ES2114732T3 - Valvula piezoelectrica de control de fluido. - Google Patents

Valvula piezoelectrica de control de fluido.

Info

Publication number
ES2114732T3
ES2114732T3 ES95902195T ES95902195T ES2114732T3 ES 2114732 T3 ES2114732 T3 ES 2114732T3 ES 95902195 T ES95902195 T ES 95902195T ES 95902195 T ES95902195 T ES 95902195T ES 2114732 T3 ES2114732 T3 ES 2114732T3
Authority
ES
Spain
Prior art keywords
cantilever spring
measurement element
valve
measurement
valves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES95902195T
Other languages
English (en)
Inventor
Shunso Frank Watanabe
Steven James Eckert
Gerald H Engelman
Neil Thomas Dionesotes
Robert Collins Collins
Steven David Bernstein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ford Motor Co
Raytheon Co
Original Assignee
Ford Motor Co
Raytheon Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ford Motor Co, Raytheon Co filed Critical Ford Motor Co
Application granted granted Critical
Publication of ES2114732T3 publication Critical patent/ES2114732T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/005—Piezoelectric benders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60G—VEHICLE SUSPENSION ARRANGEMENTS
    • B60G17/00—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load
    • B60G17/015—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements
    • B60G17/019—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements characterised by the type of sensor or the arrangement thereof
    • B60G17/01941—Resilient suspensions having means for adjusting the spring or vibration-damper characteristics, for regulating the distance between a supporting surface and a sprung part of vehicle or for locking suspension during use to meet varying vehicular or surface conditions, e.g. due to speed or load the regulating means comprising electric or electronic elements characterised by the type of sensor or the arrangement thereof characterised by the use of piezoelectric elements, e.g. sensors or actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60T—VEHICLE BRAKE CONTROL SYSTEMS OR PARTS THEREOF; BRAKE CONTROL SYSTEMS OR PARTS THEREOF, IN GENERAL; ARRANGEMENT OF BRAKING ELEMENTS ON VEHICLES IN GENERAL; PORTABLE DEVICES FOR PREVENTING UNWANTED MOVEMENT OF VEHICLES; VEHICLE MODIFICATIONS TO FACILITATE COOLING OF BRAKES
    • B60T8/00—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force
    • B60T8/32—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration
    • B60T8/34—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition
    • B60T8/36—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition including a pilot valve responding to an electromagnetic force
    • B60T8/3615—Electromagnetic valves specially adapted for anti-lock brake and traction control systems
    • B60T8/363—Electromagnetic valves specially adapted for anti-lock brake and traction control systems in hydraulic systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60T—VEHICLE BRAKE CONTROL SYSTEMS OR PARTS THEREOF; BRAKE CONTROL SYSTEMS OR PARTS THEREOF, IN GENERAL; ARRANGEMENT OF BRAKING ELEMENTS ON VEHICLES IN GENERAL; PORTABLE DEVICES FOR PREVENTING UNWANTED MOVEMENT OF VEHICLES; VEHICLE MODIFICATIONS TO FACILITATE COOLING OF BRAKES
    • B60T8/00—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force
    • B60T8/32—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration
    • B60T8/34—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition
    • B60T8/36—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition including a pilot valve responding to an electromagnetic force
    • B60T8/3615—Electromagnetic valves specially adapted for anti-lock brake and traction control systems
    • B60T8/3655—Continuously controlled electromagnetic valves
    • B60T8/366—Valve details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60T—VEHICLE BRAKE CONTROL SYSTEMS OR PARTS THEREOF; BRAKE CONTROL SYSTEMS OR PARTS THEREOF, IN GENERAL; ARRANGEMENT OF BRAKING ELEMENTS ON VEHICLES IN GENERAL; PORTABLE DEVICES FOR PREVENTING UNWANTED MOVEMENT OF VEHICLES; VEHICLE MODIFICATIONS TO FACILITATE COOLING OF BRAKES
    • B60T8/00—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force
    • B60T8/32—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration
    • B60T8/34—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition
    • B60T8/36—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition including a pilot valve responding to an electromagnetic force
    • B60T8/3615—Electromagnetic valves specially adapted for anti-lock brake and traction control systems
    • B60T8/369—Valves using piezoelectric elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H61/00—Control functions within control units of change-speed- or reversing-gearings for conveying rotary motion ; Control of exclusively fluid gearing, friction gearing, gearings with endless flexible members or other particular types of gearing
    • F16H61/02—Control functions within control units of change-speed- or reversing-gearings for conveying rotary motion ; Control of exclusively fluid gearing, friction gearing, gearings with endless flexible members or other particular types of gearing characterised by the signals used
    • F16H61/0202—Control functions within control units of change-speed- or reversing-gearings for conveying rotary motion ; Control of exclusively fluid gearing, friction gearing, gearings with endless flexible members or other particular types of gearing characterised by the signals used the signals being electric
    • F16H61/0251—Elements specially adapted for electric control units, e.g. valves for converting electrical signals to fluid signals
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F16K99/0007—Lift valves of cantilever type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M2200/00—Details of fuel-injection apparatus, not otherwise provided for
    • F02M2200/50—Arrangements of springs for valves used in fuel injectors or fuel injection pumps
    • F02M2200/502—Springs biasing the valve member to the open position
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/009—Fluid power devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86718—Dividing into parallel flow paths with recombining
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87169—Supply and exhaust
    • Y10T137/87217—Motor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87708—With common valve operator
    • Y10T137/87772—With electrical actuation

