WO2002042516A3 - Sputter deposition of lithium phosphorous oxynitride material - Google Patents

Sputter deposition of lithium phosphorous oxynitride material Download PDF

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Publication number
WO2002042516A3
WO2002042516A3 PCT/US2001/049864 US0149864W WO0242516A3 WO 2002042516 A3 WO2002042516 A3 WO 2002042516A3 US 0149864 W US0149864 W US 0149864W WO 0242516 A3 WO0242516 A3 WO 0242516A3
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WO
Grant status
Application
Patent type
Prior art keywords
sputter deposition
oxynitride material
phosphorous oxynitride
lithium phosphorous
substrate
Prior art date
Application number
PCT/US2001/049864
Other languages
French (fr)
Other versions
WO2002042516A2 (en )
Inventor
Victor Krasnov
Kai-Wei Nieh
Su-Jen Ting
Paul Tang
Fan-Hsiu Chang
Chun-Ting Lin
Original Assignee
Front Edge Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

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Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL INTO ELECTRICAL ENERGY
    • H01M6/00Primary cells; Manufacture thereof
    • H01M6/14Cells with non-aqueous electrolyte
    • H01M6/18Cells with non-aqueous electrolyte with solid electrolyte
    • H01M6/188Processes of manufacture
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0676Oxynitrides
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/36Accumulators not provided for in groups H01M10/05-H01M10/34
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49108Electric battery cell making

Abstract

A method of depositing lithium phosphorus oxynitride on a substrate, the method comprising loading a substrate into a vacuum chamber having a target comprising lithium phosphate, introducing a process gas comprising nitrogen into the chamber and maintaining the gas at a pressure of less than about 15 mTorr; and forming a plasma of the process gas in the chamber to deposit lithium phosphorous oxynitride on the substrate.
PCT/US2001/049864 2000-11-03 2001-10-29 Sputter deposition of lithium phosphorous oxynitride material WO2002042516A3 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US09705962 US6863699B1 (en) 2000-11-03 2000-11-03 Sputter deposition of lithium phosphorous oxynitride material
US09/705,962 2000-11-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AU3408502A AU3408502A (en) 2000-11-03 2001-10-29 Sputter deposition of lithium phosphorous oxynitride material

Publications (2)

Publication Number Publication Date
WO2002042516A2 true WO2002042516A2 (en) 2002-05-30
WO2002042516A3 true true WO2002042516A3 (en) 2003-01-16

Family

ID=24835647

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/049864 WO2002042516A3 (en) 2000-11-03 2001-10-29 Sputter deposition of lithium phosphorous oxynitride material

Country Status (2)

Country Link
US (1) US6863699B1 (en)
WO (1) WO2002042516A3 (en)

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US8865340B2 (en) 2011-10-20 2014-10-21 Front Edge Technology Inc. Thin film battery packaging formed by localized heating
US8864954B2 (en) 2011-12-23 2014-10-21 Front Edge Technology Inc. Sputtering lithium-containing material with multiple targets
US8870974B2 (en) 2008-02-18 2014-10-28 Front Edge Technology, Inc. Thin film battery fabrication using laser shaping
US8906523B2 (en) 2008-08-11 2014-12-09 Infinite Power Solutions, Inc. Energy device with integral collector surface for electromagnetic energy harvesting and method thereof
US9077000B2 (en) 2012-03-29 2015-07-07 Front Edge Technology, Inc. Thin film battery and localized heat treatment
US9257695B2 (en) 2012-03-29 2016-02-09 Front Edge Technology, Inc. Localized heat treatment of battery component films
US9334557B2 (en) 2007-12-21 2016-05-10 Sapurast Research Llc Method for sputter targets for electrolyte films
US9356320B2 (en) 2012-10-15 2016-05-31 Front Edge Technology Inc. Lithium battery having low leakage anode
US9532453B2 (en) 2009-09-01 2016-12-27 Sapurast Research Llc Printed circuit board with integrated thin film battery

