electrodo cuando se aplica un voltaje eléctrico entre el electrodo (5) y el pétalo (8), de tal manera que dichas partes extremas del contacto móvil (10) se acoplan con dicho par de contactos fijos (11), caracterizado porque el pétalo (8) tiene ambos extremos conectados a la base de soporte (2) y presenta un segundo contacto móvil (10) para cooperar con un segundo par de contactos fijos (10) situados sobre la base de soporte (2) a ambos lados de un segundo electrodo (6) que está también asociado a la base de soporte (2) en una posición separada de dicho primer electrodo (5).Electrostatically controlled micro-relay device comprising: - a support base (2) that supports at least one electrode (5) and a pair of fixed electrical contacts (11) spaced apart from each other, located on both sides of the electrode (5), - a mobile petal (8) formed by a thin film of an electrically conductive material that has at least one end part connected to the support base (2) and a mobile part that supports a mobile contact (10) that has parts ends protruding laterally from the petal (8), said petal being adapted to be displaced by electrostatic effect towards said electrode when an electric voltage is applied between the electrode (5) and the petal (8), such that said end parts of the mobile contact (10) is coupled with said pair of fixed contacts (11), characterized in that the petal (8) has both ends connected to the support base (2) and has a second mobile contact (10) pair to cooperate with a second pair of fixed contacts (10) located on the support base (2) on both sides of a second electrode (6) which is also associated with the support base (2) in a position separated from said first electrode (5).

ES99830731T 1999-02-02 1999-11-25 ELECTROSTATICALLY CONTROLLED MICRORRELE DEVICE. Expired - Lifetime ES2189379T3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO990072 IT1307131B1 (en) 1999-02-02 1999-02-02 ELECTROSTATIC CONTROL MICRO-RELAY DEVICE.

Publications (1)

Publication Number Publication Date
ES2189379T3 true ES2189379T3 (en) 2003-07-01

Family

ID=11417411

Family Applications (1)

Application Number Title Priority Date Filing Date
ES99830731T Expired - Lifetime ES2189379T3 (en) 1999-02-02 1999-11-25 ELECTROSTATICALLY CONTROLLED MICRORRELE DEVICE.

Country Status (4)

Country Link
EP (1) EP1026718B1 (en)
DE (1) DE69905233T2 (en)
ES (1) ES2189379T3 (en)
IT (1) IT1307131B1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10040867A1 (en) 2000-08-21 2002-05-23 Abb Research Ltd Microswitch has contact bearer deformable parallel to substrate with shape of symmetrical oscillation trough in stable off position, shape of asymmetrical trough in stable on position
FR2854726B1 (en) 2003-05-09 2005-08-26 St Microelectronics Sa MICROCOMMUTER WITH SEVERAL CLOSED POSITIONS WITH SIDE MOVEMENT
DE102004010150B9 (en) * 2004-02-27 2012-01-26 Eads Deutschland Gmbh High-frequency MEMS switch with bent switching element and method for its production
KR100693345B1 (en) * 2005-11-30 2007-03-09 삼성전자주식회사 Mems switch

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19730715C1 (en) * 1996-11-12 1998-11-26 Fraunhofer Ges Forschung Method of manufacturing a micromechanical relay
JPH10162713A (en) * 1996-11-29 1998-06-19 Omron Corp Micro relay
DE19736674C1 (en) * 1997-08-22 1998-11-26 Siemens Ag Micromechanical electrostatic relay

Also Published As

Publication number Publication date
IT1307131B1 (en) 2001-10-29
EP1026718A2 (en) 2000-08-09
DE69905233T2 (en) 2003-11-06
DE69905233D1 (en) 2003-03-13
EP1026718B1 (en) 2003-02-05
EP1026718A3 (en) 2001-09-12
ITTO990072A1 (en) 2000-08-02

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