ES2165730T3 - Un giroscopo. - Google Patents
Un giroscopo.Info
- Publication number
- ES2165730T3 ES2165730T3 ES99907762T ES99907762T ES2165730T3 ES 2165730 T3 ES2165730 T3 ES 2165730T3 ES 99907762 T ES99907762 T ES 99907762T ES 99907762 T ES99907762 T ES 99907762T ES 2165730 T3 ES2165730 T3 ES 2165730T3
- Authority
- ES
- Spain
- Prior art keywords
- resonator
- axis
- response
- plane
- detect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
Un giróscopo para detectar velocidades angulares en al menos dos ejes, que incluye un resonador (2) vibratorio, sustancialmente plano, que tiene una estructura de forma sustancialmente de aro o anillo con periferias interior y exterior que se extienden alrededor de un eje común, caracterizado por incluir medios (4, 14, 22) de activación de modo de portadora para hacer vibrar el resonador (2) en un modo de portadora en el plano de cos n1 , donde n1 es un valor entero igual o mayor que 2, medios (3) de soporte para soportar de modo flexible el resonador (2) y para permitir que vibre el resonador (2), en respuesta a los medios (4, 14, 22) de activación de modo de portadora, con relación a los medios (3) de soporte, medios (5, 15, 23) de detección de modo de portadora para detectar movimiento en el plano del resonador (2), medios (8, 18, 26) de detección de modo de respuesta de eje X para detectar el movimiento de modo de respuesta de cos nde fuera del plano del resonador (2) con respecto al giro del giróscopo alrededor del eje X, en donde n tiene un valor de n1+1 o n1-1, y medios (10, 20, 28) de detección de modo de respuesta de eje Y para detectar el movimiento de modo de respuesta de sen nde fuera del plano del resonador (2) con respecto al giro del giróscopo alrededor del eje Y, donde n tiene un valor de n1+1 o n1-1, idéntico al del modo de respuesta para el eje X.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9805388A GB2335273B (en) | 1998-03-14 | 1998-03-14 | A two axis gyroscope |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2165730T3 true ES2165730T3 (es) | 2002-03-16 |
Family
ID=10828507
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES99907762T Expired - Lifetime ES2165730T3 (es) | 1998-03-14 | 1999-03-10 | Un giroscopo. |
Country Status (16)
Country | Link |
---|---|
US (2) | US6343509B1 (es) |
EP (1) | EP1062480B1 (es) |
JP (1) | JP4375818B2 (es) |
KR (2) | KR100511845B1 (es) |
CN (1) | CN1148564C (es) |
AU (2) | AU743518B2 (es) |
CA (1) | CA2323163A1 (es) |
CZ (1) | CZ20003337A3 (es) |
DE (1) | DE69900751T2 (es) |
DK (1) | DK1062480T3 (es) |
ES (1) | ES2165730T3 (es) |
GB (1) | GB2335273B (es) |
HU (1) | HUP0101205A3 (es) |
NO (1) | NO20004572L (es) |
PL (1) | PL342901A1 (es) |
WO (1) | WO1999047890A1 (es) |
Families Citing this family (54)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0001294D0 (en) | 2000-01-20 | 2000-03-08 | British Aerospace | Multi-axis sensing device |
EP1120630A1 (en) * | 2000-01-27 | 2001-08-01 | British Aerospace Public Limited Company | Micromachined angular rate sensor |
US6715352B2 (en) * | 2001-06-26 | 2004-04-06 | Microsensors, Inc. | Method of designing a flexure system for tuning the modal response of a decoupled micromachined gyroscope and a gyroscoped designed according to the method |