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US8394522B2 (en) 2002-08-09 2013-03-12 Infinite Power Solutions, Inc. Robust metal film encapsulation
US8404376B2 (en) 2002-08-09 2013-03-26 Infinite Power Solutions, Inc. Metal film encapsulation
US20070264564A1 (en) * 2006-03-16 2007-11-15 Infinite Power Solutions, Inc. Thin film battery on an integrated circuit or circuit board and method thereof
US8445130B2 (en) 2002-08-09 2013-05-21 Infinite Power Solutions, Inc. Hybrid thin-film battery
US8431264B2 (en) 2002-08-09 2013-04-30 Infinite Power Solutions, Inc. Hybrid thin-film battery
US9793523B2 (en) 2002-08-09 2017-10-17 Sapurast Research Llc Electrochemical apparatus with barrier layer protected substrate
US8021778B2 (en) 2002-08-09 2011-09-20 Infinite Power Solutions, Inc. Electrochemical apparatus with barrier layer protected substrate
US8236443B2 (en) 2002-08-09 2012-08-07 Infinite Power Solutions, Inc. Metal film encapsulation
US8728285B2 (en) 2003-05-23 2014-05-20 Demaray, Llc Transparent conductive oxides
US7577636B2 (en) * 2003-05-28 2009-08-18 Fernandez Dennis S Network-extensible reconfigurable media appliance
CN101931097B (en) 2004-12-08 2012-11-21 希莫菲克斯公司 Deposition of LiCoO2
US7959769B2 (en) 2004-12-08 2011-06-14 Infinite Power Solutions, Inc. Deposition of LiCoO2
US8679674B2 (en) * 2005-03-25 2014-03-25 Front Edge Technology, Inc. Battery with protective packaging
US7846579B2 (en) * 2005-03-25 2010-12-07 Victor Krasnov Thin film battery with protective packaging
US8273222B2 (en) * 2006-05-16 2012-09-25 Southwest Research Institute Apparatus and method for RF plasma enhanced magnetron sputter deposition
CN101523571A (en) 2006-09-29 2009-09-02 无穷动力解决方案股份有限公司 Masking of and material constraint for depositing battery layers on flexible substrates
US8197781B2 (en) 2006-11-07 2012-06-12 Infinite Power Solutions, Inc. Sputtering target of Li3PO4 and method for producing same
US7862927B2 (en) * 2007-03-02 2011-01-04 Front Edge Technology Thin film battery and manufacturing method
US7862627B2 (en) 2007-04-27 2011-01-04 Front Edge Technology, Inc. Thin film battery substrate cutting and fabrication process
US8784512B2 (en) * 2007-08-13 2014-07-22 University Of Virginia Patent Foundation Thin film battery synthesis by directed vapor deposition
US8277617B2 (en) * 2007-08-14 2012-10-02 Southwest Research Institute Conformal magnetron sputter deposition
US8628645B2 (en) * 2007-09-04 2014-01-14 Front Edge Technology, Inc. Manufacturing method for thin film battery
US20090136839A1 (en) * 2007-11-28 2009-05-28 Front Edge Technology, Inc. Thin film battery comprising stacked battery cells and method
US8268488B2 (en) 2007-12-21 2012-09-18 Infinite Power Solutions, Inc. Thin film electrolyte for thin film batteries
KR101606183B1 (en) 2008-01-11 2016-03-25 사푸라스트 리써치 엘엘씨 Thin film encapsulation for thin film batteries and other devices
KR101672254B1 (en) 2008-04-02 2016-11-08 사푸라스트 리써치 엘엘씨 Passive over/under voltage control and protection for energy storage devices associated with energy harvesting
WO2010030743A1 (en) 2008-09-12 2010-03-18 Infinite Power Solutions, Inc. Energy device with integral conductive surface for data communication via electromagnetic energy and method thereof
WO2010042594A1 (en) 2008-10-08 2010-04-15 Infinite Power Solutions, Inc. Environmentally-powered wireless sensor module
CN103109396A (en) * 2010-08-24 2013-05-15 应用材料公司 In-situ synthesis and deposition of battery active lithium materials by spraying
WO2011028529A3 (en) * 2009-08-24 2011-06-23 Applied Materials, Inc. In-situ deposition of battery active lithium materials by thermal spraying
US8502494B2 (en) * 2009-08-28 2013-08-06 Front Edge Technology, Inc. Battery charging apparatus and method
US8747631B2 (en) * 2010-03-15 2014-06-10 Southwest Research Institute Apparatus and method utilizing a double glow discharge plasma for sputter cleaning
US9887429B2 (en) 2011-12-21 2018-02-06 Front Edge Technology Inc. Laminated lithium battery
US9159964B2 (en) 2012-09-25 2015-10-13 Front Edge Technology, Inc. Solid state battery having mismatched battery cells
US8753724B2 (en) 2012-09-26 2014-06-17 Front Edge Technology Inc. Plasma deposition on a partially formed battery through a mesh screen
US9570748B2 (en) 2012-10-12 2017-02-14 Ut-Battelle, Llc Lipon coatings for high voltage and high temperature Li-ion battery cathodes
GB201400276D0 (en) * 2014-01-08 2014-02-26 Ilika Technologies Ltd Vapour deposition method for fabricating lithium-containing thin film layered structures
US10008739B2 (en) 2015-02-23 2018-06-26 Front Edge Technology, Inc. Solid-state lithium battery with electrolyte

