EP4381113A1 - Installation de revêtement pour le revêtement d'un objet, procédé pour le revêtement d'un objet et utilisation - Google Patents

Installation de revêtement pour le revêtement d'un objet, procédé pour le revêtement d'un objet et utilisation

Info

Publication number
EP4381113A1
EP4381113A1 EP22733045.3A EP22733045A EP4381113A1 EP 4381113 A1 EP4381113 A1 EP 4381113A1 EP 22733045 A EP22733045 A EP 22733045A EP 4381113 A1 EP4381113 A1 EP 4381113A1
Authority
EP
European Patent Office
Prior art keywords
coating
nozzle
section
evaporation
evaporation section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP22733045.3A
Other languages
German (de)
English (en)
Inventor
Christian Schwerdt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ThyssenKrupp Steel Europe AG
Original Assignee
ThyssenKrupp Steel Europe AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ThyssenKrupp Steel Europe AG filed Critical ThyssenKrupp Steel Europe AG
Publication of EP4381113A1 publication Critical patent/EP4381113A1/fr
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/228—Gas flow assisted PVD deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/36—Coil arrangements

Definitions

  • Coating system for coating an object for coating an object
  • the invention is aimed at a coating system for coating an object.
  • the invention is also directed to a method for coating an object and to a use.
  • a coating installation to which the invention is directed has a coating chamber through which the object to be coated can be passed.
  • the coating chamber preferably has a heated coating channel.
  • the coating installation has a device for the gas phase deposition of material.
  • the device for the gas phase deposition of material has at least one evaporation section.
  • the evaporation section serves to prepare a material provided as a starting material by evaporation in such a way that it is partially or completely in the gas phase.
  • the material brought into the gas phase by evaporation can then reach the surface of the object to be coated that is intended for the coating, in order to contribute to the layer formation there.
  • the device for the vapor deposition of material also has a nozzle section which is coupled to the evaporation section.
  • the nozzle section serves the function of directing the material brought into the vapor phase in the vaporization section in the direction of the surface to be coated.
  • the material in the gas phase is directed toward a surface of the article to be coated and out from within the coating chamber opening nozzle outlet of the nozzle section left out of this.
  • the surface of the object to be coated is coated by the object being guided through the coating chamber past the nozzle outlet and being coated with material present in the gas phase flowing out of the nozzle outlet, by the material present in the gas phase condensing on the surface of the object and thereby forms the desired coating.
  • a conceptually simple approach is to thermally vaporize a feedstock, which is then fed to and through the nozzle section.
  • a pressure difference between the evaporation section and the coating chamber contributes to the movement of the material present in the gas phase.
  • a carrier gas stream for example an inert gas, can also be used through the vaporization section and then through the nozzle section to transport the vaporized material.
  • An example of a device for the gas phase deposition of material is a jet vapor deposition system, by which the person skilled in the art understands a system in which the coating material is brought into the gas phase by means of thermal evaporation and it is then, for example, typically, but not necessarily - Is transported to the substrate with a carrier gas flow of inert gas, preferably with a gas flow rate above the speed of sound, preferably above 500 m / s.
  • the way it works is explained, for example, in the overview article in the Handbook of Deposition Technologies for Films and Coatings (Third Edition), Science, Applications and Technology, 2010, pages 881-901, https://doi. org/ 10 . 1016/B978- 0- 8155-2031- 3 . 00018-1 (linked on the filing date).
  • the present invention can also be implemented with such jet vapor deposition systems.
  • the present invention can be used very generally for all coating devices of the type mentioned at the outset, i.e. for all coating devices in which the material intended for coating is brought into its gas phase within an evaporation section having a crucible and the material in the gas phase is then passed through is discharged through a nozzle section and out the exit of the nozzle section toward a surface of the article to be coated.
  • the present invention is intended for the subgenus of such coating devices in which a carrier gas flow feed leads into the evaporation section for feeding a carrier gas flow of a carrier gas into the evaporation section and through it for entraining the coating material towards the substrate surface.
  • a coating device of this type is known, for example, from WO 2016/042079 A1.
  • two wires are continuously fed as coating material.
  • the coating material arrives at a spray head, in which the two material wires are connected to an electrical DC voltage source as the cathode and as the anode.
  • an electric arc forms between the two material wires, as a result of which the supplied starting material is vaporized and/or liquefied in the form of the two material wires.
  • a gas stream is guided through the spray head, which carries the vaporized and/or liquefied coating material with it and transports it via an injector tube into a crucible.
  • the coating material conveyed into the crucible then evaporates completely within the heated crucible and is led out of the crucible and directed towards the substrate to be coated.
  • This coating device has a combination of elements that are also known from jet vapor deposition systems and elements that are known from systems that work on the principle of arc evaporation.
  • the device is based on transporting the coating material with a flow of carrier gas.
  • this coating device uses an evaporation section which is composed of a pre-evaporation section and a post-evaporation section designed as a crucible.
  • the pre-evaporation section prepares the material in the spray head and the injector tube and prepares it for post-evaporation, ie bringing the solid or liquid components still present to the crucible, at least for the most part, into the gas phase.
  • the systems of the type mentioned at the outset all have in common that, due to their conceptual implementation with a coating chamber for carrying out the object to be coated, they can be used in particular for large-scale implementations and develop their advantages.