GB0121934D0 (en) * | 2001-09-12 | 2001-10-31 | Europ Technology For Business | Angular rate sensors |
GB0122253D0 (en) * | 2001-09-14 | 2001-11-07 | Bae Systems Plc | Vibratory gyroscopic rate sensor |
GB0122256D0 (en) | 2001-09-14 | 2001-11-07 | Bae Systems Plc | Vibratory gyroscopic rate sensor |
GB0122254D0 (en) * | 2001-09-14 | 2001-11-07 | Bae Systems Plc | Vibratory gyroscopic rate sensor |
GB0122252D0 (en) * | 2001-09-14 | 2001-11-07 | Bae Systems Plc | Vibratory gyroscopic rate sensor |
GB0122258D0 (en) * | 2001-09-14 | 2001-11-07 | Bae Systems Plc | Vibratory gyroscopic rate sensor |
GB0206510D0 (en) * | 2002-03-20 | 2002-05-01 | Qinetiq Ltd | Micro-Electromechanical systems |
US7040163B2 (en) * | 2002-08-12 | 2006-05-09 | The Boeing Company | Isolated planar gyroscope with internal radial sensing and actuation |
GB0227098D0 (en) * | 2002-11-20 | 2002-12-24 | Bae Systems Plc | Method of calibrating bias drift with temperature for a vibrating structure gyroscope |
US20050092084A1 (en) * | 2003-03-28 | 2005-05-05 | Fell Christopher P. | Rate sensing device |
US20050062362A1 (en) * | 2003-08-28 | 2005-03-24 | Hongyuan Yang | Oscillatory gyroscope |
US6940433B2 (en) * | 2003-11-14 | 2005-09-06 | Northrop Grumman Corporation | Modulation method for signal crosstalk mitigation in electrostatically driven devices |
US7406867B2 (en) * | 2005-06-27 | 2008-08-05 | Milli Sensor Systems + Actuators | G2-Gyroscope: MEMS gyroscope with output oscillation about the normal to the plane |
US8079259B2 (en) * | 2005-06-27 | 2011-12-20 | Milli Sensor Systems & Actuators | MEMS gyroscope with output oscillation about the normal to the plane |
US7543496B2 (en) * | 2006-03-27 | 2009-06-09 | Georgia Tech Research Corporation | Capacitive bulk acoustic wave disk gyroscopes |
US7281426B1 (en) * | 2006-06-15 | 2007-10-16 | Innalabs Technologies, Inc. | Stemless hemispherical resonator gyroscope |
US7958781B2 (en) * | 2006-12-15 | 2011-06-14 | Atlantic Inertial Systems Limited | Vibrating structure gyroscope |
US7493814B2 (en) * | 2006-12-22 | 2009-02-24 | The Boeing Company | Vibratory gyroscope with parasitic mode damping |
US7836765B2 (en) * | 2007-07-31 | 2010-11-23 | The Boeing Company | Disc resonator integral inertial measurement unit |
US7801694B1 (en) | 2007-09-27 | 2010-09-21 | Watson Industries, Inc. | Gyroscope with temperature compensation |
US7992438B2 (en) * | 2007-11-28 | 2011-08-09 | Chung Shan Institute Of Science And Technology, Armaments Bureau, M.N.D. | Multiaxial gyroscope |
WO2009087858A1 (ja) | 2008-01-07 | 2009-07-16 | Murata Manufacturing Co., Ltd. | 角速度センサ |
EP2239541B1 (en) * | 2008-01-29 | 2013-10-23 | Sumitomo Precision Products Co., Ltd. | Vibrating gyroscope using piezoelectric film |
JP5524045B2 (ja) * | 2008-03-25 | 2014-06-18 | 住友精密工業株式会社 | 圧電体膜を用いた振動ジャイロ |
WO2009119204A1 (ja) * | 2008-03-25 | 2009-10-01 | 住友精密工業株式会社 | 圧電体膜を用いた振動ジャイロ |
JP5523755B2 (ja) | 2009-02-11 | 2014-06-18 | 住友精密工業株式会社 | 圧電体膜を用いた振動ジャイロ及びその製造方法 |
US8151641B2 (en) | 2009-05-21 | 2012-04-10 | Analog Devices, Inc. | Mode-matching apparatus and method for micromachined inertial sensors |
JP2011027562A (ja) * | 2009-07-27 | 2011-02-10 | Sumitomo Precision Prod Co Ltd | 圧電体膜を用いた振動ジャイロ |
US20120125100A1 (en) * | 2009-07-27 | 2012-05-24 | Sumitomo Precision Products Co, Ltd. | Vibrating gyroscope including piezoelectric film |
