GB2238874A - Accelerometer - Google Patents

Accelerometer

Info

Publication number
GB2238874A
GB2238874A GB9023236A GB9023236A GB2238874A GB 2238874 A GB2238874 A GB 2238874A GB 9023236 A GB9023236 A GB 9023236A GB 9023236 A GB9023236 A GB 9023236A GB 2238874 A GB2238874 A GB 2238874A
Authority
GB
United Kingdom
Prior art keywords
filaments
thermal resistors
vibrations
sustaining
piezo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB9023236A
Other versions
GB9023236D0 (en
GB2238874B (en
Inventor
Dennis John Miles
Sidney George Smith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Defence
Original Assignee
UK Secretary of State for Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Secretary of State for Defence filed Critical UK Secretary of State for Defence
Publication of GB9023236D0 publication Critical patent/GB9023236D0/en
Publication of GB2238874A publication Critical patent/GB2238874A/en
Application granted granted Critical
Publication of GB2238874B publication Critical patent/GB2238874B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/122—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by metal resistance strain gauges, e.g. wire resistance strain gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Gyroscopes (AREA)

Abstract

A transducer for acceleration measurement is fabricated from a silicon slice and comprises four filaments (3, 4, 5 and 6) which interconnect a central support (1) with an inertial mass (2). The filaments vibrate in a common plane, their resonant frequencies being determined by any external forces applied thereto. Vibrations are sustained and detected by means of a pair of thermal resistors (RS, RD) implanted in each filament. The embodiment is configured as a 2-axis accelerometer for use in vehicle navigation and guidance systems. Piezo-electric means for sustaining and detecting vibrations of the filaments may be used instead of the thermal resistors (RS and RD).
GB9023236A 1988-04-25 1990-10-24 Accelerometer Expired GB2238874B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB8809755A GB8809755D0 (en) 1988-04-25 1988-04-25 Accelerometer
PCT/GB1989/000441 WO1989010567A1 (en) 1988-04-25 1989-04-25 Accelerometer

Publications (3)

Publication Number Publication Date
GB9023236D0 GB9023236D0 (en) 1991-02-27
GB2238874A true GB2238874A (en) 1991-06-12
GB2238874B GB2238874B (en) 1992-02-12

Family

ID=10635805

Family Applications (2)

Application Number Title Priority Date Filing Date
GB8809755A Pending GB8809755D0 (en) 1988-04-25 1988-04-25 Accelerometer
GB9023236A Expired GB2238874B (en) 1988-04-25 1990-10-24 Accelerometer

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB8809755A Pending GB8809755D0 (en) 1988-04-25 1988-04-25 Accelerometer

Country Status (4)

Country Link
EP (1) EP0412106A1 (en)
JP (1) JPH03503932A (en)
GB (2) GB8809755D0 (en)
WO (1) WO1989010567A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02129513A (en) * 1988-11-09 1990-05-17 Aisin Seiki Co Ltd Detector for biaxial revolution
FR2656929B1 (en) * 1990-01-11 1994-05-13 Etat Francais Delegue Armement DIFFERENTIAL ACCELEROMETER WITH PIEZOELECTRIC RESONATORS.
US5165289A (en) * 1990-07-10 1992-11-24 Johnson Service Company Resonant mechanical sensor
US5233874A (en) * 1991-08-19 1993-08-10 General Motors Corporation Active microaccelerometer
US5355712A (en) * 1991-09-13 1994-10-18 Lucas Novasensor Method and apparatus for thermally actuated self testing of silicon structures
JP3311633B2 (en) * 1997-04-04 2002-08-05 日本碍子株式会社 Sensor unit
DE19812773C2 (en) 1998-03-24 2002-11-14 Conti Temic Microelectronic Microsensor with a resonator structure
EP1083430B1 (en) * 1999-09-10 2006-07-26 STMicroelectronics S.r.l. Semiconductor integrated inertial sensor with calibration microactuator
GB2505875A (en) * 2012-09-04 2014-03-19 Cambridge Entpr Ltd Dual and triple axis inertial sensors and methods of inertial sensing
US10168194B2 (en) 2015-12-24 2019-01-01 Analog Devices, Inc. Method and apparatus for driving a multi-oscillator system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3303452A (en) * 1964-05-12 1967-02-07 Textron Electronics Inc Piezoresistive device
DE1243895B (en) * 1961-07-14 1967-07-06 Litton Industries Inc Electromechanical measuring transducers for measuring a force, in particular for use as an accelerometer
GB2174500A (en) * 1985-05-04 1986-11-05 Stc Plc Accelerometer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1243895B (en) * 1961-07-14 1967-07-06 Litton Industries Inc Electromechanical measuring transducers for measuring a force, in particular for use as an accelerometer
US3303452A (en) * 1964-05-12 1967-02-07 Textron Electronics Inc Piezoresistive device
GB2174500A (en) * 1985-05-04 1986-11-05 Stc Plc Accelerometer

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
97-100 see page 97 column 2,lines 1-16;figure 3 *
l Papers,IEEE,T.S.J.Lammerink et.al:"Integrated thermally resonant diaphragm pressure sensor",pp. *
Transducers '85,1985 International Conference on Solid-StateSensors and Actuators,Digest of Technica *

Also Published As

Publication number Publication date
GB8809755D0 (en) 1988-06-02
GB9023236D0 (en) 1991-02-27
EP0412106A1 (en) 1991-02-13
WO1989010567A1 (en) 1989-11-02
JPH03503932A (en) 1991-08-29
GB2238874B (en) 1992-02-12

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19930425