  • the resulting boundary conditions such as the corresponding size of the coating chamber as well as time and cost-dependent limits in the provision of a technical vacuum
  • the invention is based on the object of improving the process reliability of the operation of a coating system of the type mentioned at the outset.
  • the object is achieved with a coating installation having the features of claim 1 , with a method having the features of claim 10 and with a use having the features of claim 13 .
  • the coating system serves to coat an object, preferably a strip.
  • the object can be a metal strip, for example, preferably a steel strip.
  • the coating process within the coating chamber preferably takes place in a technical vacuum, optionally with the addition of inert gas.
  • the coating plant includes:
  • an apparatus for the vapor deposition of material comprising an evaporation section for evaporating the material into the vapor phase, and
  • a nozzle section coupled to the evaporation section, the nozzle section having a nozzle with a nozzle outlet opening into the coating chamber.
  • the nozzle section serves to direct and discharge the gaseous phase material out of the nozzle exit to a surface of the article to be coated, for example strip, which is fed through the coating chamber past the nozzle exit. This ensures that the surface is continuously coated, in that material present in the gas phase and flowing out of the nozzle outlet condenses on the surface and thereby forms the coating.
  • the evaporation section is the entirety of all equipment of the coating system, which Reconciliation of the intended for the coating
  • Evaporation section on a feed for the starting material, through which the evaporation section is supplied with the starting material to evaporate it.
  • gas phase and vaporization are used throughout the description because they are common in the field of technology described.
  • the concept of the gas phase includes a small proportion by weight, for example up to 30% by weight. -%, preferably not more than 10 wt. -%, of the material present in the gas phase may not exist as a pure gas in the physical sense, but instead as vapor constituents such as, for example, as an aerosol and/or as a cluster.
  • vaporization includes the fact that, depending on the material used and the technology used, the transition of the particles into the gas phase also takes place at least partially by means of other mechanisms, for example by sublimation.
  • the concept of evaporation thus also includes evaporation in the strictly physical sense, ie a transition to liquid Gas phase, also other mechanisms, such as sublimation in particular.
  • the coating chamber preferably has an entry passage and an exit passage as well as a coating channel, which is particularly preferably arranged inside the coating chamber and has an entry opening and an exit opening for introducing and removing the object.
  • the coating chamber can be a strip coating system with transport and support rollers arranged outside the coating chamber, so that the strip is guided through the coating chamber.
  • the nozzle section is designed to overheat the material. The overheating takes place in such a way that the material which, after evaporation in the evaporation section, reaches the nozzle section as material in the gas phase from there, overheats after flowing through the nozzle section, i.e. exits the nozzle section as superheated gas.
  • the evaporation section serves to evaporate the material.
  • the vaporization takes place in such a way that part of the material present in the gas phase is not in the gas phase in the physical sense, but is present as an aerosol and/or as a cluster; Strictly speaking, one would say in this case that at the end of the evaporation section there is a material vapor in the sense that liquid and solid components of the material are still present or at least the material vapor is always at or near the phase boundary to the liquid and/or solid state is .
  • This is equivalent to the temperature of the material in the gas phase being equal to or not significantly different from the vaporization temperature.
  • the overheating takes place in such a way that an overheated material is present after exiting the nozzle outlet of the nozzle of the nozzle section.
  • overheated material present in the gas phase prevents or at least can largely prevent the premature formation of liquid or solid condensation in the form of droplets or dust.
  • a degradation of the product quality and the associated costs due to the lack of cleaning/disposal measures can be avoided.
  • the nozzle section for overheating the material is preferably designed in such a way that the material which, after evaporation in the evaporation section, reaches the nozzle section from there, after flowing through the nozzle section and until it reaches the surface of the object to be coated, for example strips, is overheated and condensation only takes place at this point.
  • the overheating temperature is selected sufficiently high so that not only is overheated material present at the nozzle outlet, but also that overheated gas is present during the entire transport to the surface to be coated.
  • the overheating temperature required for this is to be selected professionally, as it depends on a large number of parameters and circumstances, for example the distance to be covered and the flow conditions prevailing within the coating chamber.
  • the overheating temperature must be increased sufficiently by the person skilled in the art entrusted with implementing the invention so that no more condensation takes place at any undesired point in the coating chamber. It is therefore essential that the material which, after evaporation in the evaporation section, comes out of the nozzle cut-out, exits superheated after flowing through the nozzle section; the overheating temperature to be selected itself must be chosen professionally.
  • the nozzle section for overheating the material is designed in such a way that the material which, after evaporation in the evaporation section, reaches the nozzle section from there, has a temperature of 10 to 50% after flowing through the nozzle section, particularly preferably between 20 and 40% superheated, above its vaporization temperature on the Kelvin scale, exits the nozzle section.
  • the invention therefore provides in particular, downstream of the evaporation section, i.e. within the nozzle section, the partially or completely evaporated material emerging from the evaporation section, which has the evaporation temperature approximately, for example +/- 5% of the evaporation temperature in Kelvin, above this value out is overheated, so that an overheated material present in the gas phase emerges from the nozzle section, more precisely, from the nozzle outlet of the nozzle of the nozzle section.
  • the evaporation section consists of a crucible.
  • the nozzle section consists of a nozzle with a nozzle outlet.
  • the nozzle section preferably has a nozzle and a coupling member arranged between the evaporation section and the nozzle.
  • the advantage of the presence of a coupling element is that different nozzles can be arranged on an existing evaporation section.
  • the nozzle section has a nozzle and a coupling element arranged between the evaporation section and the nozzle, the nozzle optionally being arranged with the coupling element on the evaporation section such that it can rotate.
  • the coating becomes more flexible.
  • a superheater is arranged in the coupling member or is formed by the coupling member; in this case, the superheater is referred to as a coupling member superheater in the context of this application.
  • a superheater is arranged in the nozzle or is formed by the nozzle; in this case, the superheater is referred to as a nozzle superheater in the context of this application.
  • a heat exchanger is arranged within the coupling member.
  • the heat exchanger can be designed, for example, as a tube bundle heat exchanger, as a perforated plate heat exchanger, as a material block having a cavity, preferably made of tile or sintered material, it also being possible for several of the aforementioned to be arranged sequentially within the coupling member.
  • the perforated plate heat exchanger is preferred with staggered openings provided.
  • the heat exchanger is heated, for example by combustion, or by chemical processes, or by induction, or electrically resistively, and is thereby used to superheat the gas. It goes without saying that the temperature must be correspondingly high. In other words, it can be provided that the overheating takes place partially or completely within the coupling element. This has the advantage that the nozzle itself remains interchangeable and as such remains an object that is particularly easy to design structurally.
  • a resistive heat exchanger and/or an inductive heat exchanger is arranged within the coupling element.
  • the resistive heat exchanger can be, for example, an electrical current heated resistance heat source.
  • the inductive heat exchanger can be designed, for example, as an electrically conductive object, preferably made of graphite, which can be heated with an induction coil, for example located outside the coupling element.
  • the induction coil is part of the coating system.
  • the coupling member itself can be partially or completely made of an electrically conductive material, into which an induction field generated by the induction coil can be coupled, resulting in heating of the coupling member.
  • the coupling member has an inner shell that consists partly or entirely of graphite.
  • the overheating takes place in the coupling member
  • the superheating takes place partially or completely within the nozzle, that is to say that a nozzle superheater is present.
  • a resistively heatable heat exchanger can be arranged inside the nozzle, which can be designed in the same way as described above in connection with the coupling member.
  • a resistive heat exchanger, an inductive heat exchanger and/or the nozzle itself being made of metallic material, preferably graphite, and capable of being coupled with an induction coil as in the manner described above can also be provided.
  • the evaporation section includes a pre-evaporation section with in particular a spray head and an injector tube from the spray head to the crucible designed as a post-evaporation section.
  • the starting material is fed to the extrusion head, preferably in the form of wire or strip.
  • the starting material is processed in the spray head, which means that components of the starting material are vaporized and/or separated from the starting material as particles present in the liquid phase, preferably by means of arc evaporation between the starting material connected as a cathode and the starting material connected as an anode.
  • the processed starting material is not completely in the gas phase, but consists of a mixture, in particular of gas phase and liquid or partially liquid particles, which is suitable for being guided through the crucible in order to be post-evaporated there, i.e.: by heating taking place there completely or to go largely completely into the gas phase.
  • the pre-evaporation section comprises in particular a spray head for preparing the coating material present as the starting material and an injector tube.
  • the injector tube is coupled to the crucible and designed to direct the coating material prepared in the spray head to the crucible.
  • the prepared coating material enters the crucible. Constituents of the coating material that are not yet in the gas phase vaporize within the crucible, which for this purpose is heated to a temperature that is above the vaporization temperature of the starting material.
  • the crucible is heated to vaporize the processed feedstock.
  • the temperature to which the crucible is heated depends on the coating material. As long as liquid evaporating material is still present, a temperature close to the vaporization temperature of the liquid material that is still to be vaporized occurs on contact with the crucible on the surface of the crucible. Therefore, when implementing the invention or its developments, it must be taken into account that the starting temperature, i.e. the temperature at the point of energy supply, for example by induction current inside or radiation on the outer wall of the crucible, must be set to a value that is greater than the evaporation temperature of the starting material .
  • the crucible is preferably designed as a cyclone, since a cyclone shape is a space-saving design that allows the gas flow to be guided efficiently through the crucible.
  • Another advantage of a crucible designed in the form of a cyclone is its high reliability in the almost complete evaporation of the material flowing through, which ensures a high quality of the deposited coating, since a bombardment of the strip with coating material that is still in the liquid phase can be almost completely ruled out if used properly.
  • every cyclone has a so-called lower selectivity, i.e. a minimum diameter of retained droplets, so that in operational reality some - albeit small - liquid particles always leave the crucible.
  • the inventive The procedure starts precisely with this problem, in that these liquid particles are also largely or completely evaporated by suitable overheating in the manner described.
  • a carrier gas flow feed pointing into the evaporation section is arranged on the evaporation section for feeding a carrier gas flow of a carrier gas into the evaporation section and through it for entraining the coating material.
  • the pre-evaporation section has a spray head, with the carrier gas flow supply being arranged in the spray head, so that the carrier gas is passed through the spray head and processed starting material there, for example in the form of particles or clusters, with tears and directs it through the injector tube into the crucible.
  • the spray head can be designed as a wire syringe, which describes a spray head into which the starting material is introduced in the form of a wire or strip in order to then prepare it within the spray head by means of arc melting and/or arc vaporization, i.e. to prepare it for further vaporization.
  • a further idea of the invention which can be carried out in connection with the coating systems explained so far as well as on its own, is aimed at a method for coating the object, preferably by operating a coating system of the type mentioned at the outset or its development.
  • the following steps are provided: a) Introduction of a coating material into a
  • the vaporized coating material may still contain liquid and/or solid components, for example up to 10% by weight. -%, optionally also up to 30 wt. -%, and in particular the material vapor with a temperature approximately corresponding to the evaporation temperature (for example, at most 20% deviation, preferably between 2 and 15% deviation, particularly preferably between 5 and 10% deviation, from the evaporation temperature on the Kelvin scale); c ) conducting the vaporized coating material into a nozzle section coupled to the vaporization section with a nozzle ; d) Overheating of the vaporized coating material by means of the nozzle section, for example with a target temperature that is preferably between 10 and 50%, particularly preferably between 20 and 40%, above the vaporization temperature on the Kelvin scale, with the values mentioned being in tests carried out as have shown a good compromise between sufficient superheat capacity and technical feasibility; e) Conducting the overheated vaporized coating material out of a nozzle outlet of
  • the person responsible for implementing the invention must empirically determine whether condensation of the superheated vaporized material in a given system in their operation with all tolerated operating parameters, for example within the tolerated pressure and temperature corridors, avoided or largely avoided. It must therefore be determined which temperature and which pressure conditions can be expected in the coating chamber; the design basis for the locally minimum tolerated temperatures and/or the highest tolerated pressures result from the phase diagram of the material to be evaporated.
  • an empirical approach can be taken by examining the temperatures considered possible during operation of the plant (at experimentally meaningful intervals), above which critical overheating temperature at the nozzle outlet or, speaking in the direction of steam movement, behind the nozzle outlet, an observation of undesirable condensation does not occur takes place more or no longer above a level considered acceptable by a person skilled in the art in the specific case;
  • This critical overheating temperature optionally plus a safety margin (of, for example, a flat rate of 50 K), can then be used to set the overheating in step d) above.
  • the invention is also aimed at using a coating system to coat a strip, preferably a metal strip, particularly preferably a steel strip.
  • Fig. la exemplary embodiment of a coating system
  • figs . 1b and 1c exemplary designs of the nozzle section of the coating system in FIG. la .
  • Fig. 1a shows an exemplary embodiment of a coating system 1 for coating an object 2 , which is designed here as a strip 2 .
  • the coating system 1 designed as a strip coating system has a coating chamber 4 in which a technical vacuum prevails and through which the strip 2 is guided in the direction of the arrow 5 by means of the transport rollers 3a and 3b.
  • the coating system has a device for gas phase deposition of material 6 . This consists of an evaporation section 7 for evaporating the material into the gas phase and a nozzle section 8 , 9 , which is composed of a nozzle 8 and a coupling member 9 serving as an adapter.
  • Material evaporated in the evaporation section 7 embodied as a crucible, for example, is guided through the nozzle section 8 , 9 into the coating chamber 4 , where it reaches the strip 2 and thereby forms the coating.
  • the nozzle section 8 , 9 is designed to superheat the material evaporated in the evaporation section 7 .
  • FIG. 1 b shows an embodiment according to which a coupling element superheater 9 ′ is arranged within the coupling element 9 .
  • Fig. 1c shows an embodiment according to which a nozzle superheater 8' is arranged inside the nozzle 8.
  • FIG. Tests were carried out with a
  • Coating systems have a device for gas-phase deposition of material, as was mentioned, for example, at the beginning and is known from WO 2016/042079.
  • the device for the vapor phase deposition of material has an evaporation section with a pre-evaporation section and a post-evaporation section designed as a crucible, the crucible being designed as a cyclone.
  • the pre-evaporation section has an injection head for preparing the coating material present as the starting material and an injector tube, the injector pipe being designed to conduct the coating material prepared in the injection head to the post-evaporation section and being coupled to the post-evaporation section.
  • Zinc was chosen as the starting material.
  • the pre-evaporation was carried out in such a way that the zinc inside the injector tube never fell below its melting point of 419.53 degrees Celsius; to ensure this, a temperature of 600 degrees Celsius was maintained inside the injector tube.
  • Pre-tempered nitrogen was used as the spray gas.
  • the crucible and the nozzle are connected with a coupling member designed as a tube. To overheat, its walls must be above the temperature determined above. In this case, 1200 degrees Celsius was empirically used for the local pressure conditions present both in the crucible and in the nozzle determined to be sufficient, which corresponds to between 20 and 30 percent above the vaporization temperature of Zn on the Kelvin scale.
  • the connected nozzle is also heated to 1200 degrees Celsius in the connection to the coupling member. Zn then emerges superheated from the nozzle outlet of the nozzle and it was observed that premature condensation of Zn before it hits the object to be coated could be effectively avoided.
  • a technical vacuum with a gas pressure of approximately 50 mbar N 2 was present inside the coating chamber after the spray gas had been switched on.
  • the tube and the nozzle used consisted of graphite and were inductively heated from the outside.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

L'invention concerne une installation de revêtement (1) pour le revêtement d'un objet (2), par exemple une bande d'acier. L'installation de revêtement (1) comprend : - une chambre de revêtement (4) et - un dispositif pour le dépôt chimique en phase vapeur de matière (6), comprenant une section d'évaporation (7) et une section de buse (8, 9). La bande d'acier est menée, par exemple, à l'aide de rouleaux de transport (3a, 3b) dans la direction de la flèche (5) à travers la chambre de revêtement (4). La section de buse (8, 9) est conçue pour surchauffer la matière qui sort de celle-ci en une phase gazeuse surchauffée. L'invention concerne en outre un procédé pour le revêtement d'un objet et une utilisation.
EP22733045.3A 2021-08-02 2022-06-09 Installation de revêtement pour le revêtement d'un objet, procédé pour le revêtement d'un objet et utilisation Pending EP4381113A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102021120004.0A DE102021120004A1 (de) 2021-08-02 2021-08-02 Beschichtungsanlage zur Beschichtung eines Gegenstands, Verfahren zum Beschichten eines Gegenstands sowie Verwendung
PCT/EP2022/065710 WO2023011782A1 (fr) 2021-08-02 2022-06-09 Installation de revêtement pour le revêtement d'un objet, procédé pour le revêtement d'un objet et utilisation

Publications (1)

Publication Number Publication Date
EP4381113A1 true EP4381113A1 (fr) 2024-06-12

Family

ID=82163468

Family Applications (1)

Application Number Title Priority Date Filing Date
EP22733045.3A Pending EP4381113A1 (fr) 2021-08-02 2022-06-09 Installation de revêtement pour le revêtement d'un objet, procédé pour le revêtement d'un objet et utilisation

Country Status (5)

Country Link
EP (1) EP4381113A1 (fr)
KR (1) KR20240005955A (fr)
CN (1) CN117769608A (fr)
DE (1) DE102021120004A1 (fr)
WO (1) WO2023011782A1 (fr)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3447951A (en) * 1965-10-20 1969-06-03 Pennsalt Chemicals Corp Cyclone separation of particles in vapor coating
DE10007059A1 (de) 2000-02-16 2001-08-23 Aixtron Ag Verfahren und Vorrichtung zur Herstellung von beschichteten Substraten mittels Kondensationsbeschichtung
US20070178225A1 (en) 2005-12-14 2007-08-02 Keiji Takanosu Vapor deposition crucible, thin-film forming apparatus comprising the same, and method of producing display device
EP3194635B1 (fr) 2014-09-18 2019-11-20 ThyssenKrupp Steel Europe AG Dispositif de formation de revêtements de surfaces d'un élément, d'un matériau en forme de bande ou d'un outil
WO2019239192A1 (fr) * 2018-06-15 2019-12-19 Arcelormittal Installation de dépôt sous vide et procédé de revêtement d'un substrat
WO2020082282A1 (fr) 2018-10-25 2020-04-30 China Triumph International Engineering Co., Ltd. Appareil de dépôt en phase vapeur et utilisation de celui-ci

Also Published As

Publication number Publication date
CN117769608A (zh) 2024-03-26
DE102021120004A1 (de) 2023-02-02
WO2023011782A1 (fr) 2023-02-09
KR20240005955A (ko) 2024-01-12

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