ES2105131T3 - Dispositivo abrasivo. - Google Patents

Dispositivo abrasivo.

Info

Publication number
ES2105131T3
ES2105131T3 ES93309058T ES93309058T ES2105131T3 ES 2105131 T3 ES2105131 T3 ES 2105131T3 ES 93309058 T ES93309058 T ES 93309058T ES 93309058 T ES93309058 T ES 93309058T ES 2105131 T3 ES2105131 T3 ES 2105131T3
Authority
ES
Spain
Prior art keywords
abrasive
polishing
carrier
recesses
typically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES93309058T
Other languages
English (en)
Inventor
John Stirling Sexton
Derek Norman Wright
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
De Beers Industrial Diamond Division Pty Ltd
Original Assignee
De Beers Industrial Diamond Division Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by De Beers Industrial Diamond Division Pty Ltd filed Critical De Beers Industrial Diamond Division Pty Ltd
Application granted granted Critical
Publication of ES2105131T3 publication Critical patent/ES2105131T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/10Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with cooling provisions

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Power Steering Mechanism (AREA)

Abstract

EL DISPOSITIVO PULIDO ABRASIVO TIENE UN SOPORTE, NORMALMENTE A MODO DE CABEZA PULIDORA ROTATIVA (10) Y UNAS ALMOHADILLAS PULIDORAS ABRASIVAS (16) MONTADAS EN EL SOPORTE. CADA UNA DE LAS ALMOHADILLAS PULIDORAS (16) INCLUYE UN CUERPO ABRASIVO (18) FORMADO CON UN POLIMERO TERMOPLASTICO IMPREGNADO CON PARTICULA ABRASIVAS ULTRA-DURAS E INCLUYE UNA SUPERFICIE PULIDORA ABRASIVA PARA LLEVAR A CABO LA ACCION DE PULIDO ABRASIVA CUANDO SE UTILIZA. EL CUERPO ABRASIVO (18) TIENE UNA RED REGULAR DE RANURAS, NORMALMENTE UNOS CONDUCTOS TIPO CAPILAR ESTRECHOS FORMADOS DENTRO DEL MISMO QUE SE EXTIENDEN HASTA LA SUPERFICIE ABRASIVA. LAS RANURAS PROPORCIONAN UNA MEJOR REFRIGERACION DE LA CAPA ABRASIVA DURANTE LA OPERACION DE PULIDO.
ES93309058T 1992-11-13 1993-11-12 Dispositivo abrasivo. Expired - Lifetime ES2105131T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB929223826A GB9223826D0 (en) 1992-11-13 1992-11-13 Abrasive device

Publications (1)

Publication Number Publication Date
ES2105131T3 true ES2105131T3 (es) 1997-10-16

Family

ID=10725036

Family Applications (1)

Application Number Title Priority Date Filing Date
ES93309058T Expired - Lifetime ES2105131T3 (es) 1992-11-13 1993-11-12 Dispositivo abrasivo.

Country Status (12)

Country Link
US (1) US5454752A (es)
EP (1) EP0597723B1 (es)
JP (1) JPH06190733A (es)
CN (1) CN1080167C (es)
AT (1) ATE156054T1 (es)
AU (1) AU669573B2 (es)
CA (1) CA2102974A1 (es)
DE (1) DE69312641T2 (es)
ES (1) ES2105131T3 (es)
GB (1) GB9223826D0 (es)
TW (1) TW349455U (es)
ZA (1) ZA938428B (es)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3009565B2 (ja) * 1993-08-18 2000-02-14 洋 橋本 研削具
US5605493A (en) * 1994-04-19 1997-02-25 Clarke Industries, Inc. Stone polishing apparatus and method
JPH07314325A (ja) * 1994-05-20 1995-12-05 Nippon Seiko Kk 球体研磨装置
IT1269964B (it) 1994-06-29 1997-04-16 S E A Utensili Diamantati S P Utensile porta-inserti diamantati per macchine automatiche e manuali tipo calibratrici, levigatrici e lucidatrici per l'industria lapidea, ceramica e piastrelle
US5679067A (en) 1995-04-28 1997-10-21 Minnesota Mining And Manufacturing Company Molded abrasive brush
US5903951A (en) * 1995-11-16 1999-05-18 Minnesota Mining And Manufacturing Company Molded brush segment
WO1998016347A1 (fr) * 1996-10-15 1998-04-23 Nippon Steel Corporation Appareil ebarbeur pour tampon de polissage de substrat semi-conducteur, son procede de fabrication et procede de polissage chimico-mecanique au moyen dudit appareil ebarbeur
WO1998028108A1 (en) * 1996-12-20 1998-07-02 Unique Technology International Private Limited Manufacture of porous polishing pad
DE19707445A1 (de) * 1997-02-25 1998-08-27 Hilti Ag Topfförmige Schleifscheibe
US5944583A (en) * 1997-03-17 1999-08-31 International Business Machines Corporation Composite polish pad for CMP
US5865571A (en) * 1997-06-17 1999-02-02 Norton Company Non-metallic body cutting tools
JPH11267902A (ja) * 1998-03-23 1999-10-05 Hiroshi Hashimoto 超微細切刃付き工具及び超微細切刃付き加工具
JP3295888B2 (ja) * 1998-04-22 2002-06-24 株式会社藤森技術研究所 ケミカルマシンポリッシャの研磨盤用研磨ドレッサ
IT244194Y1 (it) * 1998-08-03 2002-03-07 Master Service S R L Spazzola per il trattamento superficiale di materiali
US6095902A (en) * 1998-09-23 2000-08-01 Rodel Holdings, Inc. Polyether-polyester polyurethane polishing pads and related methods
IT246526Y1 (it) * 1999-02-16 2002-04-09 Master Service S R L Spazzola per il trattamento superficiale di materiali
KR20000059931A (ko) * 1999-03-10 2000-10-16 황인길 화학적 기계적 연마 장비의 연마 헤드 구조
CN1312742C (zh) * 1999-03-30 2007-04-25 株式会社尼康 抛光垫、抛光机及制造半导体器件的方法
JP3843933B2 (ja) * 2002-02-07 2006-11-08 ソニー株式会社 研磨パッド、研磨装置および研磨方法
US7690970B2 (en) * 2007-01-19 2010-04-06 Epoxy-Tech, Inc. Abrasive preparation device with an improved abrasion element assembly
TW201016387A (en) * 2008-10-22 2010-05-01 jian-min Song CMP Pad Dressers with Hybridized abrasive surface and related methods
CH701596B1 (de) * 2009-08-11 2013-08-15 Meister Abrasives Ag Abrichtwerkzeug.
EP2486602B1 (de) * 2009-10-08 2013-01-16 Komax Holding AG Vorrichtung und Verfahren zum Entschichten von Solarmodulen
CN101934504A (zh) * 2010-08-11 2011-01-05 北京荣锋精密工具有限公司 新型陶瓷结合剂立方氮化硼研磨盘及其生产方法
CN101934505A (zh) * 2010-08-17 2011-01-05 何�轩 一种磨盘及设有该磨盘的高铁桥梁研磨机
CN102218711A (zh) * 2011-06-03 2011-10-19 福建万龙金刚石工具有限公司 一种自动磨金刚石磨盘
KR101092073B1 (ko) * 2011-10-05 2011-12-13 현주빈 연마팁이 일체화된 팁 고정홀더
US9387565B2 (en) * 2011-12-13 2016-07-12 Alderson (Nz) Limited Abrasive apparatus and components thereof
CN102658528A (zh) * 2012-02-24 2012-09-12 浙江工业大学 一种分级结构化复合弹性研抛盘
CN103013058B (zh) * 2012-12-04 2016-04-27 合肥杰事杰新材料股份有限公司 一种液晶聚合物/立方氮化硼母粒及其制备方法
US9149913B2 (en) 2012-12-31 2015-10-06 Saint-Gobain Abrasives, Inc. Abrasive article having shaped segments
CN103192325B (zh) * 2013-04-10 2015-07-15 大连理工大学 一种内冷却固结磨料研磨盘
SE540285C2 (en) * 2015-01-20 2018-05-22 Htc Sweden Ab System comprising a carrier disk and a floor grinding machine
CN108127578A (zh) * 2016-12-01 2018-06-08 侯家祥 一种水泥地坪、花岗石干磨地机磨块
CN107283285A (zh) * 2017-07-14 2017-10-24 合肥文胜新能源科技有限公司 一种光伏组件用抛光刷
CN109483418B (zh) * 2018-12-28 2023-11-17 西安增材制造国家研究院有限公司 金属基微量润滑砂轮及金属基微量润滑砂轮的制作方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2032362A (en) * 1934-04-23 1936-03-03 Carborundum Co Segmental grinding wheel
US2000772A (en) * 1934-09-24 1935-05-07 William H Mcgill Grindstone
US2225193A (en) * 1937-09-15 1940-12-17 Carborundum Co Abrasive wheel
US2188365A (en) * 1937-12-07 1940-01-30 Leon B Lent Grinding tool
US3386214A (en) * 1965-09-01 1968-06-04 Titan Abrasives Company Grinding disc
US3517466A (en) * 1969-07-18 1970-06-30 Ferro Corp Stone polishing wheel for contoured surfaces
FR2203301A5 (es) * 1972-10-18 1974-05-10 Lam Plan Sa
SU550278A1 (ru) * 1974-06-25 1977-03-15 Карагандинский политехнический институт Шлифовальный инструмент
SU984852A1 (ru) * 1981-07-08 1982-12-30 Ордена Трудового Красного Знамени Институт Сверхтвердых Материалов Ан Усср Алмазный инструмент
JPS6215080A (ja) * 1985-07-09 1987-01-23 Sanwa Daiyamondo Kogyo Kk 研削砥石
DE3931277A1 (de) * 1988-10-17 1990-04-19 Zuschlagstoffe Natursteine Veb Schleifteller zur bearbeitung von gestein oder aehnlichen werkstoffen und verfahren zu seiner herstellung
US5020283A (en) * 1990-01-22 1991-06-04 Micron Technology, Inc. Polishing pad with uniform abrasion
US5218949A (en) * 1990-03-19 1993-06-15 Tomlinson Peter N Saws
GB9006703D0 (en) * 1990-03-26 1990-05-23 De Beers Ind Diamond Abrasive product
GB9015609D0 (en) * 1990-07-16 1990-09-05 De Beers Ind Diamond Tool insert
GB9020462D0 (en) * 1990-09-19 1990-10-31 Filters For Industry Ltd Abrasive segments
US5247765A (en) * 1991-07-23 1993-09-28 Abrasive Technology Europe, S.A. Abrasive product comprising a plurality of discrete composite abrasive pellets in a resilient resin matrix

