AU2003206601A8 - Fabrication process for optical mems device for fiber alignment and variable optical attenuation - Google Patents
Fabrication process for optical mems device for fiber alignment and variable optical attenuationInfo
- Publication number
- AU2003206601A8 AU2003206601A8 AU2003206601A AU2003206601A AU2003206601A8 AU 2003206601 A8 AU2003206601 A8 AU 2003206601A8 AU 2003206601 A AU2003206601 A AU 2003206601A AU 2003206601 A AU2003206601 A AU 2003206601A AU 2003206601 A8 AU2003206601 A8 AU 2003206601A8
- Authority
- AU
- Australia
- Prior art keywords
- fabrication process
- mems device
- fiber alignment
- optical
- attenuation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3632—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means
- G02B6/3636—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the mechanical coupling means being grooves
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/264—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
- G02B6/266—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting the optical element being an attenuator
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
- G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
- G02B6/3692—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier with surface micromachining involving etching, e.g. wet or dry etching steps
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12104—Mirror; Reflectors or the like
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
- G02B6/3656—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being micropositioning, with microactuating elements for fine adjustment, or restricting movement, into two dimensions, e.g. cantilevers, beams, tongues or bridges with associated MEMs
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optical Couplings Of Light Guides (AREA)
- Micromachines (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US36447102P | 2002-03-15 | 2002-03-15 | |
US60/364,471 | 2002-03-15 | ||
PCT/CH2003/000159 WO2003078303A2 (en) | 2002-03-15 | 2003-03-11 | Fabrication process for optical mems device for fiber alignment and variable optical attenuation |
Publications (2)
Publication Number | Publication Date |
---|---|
AU2003206601A1 AU2003206601A1 (en) | 2003-09-29 |
AU2003206601A8 true AU2003206601A8 (en) | 2003-09-29 |
Family
ID=28041919
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2003206601A Abandoned AU2003206601A1 (en) | 2002-03-15 | 2003-03-11 | Fabrication process for optical mems device for fiber alignment and variable optical attenuation |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU2003206601A1 (en) |
WO (1) | WO2003078303A2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11215762B2 (en) * | 2018-08-15 | 2022-01-04 | Advanced Semiconductor Engineering, Inc. | Optical device package and method for manufacturing the same |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5742419A (en) * | 1995-11-07 | 1998-04-21 | The Board Of Trustees Of The Leland Stanford Junior Universtiy | Miniature scanning confocal microscope |
US5872880A (en) * | 1996-08-12 | 1999-02-16 | Ronald S. Maynard | Hybrid-optical multi-axis beam steering apparatus |
ES2175454T3 (en) * | 1996-09-20 | 2002-11-16 | Ascom Ag | OPTICAL FIBER CIRCUIT SWITCH AND PROCEDURE FOR THE MANUFACTURING OF THE SAME. |
DE19644918C2 (en) * | 1996-10-29 | 1999-10-21 | Cms Mikrosysteme Gmbh Chemnitz | Micromechanical optical switching unit |
DE50101190D1 (en) * | 2000-01-31 | 2004-01-29 | Sercalo Microtechnology Ltd | SWITCH ARRANGEMENT FOR RADIATORS |
US6591027B2 (en) * | 2001-02-27 | 2003-07-08 | Litton Systems, Inc. | Bi-stable micro-actuator and optical switch |
-
2003
- 2003-03-11 WO PCT/CH2003/000159 patent/WO2003078303A2/en not_active Application Discontinuation
- 2003-03-11 AU AU2003206601A patent/AU2003206601A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO2003078303A3 (en) | 2004-02-26 |
AU2003206601A1 (en) | 2003-09-29 |
WO2003078303A2 (en) | 2003-09-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |