ES2175401T3 - Dispositivo de puente semiconductor y procedimiento de fabricacion. - Google Patents
Dispositivo de puente semiconductor y procedimiento de fabricacion.Info
- Publication number
- ES2175401T3 ES2175401T3 ES97921498T ES97921498T ES2175401T3 ES 2175401 T3 ES2175401 T3 ES 2175401T3 ES 97921498 T ES97921498 T ES 97921498T ES 97921498 T ES97921498 T ES 97921498T ES 2175401 T3 ES2175401 T3 ES 2175401T3
- Authority
- ES
- Spain
- Prior art keywords
- semiconductor
- volframio
- titanium
- layer
- bridge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F42—AMMUNITION; BLASTING
- F42B—EXPLOSIVE CHARGES, e.g. FOR BLASTING, FIREWORKS, AMMUNITION
- F42B3/00—Blasting cartridges, i.e. case and explosive
- F42B3/10—Initiators therefor
- F42B3/12—Bridge initiators
- F42B3/13—Bridge initiators with semiconductive bridge
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Die Bonding (AREA)
- Coating By Spraying Or Casting (AREA)
Abstract
UN DISPOSITIVO, POR EJEMPLO, UN DISPOSITIVO DE CEBADO DE UN EXPLOSIVO (24) INCLUYE UN DISPOSITIVO DE PUENTE SEMICONDUCTOR (10) QUE COMPRENDE UNAS PLACAS SEMICONDUCTORAS (14A, 14B), SEPARADAS POR UN PUENTE INICIADOR (14C) Y QUE TIENE SUPERFICIES METALIZADAS (16A, 16B) DISPUESTAS SOBRE LAS PLACAS (14A, 14B). CADA UNA DE LAS SUPERFICIES METALIZADAS (16A, 16B) COMPRENDE UNA CAPA BASE DE TITANIO (18), UNA CAPA INTERMEDIA DE TITANIO - VOLFRAMIO (20) Y UNA CAPA SUPERIOR DE VOLFRAMIO (22). ESTA CONSTRUCCION DE CAPAS MULTIPLES ES DE SIMPLE APLICACION, PROPORCIONA UNA BUENA ADHERENCIA AL SEMICONDUCTOR (14) Y MEJORES CARACTERISTICAS AL PUENTE SEMICONDUCTOR, EVITANDO LOS PROBLEMAS DE ELECTROMIGRACION QUE SE PRODUCEN CON EL USO DE SUPERFICIES METALIZADAS DE ALUMINIO EN SEVERAS CONDICIONES DE ENSAYOS SIN FUEGO Y NIVELES MUY BAJOS DE CORRIENTE O TENSION DE DISPARO. EL SEMICONDUCTOR (14) PUEDE IR CUBIERTO OPCIONALMENTE POR UNA CAPA O CUBIERTA (117) DE UNA CAPA DE METAL ESTRATIFICADA SIMILAR O IDENTICA A LAS SUPERFICIES METALIZADAS (16A, 16B). UN PROCEDIMIENTO PARA FABRICAR DISPOSITIVOS DE PUENTE DE SEMICONDUCTOR INCLUYE LA PULVERIZACION METALICA DE TITANIO, A CONTINUACION DE TITANIO MAS VOLFRAMIO Y POR ULTIMO DE VOLFRAMIO SOBRE LA SUPERFICIE ADECUADAMENTE ENMASCARADA DEL SEMICONDUCTOR, A FIN DE ALCANZAR LAS SUPERFICIES METALIZADAS DE CAPAS MULTIPLES (16A, 16B) Y/O LA TAPA (117) DE LA INVENCION.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/644,008 US6133146A (en) | 1996-05-09 | 1996-05-09 | Semiconductor bridge device and method of making the same |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2175401T3 true ES2175401T3 (es) | 2002-11-16 |
Family
ID=24583068
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES97921498T Expired - Lifetime ES2175401T3 (es) | 1996-05-09 | 1997-05-02 | Dispositivo de puente semiconductor y procedimiento de fabricacion. |
Country Status (10)
Country | Link |
---|---|
US (1) | US6133146A (es) |
EP (1) | EP0897523B1 (es) |
AR (1) | AR007028A1 (es) |
AT (1) | ATE216063T1 (es) |
BR (1) | BR9710438A (es) |
CA (1) | CA2253672C (es) |
DE (1) | DE69711864T2 (es) |
ES (1) | ES2175401T3 (es) |
NO (1) | NO985233L (es) |
WO (1) | WO1997042462A1 (es) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19832449A1 (de) * | 1998-07-18 | 2000-01-20 | Dynamit Nobel Ag | Zündbrücke für ein elektrisches Anzündelement |
JP3175051B2 (ja) * | 1999-10-14 | 2001-06-11 | 昭和金属工業株式会社 | 電気発火式イニシエータ |
JP2001241896A (ja) * | 1999-12-22 | 2001-09-07 | Scb Technologies Inc | チタン半導体ブリッジの点火装置 |
FR2807157B1 (fr) * | 2000-04-04 | 2003-01-31 | Vishay Sa | Element resistif pour initiateur pyrotechnique |
US6772692B2 (en) | 2000-05-24 | 2004-08-10 | Lifesparc, Inc. | Electro-explosive device with laminate bridge |
