EP4267532A1 - Matériau céramique, poudre et système de couche - Google Patents

Matériau céramique, poudre et système de couche

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Publication number
EP4267532A1
EP4267532A1 EP22702398.3A EP22702398A EP4267532A1 EP 4267532 A1 EP4267532 A1 EP 4267532A1 EP 22702398 A EP22702398 A EP 22702398A EP 4267532 A1 EP4267532 A1 EP 4267532A1
Authority
EP
European Patent Office
Prior art keywords
weight
oxide
material according
ceramic material
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP22702398.3A
Other languages
German (de)
English (en)
Inventor
Arturo Flores Renteria
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Energy Global GmbH and Co KG
Original Assignee
Siemens Energy Global GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Energy Global GmbH and Co KG filed Critical Siemens Energy Global GmbH and Co KG
Publication of EP4267532A1 publication Critical patent/EP4267532A1/fr
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/486—Fine ceramics
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/62222—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products obtaining ceramic coatings
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
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    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • C23C28/3455—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer
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    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C23C4/11—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134—Plasma spraying
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3206—Magnesium oxides or oxide-forming salts thereof
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    • C04B2235/34—Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3418—Silicon oxide, silicic acids or oxide forming salts thereof, e.g. silica sol, fused silica, silica fume, cristobalite, quartz or flint

Definitions

  • the invention relates to a ceramic material and a powder that can be used for ceramic layer systems.
  • Ceramics generally have a high temperature stability and are therefore often used as ceramic coatings on high-temperature components, such as for turbines, in particular for gas turbines.
  • the object is achieved by a ceramic material according to claim 1, a ceramic powder according to claim 17 and a layer system according to claim 18.
  • Ceramic layers based on zirconium oxide with stabilizers are known, with stabilized or fully stabilized zirconium oxide often being used here because of its better thermal stability.
  • the aim of the idea is to use partially stabilized zirconium oxide with improved stability, in particular thermal stability, namely a ceramic material based on zirconium oxide (ZrCh), having: 1.0% by weight to 8.0% by weight Basic stabilizers: in particular with 2.0% to 8.0% by weight base stabilizers; yttrium oxide (Y2O3), and/or
  • hafnium oxide HfCh
  • Y2O3 yttrium oxide
  • E ⁇ Ck erbium oxide
  • Ytterbium oxide with a proportion of 0.2% by weight to 20.0% by weight, in particular with 1.0% by weight to 10.0% by weight, very particularly with 2.0% by weight to 9.0% by weight, and each optional aluminum oxide (AI2O3) 0.1% - 2.0%, and permitted impurity levels (each max.): calcium oxide (CaO) 0.1% - 0.2%,
  • Iron oxide (Fe203) 0.1% - 0.2%
  • Yttrium oxide (Y2O3) and hafnium oxide (HfCk) are preferably used as base stabilizers. Likewise, only yttrium oxide (Y2O3) can be used as a base stabilizer.
  • the ceramic material preferably comprises 2.5% to 5.5% by weight yttrium oxide (Y2O3), in particular 3.0% to 5.0% by weight yttrium oxide (Y2O3), especially 3.5% to 4.0% by weight. % yttria (Y2O3) to achieve good phase stability.
  • the ceramic material also preferably has hafnium oxide (HfO 2 ) > 2.0% by weight to 4.0% by weight, in particular 2.2% by weight to 4.0% by weight hafnium oxide (HfO 2 ), very particularly 2.4% by weight to 3 .0% by weight hafnium oxide (HfO2).
  • hafnium oxide (HfO 2 ) content is 0.2% by weight to ⁇ 2.0% by weight, in particular 0.2% by weight to 1.8% by weight hafnium oxide (HfCk), especially 0 .2% by weight to 1.6% by weight of hafnium oxide (HfO 2 ).
  • Secondary particles such as aluminum oxide (AI2O3) can be present with a proportion of 0.2% by weight to 1.5% by weight aluminum oxide (AI2O3), in particular from 0.2% by weight to 1.2% by weight.
  • the proportion of aluminum oxide (AI2O3) can also be 1.5% by weight to 3.0% by weight aluminum oxide (AI2O3), in particular >2.0% by weight to 2.5% by weight aluminum oxide (AI2O3).
  • ytterbium oxide (Yb 2 0 3) is preferably used as additional stabilizer.
  • compositions are therefore Zr0 2 -Hf0 2 -Y 2 03-Yb 2 C>3 or also Zr0 2 -Hf0 2 -Y 2 03-Yb 2 03-Al 2 03.
  • the weight of the additional stabilizers is preferably 5.5% by weight to 8.5% by weight ytterbium oxide (Yb 2 0 3) , in particular 6.0% by weight and to 8.0% by weight ytterbium oxide (Yb 2 0 3) , especially 6 .5% by weight to 7.5% by weight ytterbium oxide (Yb 2 0 3) , or
  • a ceramic powder has, in particular, consists of a composition of a material according to the above lists with or without a binder.
  • An advantageous layer system has a metallic sub strate, optionally a metallic adhesion promoter layer and at least one ceramic layer based on the ceramic material according to the invention.
  • a metallic adhesion promoter layer between the ceramic mix layer and the metallic substrate is used for advantageous adhesion.
  • a ceramic sub-layer (not the TGO) under the ceramic mix layer made of a ceramic material is at least 20% thinner and preferably has 8YSZ, ie with 3 mol% to 4 mol% yttria-stabilized zirconium oxide.
  • Yttrium oxide is definitely used as a stabilizer.
  • This ceramic material can be produced as a powder, so that further additives can be present, such as when using abrasive layers which have cubic boron nitride or other abrasive particles.
  • a ceramic layer 10 is applied to metal, with nickel or cobalt-based superalloys preferably being used, a metallic adhesive layer 7 forming aluminum oxide being present in between.
  • the metallic adhesion promoter layer is preferably an aluminide, platinum aluminide or represents a NiCoCrAl layer as the basis.
  • the ceramic layer made of the ceramic material can be produced by means of EB-PVD, plasma spraying (APS, . . . ) and has a columnar structure or a DVC (dense decay cracked) structure.
  • the layer 10 preferably has a layer thickness of 100 ⁇ m to 1000 ⁇ m.
  • this ceramic layer 10 can also have a ceramic sub-layer 13 which clearly differs from the ceramic layer 16, ie has no Yb2Ü3 and/or no Er2 ⁇ 03.
  • the layer thickness of the ceramic sub-layer 13 is at least 20% thinner than that of the ceramic material of the ceramic layer 16 according to the invention.
  • the ceramic sub-layer has 8YSZ, i.e. with 3mol% to 4mol% yttrium-stabilized zirconium oxide.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Structural Engineering (AREA)
  • Composite Materials (AREA)
  • Compositions Of Oxide Ceramics (AREA)