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WO2002021627A2 (en) * 2000-09-07 2002-03-14 Front Edge Technology, Inc. Thin film battery and method of manufacture

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Publication number Priority date Publication date Assignee Title
FR2403652A2 (en) * 1977-09-16 1979-04-13 Anvar Anion deficient fluoride thin films - used in prodn. of galvanic cells and formed by vapour deposition on substrates in microelectronics
US5512147A (en) * 1992-07-29 1996-04-30 Martin Marietta Energy Systems, Inc. Method of making an electrolyte for an electrochemical cell
US5612152A (en) * 1994-01-12 1997-03-18 Martin Marietta Energy Systems, Inc. Rechargeable lithium battery for use in applications requiring a low to high power output
WO2000060689A1 (en) * 1999-04-02 2000-10-12 Ut-Batelle, L.L.C. Battery with an in-situ activation plated lithium anode
WO2002021627A2 (en) * 2000-09-07 2002-03-14 Front Edge Technology, Inc. Thin film battery and method of manufacture

Non-Patent Citations (1)

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Title
ROH N-S ET AL: "Effects of deposition condition on the ionic conductivity and structure of amorphous lithium phosphorus oxynitrate thin film", SCRIPTA MATERIALIA, ELSEVIER, NEW YORK, NY, US, vol. 42, no. 1, 17 December 1999 (1999-12-17), pages 43 - 49, XP004325885, ISSN: 1359-6462 *

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9334557B2 (en) 2007-12-21 2016-05-10 Sapurast Research Llc Method for sputter targets for electrolyte films
US8870974B2 (en) 2008-02-18 2014-10-28 Front Edge Technology, Inc. Thin film battery fabrication using laser shaping
US8906523B2 (en) 2008-08-11 2014-12-09 Infinite Power Solutions, Inc. Energy device with integral collector surface for electromagnetic energy harvesting and method thereof
US9532453B2 (en) 2009-09-01 2016-12-27 Sapurast Research Llc Printed circuit board with integrated thin film battery
US8865340B2 (en) 2011-10-20 2014-10-21 Front Edge Technology Inc. Thin film battery packaging formed by localized heating
US8864954B2 (en) 2011-12-23 2014-10-21 Front Edge Technology Inc. Sputtering lithium-containing material with multiple targets
US9077000B2 (en) 2012-03-29 2015-07-07 Front Edge Technology, Inc. Thin film battery and localized heat treatment
US9257695B2 (en) 2012-03-29 2016-02-09 Front Edge Technology, Inc. Localized heat treatment of battery component films
US9356320B2 (en) 2012-10-15 2016-05-31 Front Edge Technology Inc. Lithium battery having low leakage anode

Also Published As

Publication number Publication date Type
US6863699B1 (en) 2005-03-08 grant
WO2002042516A2 (en) 2002-05-30 application

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