JP2011027561A (ja) * | 2009-07-27 | 2011-02-10 | Sumitomo Precision Prod Co Ltd | 圧電体膜を用いた振動ジャイロ |
JP2011027560A (ja) * | 2009-07-27 | 2011-02-10 | Sumitomo Precision Prod Co Ltd | 圧電体膜を用いた振動ジャイロ |
WO2011026100A1 (en) | 2009-08-31 | 2011-03-03 | Georgia Tech Research Corporation | Bulk acoustic wave gyroscope with spoked structure |
FR2958030B1 (fr) * | 2010-03-23 | 2012-04-20 | Sagem Defense Securite | Procede et dispositif de mesure angulaire avec compensation de non linearites |
US8616056B2 (en) * | 2010-11-05 | 2013-12-31 | Analog Devices, Inc. | BAW gyroscope with bottom electrode |
US8919199B2 (en) | 2010-12-01 | 2014-12-30 | Analog Devices, Inc. | Apparatus and method for anchoring electrodes in MEMS devices |
US8631700B2 (en) | 2010-11-05 | 2014-01-21 | Analog Devices, Inc. | Resonating sensor with mechanical constraints |
US9091544B2 (en) * | 2010-11-05 | 2015-07-28 | Analog Devices, Inc. | XY-axis shell-type gyroscopes with reduced cross-talk sensitivity and/or mode matching |
US9726489B2 (en) * | 2010-12-07 | 2017-08-08 | Georgia Tech Research Corporation | Mode-matched single proof-mass dual-axis gyroscope and method of fabrication |
CN102706337B (zh) * | 2012-05-07 | 2015-08-19 | 上海交通大学 | 压电圆盘微机械陀螺 |
US20140260611A1 (en) * | 2013-03-15 | 2014-09-18 | Analog Devices, Inc. | XY-Axis Gyroscopes with Electrode Configuration for Detecting Quadrature Errors and Out-of-Plane Sense Modes |
US9709595B2 (en) | 2013-11-14 | 2017-07-18 | Analog Devices, Inc. | Method and apparatus for detecting linear and rotational movement |
US9599471B2 (en) | 2013-11-14 | 2017-03-21 | Analog Devices, Inc. | Dual use of a ring structure as gyroscope and accelerometer |
CN104165624B (zh) * | 2014-07-25 | 2017-01-11 | 中国人民解放军国防科学技术大学 | 一种基于侧壁压电驱动的环形振动陀螺及其驱动和检测方法 |
US10746548B2 (en) | 2014-11-04 | 2020-08-18 | Analog Devices, Inc. | Ring gyroscope structural features |
US9869552B2 (en) * | 2015-03-20 | 2018-01-16 | Analog Devices, Inc. | Gyroscope that compensates for fluctuations in sensitivity |
CN105486298A (zh) * | 2015-11-27 | 2016-04-13 | 上海新跃仪表厂 | Mems金刚石多环陀螺仪及其加工方法 |
WO2019032177A1 (en) * | 2017-08-08 | 2019-02-14 | Hrl Laboratories, Llc | VIBRATION GYROSCOPE WITH HIGH QUALITY FACTOR, SILICON-LIKE, FOR MICRO-ELECTROMECHANICAL SYSTEM (MEMS), |
GB2567479B (en) * | 2017-10-13 | 2022-04-06 | Atlantic Inertial Systems Ltd | Angular rate sensors |
US11656077B2 (en) | 2019-01-31 | 2023-05-23 | Analog Devices, Inc. | Pseudo-extensional mode MEMS ring gyroscope |
GB201911534D0 (en) * | 2019-08-12 | 2019-09-25 | Atlantic Inertial Systems Ltd | Improved noise performance for vibrating structure gyroscopes |
RU2750182C1 (ru) * | 2020-12-09 | 2021-06-23 | Николай Юрьевич Овчаренко | Способ управления характеристиками подшипника скольжения при помощи температуры и подшипник скольжения для его реализации |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3206985A (en) * | 1963-01-04 | 1965-09-21 | Western Electric Co | Apparatus for simultaneously sensing movement of a body around a plurality of mutually perpendicular axes |
GB8404668D0 (en) * | 1984-02-22 | 1984-03-28 | Burdess J S | Gyroscopic devices |
JPH02198315A (ja) * | 1989-01-27 | 1990-08-06 | Canon Inc | リング状振動ジャイロ |