WO2002021067A2 (en) * | 2000-09-07 | 2002-03-14 | Nknm Limited | Electro-explosive device with laminate bridge |
US6902656B2 (en) * | 2002-05-24 | 2005-06-07 | Dalsa Semiconductor Inc. | Fabrication of microstructures with vacuum-sealed cavity |
US7951247B2 (en) * | 2002-10-01 | 2011-05-31 | Lawrence Livermore National Security, Llc | Nano-laminate-based ignitors |
DE10241363A1 (de) * | 2002-09-06 | 2004-03-18 | Flexiva Automation & Anlagenbau Gmbh | Pyrotechnisches Zündsystem |
JP2004209342A (ja) * | 2002-12-27 | 2004-07-29 | Takata Corp | イニシエータ及びガス発生器 |
US7638416B2 (en) * | 2005-12-13 | 2009-12-29 | Versatilis Llc | Methods of making semiconductor-based electronic devices on a wire and articles that can be made using such devices |
US7700471B2 (en) * | 2005-12-13 | 2010-04-20 | Versatilis | Methods of making semiconductor-based electronic devices on a wire and articles that can be made thereby |
US7871912B2 (en) * | 2005-12-13 | 2011-01-18 | Versatilis Llc | Methods of making semiconductor-based electronic devices by forming freestanding semiconductor structures |
WO2008076756A2 (en) * | 2006-12-13 | 2008-06-26 | Versatilis Llc | Method of making semiconductor-based electronic devices on a wire and by forming freestanding semiconductor structures, and devices that can be made thereby |
US9500448B1 (en) * | 2015-06-09 | 2016-11-22 | Reynolds Systems, Inc. | Bursting switch |
CA2990014C (en) * | 2015-06-26 | 2023-10-03 | Jozef Hubertus Gerardus SCHOLTES | Integrated circuit initiator device |
EP3673225B1 (en) * | 2017-08-21 | 2023-03-29 | Lawrence Livermore National Security, LLC | Methods to improve burst uniformity and efficiency in exploding foil initiators |
CN108502842B (zh) * | 2018-03-26 | 2019-12-03 | 北京理工大学 | 一种应用于引信安保的微机电组合逻辑器件及其制备方法 |
Family Cites Families (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US39542A (en) * | 1863-08-18 | Improvement in f | ||
US722913A (en) * | 1902-02-25 | 1903-03-17 | Nikolaus Schmitt | Electric ignition device. |
US2942546A (en) * | 1950-03-30 | 1960-06-28 | Herman A Liebhafsky | Device for actuating explosives by electrical breakdown |
US3108905A (en) * | 1960-05-16 | 1963-10-29 | Gen Motors Corp | Method of making a semiconductive ceramic body and a low voltage sparking device emboying same |
US3196041A (en) * | 1960-11-25 | 1965-07-20 | Gen Lab Associates Inc | Method of making a semiconductor gap for an initiator |
GB960186A (en) * | 1961-10-19 | 1964-06-10 | Bendix Corp | Electrically triggered squib |
US3249800A (en) * | 1963-08-02 | 1966-05-03 | Henry J Huber | Fast acting switch utilizing a vaporizable wire |
US3366055A (en) * | 1966-11-15 | 1968-01-30 | Green Mansions Inc | Semiconductive explosive igniter |
US3426682A (en) * | 1967-04-27 | 1969-02-11 | Sidney A Corren | Exploding fuse |
DE2020016C3 (de) * | 1970-04-24 | 1974-12-12 | Dynamit Nobel Ag, 5210 Troisdorf | Metallschichtzündmittel |
US3618523A (en) * | 1970-05-06 | 1971-11-09 | Us Navy | Stab-electric detonator |
US3669022A (en) * | 1970-08-05 | 1972-06-13 | Iit Res Inst | Thin film device |
US3725671A (en) * | 1970-11-02 | 1973-04-03 | Us Navy | Pyrotechnic eradication of microcircuits |
US3882323A (en) * | 1973-12-17 | 1975-05-06 | Us Navy | Method and apparatus for protecting sensitive information contained in thin-film microelectonic circuitry |
US3883762A (en) * | 1974-06-17 | 1975-05-13 | Bendix Corp | Electrical discharge device comprising an insulator body having an electrically semi-conducting coating formed thereon |
US3974424A (en) * | 1974-10-07 | 1976-08-10 | Ici United States Inc. | Variable resistance bridge element |
US4312271A (en) * | 1976-07-08 | 1982-01-26 | Systems, Science And Software | Delay detonator device |
