EP1026718A2 - Micro-relais contrôlé électrostatiquement - Google Patents
Micro-relais contrôlé électrostatiquement Download PDFInfo
- Publication number
- EP1026718A2 EP1026718A2 EP99830731A EP99830731A EP1026718A2 EP 1026718 A2 EP1026718 A2 EP 1026718A2 EP 99830731 A EP99830731 A EP 99830731A EP 99830731 A EP99830731 A EP 99830731A EP 1026718 A2 EP1026718 A2 EP 1026718A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- petal
- electrode
- relay device
- micro
- supporting base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
- H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
- H01H1/20—Bridging contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
- H01H2059/0081—Electrostatic relays; Electro-adhesion relays making use of micromechanics with a tapered air-gap between fixed and movable electrodes
Definitions
- the present invention relates to an electrostatically controlled micro-relay device.
- electrostatic motors having low power and small dimensions suitable for use as actuators in micro-electronic technology applications, for actuating mechanical devices and the like in conditions in which vibrations take place, such as in the automotive field.
- electrostatical actuators make use of flexible blades, also called cilia, or "petals”, which are electrically conductive, each having one end associated with a stator and the opposite end adjacent to a movable element.
- the application of voltage pulses between the petals and one electrode associated to the movable element causes adhesion by electrostatical effect of the petals to the movable element with a resulting movement of the latter relative to the stator.
- the object of the present invention is that of proposing a new improved type of micro-relay.
- the invention provides a micro-relay device characterised in that it comprises:
- the petal has both its ends connected to the supporting base and carries a second movable contact for co-operation with a second pair of fixed contacts provided on the supporting base at the two sides of a second electrode.
- numeral 1 generally designates a device comprising two electrostatic micro-relays.
- the device 1 comprises a supporting base or substrate 2, and a movable part 3.
- the supporting base 2 is constituted by a leaf 4 of alumina, silicon, glass, or plastic material, depending upon the applications, having a thickness of a few millimeters.
- leaf 4 two separate electrodes 5, 6 are provided, such as by evaporation, sputtering, spin-coating or screen-printing. Subsequently the surface is insulated by a layer 7 of dielectric or ferroelectric material having a thickness between one tenth and a few tens of micrometers.
- the movable part 3 is constituted by a petal 8 in form of a metal film, provided by evaporation or sputtering, having a thickness of a few micrometers and a length between a few hundreds of micrometers and a few millimeters.
- a petal 8 in form of a metal film, provided by evaporation or sputtering, having a thickness of a few micrometers and a length between a few hundreds of micrometers and a few millimeters.
- two layers of insulating dielectric material 9 are provided having a thickness of a few micrometers.
- two bars 10 of electrically conductive material, acting as movable contacts are subsequently provided by evaporation or electrode deposition.
- the movable contacts 10 have a thickness of a few hundreds of micrometers, depending upon the electric current which is to be supplied through them.
- Petal 8 is secured at both its ends on the surface of base 2.
- petal 8 may be applied also to the case in which one petal 8 is provided having a single movable contact 10 and co-operating with a single electrode 5, associated with a single pair of movable contacts 11. It is further apparent that petal 8 may have any shape and be connected to the fixed part of the device even only at one end thereof.
Landscapes
- Selective Calling Equipment (AREA)
- Micromachines (AREA)
- Manufacture Of Switches (AREA)
- Push-Button Switches (AREA)
- Relay Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITTO990072 | 1999-02-02 | ||
ITTO990072 IT1307131B1 (it) | 1999-02-02 | 1999-02-02 | Dispositivo di micro-rele' a controllo elettrostatico. |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1026718A2 true EP1026718A2 (fr) | 2000-08-09 |
EP1026718A3 EP1026718A3 (fr) | 2001-09-12 |
EP1026718B1 EP1026718B1 (fr) | 2003-02-05 |
Family
ID=11417411
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19990830731 Expired - Lifetime EP1026718B1 (fr) | 1999-02-02 | 1999-11-25 | Micro-relais contrôlé électrostatiquement |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1026718B1 (fr) |
DE (1) | DE69905233T2 (fr) |
ES (1) | ES2189379T3 (fr) |
IT (1) | IT1307131B1 (fr) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002017342A1 (fr) * | 2000-08-21 | 2002-02-28 | Abb Research Ltd | Microcontact |
FR2854726A1 (fr) * | 2003-05-09 | 2004-11-12 | St Microelectronics Sa | Microcommutateur a plusieurs positions fermees a deplacement lateral |
DE102004010150A1 (de) * | 2004-02-27 | 2005-09-22 | Eads Deutschland Gmbh | Hochfrequenz-MEMS-Schalter mit gebogenem Schaltelement und Verfahren zu seiner Herstellung |
EP1793403A2 (fr) * | 2005-11-30 | 2007-06-06 | Samsung Electronics Co., Ltd. | Commutateur MEMS |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10162713A (ja) * | 1996-11-29 | 1998-06-19 | Omron Corp | マイクロリレー |
DE19736674C1 (de) * | 1997-08-22 | 1998-11-26 | Siemens Ag | Mikromechanisches elektrostatisches Relais und Verfahren zu dessen Herstellung |
DE19730715C1 (de) * | 1996-11-12 | 1998-11-26 | Fraunhofer Ges Forschung | Verfahren zum Herstellen eines mikromechanischen Relais |
-
1999
- 1999-02-02 IT ITTO990072 patent/IT1307131B1/it active
- 1999-11-25 EP EP19990830731 patent/EP1026718B1/fr not_active Expired - Lifetime
- 1999-11-25 ES ES99830731T patent/ES2189379T3/es not_active Expired - Lifetime
- 1999-11-25 DE DE1999605233 patent/DE69905233T2/de not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19730715C1 (de) * | 1996-11-12 | 1998-11-26 | Fraunhofer Ges Forschung | Verfahren zum Herstellen eines mikromechanischen Relais |
JPH10162713A (ja) * | 1996-11-29 | 1998-06-19 | Omron Corp | マイクロリレー |
DE19736674C1 (de) * | 1997-08-22 | 1998-11-26 | Siemens Ag | Mikromechanisches elektrostatisches Relais und Verfahren zu dessen Herstellung |
Non-Patent Citations (1)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 11, 30 September 1998 (1998-09-30) -& JP 10 162713 A (OMRON CORP), 19 June 1998 (1998-06-19) * |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002017342A1 (fr) * | 2000-08-21 | 2002-02-28 | Abb Research Ltd | Microcontact |
DE10040867A1 (de) * | 2000-08-21 | 2002-05-23 | Abb Research Ltd | Mikroschalter |
US6743989B2 (en) | 2000-08-21 | 2004-06-01 | Abb Research Ltd. | Microswitch |
FR2854726A1 (fr) * | 2003-05-09 | 2004-11-12 | St Microelectronics Sa | Microcommutateur a plusieurs positions fermees a deplacement lateral |
US6927352B2 (en) | 2003-05-09 | 2005-08-09 | Stmicroelectronics S.A. | Lateral displacement multiposition microswitch |
DE102004010150A1 (de) * | 2004-02-27 | 2005-09-22 | Eads Deutschland Gmbh | Hochfrequenz-MEMS-Schalter mit gebogenem Schaltelement und Verfahren zu seiner Herstellung |
US7786829B2 (en) | 2004-02-27 | 2010-08-31 | Eads Deutschland Gmbh | High frequency MEMS switch having a bent switching element and method for its production |
DE102004010150B4 (de) * | 2004-02-27 | 2011-12-29 | Eads Deutschland Gmbh | Hochfrequenz-MEMS-Schalter mit gebogenem Schaltelement und Verfahren zu seiner Herstellung |
DE102004010150B9 (de) * | 2004-02-27 | 2012-01-26 | Eads Deutschland Gmbh | Hochfrequenz-MEMS-Schalter mit gebogenem Schaltelement und Verfahren zu seiner Herstellung |
EP1719144B1 (fr) * | 2004-02-27 | 2015-10-14 | Airbus Defence and Space GmbH | Interrupteur mems haute frequence comportant un element de commutation courbe, et son procede de production |
EP1793403A2 (fr) * | 2005-11-30 | 2007-06-06 | Samsung Electronics Co., Ltd. | Commutateur MEMS |
EP1793403A3 (fr) * | 2005-11-30 | 2009-01-21 | Samsung Electronics Co., Ltd. | Commutateur MEMS |
Also Published As
Publication number | Publication date |
---|---|
IT1307131B1 (it) | 2001-10-29 |
EP1026718B1 (fr) | 2003-02-05 |
DE69905233D1 (de) | 2003-03-13 |
ITTO990072A1 (it) | 2000-08-02 |
EP1026718A3 (fr) | 2001-09-12 |
DE69905233T2 (de) | 2003-11-06 |
