ES2139720T3 - Procedimiento de deposito de una capa a base de nitruro de titanio sobre un substrato transparente. - Google Patents
Procedimiento de deposito de una capa a base de nitruro de titanio sobre un substrato transparente.Info
- Publication number
- ES2139720T3 ES2139720T3 ES94401845T ES94401845T ES2139720T3 ES 2139720 T3 ES2139720 T3 ES 2139720T3 ES 94401845 T ES94401845 T ES 94401845T ES 94401845 T ES94401845 T ES 94401845T ES 2139720 T3 ES2139720 T3 ES 2139720T3
- Authority
- ES
- Spain
- Prior art keywords
- transparent substrate
- titanium nitride
- based layer
- nitride based
- deposit procedure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/225—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3441—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising carbon, a carbide or oxycarbide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/28—Other inorganic materials
- C03C2217/281—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/152—Deposition methods from the vapour phase by cvd
Abstract
LA INVENCION SE REFIERE A UN PROCESO DE DEPOSICION POR PIROLISIS EN FASE GASEOSA DE UNA CAPA A BASE DE NITRURO O OXINITRURO METALICO, PARTICULARMENTE DE NITRURO O OXINITRURO DE TITANIO, SOBRE UN SUSTRATO TRANSPARENTE, PARTICULARMENTE VIDRIO, CARACTERIZADO EN QUE CONSISTE EN PONER SIMULTANEAMENTE EN CONTACTO CON EL SUSTRATO LLEVADO A ALTA TEMPERATURA AL MENOS UN PRECURSOR METALICO Y AL MENOS UN PRECURSOR NITROGENADO EN FORMA DE AMINA.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9309916A FR2708924B1 (fr) | 1993-08-12 | 1993-08-12 | Procédé de dépôt d'une couche de nitrure métallique sur un substrat transparent. |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2139720T3 true ES2139720T3 (es) | 2000-02-16 |
Family
ID=9450155
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES99107159T Expired - Lifetime ES2265170T3 (es) | 1993-08-12 | 1994-08-11 | Procedimiento de deposito de una capa de nitruro metalico sobre un sustrato transparente. |
ES94401845T Expired - Lifetime ES2139720T3 (es) | 1993-08-12 | 1994-08-11 | Procedimiento de deposito de una capa a base de nitruro de titanio sobre un substrato transparente. |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES99107159T Expired - Lifetime ES2265170T3 (es) | 1993-08-12 | 1994-08-11 | Procedimiento de deposito de una capa de nitruro metalico sobre un sustrato transparente. |
Country Status (7)
Country | Link |
---|---|
US (1) | US5618579A (es) |
EP (2) | EP0638527B1 (es) |
JP (2) | JP3833726B2 (es) |
DE (2) | DE69421467T2 (es) |
ES (2) | ES2265170T3 (es) |
FR (1) | FR2708924B1 (es) |
PT (2) | PT933340E (es) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2727107B1 (fr) | 1994-11-21 | 1996-12-27 | Saint Gobain Vitrage | Vitrage muni d'au moins une couche mince et son procede d'obtention |
FR2738813B1 (fr) * | 1995-09-15 | 1997-10-17 | Saint Gobain Vitrage | Substrat a revetement photo-catalytique |
FR2744117B1 (fr) * | 1996-01-11 | 1998-04-03 | Saint Gobain Vitrage | Vitrage avec couches reflechissantes et son procede de fabrication |
FR2752235B3 (fr) * | 1996-08-07 | 1998-08-28 | Saint Gobain Vitrage | Substrat verrier muni d'une couche reflechissante |
FR2748743B1 (fr) * | 1996-05-14 | 1998-06-19 | Saint Gobain Vitrage | Vitrage a revetement antireflet |
TW415922B (en) * | 1996-06-11 | 2000-12-21 | Asahi Glass Co Ltd | Light absorptive anti-reflector and method for manufacturing the same |
US5980977A (en) * | 1996-12-09 | 1999-11-09 | Pinnacle Research Institute, Inc. | Method of producing high surface area metal oxynitrides as substrates in electrical energy storage |