Abstract

Matériau céramique amélioré destiné à l'isolation thermique, obtenu au moyen de la sélection suivante de stabilisants spécifiques et des proportions adaptées : une base de dioxyde de zirconium (ZrO2) comprenant : 1,0 % en poids à 9,0 % en poids de stabilisants de base : de l'oxyde d'yttrium (Y2O3), de l'oxyde d'hafnium (HfO2), au moins de l'oxyde d'yttrium (Y2O3) étant utilisé, et au moins l'un des stabilisants supplémentaires : de l'oxyde d'erbium (Er2O3) et/ou de l'oxyde d'ytterbium (Yb2O3) selon une proportion de 0,2 % en poids à 20 % en poids.
EP22702398.3A 2021-02-18 2022-01-13 Matériau céramique, poudre et système de couche Pending EP4267532A1 (fr)

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GB9617267D0 (en) * 1996-08-16 1996-09-25 Rolls Royce Plc A metallic article having a thermal barrier coating and a method of application thereof
US6887595B1 (en) * 2003-12-30 2005-05-03 General Electric Company Thermal barrier coatings having lower layer for improved adherence to bond coat
DE102017005800A1 (de) * 2017-06-21 2018-12-27 H.C. Starck Surface Technology and Ceramic Powders GmbH Zirkoniumoxidpulver zum thermischen Spritzen
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KR20230146058A (ko) 2023-10-18
US20240109812A1 (en) 2024-04-04
DE102021201565A1 (de) 2022-08-18

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