ES2189379T3 (es) | 2003-07-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6734770B2 (en) | Microrelay | |
US6153839A (en) | Micromechanical switching devices | |
US6373682B1 (en) | Electrostatically controlled variable capacitor | |
CA2218876C (fr) | Systemes micro-electromecaniques elastomeres | |
KR101230284B1 (ko) | 가요성이고 자유로운 스위치 멤브레인의 무선 주파수 미세전자기계 시스템 스위치 | |
KR101745722B1 (ko) | 마이크로 전기기계 시스템 스위치 | |
JP3890952B2 (ja) | 容量可変型キャパシタ装置 | |
US20040036942A1 (en) | Micro-mechanical system employing electrostatic actuator and fabrication methods of same | |
US20020131228A1 (en) | Micro-electro-mechanical switch and a method of using and making thereof | |
US7692519B2 (en) | MEMS switch with improved standoff voltage control | |
WO1998033195A1 (fr) | Structure en porte a faux | |
EP1196935A1 (fr) | Commutation electrostatique micro-usinee a haute tension | |
CN102176391B (zh) | 开关结构 | |
US6064126A (en) | Switches and switching systems | |
EP1026718B1 (fr) | Micro-relais contrôlé électrostatiquement | |
JP2004505788A (ja) | 可変容量アセンブリ | |
US20070247018A1 (en) | Electrostatic actuation method and electrostatic actuator with integral electrodes for microelectromechanical systems | |
US20040108195A1 (en) | Lorentz force assisted switch | |
US20070217120A1 (en) | Microelectrical Device With Space Charge Effect | |
EP1026536B1 (fr) | Miroir oscillant à commande électrostatique | |
JP2008517777A (ja) | 変形可能なブリッジを含むマイクロシステム | |
EP1474817B1 (fr) | Microrupteur a systeme micro-electromecanique | |
US20030059973A1 (en) | Micromechanical switch and method of manufacturing the same | |
WO2003031316A2 (fr) | Structure de systeme microelectromecanique (mems) a commande de potentiel de surface | |
KR100357164B1 (ko) | 마이크로 가변 커패시터 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE Kind code of ref document: A2 Designated state(s): DE ES FR GB SE |
|
AX | Request for extension of the european patent |
Free format text: AL;LT;LV;MK;RO;SI |
|
PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
|
AK | Designated contracting states |
Kind code of ref document: A3 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE |
|
AX | Request for extension of the european patent |
Free format text: AL;LT;LV;MK;RO;SI |
|
17P | Request for examination filed |
Effective date: 20010928 |
|
17Q | First examination report despatched |
Effective date: 20020124 |
|
AKX | Designation fees paid |
Free format text: DE ES FR GB SE |
|
GRAH | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOS IGRA |
|
GRAH | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOS IGRA |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Designated state(s): DE ES FR GB SE |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: FG4D |
|
REF | Corresponds to: |
Ref document number: 69905233 Country of ref document: DE Date of ref document: 20030313 Kind code of ref document: P |
|
REG | Reference to a national code |
Ref country code: ES Ref legal event code: FG2A Ref document number: 2189379 Country of ref document: ES Kind code of ref document: T3 |
|
ET | Fr: translation filed | ||
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
26N | No opposition filed |
Effective date: 20031106 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: SE Payment date: 20061106 Year of fee payment: 8 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20061122 Year of fee payment: 8 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: ES Payment date: 20061222 Year of fee payment: 8 |
|
EUG | Se: european patent has lapsed | ||
GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 20071125 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: SE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20071126 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20071125 |
|
REG | Reference to a national code |
Ref country code: ES Ref legal event code: FD2A Effective date: 20071126 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: ES Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20071126 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 20101123 Year of fee payment: 12 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 20101117 Year of fee payment: 12 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST Effective date: 20120731 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R119 Ref document number: 69905233 Country of ref document: DE Effective date: 20120601 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20111130 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20120601 |