ES2175454T3 - Interruptor de circuito de fibras opticas y procedimiento para la fabricacion del mismo. - Google Patents

Interruptor de circuito de fibras opticas y procedimiento para la fabricacion del mismo.

Info

Publication number
ES2175454T3
ES2175454T3 ES97939932T ES97939932T ES2175454T3 ES 2175454 T3 ES2175454 T3 ES 2175454T3 ES 97939932 T ES97939932 T ES 97939932T ES 97939932 T ES97939932 T ES 97939932T ES 2175454 T3 ES2175454 T3 ES 2175454T3
Authority
ES
Spain
Prior art keywords
areas
switching element
width
optical fiber
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES97939932T
Other languages
English (en)
Inventor
Olivier Anthamatten
Cornel Marxer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ascom Schweiz AG
Original Assignee
Ascom AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ascom AG filed Critical Ascom AG
Application granted granted Critical
Publication of ES2175454T3 publication Critical patent/ES2175454T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3656—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being micropositioning, with microactuating elements for fine adjustment, or restricting movement, into two dimensions, e.g. cantilevers, beams, tongues or bridges with associated MEMs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3692—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier with surface micromachining involving etching, e.g. wet or dry etching steps

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

LA INVENCION SE REFIERE A UN PROCESO PARA PRODUCIR UN PROCESO DE FIBRA OPTICA CON AL MENOS DOS GUIAS DE LUZ EN UN PLANO Y UN ELEMENTO DE CONMUTACION OPTICA MOVIL (7) FORMADO POR UN DISCO CHIP EN EMPAREDADO (39). EN UNA PRIMERA OPERACION, LA CAPA DE RECUBRIMIENTO (43) SE ENMASCARA DE MANERA QUE, DESPUES DE ESTA CAPA, PREFERENTEMENTE LAS ZONAS PARCIALMENTE MOVILES (45), EXPUESTAS TRANSVERSALMENTE, SOBRE TODO DEL ELEMENTO DE CONMUTACION (7), TENGAN UNA ANCHURA ESTRECHA, Y QUE UNAS AREAS PARCIALES DE CONMUTACION (47) FIJADAS AL SUBSTRATO BASE (25) TENGAN UNA SEGUNDA ANCHURA MAYOR QUE LA PRIMERA. EN UNA SEGUNDA OPERACION, LAS AREAS ABIERTAS DE LA CAPA DE RECUBRIMIENTO ENMASCARADA (43) SE ATACAN EN UN PROCESO DE MORDENTADO EN SECO CON UN ATAQUE POR MEDIO DE IONES REACTIVOS ANISOTROPICOS PROFUNDOS, FORMANDO UNAS PAREDES MORDENTADAS PRACTICAMENTE VERTICALES HASTA UNA CAPA INTERMEDIA AMORFA (41). EN UNA TERCERA OPERACION, SE USA UN AGENTE DE MORDENTADO QUE SOLO ATACA LA CAPA INTERMEDIA (41), Y EL TIEMPO DE MORDENTADO SE SELECCIONA DE MANERA QUE LA CAPA INTERMEDIA (41) SE ATAQUE UNICAMENTE DEJANDOLA LIBRE DEBAJO DE LAS AREAS PARCIALES (45) DE LA PRIMERA ANCHURA, PERO NO DEBAJO DE LAS AREAS PARCIALES (47) QUE TIENEN LA SEGUNDA ANCHURA. LOS EXTREMOS DE LA FIBRA OPTICA ESTAN DISPUESTOS TAN CERCANOS ENTRE SI QUE EL ELEMENTO DE CONMUTACION (7) PUEDE TODAVIA INSERTARSE JUSTAMENTE ENTRE ELLOS, Y SIN EMBARGO, AL RETIRARSE EL ELEMENTO DE CONMUTACION (7), TIENE LUGAR EL ACOPLAMIENTO DE LA RADIACION DESDE UN PUNTO CONDUCTOR OPTICO HASTA OTRO SITUADO EN POSICION OPUESTA, SIN NINGUNA AYUDA DE ELEMENTOS ADICIONALES PARA OBTENCION DE IMAGENES OPTICAS.
ES97939932T 1996-09-20 1997-09-19 Interruptor de circuito de fibras opticas y procedimiento para la fabricacion del mismo. Expired - Lifetime ES2175454T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH230896 1996-09-20

Publications (1)

Publication Number Publication Date
ES2175454T3 true ES2175454T3 (es) 2002-11-16

Family

ID=4230770

Family Applications (1)

Application Number Title Priority Date Filing Date
ES97939932T Expired - Lifetime ES2175454T3 (es) 1996-09-20 1997-09-19 Interruptor de circuito de fibras opticas y procedimiento para la fabricacion del mismo.

Country Status (5)

Country Link
US (1) US6315462B1 (es)
EP (1) EP0927376B1 (es)
DE (1) DE59706989D1 (es)
ES (1) ES2175454T3 (es)
WO (1) WO1998012589A1 (es)

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US6229640B1 (en) * 1999-08-11 2001-05-08 Adc Telecommunications, Inc. Microelectromechanical optical switch and method of manufacture thereof
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US6303885B1 (en) 2000-03-03 2001-10-16 Optical Coating Laboratory, Inc. Bi-stable micro switch
US6388359B1 (en) 2000-03-03 2002-05-14 Optical Coating Laboratory, Inc. Method of actuating MEMS switches
US6283601B1 (en) * 2000-04-14 2001-09-04 C Speed Corporation Optical mirror system with multi-axis rotational control
EP1322989A1 (en) * 2000-08-18 2003-07-02 Alcatel Optronics UK Limited Mem device
GB0020427D0 (en) * 2000-08-18 2000-10-04 Kymata Ltd Moem device and fabrication method
US6411754B1 (en) * 2000-08-25 2002-06-25 Corning Incorporated Micromechanical optical switch and method of manufacture
FR2817629A1 (fr) * 2000-12-01 2002-06-07 Memscap Procede de fabrication d'un commutateur optique, commutateur optique obtenu par ledit procede, et matrice de tels commutateurs
WO2002075427A1 (en) * 2001-03-16 2002-09-26 Optical Coating Laboratory, Inc. Method of actuating mems switches
CA2419316C (en) * 2001-03-16 2009-08-18 Jds Uniphase Corporation Bi-stable micro switch
WO2002075429A1 (en) * 2001-03-16 2002-09-26 Optical Coating Laboratory, Inc. Tapered lensed fiber optical switch
US6771001B2 (en) 2001-03-16 2004-08-03 Optical Coating Laboratory, Inc. Bi-stable electrostatic comb drive with automatic braking
US6526197B2 (en) 2001-04-09 2003-02-25 Adc Telecommunications, Inc. MEMS optical balanced path switch
US6801682B2 (en) 2001-05-18 2004-10-05 Adc Telecommunications, Inc. Latching apparatus for a MEMS optical switch
FR2828185A1 (fr) 2001-07-31 2003-02-07 Memscap Procede de fabrication d'un composant optique microelectromecanique
FR2830004B1 (fr) * 2001-09-21 2005-01-14 Phs Mems Micro-actionneur de miroir
KR100401109B1 (ko) 2001-12-06 2003-10-10 삼성전기주식회사 가변 광감쇄기
KR100401104B1 (ko) 2001-12-07 2003-10-10 삼성전기주식회사 광 스위치
GB0201969D0 (en) * 2002-01-29 2002-03-13 Qinetiq Ltd Integrated optics devices
GB0203343D0 (en) * 2002-02-13 2002-03-27 Alcatel Optronics Uk Ltd Micro opto electro mechanical device
US7149378B2 (en) * 2002-02-22 2006-12-12 Lucent Technologies Inc. Monolithic waveguide/MEMS switch
JP2003251597A (ja) 2002-02-26 2003-09-09 Furukawa Electric Co Ltd:The シリコンデバイスの製造方法およびこのシリコンデバイスを用いた光部品
AU2003206601A1 (en) * 2002-03-15 2003-09-29 Colibrys S. A. Fabrication process for optical mems device for fiber alignment and variable optical attenuation
KR100446625B1 (ko) * 2002-03-27 2004-09-04 삼성전자주식회사 광스위치 제조 방법
FR2839060A3 (fr) * 2002-04-30 2003-10-31 Memscap Attenuateur optique variable
JP3719239B2 (ja) * 2002-07-30 2005-11-24 株式会社村田製作所 光スイッチ装置
JP2004246324A (ja) * 2003-01-24 2004-09-02 Murata Mfg Co Ltd 静電型アクチュエータ
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US6865313B2 (en) * 2003-05-09 2005-03-08 Opticnet, Inc. Bistable latching actuator for optical switching applications
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JP2005107180A (ja) * 2003-09-30 2005-04-21 Japan Aviation Electronics Industry Ltd 微小光デバイスおよびその作製方法
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JP4422624B2 (ja) * 2004-03-03 2010-02-24 日本航空電子工業株式会社 微小可動デバイス及びその作製方法
CN100444317C (zh) * 2004-03-03 2008-12-17 日本航空电子工业株式会社 微型移动装置及其制作方法
US7039268B2 (en) * 2004-03-29 2006-05-02 Japan Aviation Electronics Industry Limited Optical device
JP4295256B2 (ja) * 2005-08-15 2009-07-15 日本航空電子工業株式会社 光ファイバデバイス
JP4219380B2 (ja) * 2006-10-11 2009-02-04 日本航空電子工業株式会社 光ファイバ、マーカ溝形成装置、その方法及び光ファイバデバイスを作成する方法
US8532441B2 (en) * 2009-11-03 2013-09-10 Alcatel Lucent Optical device for wavelength locking
US9008515B2 (en) 2010-10-07 2015-04-14 Alcatel Lucent Direct laser modulation
US8787775B2 (en) 2010-10-07 2014-07-22 Alcatel Lucent Opto-electronic assembly for a line card
KR101568825B1 (ko) 2011-08-16 2015-11-12 엠파이어 테크놀로지 디벨롭먼트 엘엘씨 오디오 신호를 생성하기 위한 기법
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Also Published As

Publication number Publication date
US6315462B1 (en) 2001-11-13
DE59706989D1 (de) 2002-05-16
WO1998012589A1 (de) 1998-03-26
EP0927376A1 (de) 1999-07-07
EP0927376B1 (de) 2002-04-10

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