FR2757151B1 (fr) | 1996-12-12 | 1999-01-08 | Saint Gobain Vitrage | Vitrage comprenant un substrat muni d'un empilement de couches minces pour la protection solaire et/ou l'isolation thermique |
FR2759362B1 (fr) * | 1997-02-10 | 1999-03-12 | Saint Gobain Vitrage | Substrat transparent muni d'au moins une couche mince a base de nitrure ou d'oxynitrure de silicium et son procede d'obtention |
US6027766A (en) | 1997-03-14 | 2000-02-22 | Ppg Industries Ohio, Inc. | Photocatalytically-activated self-cleaning article and method of making same |
US7096692B2 (en) * | 1997-03-14 | 2006-08-29 | Ppg Industries Ohio, Inc. | Visible-light-responsive photoactive coating, coated article, and method of making same |
US5935648A (en) * | 1997-03-28 | 1999-08-10 | The United States Of America As Represented By The Secretary Of The Air Force | High surface area molybdenum nitride electrodes |
FR2766817B1 (fr) * | 1997-07-31 | 1999-08-27 | Saint Gobain Vitrage | Substrat transparent muni d'au moins une couche reflechissante et son procede d'obtention |
FR2774085B3 (fr) | 1998-01-26 | 2000-02-25 | Saint Gobain Vitrage | Procede de fusion et d'affinage de matieres vitrifiables |
CA2289868A1 (en) * | 1998-11-18 | 2000-05-18 | Koichi Sakaguchi | Heat-reflecting glass and double-glazing unit using the same |
EP1013619A1 (fr) * | 1998-12-22 | 2000-06-28 | Glaverbel | Substrat en verre coloré portant un revêtement |
FR2793889B1 (fr) * | 1999-05-20 | 2002-06-28 | Saint Gobain Vitrage | Substrat transparent a revetement anti-reflets |
FR2800731B1 (fr) | 1999-11-05 | 2002-01-18 | Saint Gobain Vitrage | Substrat transparent muni d'une couche en derive de silicium |
US6413579B1 (en) | 2000-01-27 | 2002-07-02 | Libbey-Owens-Ford Co. | Temperature control of CVD method for reduced haze |
FR2806014B1 (fr) * | 2000-03-08 | 2002-09-20 | Saint Gobain Vitrage | Substrat a revetement photocatalytique et/ou hydrophile |
EP1152066A1 (en) * | 2000-05-05 | 2001-11-07 | Ingersoll-Rand Company | Coloured metal nitride films and process of manufacturing |
JP4358492B2 (ja) * | 2002-09-25 | 2009-11-04 | レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | 熱化学気相成長法によるシリコン窒化物膜またはシリコンオキシ窒化物膜の製造方法 |
EP1834933A4 (en) * | 2004-11-19 | 2009-04-01 | Nippon Sheet Glass Co Ltd | PROCESS FOR MANUFACTURING GLASS PLATE WITH THIN FILM |
JP4416044B1 (ja) * | 2008-10-07 | 2010-02-17 | 住友電気工業株式会社 | p型窒化ガリウム系半導体を作製する方法、窒化物系半導体素子を作製する方法、及びエピタキシャルウエハを作製する方法 |
DE102009037183B4 (de) | 2009-08-12 | 2012-03-22 | Bayerische Motoren Werke Aktiengesellschaft | Verfahren zur Herstellung eines Formteils, insbesondere eines Bedienteils für den Fahrgastraum eines Kraftfahrzeugs |
US9382269B2 (en) | 2013-09-27 | 2016-07-05 | Voltaix, Llc | Halogen free syntheses of aminosilanes by catalytic dehydrogenative coupling |
EP3194477A4 (en) | 2014-09-15 | 2018-05-30 | Saint-Gobain Performance Plastics Corporation | Optical film including an infrared absorption layer |
US10571610B2 (en) | 2014-11-21 | 2020-02-25 | Saint-Gobain Performance Plastics Corporation | Infra-red control optical films having metal nitride between encapsulating layers containing oxide |
US9777025B2 (en) | 2015-03-30 | 2017-10-03 | L'Air Liquide, Société pour l'Etude et l'Exploitation des Procédés Georges Claude | Si-containing film forming precursors and methods of using the same |
US11124876B2 (en) | 2015-03-30 | 2021-09-21 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Si-containing film forming precursors and methods of using the same |