JPS55155092U (es) * | 1979-04-23 | 1980-11-08 | ||
US4471697A (en) * | 1982-01-28 | 1984-09-18 | The United States Of America As Represented By The United States Department Of Energy | Bidirectional slapper detonator |
US4708060A (en) * | 1985-02-19 | 1987-11-24 | The United States Of America As Represented By The United States Department Of Energy | Semiconductor bridge (SCB) igniter |
GB2190730B (en) * | 1986-05-22 | 1990-10-24 | Detonix Close Corp | Detonator firing element |
GB8712789D0 (en) * | 1986-06-25 | 1989-10-18 | Secr Defence | Pyrotechnic train |
US4976200A (en) * | 1988-12-30 | 1990-12-11 | The United States Of America As Represented By The United States Department Of Energy | Tungsten bridge for the low energy ignition of explosive and energetic materials |
US5173449A (en) * | 1989-06-05 | 1992-12-22 | Motorola, Inc. | Metallization process |
US5355800A (en) * | 1990-02-13 | 1994-10-18 | Dow Robert L | Combined EED igniter means and means for protecting the EED from inadvertent extraneous electricity induced firing |
US5166468A (en) * | 1991-04-05 | 1992-11-24 | Thiokol Corporation | Thermocouple-triggered igniter |
US5431101A (en) * | 1991-04-16 | 1995-07-11 | Thiokol Corporation | Low cost hermetically sealed squib |
US5179248A (en) * | 1991-10-08 | 1993-01-12 | Scb Technologies, Inc. | Zener diode for protection of semiconductor explosive bridge |
US5309841A (en) * | 1991-10-08 | 1994-05-10 | Scb Technologies, Inc. | Zener diode for protection of integrated circuit explosive bridge |
GB9216517D0 (en) * | 1992-08-04 | 1992-09-23 | Ici Plc | Pyrotechnic sheet material |
US5376585A (en) * | 1992-09-25 | 1994-12-27 | Texas Instruments Incorporated | Method for forming titanium tungsten local interconnect for integrated circuits |
US5370054A (en) * | 1992-10-01 | 1994-12-06 | The United States Of America As Represented By The Secretary Of The Army | Semiconductor slapper |
US5385097A (en) * | 1993-07-16 | 1995-01-31 | At&T Corp. | Electroexplosive device |
US5439847A (en) * | 1993-11-05 | 1995-08-08 | At&T Corp. | Integrated circuit fabrication with a raised feature as mask |
US5503077A (en) * | 1994-03-29 | 1996-04-02 | Halliburton Company | Explosive detonation apparatus |
US5484747A (en) * | 1995-05-25 | 1996-01-16 | United Microelectronics Corporation | Selective metal wiring and plug process |
-
1996
- 1996-05-09 US US08/644,008 patent/US6133146A/en not_active Expired - Lifetime
-
1997
- 1997-05-02 WO PCT/US1997/007490 patent/WO1997042462A1/en active IP Right Grant
- 1997-05-02 BR BR9710438-8A patent/BR9710438A/pt unknown
- 1997-05-02 ES ES97921498T patent/ES2175401T3/es not_active Expired - Lifetime
- 1997-05-02 CA CA002253672A patent/CA2253672C/en not_active Expired - Fee Related
- 1997-05-02 AT AT97921498T patent/ATE216063T1/de not_active IP Right Cessation
- 1997-05-02 EP EP97921498A patent/EP0897523B1/en not_active Expired - Lifetime
- 1997-05-02 DE DE69711864T patent/DE69711864T2/de not_active Expired - Lifetime
- 1997-05-07 AR ARP970101886A patent/AR007028A1/es unknown
-
1998
- 1998-11-09 NO NO985233A patent/NO985233L/no not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
DE69711864T2 (de) | 2002-08-29 |
NO985233L (no) | 1999-01-08 |
EP0897523A1 (en) | 1999-02-24 |
DE69711864D1 (de) | 2002-05-16 |
ATE216063T1 (de) | 2002-04-15 |
NO985233D0 (no) | 1998-11-09 |
EP0897523B1 (en) | 2002-04-10 |
WO1997042462A1 (en) | 1997-11-13 |
BR9710438A (pt) | 2000-01-11 |
CA2253672C (en) | 2002-04-16 |
US6133146A (en) | 2000-10-17 |
EP0897523A4 (en) | 1999-07-28 |
AR007028A1 (es) | 1999-10-13 |
CA2253672A1 (en) | 1997-11-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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