Also Published As

Publication number Publication date
US5454752A (en) 1995-10-03
CN1091073A (zh) 1994-08-24
DE69312641D1 (de) 1997-09-04
JPH06190733A (ja) 1994-07-12
ATE156054T1 (de) 1997-08-15
EP0597723A1 (en) 1994-05-18
DE69312641T2 (de) 1998-01-15
CA2102974A1 (en) 1994-05-14
CN1080167C (zh) 2002-03-06
AU669573B2 (en) 1996-06-13
GB9223826D0 (en) 1993-01-06
EP0597723B1 (en) 1997-07-30
TW349455U (en) 1999-01-01
ZA938428B (en) 1994-06-13
AU5064993A (en) 1994-05-26

Similar Documents

Publication Publication Date Title
ES2105131T3 (es) Dispositivo abrasivo.
DE69503408D1 (de) Vorrichtung zum chemisch-mechanischen Polieren mit verbesserter Verteilung der Polierzusammensetzung
MY114512A (en) Polymeric substrate with polymeric microelements
KR980000766A (ko) 연마패드 및 그를 갖는 연마장치
ES2082592T3 (es) Almohadilla pulimentadora.
MY113867A (en) Polishing pad conditioning
MY112281A (en) Improved polishing pads and methods for their use
WO1995018697A1 (en) Device for conditioning polishing pads
ES2149824T3 (es) Cabeza contorneadora para rectificadora que utiliza bandas abrasivas, paralelas, multiples y procedimiento para su ensamblaje.
DE69110075D1 (de) Schleifmittel.
TW429462B (en) Manufacturing method and processing device for semiconductor device
US6165060A (en) Sanding apparatus
MY132537A (en) Apparatus for polishing wafers
AU6263690A (en) Conveying rotational member for an ink recording apparatus, and ink recording apparatus having the same
ATE108358T1 (de) Schleifscheibe zum tiefschleifen.
EP1125686A4 (en) WORKPIECE HOLDING DISK FOR POLISHING, WORKPIECE HOLDING APPARATUS AND WORKPIECE POLISHING METHOD
JPH05505769A (ja) 半導体材料の中間層平坦化のための装置
SG97161A1 (en) Polishing method and polishing apparatus
ES2065754T3 (es) Procedimiento de compactacion sobre un soporte de una mezcla pulverulenta y aplicador de maquillaje constituido por un soporte que lleva una pastilla de mezcla pulverulenta compactada.
ATE175916T1 (de) Polierverfahren, hierzu bestimmte vorrichtung und schwabbel-/polierscheibe
SG65778A1 (en) Wafer polishing apparatus
CA2001487A1 (en) Gel producing pad and improved method for surfacing and polishing lenses
EP0324596A3 (en) Method of and apparatus for applying polymeric materials to printed circuits
DE69105422T2 (de) Rotierendes Schleifwerkzeug.
ATE215420T1 (de) Gerät zum chemisch-mechanischen polieren von wafern

Legal Events

Date Code Title Description
FG2A Definitive protection

Ref document number: 597723

Country of ref document: ES