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • Fluid Mechanics (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Transportation (AREA)
  • Theoretical Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Electrically Driven Valve-Operating Means (AREA)

Abstract

UNA VALVULA PIEZOELECTRICA DE CONTROL DE FLUIDO INCLUYE UN ELEMENTO DE MEDICION SUPERIOR (100) Y UN ELEMENTO DE MEDICION INFERIOR (116). CADA ELEMENTO DE MEDICION (100, 116) TIENE UN EXTREMO ANCLADO FIJADO A LAS PAREDES DE UNA CAMARA (16). EL EXTREMO ANCLADO DEL ELEMENTO DE MEDICION SUPERIOR (100) ESTA PROVISTO CON UN CANAL DE ENTRADA (122) Y EL DEL ELEMENTO DE MEDICION INFERIOR (116) CON UN CANAL DE SALIDA (123). ENTRE CADA ELEMENTO DE MEDICION (100, 116) HAY PROVISTO UN ORIFICIO DE MEDICION (124, 126). UNA VALVULA DE RESORTE EN VOLADIZO (128, 130) SE PUEDE SITUAR EN EL ORIFICIO DE MEDICION ASOCIADO (124, 126). CADA VALVULA DE RESORTE EN VOLADIZO (128, 130) ES CONTINUAMENTE DESPLAZABLE ENTRE UNA POSICION ABIERTA Y UNA POSICION NORMALMENTE CERRADA. CADA UNA DE LAS VALVULAS DE RESORTE EN VOLADIZO (128, 130) TIENE BORDES DE MEDICION AFILADOS (131, 133) QUE COOPERAN CON LOS ELEMENTOS DE MEDICION (100, 116) PARA PROPORCIONAR LOS ORIFICIOS DE MEDICION ASOCIADOS (124, 126), LOS BORDES (131, 133)BLOQUEANDO EL FLUIDO CUANDO SE CIERRAN LAS VALVULAS DE RESORTE EN VOLADIZO (128, 130). SITUADO ENTRE LAS VALVULAS DE RESORTE EN VOLADIZO (128, 130) HAY UN POLIMORFO (132) QUE ESTA EN COMUNICACION OPERATIVA CON LOS ELEMENTOS DE MEDICION (110, 116). CUANDO SE APLICA UNA DIFERENCIA DE POTENCIA, EL POLIMORFO (132) ES DESVIADO Y ABRE UNA DE LAS VALVULAS DE RESORTE EN VOLADIZO (128, 130). CADA VALVULA DE RESORTE EN VOLADIZO (128, 130) TIENE TRES LADOS PARA QUE CADA VALVULA (128, 130) ACTUE DE FORMA EFECTIVA COMO UNA ALETA DE UNA SOLA PIEZA.
ES95902195T 1993-12-06 1994-11-30 Valvula piezoelectrica de control de fluido. Expired - Lifetime ES2114732T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/163,212 US5445185A (en) 1993-04-05 1993-12-06 Piezoelectric fluid control valve

Publications (1)

Publication Number Publication Date
ES2114732T3 true ES2114732T3 (es) 1998-06-01

Family

ID=22588959

Family Applications (1)

Application Number Title Priority Date Filing Date
ES95902195T Expired - Lifetime ES2114732T3 (es) 1993-12-06 1994-11-30 Valvula piezoelectrica de control de fluido.

