ES2182505T3 - Sensor en construccion de pelicula delgada. - Google Patents
Sensor en construccion de pelicula delgada.Info
- Publication number
- ES2182505T3 ES2182505T3 ES99914410T ES99914410T ES2182505T3 ES 2182505 T3 ES2182505 T3 ES 2182505T3 ES 99914410 T ES99914410 T ES 99914410T ES 99914410 T ES99914410 T ES 99914410T ES 2182505 T3 ES2182505 T3 ES 2182505T3
- Authority
- ES
- Spain
- Prior art keywords
- thin film
- layer
- sensor
- construction
- containing platinum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
- G01F1/692—Thin-film arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
- G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
- G01K7/183—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer characterised by the use of the resistive element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Measuring Volume Flow (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measuring Fluid Pressure (AREA)
- Laminated Bodies (AREA)
Abstract
Sensor, en especial sensor de flujo de masa, con una capa dieléctrica de soporte (21), sobre la que está colocada una capa (23) que contiene platino y está estructurada formando un elemento de resistencia, en el que por lo menos una superficie de la capa (23) que contiene platino tiene al menos por zonas un recubrimiento con una capa adhesiva adicional (22, 24), caracterizado porque la capa adhesiva (22, 24) consta de silicio y tiene un grosor de entre 0,5 nm y 2,4 nm.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19806211A DE19806211C2 (de) | 1998-02-16 | 1998-02-16 | Sensor in Dünnfilmbauweise |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2182505T3 true ES2182505T3 (es) | 2003-03-01 |
Family
ID=7857810
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES99914410T Expired - Lifetime ES2182505T3 (es) | 1998-02-16 | 1999-02-11 | Sensor en construccion de pelicula delgada. |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP1060365B1 (es) |
JP (1) | JP2002503805A (es) |
KR (1) | KR20010024919A (es) |
AT (1) | ATE222355T1 (es) |
DE (2) | DE19806211C2 (es) |
ES (1) | ES2182505T3 (es) |
WO (1) | WO1999041573A1 (es) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19828969A1 (de) | 1998-06-29 | 1999-12-30 | Siemens Ag | Verfahren zur Herstellung von Halbleiterbauelementen |
DE102005014145A1 (de) * | 2005-03-29 | 2006-02-23 | Siemens Ag | Paramagnetischer Gassensor |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61188901A (ja) * | 1985-02-16 | 1986-08-22 | 株式会社日本自動車部品総合研究所 | 流量センサ用膜式抵抗 |
US4952904A (en) * | 1988-12-23 | 1990-08-28 | Honeywell Inc. | Adhesion layer for platinum based sensors |
JP3333948B2 (ja) * | 1994-02-23 | 2002-10-15 | 本田技研工業株式会社 | ガス式センサの製造方法 |
DE19601592C1 (de) * | 1996-01-18 | 1997-05-07 | Bosch Gmbh Robert | Sensor und Verfahren zur Herstellung eines Sensors |
DE19601791A1 (de) * | 1996-01-19 | 1997-07-24 | Bosch Gmbh Robert | Sensor mit einer Membran und Verfahren zur Herstellung eines Sensors mit einer Membran |
-
1998
- 1998-02-16 DE DE19806211A patent/DE19806211C2/de not_active Expired - Fee Related
-
1999
- 1999-02-11 EP EP99914410A patent/EP1060365B1/de not_active Expired - Lifetime
- 1999-02-11 ES ES99914410T patent/ES2182505T3/es not_active Expired - Lifetime
- 1999-02-11 JP JP2000531711A patent/JP2002503805A/ja active Pending
- 1999-02-11 KR KR1020007008953A patent/KR20010024919A/ko not_active Application Discontinuation
- 1999-02-11 AT AT99914410T patent/ATE222355T1/de not_active IP Right Cessation
- 1999-02-11 WO PCT/DE1999/000368 patent/WO1999041573A1/de not_active Application Discontinuation
- 1999-02-11 DE DE59902340T patent/DE59902340D1/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1060365B1 (de) | 2002-08-14 |
DE59902340D1 (de) | 2002-09-19 |
EP1060365A1 (de) | 2000-12-20 |
KR20010024919A (ko) | 2001-03-26 |
JP2002503805A (ja) | 2002-02-05 |
WO1999041573A1 (de) | 1999-08-19 |
DE19806211C2 (de) | 2000-11-02 |
DE19806211A1 (de) | 1999-08-26 |
ATE222355T1 (de) | 2002-08-15 |
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