TWI659118B (zh) * | 2018-06-06 | 2019-05-11 | 國立中興大學 | Solar absorption device |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3615271A (en) * | 1970-01-28 | 1971-10-26 | Du Pont | Preparation of titanium carbonitride |
US4524718A (en) * | 1982-11-22 | 1985-06-25 | Gordon Roy G | Reactor for continuous coating of glass |
JPS6270208A (ja) * | 1985-09-25 | 1987-03-31 | Toray Ind Inc | 窒化チタン組成物の製造方法 |
BR9005414A (pt) * | 1989-02-21 | 1991-08-06 | Libbey Owens Ford Co | Artigo de vidro revestido,processo para preparacao de artigos de vidro revestidos,processo para deposito de vapor quimico e vidraca para janelas arquitetonicas e automotivas |
JPH0723235B2 (ja) * | 1989-02-23 | 1995-03-15 | 旭硝子株式会社 | 熱線反射物品 |
US5176893A (en) * | 1989-10-02 | 1993-01-05 | Phillips Petroleum Company | Silicon nitride products and method for their production |
US5139825A (en) * | 1989-11-30 | 1992-08-18 | President And Fellows Of Harvard College | Process for chemical vapor deposition of transition metal nitrides |
US5087593A (en) * | 1990-12-10 | 1992-02-11 | Ford Motor Company | Preparation of titanium nitride from organometallic precursors |
FR2677639B1 (fr) | 1991-06-14 | 1994-02-25 | Saint Gobain Vitrage Internal | Technique de formation par pyrolyse en voie gazeuse d'un revetement essentiellement a base d'oxygene et de silicium. |
GB9121581D0 (en) * | 1991-10-11 | 1991-11-27 | Caradon Everest Ltd | Fire resistant glass |
US5227334A (en) * | 1991-10-31 | 1993-07-13 | Micron Technology, Inc. | LPCVD process for depositing titanium nitride (tin) films and silicon substrates produced thereby |
EP0546670B2 (en) * | 1991-12-13 | 2000-11-08 | Ford Motor Company Limited | Metal nitride films |
US5194642A (en) | 1992-01-24 | 1993-03-16 | Ford Motor Company | Metallo-organic precursors to titanium nitride |
US5194564A (en) | 1992-06-18 | 1993-03-16 | General Electric Company | Phosphine oxide substituted polycarbonate |
-
1993
- 1993-08-12 FR FR9309916A patent/FR2708924B1/fr not_active Expired - Lifetime
-
1994
- 1994-08-11 PT PT99107159T patent/PT933340E/pt unknown
- 1994-08-11 ES ES99107159T patent/ES2265170T3/es not_active Expired - Lifetime
- 1994-08-11 ES ES94401845T patent/ES2139720T3/es not_active Expired - Lifetime
- 1994-08-11 DE DE69421467T patent/DE69421467T2/de not_active Expired - Lifetime
- 1994-08-11 EP EP94401845A patent/EP0638527B1/fr not_active Expired - Lifetime
- 1994-08-11 DE DE69434751T patent/DE69434751T2/de not_active Expired - Lifetime
- 1994-08-11 PT PT94401845T patent/PT638527E/pt unknown
- 1994-08-11 EP EP99107159A patent/EP0933340B1/fr not_active Expired - Lifetime
- 1994-08-12 JP JP19042894A patent/JP3833726B2/ja not_active Expired - Fee Related
- 1994-08-12 US US08/288,801 patent/US5618579A/en not_active Expired - Lifetime
-
2006
- 2006-03-06 JP JP2006060153A patent/JP4468909B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0933340A3 (fr) | 1999-08-25 |
JP4468909B2 (ja) | 2010-05-26 |
FR2708924A1 (fr) | 1995-02-17 |
JP2006206435A (ja) | 2006-08-10 |
DE69434751T2 (de) | 2007-04-26 |
US5618579A (en) | 1997-04-08 |
EP0933340A2 (fr) | 1999-08-04 |
DE69421467D1 (de) | 1999-12-09 |
JPH07187713A (ja) | 1995-07-25 |
EP0933340B1 (fr) | 2006-05-31 |
EP0638527A1 (fr) | 1995-02-15 |
FR2708924B1 (fr) | 1995-10-20 |
ES2265170T3 (es) | 2007-02-01 |
DE69434751D1 (de) | 2006-07-06 |
PT638527E (pt) | 2000-04-28 |
DE69421467T2 (de) | 2000-05-11 |
EP0638527B1 (fr) | 1999-11-03 |
JP3833726B2 (ja) | 2006-10-18 |
PT933340E (pt) | 2006-09-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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