ES2152164A1 - Radio frequency wave guide anti multipactor coating method consists of electron bombardment with simultaneous argon inert ions administration under controlled conditions - Google Patents

Radio frequency wave guide anti multipactor coating method consists of electron bombardment with simultaneous argon inert ions administration under controlled conditions

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Publication number
ES2152164A1
ES2152164A1 ES009801841A ES9801841A ES2152164A1 ES 2152164 A1 ES2152164 A1 ES 2152164A1 ES 009801841 A ES009801841 A ES 009801841A ES 9801841 A ES9801841 A ES 9801841A ES 2152164 A1 ES2152164 A1 ES 2152164A1
Authority
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Spain
Prior art keywords
radio frequency
wave guide
frequency wave
coating method
method consists
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
ES009801841A
Other languages
Spanish (es)
Other versions
ES2152164B1 (en
Inventor
Quintana Saul Castaneda
Rivillas Nuria Diaz
Sanchez Fernando Rueda
Herrero Isabel Montero
Estella Luis Galan
Vaquero David Raboso
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universidad Autonoma de Madrid
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Universidad Autonoma de Madrid
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universidad Autonoma de Madrid filed Critical Universidad Autonoma de Madrid
Priority to ES9801841A priority Critical patent/ES2152164B1/en
Publication of ES2152164A1 publication Critical patent/ES2152164A1/en
Application granted granted Critical
Publication of ES2152164B1 publication Critical patent/ES2152164B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Materials For Medical Uses (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

The radio frequency wave guide anti-multipactor coating technique comprises application of a 4 kV d.c. 100 mA electron gun, with simultaneous administration of 0.25 mA/cm2 200 eV kinetic energy argon inert ions. Operating in a nitrogen atmosphere at 3 x 10-4 mmHg and 40 A/minute deposition rate the substrate is at 100degreesC. The basic pressure is 4 x 10-8 mmHg, and the deposition pressure is 3 x 10-4 to 4.5 x 10-4 mmHg.
ES9801841A 1998-09-01 1998-09-01 PROCEDURE FOR OBTAINING ANTIMULTIPACTOR COATINGS APPLICABLE TO RADIO FREQUENCY WAVE GUIDES. Expired - Lifetime ES2152164B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ES9801841A ES2152164B1 (en) 1998-09-01 1998-09-01 PROCEDURE FOR OBTAINING ANTIMULTIPACTOR COATINGS APPLICABLE TO RADIO FREQUENCY WAVE GUIDES.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ES9801841A ES2152164B1 (en) 1998-09-01 1998-09-01 PROCEDURE FOR OBTAINING ANTIMULTIPACTOR COATINGS APPLICABLE TO RADIO FREQUENCY WAVE GUIDES.

Publications (2)

Publication Number Publication Date
ES2152164A1 true ES2152164A1 (en) 2001-01-16
ES2152164B1 ES2152164B1 (en) 2001-08-01

Family

ID=8305032

Family Applications (1)

Application Number Title Priority Date Filing Date
ES9801841A Expired - Lifetime ES2152164B1 (en) 1998-09-01 1998-09-01 PROCEDURE FOR OBTAINING ANTIMULTIPACTOR COATINGS APPLICABLE TO RADIO FREQUENCY WAVE GUIDES.

Country Status (1)

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ES (1) ES2152164B1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3891884A (en) * 1972-06-26 1975-06-24 Raytheon Co Electron discharge device having electron multipactor suppression coating on window body
US4151325A (en) * 1975-04-03 1979-04-24 The United States Of America As Represented By The United States Department Of Energy Titanium nitride thin films for minimizing multipactoring
US4209552A (en) * 1975-04-03 1980-06-24 The United States Of America As Represented By The United States Department Of Energy Thin film deposition by electric and magnetic crossed-field diode sputtering
WO1998016326A1 (en) * 1996-10-11 1998-04-23 Mako, Frederick, M. Suppression of voltage breakdown and field emission from surfaces

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3891884A (en) * 1972-06-26 1975-06-24 Raytheon Co Electron discharge device having electron multipactor suppression coating on window body
US4151325A (en) * 1975-04-03 1979-04-24 The United States Of America As Represented By The United States Department Of Energy Titanium nitride thin films for minimizing multipactoring
US4209552A (en) * 1975-04-03 1980-06-24 The United States Of America As Represented By The United States Department Of Energy Thin film deposition by electric and magnetic crossed-field diode sputtering
WO1998016326A1 (en) * 1996-10-11 1998-04-23 Mako, Frederick, M. Suppression of voltage breakdown and field emission from surfaces

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NYAIESH et al. "Properties of thin antimultipactor TiN and Cr2O3 coatings for Klystron windows" Journal of Vacuum Science & Technology A. Septiembre-Octubre 1986. Vol. 4, no 5, paginas 2356-63. *

Also Published As

Publication number Publication date
ES2152164B1 (en) 2001-08-01

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