Country Status (6)

Country Link
US (2) US5445185A (es)
EP (1) EP0733006B1 (es)
JP (1) JPH09507899A (es)
DE (1) DE69408166T2 (es)
ES (1) ES2114732T3 (es)
WO (1) WO1995015873A1 (es)

Families Citing this family (59)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6230501B1 (en) 1994-04-14 2001-05-15 Promxd Technology, Inc. Ergonomic systems and methods providing intelligent adaptive surfaces and temperature control
GB9610819D0 (en) * 1996-05-22 1996-07-31 Lucas Ind Plc Valve arrangement
US6533366B1 (en) 1996-05-29 2003-03-18 Kelsey-Hayes Company Vehicle hydraulic braking systems incorporating micro-machined technology
US6019437A (en) * 1996-05-29 2000-02-01 Kelsey-Hayes Company Vehicle hydraulic braking systems incorporating micro-machined technology
DE19712855A1 (de) * 1997-03-27 1998-10-01 Itt Mfg Enterprises Inc Piezoelektrisch betätigtes Fluidventil
DE19741816C1 (de) * 1997-09-23 2000-02-17 Inst Mikrotechnik Mainz Gmbh Mikroventil
US5964242A (en) * 1998-01-23 1999-10-12 Aesop, Inc. Method of and apparatus for substance processing with small opening gates actuated and controlled by large displacement members having fine surface finishing
US6523560B1 (en) 1998-09-03 2003-02-25 General Electric Corporation Microvalve with pressure equalization
US7011378B2 (en) 1998-09-03 2006-03-14 Ge Novasensor, Inc. Proportional micromechanical valve
AU5905499A (en) 1998-09-03 2000-03-27 Lucas Novasensor Proportional micromechanical device
DE19849700C2 (de) * 1998-10-28 2001-06-28 Festo Ag & Co Mikroventilanordnung
US6540203B1 (en) 1999-03-22 2003-04-01 Kelsey-Hayes Company Pilot operated microvalve device
US6170526B1 (en) 1999-05-18 2001-01-09 Caterpillar Inc. Piezoelectric actuated poppet valve to modulate pilot pressures and control main valve activation
US6302495B1 (en) * 1999-06-04 2001-10-16 Ge Harris Railway Electronics, Llc Railway car braking system including piezoelectric pilot valve and associated methods
US6293632B1 (en) 1999-06-11 2001-09-25 John F. Grote Vehicular brake-by-wire system
DE19931990C1 (de) * 1999-07-09 2001-01-11 Festo Ag & Co Elektroventil
US6357669B1 (en) 1999-12-22 2002-03-19 Visteon Global Tech., Inc. Nozzle
US6394369B2 (en) 1999-12-22 2002-05-28 Visteon Global Tech., Inc. Nozzle
US6338439B1 (en) 1999-12-22 2002-01-15 Visteon Global Tech., Inc. Nozzle assembly
US6315221B1 (en) 1999-12-22 2001-11-13 Visteon Global Tech., Inc. Nozzle
US6328226B1 (en) 1999-12-22 2001-12-11 Visteon Global Technologies, Inc. Nozzle assembly
US6318642B1 (en) 1999-12-22 2001-11-20 Visteon Global Tech., Inc Nozzle assembly
US6845962B1 (en) * 2000-03-22 2005-01-25 Kelsey-Hayes Company Thermally actuated microvalve device
US6694998B1 (en) 2000-03-22 2004-02-24 Kelsey-Hayes Company Micromachined structure usable in pressure regulating microvalve and proportional microvalve
US6494804B1 (en) 2000-06-20 2002-12-17 Kelsey-Hayes Company Microvalve for electronically controlled transmission
US6505811B1 (en) 2000-06-27 2003-01-14 Kelsey-Hayes Company High-pressure fluid control valve assembly having a microvalve device attached to fluid distributing substrate
US6589229B1 (en) 2000-07-31 2003-07-08 Becton, Dickinson And Company Wearable, self-contained drug infusion device
