ES2152164A1 - Radio frequency wave guide anti multipactor coating method consists of electron bombardment with simultaneous argon inert ions administration under controlled conditions - Google Patents
Radio frequency wave guide anti multipactor coating method consists of electron bombardment with simultaneous argon inert ions administration under controlled conditionsInfo
- Publication number
- ES2152164A1 ES2152164A1 ES009801841A ES9801841A ES2152164A1 ES 2152164 A1 ES2152164 A1 ES 2152164A1 ES 009801841 A ES009801841 A ES 009801841A ES 9801841 A ES9801841 A ES 9801841A ES 2152164 A1 ES2152164 A1 ES 2152164A1
- Authority
- ES
- Spain
- Prior art keywords
- radio frequency
- wave guide
- frequency wave
- coating method
- method consists
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Materials For Medical Uses (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The radio frequency wave guide anti-multipactor coating technique comprises application of a 4 kV d.c. 100 mA electron gun, with simultaneous administration of 0.25 mA/cm2 200 eV kinetic energy argon inert ions. Operating in a nitrogen atmosphere at 3 x 10-4 mmHg and 40 A/minute deposition rate the substrate is at 100degreesC. The basic pressure is 4 x 10-8 mmHg, and the deposition pressure is 3 x 10-4 to 4.5 x 10-4 mmHg.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES9801841A ES2152164B1 (en) | 1998-09-01 | 1998-09-01 | PROCEDURE FOR OBTAINING ANTIMULTIPACTOR COATINGS APPLICABLE TO RADIO FREQUENCY WAVE GUIDES. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES9801841A ES2152164B1 (en) | 1998-09-01 | 1998-09-01 | PROCEDURE FOR OBTAINING ANTIMULTIPACTOR COATINGS APPLICABLE TO RADIO FREQUENCY WAVE GUIDES. |
Publications (2)
Publication Number | Publication Date |
---|---|
ES2152164A1 true ES2152164A1 (en) | 2001-01-16 |
ES2152164B1 ES2152164B1 (en) | 2001-08-01 |
Family
ID=8305032
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES9801841A Expired - Lifetime ES2152164B1 (en) | 1998-09-01 | 1998-09-01 | PROCEDURE FOR OBTAINING ANTIMULTIPACTOR COATINGS APPLICABLE TO RADIO FREQUENCY WAVE GUIDES. |
Country Status (1)
Country | Link |
---|---|
ES (1) | ES2152164B1 (en) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3891884A (en) * | 1972-06-26 | 1975-06-24 | Raytheon Co | Electron discharge device having electron multipactor suppression coating on window body |
US4151325A (en) * | 1975-04-03 | 1979-04-24 | The United States Of America As Represented By The United States Department Of Energy | Titanium nitride thin films for minimizing multipactoring |
US4209552A (en) * | 1975-04-03 | 1980-06-24 | The United States Of America As Represented By The United States Department Of Energy | Thin film deposition by electric and magnetic crossed-field diode sputtering |
WO1998016326A1 (en) * | 1996-10-11 | 1998-04-23 | Mako, Frederick, M. | Suppression of voltage breakdown and field emission from surfaces |
-
1998
- 1998-09-01 ES ES9801841A patent/ES2152164B1/en not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3891884A (en) * | 1972-06-26 | 1975-06-24 | Raytheon Co | Electron discharge device having electron multipactor suppression coating on window body |
US4151325A (en) * | 1975-04-03 | 1979-04-24 | The United States Of America As Represented By The United States Department Of Energy | Titanium nitride thin films for minimizing multipactoring |
US4209552A (en) * | 1975-04-03 | 1980-06-24 | The United States Of America As Represented By The United States Department Of Energy | Thin film deposition by electric and magnetic crossed-field diode sputtering |
WO1998016326A1 (en) * | 1996-10-11 | 1998-04-23 | Mako, Frederick, M. | Suppression of voltage breakdown and field emission from surfaces |
Non-Patent Citations (1)
Title |
---|
NYAIESH et al. "Properties of thin antimultipactor TiN and Cr2O3 coatings for Klystron windows" Journal of Vacuum Science & Technology A. Septiembre-Octubre 1986. Vol. 4, no 5, paginas 2356-63. * |
Also Published As
Publication number | Publication date |
---|---|
ES2152164B1 (en) | 2001-08-01 |
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