AU2003206601A1 - Fabrication process for optical mems device for fiber alignment and variable optical attenuation - Google Patents

Fabrication process for optical mems device for fiber alignment and variable optical attenuation

Info

Publication number
AU2003206601A1
AU2003206601A1 AU2003206601A AU2003206601A AU2003206601A1 AU 2003206601 A1 AU2003206601 A1 AU 2003206601A1 AU 2003206601 A AU2003206601 A AU 2003206601A AU 2003206601 A AU2003206601 A AU 2003206601A AU 2003206601 A1 AU2003206601 A1 AU 2003206601A1
Authority
AU
Australia
Prior art keywords
fabrication process
mems device
fiber alignment
optical
attenuation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003206601A
Other versions
AU2003206601A8 (en
Inventor
Sophie Birling
Pierre Cusin
Robert Gaisch
Marc Alan Straub
Jean-Philippe Thiebaud
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Colibrys SA
Original Assignee
Colibrys SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Colibrys SA filed Critical Colibrys SA
Publication of AU2003206601A8 publication Critical patent/AU2003206601A8/en
Publication of AU2003206601A1 publication Critical patent/AU2003206601A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3632—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means
    • G02B6/3636—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the mechanical coupling means being grooves
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/264—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
    • G02B6/266—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting the optical element being an attenuator
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3692—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier with surface micromachining involving etching, e.g. wet or dry etching steps
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12104—Mirror; Reflectors or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3656—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being micropositioning, with microactuating elements for fine adjustment, or restricting movement, into two dimensions, e.g. cantilevers, beams, tongues or bridges with associated MEMs

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Micromachines (AREA)
AU2003206601A 2002-03-15 2003-03-11 Fabrication process for optical mems device for fiber alignment and variable optical attenuation Abandoned AU2003206601A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US36447102P 2002-03-15 2002-03-15
US60/364,471 2002-03-15
PCT/CH2003/000159 WO2003078303A2 (en) 2002-03-15 2003-03-11 Fabrication process for optical mems device for fiber alignment and variable optical attenuation

Publications (2)

Publication Number Publication Date
AU2003206601A8 AU2003206601A8 (en) 2003-09-29
AU2003206601A1 true AU2003206601A1 (en) 2003-09-29

Family

ID=28041919

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003206601A Abandoned AU2003206601A1 (en) 2002-03-15 2003-03-11 Fabrication process for optical mems device for fiber alignment and variable optical attenuation

Country Status (2)

Country Link
AU (1) AU2003206601A1 (en)
WO (1) WO2003078303A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11215762B2 (en) * 2018-08-15 2022-01-04 Advanced Semiconductor Engineering, Inc. Optical device package and method for manufacturing the same

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5742419A (en) * 1995-11-07 1998-04-21 The Board Of Trustees Of The Leland Stanford Junior Universtiy Miniature scanning confocal microscope
US5872880A (en) * 1996-08-12 1999-02-16 Ronald S. Maynard Hybrid-optical multi-axis beam steering apparatus
DE59706989D1 (en) * 1996-09-20 2002-05-16 Ascom Ag Bern METHOD FOR PRODUCING A LIGHT GUIDE SWITCH AND LIGHT GUIDE SWITCH
DE19644918C2 (en) * 1996-10-29 1999-10-21 Cms Mikrosysteme Gmbh Chemnitz Micromechanical optical switching unit
JP2003521739A (en) * 2000-01-31 2003-07-15 セルカロ・マイクロテクノロジー・リミテツド Switch device for beam guide
US6591027B2 (en) * 2001-02-27 2003-07-08 Litton Systems, Inc. Bi-stable micro-actuator and optical switch

Also Published As

Publication number Publication date
WO2003078303A3 (en) 2004-02-26
AU2003206601A8 (en) 2003-09-29
WO2003078303A2 (en) 2003-09-25

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase