ES2067381B1 - Celula de efusion de fosforo para epitaxia de haces moleculares. - Google Patents
Celula de efusion de fosforo para epitaxia de haces moleculares.Info
- Publication number
- ES2067381B1 ES2067381B1 ES09300063A ES9300063A ES2067381B1 ES 2067381 B1 ES2067381 B1 ES 2067381B1 ES 09300063 A ES09300063 A ES 09300063A ES 9300063 A ES9300063 A ES 9300063A ES 2067381 B1 ES2067381 B1 ES 2067381B1
- Authority
- ES
- Spain
- Prior art keywords
- phosphorus
- epitaxia
- molecular beams
- effusion cell
- reevaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
- C30B23/06—Heating of the deposition chamber, the substrate or the materials to be evaporated
- C30B23/066—Heating of the material to be evaporated
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
CELULA DE EFUSION DE FOSFORO PARA EPITAXIA DE HACES MOLECULARES. CONSISTE EN UN RECIPIENTE, DONDE SE PRODUCEN POR SUBLIMACION DE FOSFORO ROJO LOS VAPORES DE ESTE ELEMENTO. CERRADO MEDIANTE UNA VALVULA ESTANCA AL VACIO QUE REGULA SU FLUJO. EN EL RECIPIENTE EXISTEN DOS ZONAS CON TEMPERATURAS DIFERENTES, UNA DE SUBLIMACION DE FOSFORO ROJO Y OTRA DE CONDENSACION Y REEVAPORACION DE FOSFORO BLANCO, ESTANDO AMBAS ZONAS AISLADAS TERMICAMENTE MEDIANTE PANTALLAS REFLECTORAS QUE EVITAN QUE LA TEMPERATURA DE LA RESISTENCIA DE CALEFACCION TENGA QUE ALCANZAR TEMPERATURAS SUPERIORES A LOS 350GC. LA VALVULA, CUYO CIERRE INTERMITENTE REGULA LA EFUSION DE VAPORES DE FOSFORO, SE ENCUENTRA A UNA TEMPERATURA LIGERAMENTE SUPERIOR A LA DE LA ZONA TERMOSTATIZADA DE CONDENSACION-REEVAPORACION DE FOSFORO BLANCO ES DE APLICACION EN LA FABRICACION DE ESTRUCTURAS SEMICONDUCTORAS.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES09300063A ES2067381B1 (es) | 1993-01-14 | 1993-01-14 | Celula de efusion de fosforo para epitaxia de haces moleculares. |
GB9400573A GB9400573D0 (en) | 1993-01-14 | 1994-01-13 | Phosphorus effusion cell for molecular beam epitaxy |
GB9400672A GB2274468B (en) | 1993-01-14 | 1994-01-14 | Phosphorous effusion apparatus and method for molecular beam epitaxy |
US08/181,802 US5431735A (en) | 1993-01-14 | 1994-01-14 | Phosphorus effusion cell for molecular beam epitaxy |
US08/403,975 US5482892A (en) | 1993-01-14 | 1995-03-15 | Method of producing white phosphorus for molecular beam epitaxy |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES09300063A ES2067381B1 (es) | 1993-01-14 | 1993-01-14 | Celula de efusion de fosforo para epitaxia de haces moleculares. |
Publications (2)
Publication Number | Publication Date |
---|---|
ES2067381A1 ES2067381A1 (es) | 1995-03-16 |
ES2067381B1 true ES2067381B1 (es) | 1995-10-16 |
Family
ID=8280463
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES09300063A Expired - Fee Related ES2067381B1 (es) | 1993-01-14 | 1993-01-14 | Celula de efusion de fosforo para epitaxia de haces moleculares. |
Country Status (3)
Country | Link |
---|---|
US (2) | US5431735A (es) |
ES (1) | ES2067381B1 (es) |
GB (1) | GB9400573D0 (es) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6030458A (en) * | 1997-02-14 | 2000-02-29 | Chorus Corporation | Phosphorus effusion source |