US6581640B1 (en) 2000-08-16 2003-06-24 Kelsey-Hayes Company Laminated manifold for microvalve
JP5142443B2 (ja) * 2000-09-27 2013-02-13 コンティネンタル・テーベス・アクチエンゲゼルシヤフト・ウント・コンパニー・オッフェネ・ハンデルスゲゼルシヤフト 電子制御可能なブレーキ操作システムを制御する方法と制御システム
US6634395B1 (en) 2002-04-19 2003-10-21 Husky Corporation Double poppet valve for precise shut off of fuel dispensing nozzle
SE0301637D0 (sv) * 2003-06-06 2003-06-06 Wouter Van Der Wijngaart Royal a micromachined knife gate valve for high-flow pressure regulation applications
US20070251586A1 (en) * 2003-11-24 2007-11-01 Fuller Edward N Electro-pneumatic control valve with microvalve pilot
US8011388B2 (en) * 2003-11-24 2011-09-06 Microstaq, INC Thermally actuated microvalve with multiple fluid ports
KR20060109959A (ko) * 2003-11-24 2006-10-23 알루미나 마이크로 엘엘씨 가변형 변위 압축기 제어용 마이크로밸브 장치
WO2005084211A2 (en) * 2004-02-27 2005-09-15 Alumina Micro Llc Hybrid micro/macro plate valve
CN1942222B (zh) * 2004-03-05 2011-08-31 麦克罗斯塔克公司 用于形成微阀的选择性接合
US7156365B2 (en) * 2004-07-27 2007-01-02 Kelsey-Hayes Company Method of controlling microvalve actuator
KR20070092328A (ko) * 2005-01-14 2007-09-12 알루미나 마이크로 엘엘씨 가변용량형 압축기를 제어하기 위한 시스템 및 방법
DE102007009288A1 (de) * 2006-11-16 2008-05-21 Bürkert Werke GmbH & Co. KG Ventilvorrichtung zur Unterbrechung der Gaszufuhr einer Versorgungsleitung
CN101617155B (zh) * 2006-12-15 2012-03-21 麦克罗斯塔克公司 微阀装置
DE112008000862T5 (de) 2007-03-30 2010-03-11 Microstaq, Inc., Austin Vorgesteuertes Mikroschieberventil
WO2008121365A1 (en) 2007-03-31 2008-10-09 Microstaq, Inc. Pilot operated spool valve
JP4946763B2 (ja) * 2007-10-01 2012-06-06 ブラザー工業株式会社 屈曲検出装置
US8662468B2 (en) 2008-08-09 2014-03-04 Dunan Microstaq, Inc. Microvalve device
US8113482B2 (en) 2008-08-12 2012-02-14 DunAn Microstaq Microvalve device with improved fluid routing
WO2010065804A2 (en) 2008-12-06 2010-06-10 Microstaq, Inc. Fluid flow control assembly
WO2010117874A2 (en) 2009-04-05 2010-10-14 Microstaq, Inc. Method and structure for optimizing heat exchanger performance
WO2011022267A2 (en) 2009-08-17 2011-02-24 Microstaq, Inc. Micromachined device and control method
US20110073188A1 (en) * 2009-09-30 2011-03-31 Marcus Michael A Microvalve for control of compressed fluids
WO2011094302A2 (en) 2010-01-28 2011-08-04 Microstaq, Inc. Process for reconditioning semiconductor surface to facilitate bonding
US9006844B2 (en) 2010-01-28 2015-04-14 Dunan Microstaq, Inc. Process and structure for high temperature selective fusion bonding
US8996141B1 (en) 2010-08-26 2015-03-31 Dunan Microstaq, Inc. Adaptive predictive functional controller
DE102010051743B4 (de) 2010-11-19 2022-09-01 C. Miethke Gmbh & Co. Kg Programmierbares Hydrocephalusventil
US8925793B2 (en) 2012-01-05 2015-01-06 Dunan Microstaq, Inc. Method for making a solder joint
US9140613B2 (en) 2012-03-16 2015-09-22 Zhejiang Dunan Hetian Metal Co., Ltd. Superheat sensor
DE102012006658A1 (de) * 2012-04-03 2013-10-10 Burkhard Büstgens Mikro-Pilotventil
US9188375B2 (en) 2013-12-04 2015-11-17 Zhejiang Dunan Hetian Metal Co., Ltd. Control element and check valve assembly
TWI612246B (zh) * 2016-09-05 2018-01-21 研能科技股份有限公司 流體控制裝置之製造方法
TWI599868B (zh) * 2016-09-05 2017-09-21 研能科技股份有限公司 流體控制裝置之製造方法

