GB201307073D0 - Pulsed valve cracker effusion cell - Google Patents

Pulsed valve cracker effusion cell

Info

Publication number
GB201307073D0
GB201307073D0 GBGB1307073.5A GB201307073A GB201307073D0 GB 201307073 D0 GB201307073 D0 GB 201307073D0 GB 201307073 A GB201307073 A GB 201307073A GB 201307073 D0 GB201307073 D0 GB 201307073D0
Authority
GB
United Kingdom
Prior art keywords
effusion cell
pulsed valve
cracker
valve cracker
pulsed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB1307073.5A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BRIONES FERNANDO
NANO4ENERGY SLNE
WENNBERG AMBI RN
Original Assignee
BRIONES FERNANDO
NANO4ENERGY SLNE
WENNBERG AMBI RN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BRIONES FERNANDO, NANO4ENERGY SLNE, WENNBERG AMBI RN filed Critical BRIONES FERNANDO
Priority to GBGB1307073.5A priority Critical patent/GB201307073D0/en
Publication of GB201307073D0 publication Critical patent/GB201307073D0/en
Priority to PCT/EP2014/058142 priority patent/WO2014170503A1/en
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GBGB1307073.5A 2013-04-19 2013-04-19 Pulsed valve cracker effusion cell Ceased GB201307073D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GBGB1307073.5A GB201307073D0 (en) 2013-04-19 2013-04-19 Pulsed valve cracker effusion cell
PCT/EP2014/058142 WO2014170503A1 (en) 2013-04-19 2014-04-22 Pulsed valve cracker effusion cell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB1307073.5A GB201307073D0 (en) 2013-04-19 2013-04-19 Pulsed valve cracker effusion cell

Publications (1)

Publication Number Publication Date
GB201307073D0 true GB201307073D0 (en) 2013-05-29

Family

ID=48537467

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB1307073.5A Ceased GB201307073D0 (en) 2013-04-19 2013-04-19 Pulsed valve cracker effusion cell

Country Status (2)

Country Link
GB (1) GB201307073D0 (en)
WO (1) WO2014170503A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20190338412A1 (en) * 2017-01-31 2019-11-07 Applied Materials, Inc. Material deposition arrangement, vacuum deposition system and method therefor
FR3123660B1 (en) * 2021-06-07 2024-02-16 Air Liquide Electronics Systems Device and method for distributing a gas phase of a solid precursor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4583710A (en) * 1982-05-10 1986-04-22 Cornell Research Foundation, Inc. Electromagnetic valve for pulsed molecular beam
US5080870A (en) * 1988-09-08 1992-01-14 Board Of Regents, The University Of Texas System Sublimating and cracking apparatus
ES2067381B1 (en) 1993-01-14 1995-10-16 Consejo Superior Investigacion PHOSPHORUS EFFUSION CELL FOR EPITAXIA OF MOLECULAR BEAMS.
GB9414415D0 (en) * 1994-07-16 1994-09-07 Oxford Appl Res Ltd Cracking feedstocks
EP2186920A1 (en) * 2008-10-22 2010-05-19 Applied Materials, Inc. Arrangement and method for regulating a gas stream or the like

Also Published As

Publication number Publication date
WO2014170503A1 (en) 2014-10-23

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)