US6551405B1 (en) * | 2000-09-22 | 2003-04-22 | The Board Of Trustees Of The University Of Arkansas | Tool and method for in situ vapor phase deposition source material reloading and maintenance |
FR2823228B1 (fr) * | 2001-04-04 | 2003-06-13 | Addon | Reservoir pour installation d'epitaxie et installation comprenant un tel reservoir |
US20030141176A1 (en) * | 2002-01-25 | 2003-07-31 | Esa Supponen | Cracker apparatus |
EP1491653A3 (en) * | 2003-06-13 | 2005-06-15 | Pioneer Corporation | Evaporative deposition methods and apparatus |
EP2381011B1 (en) * | 2003-08-04 | 2012-12-05 | LG Display Co., Ltd. | Evaporation source for evaporating an organic electroluminescent layer |
WO2006003231A1 (en) * | 2004-06-30 | 2006-01-12 | Dca-Instruments Oy | Phosphorus effusion cell arrangement and method for producing molecular phosphorus |
JP4442558B2 (ja) * | 2005-01-06 | 2010-03-31 | 三星モバイルディスプレイ株式會社 | 蒸発源の加熱制御方法,蒸発源の冷却制御方法および蒸発源の制御方法 |
FI118803B (fi) * | 2005-04-22 | 2008-03-31 | Beneq Oy | Lähde, järjestely lähteen asentamiseksi sekä menetelmä lähteen asentamiseksi ja poistamiseksi |
WO2008079209A1 (en) * | 2006-12-19 | 2008-07-03 | Veeco Instruments Inc. | Vapor deposition sources and methods |
FR2956412B1 (fr) * | 2010-02-16 | 2012-04-06 | Astron Fiamm Safety | Vanne d'obturation a volume constant d'une source de depot en phase vapeur |
WO2012012376A1 (en) * | 2010-07-22 | 2012-01-26 | First Solar, Inc | Deposition system |
GB201307073D0 (en) | 2013-04-19 | 2013-05-29 | Fernandez Ivan | Pulsed valve cracker effusion cell |
GB201307097D0 (en) | 2013-04-19 | 2013-05-29 | Gencoa Ltd | Cracker valve control |
TWI781929B (zh) | 2016-04-25 | 2022-11-01 | 美商創新先進材料股份有限公司 | 瀉流單元和含有瀉流單元的沉積系統以及相關方法 |
FR3080947B1 (fr) * | 2018-05-02 | 2021-02-19 | Centre Nat Rech Scient | Microscope electronique en transmission equipe d'au moins une source de jet de matiere balistique |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4618345A (en) * | 1984-02-17 | 1986-10-21 | Stauffer Chemical Company | Method of preparing high purity white phosphorus |
US4649024A (en) * | 1983-06-29 | 1987-03-10 | Stauffer Chemical Company | Method for forming evaporated pnictide and alkali metal polypnictide films |
US5156815A (en) * | 1988-09-08 | 1992-10-20 | Board Of Regents, The University Of Texas System | Sublimating and cracking apparatus |
US5041719A (en) * | 1990-06-01 | 1991-08-20 | General Electric Company | Two-zone electrical furnace for molecular beam epitaxial apparatus |
-
1993
- 1993-01-14 ES ES09300063A patent/ES2067381B1/es not_active Expired - Fee Related
-
1994
- 1994-01-13 GB GB9400573A patent/GB9400573D0/en active Pending
- 1994-01-14 US US08/181,802 patent/US5431735A/en not_active Expired - Lifetime
-
1995
- 1995-03-15 US US08/403,975 patent/US5482892A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5431735A (en) | 1995-07-11 |
ES2067381A1 (es) | 1995-03-16 |
GB9400573D0 (en) | 1994-03-09 |
US5482892A (en) | 1996-01-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FD2A | Announcement of lapse in spain |
Effective date: 20180806 |