ES2031098T3 - Procedimiento y dispositivo para la configuracion de una capa mediante proceso quimico de plasma. - Google Patents
Procedimiento y dispositivo para la configuracion de una capa mediante proceso quimico de plasma.Info
- Publication number
- ES2031098T3 ES2031098T3 ES198787112323T ES87112323T ES2031098T3 ES 2031098 T3 ES2031098 T3 ES 2031098T3 ES 198787112323 T ES198787112323 T ES 198787112323T ES 87112323 T ES87112323 T ES 87112323T ES 2031098 T3 ES2031098 T3 ES 2031098T3
- Authority
- ES
- Spain
- Prior art keywords
- procedure
- layer
- configuration
- plasma process
- chemical plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical Vapour Deposition (AREA)
- Photoreceptors In Electrophotography (AREA)
Abstract
SE PROPONE UN PROCEDIMIENTO Y UN DISPOSITIVO PARA FORMACION DE UNA CAPA DE UNA SUPERFICIE DE UN SUSTRATO MEDIANTE PROCESO PLASMAQUIMICO. CON ELLO SE DIRIGE LA SUPERFICIE PARALELAMENTE AL CAMPO ELECTRICO QUE SE NECESITA PARA EL PROCESO PLASMAQUIMICO. ADEMAS EL GAS NECESARIO CORRE INMEDIATAMENTE SOBRE LA SUPERFICIE.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3629000A DE3629000C1 (de) | 1986-08-27 | 1986-08-27 | Verfahren und Vorrichtung zum Ausbilden einer Schicht durch plasmachemischen Prozess |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2031098T3 true ES2031098T3 (es) | 1992-12-01 |
Family
ID=6308218
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES198787112323T Expired - Lifetime ES2031098T3 (es) | 1986-08-27 | 1987-08-25 | Procedimiento y dispositivo para la configuracion de una capa mediante proceso quimico de plasma. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4915978A (es) |
EP (1) | EP0257620B1 (es) |
JP (1) | JPS6369981A (es) |
DE (2) | DE3629000C1 (es) |
ES (1) | ES2031098T3 (es) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2060917A1 (en) * | 1991-03-12 | 1992-09-13 | Milam Pender | Plasma enhanced chemical vapor deposition device |
US7264850B1 (en) | 1992-12-28 | 2007-09-04 | Semiconductor Energy Laboratory Co., Ltd. | Process for treating a substrate with a plasma |
US5430355A (en) * | 1993-07-30 | 1995-07-04 | Texas Instruments Incorporated | RF induction plasma source for plasma processing |
JP3513206B2 (ja) * | 1994-03-22 | 2004-03-31 | キヤノン株式会社 | 堆積膜形成方法及び堆積膜形成装置 |
US5643639A (en) * | 1994-12-22 | 1997-07-01 | Research Triangle Institute | Plasma treatment method for treatment of a large-area work surface apparatus and methods |
US6042686A (en) * | 1995-06-30 | 2000-03-28 | Lam Research Corporation | Power segmented electrode |
EP1480250A1 (en) | 2003-05-22 | 2004-11-24 | HELYSSEN S.à.r.l. | A high density plasma reactor and RF-antenna therefor |
US9202674B2 (en) * | 2008-10-21 | 2015-12-01 | Applied Materials, Inc. | Plasma reactor with a ceiling electrode supply conduit having a succession of voltage drop elements |
PT106302A (pt) | 2012-05-09 | 2013-11-11 | Inst Superior Tecnico | Revestimentos híbridos para otimização da proteção anti-corrosiva de ligas de magnésio |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3677799A (en) * | 1970-11-10 | 1972-07-18 | Celanese Corp | Vapor phase boron deposition by pulse discharge |
US3996884A (en) * | 1973-09-14 | 1976-12-14 | Susumu Industrial Co., Ltd. | Device for processing an organic high molecular weight film |
JPS60108B2 (ja) * | 1974-07-10 | 1985-01-05 | 太平洋セメント株式会社 | 放電塗装装置 |
US4226897A (en) * | 1977-12-05 | 1980-10-07 | Plasma Physics Corporation | Method of forming semiconducting materials and barriers |
JPS6029295B2 (ja) * | 1979-08-16 | 1985-07-10 | 舜平 山崎 | 非単結晶被膜形成法 |
US4262035A (en) * | 1980-03-07 | 1981-04-14 | Bell Telephone Laboratories, Incorporated | Modified chemical vapor deposition of an optical fiber using an rf plasma |
US4399014A (en) * | 1980-05-03 | 1983-08-16 | Engle Frank W | Plasma reactor and method therefor |
DE3020815A1 (de) * | 1980-06-02 | 1981-12-10 | Siemens AG, 1000 Berlin und 8000 München | Verfahren und vorrichtung zur herstellung von duennen schichten auf substraten durch chemische umwandlung von gasen |
US4438153A (en) * | 1981-02-24 | 1984-03-20 | Welbilt Electronics Die Corporation | Method of and apparatus for the vapor deposition of material upon a substrate |
US4402993A (en) * | 1981-03-20 | 1983-09-06 | Gulf & Western Manufacturing Company | Process for coating optical fibers |
US4438188A (en) * | 1981-06-15 | 1984-03-20 | Fuji Electric Company, Ltd. | Method for producing photosensitive film for electrophotography |
US4569719A (en) * | 1981-07-17 | 1986-02-11 | Plasma Physics Corporation | Glow discharge method and apparatus and photoreceptor devices made therewith |
JPS59193265A (ja) * | 1983-03-14 | 1984-11-01 | Stanley Electric Co Ltd | プラズマcvd装置 |
US4500565A (en) * | 1983-09-28 | 1985-02-19 | Ushio Denki Kabushiki Kaisha | Deposition process |
US4593644A (en) * | 1983-10-26 | 1986-06-10 | Rca Corporation | Continuous in-line deposition system |
DE3574997D1 (de) * | 1984-03-03 | 1990-02-01 | Stc Plc | Pulsierendes plasmaverfahren. |
US4618477A (en) * | 1985-01-17 | 1986-10-21 | International Business Machines Corporation | Uniform plasma for drill smear removal reactor |
US4657616A (en) * | 1985-05-17 | 1987-04-14 | Benzing Technologies, Inc. | In-situ CVD chamber cleaner |
KR880000215A (ko) * | 1986-06-10 | 1988-03-24 | 나까므라 히사오 | 시이트(sheet)상 물체의 플라즈마 처리장치 |
-
1986
- 1986-08-27 DE DE3629000A patent/DE3629000C1/de not_active Expired
-
1987
- 1987-08-25 ES ES198787112323T patent/ES2031098T3/es not_active Expired - Lifetime
- 1987-08-25 DE DE8787112323T patent/DE3778794D1/de not_active Expired - Fee Related
- 1987-08-25 EP EP87112323A patent/EP0257620B1/de not_active Expired - Lifetime
- 1987-08-25 JP JP62211213A patent/JPS6369981A/ja active Pending
-
1988
- 1988-12-08 US US07/281,874 patent/US4915978A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE3778794D1 (de) | 1992-06-11 |
US4915978A (en) | 1990-04-10 |
EP0257620A3 (en) | 1989-08-09 |
EP0257620B1 (de) | 1992-05-06 |
DE3629000C1 (de) | 1987-10-29 |
JPS6369981A (ja) | 1988-03-30 |
EP0257620A2 (de) | 1988-03-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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