ES2106757T3 - Procedimiento para la fabricacion de un dispositivo optico integrado alargado, con al menos un canal en su interior. - Google Patents

Procedimiento para la fabricacion de un dispositivo optico integrado alargado, con al menos un canal en su interior.

Info

Publication number
ES2106757T3
ES2106757T3 ES91119228T ES91119228T ES2106757T3 ES 2106757 T3 ES2106757 T3 ES 2106757T3 ES 91119228 T ES91119228 T ES 91119228T ES 91119228 T ES91119228 T ES 91119228T ES 2106757 T3 ES2106757 T3 ES 2106757T3
Authority
ES
Spain
Prior art keywords
procedure
manufacture
optical device
integrated optical
channel inside
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES91119228T
Other languages
English (en)
Inventor
Venkata Adiseshaia Bhagavatula
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Application granted granted Critical
Publication of ES2106757T3 publication Critical patent/ES2106757T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

SE DESCRIBE UN METODO DE FABRICACION DE UN CANAL DE ONDAS OPTICAS PLANARES EN EL QUE UN ACTUADOR OPTICO PLANAR QUE ESTA DISEÑADO PARA FORMAR UNA CAÑA OPTICA PLANAR CON UNA SECCION TRANSVERSAL MENOR QUE EL ACTUADOR ORIGINAL, Y EN LA QUE LA PAUTA DEL CIRCUITO OPTICO ESTA CONSEGUIDO MEDIANTE TECNICAS LITOGRAFICAS. UNOS ACTUADORES DE FIBRA OPTICA PUEDEN SER INSERTADOS EN LAS RANURAS DEL SUSTRATO PARA FORMAR UN ACTUADOR OPTICO PLANAR-
ES91119228T 1990-12-10 1991-11-12 Procedimiento para la fabricacion de un dispositivo optico integrado alargado, con al menos un canal en su interior. Expired - Lifetime ES2106757T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/625,153 US5125946A (en) 1990-12-10 1990-12-10 Manufacturing method for planar optical waveguides

Publications (1)

Publication Number Publication Date
ES2106757T3 true ES2106757T3 (es) 1997-11-16

Family

ID=24504822

Family Applications (1)

Application Number Title Priority Date Filing Date
ES91119228T Expired - Lifetime ES2106757T3 (es) 1990-12-10 1991-11-12 Procedimiento para la fabricacion de un dispositivo optico integrado alargado, con al menos un canal en su interior.

Country Status (9)

Country Link
US (1) US5125946A (es)
EP (1) EP0490095B1 (es)
JP (1) JPH06342110A (es)
KR (1) KR100267123B1 (es)
AU (2) AU650922B2 (es)
CA (1) CA2053936A1 (es)
DE (1) DE69127680T2 (es)
ES (1) ES2106757T3 (es)
TW (1) TW200442B (es)

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* Cited by examiner, † Cited by third party
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GB9105436D0 (en) * 1991-03-14 1991-05-01 Bicc Plc An improved optical waveguide component
JPH04287010A (ja) * 1991-03-15 1992-10-12 Furukawa Electric Co Ltd:The 導波路型光切替器
US5200029A (en) * 1991-04-25 1993-04-06 At&T Bell Laboratories Method of making a planar optical amplifier
US5308656A (en) * 1991-07-16 1994-05-03 Adc Telecommunications, Inc. Electroformed mask and use therefore
US5253319A (en) * 1992-02-24 1993-10-12 Corning Incorporated Planar optical waveguides with planar optical elements
EP0631159A1 (de) * 1993-06-18 1994-12-28 Siemens Aktiengesellschaft Anordnung zur optischen Kopplung eines planaren optischen Wellenleiters und einer optischen Faser und Verfahren zur Herstellung eines für eine solche Anordnung geeigneten planaren Wellenleiters
AU3529295A (en) * 1994-09-23 1996-04-09 British Telecommunications Public Limited Company Planar waveguides
US5858051A (en) * 1995-05-08 1999-01-12 Toshiba Machine Co., Ltd. Method of manufacturing optical waveguide
US5703191A (en) * 1995-09-01 1997-12-30 Corning Incorporated Method for purifying polyalkylsiloxanes and the resulting products
US5879649A (en) * 1995-12-19 1999-03-09 Corning Incorporated Method for purifying polyalkylsiloxanes and the resulting products
US5798174A (en) * 1996-02-05 1998-08-25 Aep Industries, Inc. Biaxially and monoaxially oriented polypropylene cold seal release film
US5792549A (en) * 1996-05-30 1998-08-11 Aep Industries, Inc. Biaxially oriented polypropylene cold seal release films
US5909529A (en) * 1996-10-10 1999-06-01 Corning Incorporated Method of manufacturing planar gradient-index waveguide lenses
US6810178B2 (en) * 1998-12-04 2004-10-26 Cidra Corporation Large diameter optical waveguide having blazed grating therein
US6982996B1 (en) * 1999-12-06 2006-01-03 Weatherford/Lamb, Inc. Large diameter optical waveguide, grating, and laser
US6996316B2 (en) * 1999-09-20 2006-02-07 Cidra Corporation Large diameter D-shaped optical waveguide and coupler
US6594410B2 (en) 2000-08-26 2003-07-15 Cidra Corporation Wide range tunable optical filter
US7386204B1 (en) 2000-08-26 2008-06-10 Cidra Corporation Optical filter having a shaped filter function
US20040028336A1 (en) * 2001-09-04 2004-02-12 Feuer Mark D. Method for fabricating optical devices by assembling multiple wafers containing planar optical waveguides
JP4288841B2 (ja) * 2000-09-21 2009-07-01 ソニー株式会社 光バス部材の製造方法及び光バス装置
FR2816716B1 (fr) 2000-11-10 2003-10-31 Opsitech Optical System Chip Dispositif de transmission d'une onde optique dans une structure munie d'une fibre optique et procede pour sa fabrication
US7087179B2 (en) * 2000-12-11 2006-08-08 Applied Materials, Inc. Optical integrated circuits (ICs)
US20020163709A1 (en) * 2001-05-04 2002-11-07 Mirza Amir Raza Method and apparatus for detecting and latching the position of a MEMS moving member
US6947653B2 (en) * 2001-10-12 2005-09-20 Jds Uniphase Corporation Waveguide stress engineering and compatible passivation in planar lightwave circuits
US20030077060A1 (en) * 2001-10-23 2003-04-24 Datong Chen Planar lightwave circuit optical waveguide having a circular cross section
US20040005108A1 (en) * 2002-07-02 2004-01-08 Kjetil Johannessen Thermal compensation of waveguides by dual material core having negative thermo-optic coefficient inner core
US6987895B2 (en) * 2002-07-02 2006-01-17 Intel Corporation Thermal compensation of waveguides by dual material core having positive thermo-optic coefficient inner core
US7079740B2 (en) * 2004-03-12 2006-07-18 Applied Materials, Inc. Use of amorphous carbon film as a hardmask in the fabrication of optical waveguides
US7907801B2 (en) * 2007-01-17 2011-03-15 Ibiden Co., Ltd. Optical element, package substrate and device for optical communication
DE102009034532A1 (de) * 2009-07-23 2011-02-03 Msg Lithoglas Ag Verfahren zum Herstellen einer strukturierten Beschichtung auf einem Substrat, beschichtetes Substrat sowie Halbzeug mit einem beschichteten Substrat
US10185084B2 (en) 2016-02-23 2019-01-22 Corning Incorporated Layered glass structures
CN107922235A (zh) * 2015-08-21 2018-04-17 康宁股份有限公司 分层玻璃结构
US10094980B2 (en) * 2016-01-12 2018-10-09 King Saud University Three-dimensional space-division Y-splitter for multicore optical fibers