ES2056580T3 (es) * | 1990-05-18 | 1994-10-01 | British Aerospace | Sensores inerciales. |
GB9207148D0 (en) * | 1992-04-01 | 1992-05-13 | British Aerospace | Planar rate sensor |
GB2266588B (en) * | 1992-04-24 | 1995-11-15 | British Aerospace | Vibrating rate sensor tuning |
US5616864A (en) * | 1995-02-22 | 1997-04-01 | Delco Electronics Corp. | Method and apparatus for compensation of micromachined sensors |
GB2318184B (en) * | 1996-10-08 | 2000-07-05 | British Aerospace | A rate sensor |
GB2322196B (en) * | 1997-02-18 | 2000-10-18 | British Aerospace | A vibrating structure gyroscope |
GB2338781B (en) * | 1998-03-14 | 2002-04-03 | British Aerospace | A gyroscope |
-
1998
- 1998-03-14 GB GB9805388A patent/GB2335273B/en not_active Expired - Fee Related
-
1999
- 1999-03-10 DE DE69900751T patent/DE69900751T2/de not_active Expired - Lifetime
- 1999-03-10 CN CNB99803939XA patent/CN1148564C/zh not_active Expired - Fee Related
- 1999-03-10 ES ES99907762T patent/ES2165730T3/es not_active Expired - Lifetime
- 1999-03-10 AU AU27394/99A patent/AU743518B2/en not_active Ceased
- 1999-03-10 EP EP99907762A patent/EP1062480B1/en not_active Expired - Lifetime
- 1999-03-10 PL PL99342901A patent/PL342901A1/xx unknown
- 1999-03-10 AU AU27392/99A patent/AU740992B2/en not_active Ceased
- 1999-03-10 HU HU0101205A patent/HUP0101205A3/hu unknown
- 1999-03-10 JP JP54668199A patent/JP4375818B2/ja not_active Expired - Fee Related
- 1999-03-10 CA CA002323163A patent/CA2323163A1/en not_active Abandoned
- 1999-03-10 KR KR10-2000-7010150A patent/KR100511845B1/ko not_active IP Right Cessation
- 1999-03-10 KR KR10-2000-7010152A patent/KR100539061B1/ko not_active IP Right Cessation
- 1999-03-10 WO PCT/GB1999/000722 patent/WO1999047890A1/en not_active Application Discontinuation
- 1999-03-10 DK DK99907762T patent/DK1062480T3/da active
- 1999-03-10 CZ CZ20003337A patent/CZ20003337A3/cs unknown
- 1999-09-30 US US09/409,668 patent/US6343509B1/en not_active Expired - Lifetime
- 1999-10-13 US US09/417,302 patent/US6401534B1/en not_active Expired - Fee Related
-
2000
- 2000-09-13 NO NO20004572A patent/NO20004572L/no not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
AU743518B2 (en) | 2002-01-24 |
EP1062480A1 (en) | 2000-12-27 |
CA2323163A1 (en) | 1999-09-23 |
US6343509B1 (en) | 2002-02-05 |
CN1148564C (zh) | 2004-05-05 |
PL342901A1 (en) | 2001-07-16 |
NO20004572D0 (no) | 2000-09-13 |
KR100511845B1 (ko) | 2005-09-02 |
KR20010034602A (ko) | 2001-04-25 |
HUP0101205A3 (en) | 2003-04-28 |
GB9805388D0 (en) | 1998-05-06 |
JP2002509615A (ja) | 2002-03-26 |
AU2739299A (en) | 1999-10-11 |
GB2335273A9 (en) | 1999-11-16 |
HUP0101205A2 (hu) | 2001-08-28 |
WO1999047890A1 (en) | 1999-09-23 |
KR20010041859A (ko) | 2001-05-25 |
NO20004572L (no) | 2000-09-13 |
DK1062480T3 (da) | 2002-04-22 |
US6401534B1 (en) | 2002-06-11 |
KR100539061B1 (ko) | 2005-12-26 |
CZ20003337A3 (cs) | 2002-01-16 |
DE69900751T2 (de) | 2002-09-26 |
DE69900751D1 (de) | 2002-02-28 |
GB2335273B (en) | 2002-02-27 |
GB2335273A (en) | 1999-09-15 |
AU2739499A (en) | 1999-10-11 |
EP1062480B1 (en) | 2002-01-02 |
JP4375818B2 (ja) | 2009-12-02 |
CN1292866A (zh) | 2001-04-25 |
AU740992B2 (en) | 2001-11-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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