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB844742A (en) * 1955-06-29 1960-08-17 Elliott Brothers London Ltd Improvements in or relating to valve mechanisms for controlling fluids
DE1226843B (de) * 1956-08-25 1966-10-13 Elliott Brothers London Ltd Ventilaggregat fuer hydraulische Anlagen
US4966037A (en) * 1983-09-12 1990-10-30 Honeywell Inc. Cantilever semiconductor device
JPS6081527A (ja) * 1983-10-07 1985-05-09 Hitachi Ltd 制動装置
US4585209A (en) * 1983-10-27 1986-04-29 Harry E. Aine Miniature valve and method of making same
JPS60139563A (ja) * 1983-12-28 1985-07-24 Jidosha Kiki Co Ltd ブレ−キ装置
JPS60222672A (ja) * 1984-04-18 1985-11-07 Nec Corp 弁素子
US4617952A (en) * 1984-07-31 1986-10-21 Yamatake-Honeywell Co. Limited Switching valve and an electro-pneumatic pressure converter utilizing the same
DE3545800A1 (de) * 1984-12-25 1986-07-10 Nippon Soken, Inc., Nishio, Aichi Steuervorrichtung fuer fahrzeugbremsen
JPS61268558A (ja) * 1985-05-22 1986-11-28 Nippon Soken Inc 車両用ブレ−キ装置のアンチスキツド・油圧モジユレ−タ
DE3526559A1 (de) * 1985-07-25 1987-01-29 Wabco Westinghouse Fahrzeug Antiblockiersystem
DE3608550A1 (de) * 1986-03-14 1987-09-17 Festo Kg Piezo-elektrisch betaetigbares ventil
JPS63106475A (ja) * 1986-10-23 1988-05-11 Agency Of Ind Science & Technol 圧電素子を用いた流体制御弁
CA1319331C (en) * 1987-04-17 1993-06-22 Kouhei Yamatoh Brake device
DE3719320A1 (de) * 1987-06-10 1988-12-29 Pfister Gmbh Verfahren und einrichtung zum bestimmen der tatsaechlichen geschwindigkeit eines fahrzeuges
DE3884336T2 (de) * 1987-10-19 1994-01-20 Ford Werke Ag Silikon-Ventileinrichtung zur Kontrolle des Durchflusses.
US4768751A (en) * 1987-10-19 1988-09-06 Ford Motor Company Silicon micromachined non-elastic flow valves
DE3814150A1 (de) * 1988-04-27 1989-11-09 Draegerwerk Ag Ventilanordnung aus mikrostrukturierten komponenten
DE3919876A1 (de) * 1989-06-19 1990-12-20 Bosch Gmbh Robert Mikroventil
US5067778A (en) * 1990-11-19 1991-11-26 Testardi David A High performance anti-lock brake system for original equipment and after-market applications
US5217283A (en) * 1991-09-25 1993-06-08 Ford Motor Company Integral anti-lock brake/traction control system
US5309943A (en) * 1992-12-07 1994-05-10 Ford Motor Company Micro-valve and method of manufacturing
US5267589A (en) * 1993-04-05 1993-12-07 Ford Motor Company Piezoelectric pressure control valve

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EP0733006A1 (en) 1996-09-25
DE69408166D1 (de) 1998-02-26
US5566703A (en) 1996-10-22
WO1995015873A1 (en) 1995-06-15
US5445185A (en) 1995-08-29
JPH09507899A (ja) 1997-08-12
DE69408166T2 (de) 1998-07-30
EP0733006B1 (en) 1998-01-21

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