ES2147015T3 - Sistema de lentes optico-electronicas por una seccion de apertura en forma de hendidura. - Google Patents

Sistema de lentes optico-electronicas por una seccion de apertura en forma de hendidura.

Info

Publication number
ES2147015T3
ES2147015T3 ES97935493T ES97935493T ES2147015T3 ES 2147015 T3 ES2147015 T3 ES 2147015T3 ES 97935493 T ES97935493 T ES 97935493T ES 97935493 T ES97935493 T ES 97935493T ES 2147015 T3 ES2147015 T3 ES 2147015T3
Authority
ES
Spain
Prior art keywords
lens
opening
pole
optical axis
cylindrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES97935493T
Other languages
English (en)
Spanish (es)
Inventor
Rainer Spehr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of ES2147015T3 publication Critical patent/ES2147015T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/145—Combinations of electrostatic and magnetic lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Microscoopes, Condenser (AREA)
ES97935493T 1996-08-26 1997-07-23 Sistema de lentes optico-electronicas por una seccion de apertura en forma de hendidura. Expired - Lifetime ES2147015T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19634456A DE19634456A1 (de) 1996-08-26 1996-08-26 Elektronenoptische Linsenanordnung mit spaltförmigem Öffnungsquerschnitt

Publications (1)

Publication Number Publication Date
ES2147015T3 true ES2147015T3 (es) 2000-08-16

Family

ID=7803724

Family Applications (1)

Application Number Title Priority Date Filing Date
ES97935493T Expired - Lifetime ES2147015T3 (es) 1996-08-26 1997-07-23 Sistema de lentes optico-electronicas por una seccion de apertura en forma de hendidura.

Country Status (6)

Country Link
US (1) US6414319B1 (enExample)
EP (1) EP0920709B1 (enExample)
JP (2) JP4023556B2 (enExample)
DE (2) DE19634456A1 (enExample)
ES (1) ES2147015T3 (enExample)
WO (1) WO1998009313A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19944857A1 (de) * 1999-09-18 2001-03-22 Ceos Gmbh Elektronenoptische Linsenanordnung mit weit verschiebbarer Achse
JP4741115B2 (ja) * 2000-08-14 2011-08-03 イーリス エルエルシー リソグラフィ投影装置およびデバイス製造方法
TW579536B (en) 2001-07-02 2004-03-11 Zeiss Carl Semiconductor Mfg Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same
DE10136190A1 (de) * 2001-07-25 2003-02-06 Ceos Gmbh Schlitzlinsenanordnung für Teilchenstrahlen
DE10161680A1 (de) * 2001-12-14 2003-06-26 Ceos Gmbh Linsenanordnung mit lateral verschiebbarer optischer Achse für Teilchenstrahlen
US8519353B2 (en) * 2010-12-29 2013-08-27 Varian Semiconductor Equipment Associates, Inc. Method and apparatus for controlling an asymmetric electrostatic lens about a central ray trajectory of an ion beam
TWI506666B (zh) 2014-08-08 2015-11-01 Nat Univ Tsing Hua 桌上型電子顯微鏡及其複合多極－聚焦可調式磁透鏡
US10290463B2 (en) 2017-04-27 2019-05-14 Imatrex, Inc. Compact deflecting magnet

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU705699A2 (ru) * 1976-05-03 1979-12-25 Орденов Ленина И Трудового Красного Знамени Институт Электросварки Им. Е.О.Патона Установка дл электроннолучевого нагрева материалов
DE2623337A1 (de) * 1976-05-25 1977-12-08 Steigerwald Strahltech Elektronenoptische magnetische zylinderlinse
GB2115976A (en) * 1982-02-26 1983-09-14 Philips Electronic Associated Charged particle beam apparatus
DE3235068A1 (de) * 1982-09-22 1984-03-22 Siemens AG, 1000 Berlin und 8000 München Varioformstrahl-ablenkobjektiv fuer neutralteilchen und verfahren zu seinem betrieb
US4789787A (en) * 1987-05-27 1988-12-06 Microbeam Inc. Wien filter design
US4958078A (en) * 1989-01-05 1990-09-18 The University Of Michigan Large aperture ion-optical lens system
FR2644930B1 (fr) * 1989-03-21 1996-04-26 Cameca Lentille electromagnetique composite a focale variable
US4962309A (en) * 1989-08-21 1990-10-09 Rockwell International Corporation Magnetic optics adaptive technique
DE4105121A1 (de) * 1991-02-19 1992-08-20 Siemens Ag Teilchenoptische einheit zur abbildung eines linienfoermigen objektes

Also Published As

Publication number Publication date
JP4023556B2 (ja) 2007-12-19
EP0920709B1 (de) 2000-03-01
DE19634456A1 (de) 1998-03-05
JP2007280966A (ja) 2007-10-25
JP2000517095A (ja) 2000-12-19
US6414319B1 (en) 2002-07-02
WO1998009313A1 (de) 1998-03-05
DE59701195D1 (de) 2000-04-06
EP0920709A1 (de) 1999-06-09

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