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Publication number Priority date Publication date Assignee Title
US3022541A (en) * 1960-02-05 1962-02-27 Phillips Petroleum Co Producing indicia in film by modification of film opacity
US3663194A (en) * 1970-05-25 1972-05-16 Ibm Method for making monolithic opto-electronic structure
US3794536A (en) * 1972-01-31 1974-02-26 Bell Telephone Labor Inc Dielectric circuit forming process
US3873339A (en) * 1972-03-30 1975-03-25 Corning Glass Works Method of forming optical waveguide circuit path
US3934061A (en) * 1972-03-30 1976-01-20 Corning Glass Works Method of forming planar optical waveguides
US3806223A (en) * 1972-03-30 1974-04-23 Corning Glass Works Planar optical waveguide
US4425146A (en) * 1979-12-17 1984-01-10 Nippon Telegraph & Telephone Public Corporation Method of making glass waveguide for optical circuit
US4504341A (en) * 1982-09-20 1985-03-12 Ppg Industries, Inc. Fabricating shaped laminated transparencies
JPS59192225A (ja) * 1983-04-15 1984-10-31 Hitachi Ltd 光回路
JPS60256101A (ja) * 1984-06-01 1985-12-17 Hitachi Ltd ガラス部材への光学素子形成方法
FR2574950B1 (fr) * 1984-12-18 1987-09-25 Corning Glass Works Composants optiques integres en verre et leur fabrication
JPS62204207A (ja) * 1986-03-05 1987-09-08 Sumitomo Electric Ind Ltd 石英系平板光回路の製造方法
EP0271095A3 (en) * 1986-12-12 1989-07-12 Nippon Steel Corporation Method for the manufacture of formed products from powders, foils, or fine wires
JPS63206709A (ja) * 1987-02-23 1988-08-26 Nippon Sheet Glass Co Ltd 埋込み型シングルモ−ド光導波路の製造方法
FR2623915B1 (fr) * 1987-11-26 1990-04-13 Corning Glass Works Procede de production d'un composant optique integre en verre comprenant des tranchees de positionnement et de fixation de fibres optiques en alignement avec des guides d'ondes et composants ainsi produits

Also Published As

Publication number Publication date
EP0490095A2 (en) 1992-06-17
AU7448094A (en) 1995-01-19
EP0490095A3 (en) 1992-09-02
AU650922B2 (en) 1994-07-07
CA2053936A1 (en) 1992-06-11
KR100267123B1 (ko) 2000-10-02
AU8834291A (en) 1992-06-11
DE69127680T2 (de) 1998-03-12
TW200442B (es) 1993-02-21
KR920013811A (ko) 1992-07-29
JPH06342110A (ja) 1994-12-13
AU668320B2 (en) 1996-04-26
DE69127680D1 (de) 1997-10-23
EP0490095B1 (en) 1997-09-17
US5125946A (en) 1992-06-30

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