EP4155434A1 - Procédé de démarrage pour système de fabrication de solution électrolytique d'acide sulfurique - Google Patents
Procédé de démarrage pour système de fabrication de solution électrolytique d'acide sulfurique Download PDFInfo
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- EP4155434A1 EP4155434A1 EP20936154.2A EP20936154A EP4155434A1 EP 4155434 A1 EP4155434 A1 EP 4155434A1 EP 20936154 A EP20936154 A EP 20936154A EP 4155434 A1 EP4155434 A1 EP 4155434A1
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- EP
- European Patent Office
- Prior art keywords
- sulfuric acid
- solution
- electrolytic
- acid solution
- concentration
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- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 title claims abstract description 490
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 80
- 238000000034 method Methods 0.000 title claims description 67
- 230000001590 oxidative effect Effects 0.000 claims abstract description 63
- 150000004968 peroxymonosulfuric acids Chemical class 0.000 claims abstract description 62
- 229910001868 water Inorganic materials 0.000 claims abstract description 33
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 30
- QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 claims abstract description 29
- 238000005868 electrolysis reaction Methods 0.000 claims abstract description 21
- 230000007423 decrease Effects 0.000 claims abstract description 8
- 239000007788 liquid Substances 0.000 claims description 58
- 230000008569 process Effects 0.000 claims description 27
- 230000007246 mechanism Effects 0.000 claims description 22
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 20
- 238000012545 processing Methods 0.000 claims description 15
- 238000001816 cooling Methods 0.000 claims description 8
- 230000004044 response Effects 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 6
- 238000005265 energy consumption Methods 0.000 abstract description 6
- 239000000243 solution Substances 0.000 description 197
- 238000005530 etching Methods 0.000 description 22
- 238000007747 plating Methods 0.000 description 21
- 239000007800 oxidant agent Substances 0.000 description 17
- 238000012360 testing method Methods 0.000 description 13
- 230000004048 modification Effects 0.000 description 12
- 238000012986 modification Methods 0.000 description 12
- JRKICGRDRMAZLK-UHFFFAOYSA-N peroxydisulfuric acid Chemical compound OS(=O)(=O)OOS(O)(=O)=O JRKICGRDRMAZLK-UHFFFAOYSA-N 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 11
- 239000000463 material Substances 0.000 description 11
- 239000011347 resin Substances 0.000 description 10
- 229920005989 resin Polymers 0.000 description 10
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 9
- 238000005406 washing Methods 0.000 description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 238000004448 titration Methods 0.000 description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 229920003023 plastic Polymers 0.000 description 5
- 239000004033 plastic Substances 0.000 description 5
- DAFQZPUISLXFBF-UHFFFAOYSA-N tetraoxathiolane 5,5-dioxide Chemical compound O=S1(=O)OOOO1 DAFQZPUISLXFBF-UHFFFAOYSA-N 0.000 description 5
- 239000000654 additive Substances 0.000 description 4
- 230000000996 additive effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 3
- 239000003317 industrial substance Substances 0.000 description 3
- 229910052740 iodine Inorganic materials 0.000 description 3
- 239000011630 iodine Substances 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- FHHJDRFHHWUPDG-UHFFFAOYSA-N peroxysulfuric acid Chemical compound OOS(O)(=O)=O FHHJDRFHHWUPDG-UHFFFAOYSA-N 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 238000001994 activation Methods 0.000 description 2
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 238000010790 dilution Methods 0.000 description 2
- 239000012895 dilution Substances 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- JRKICGRDRMAZLK-UHFFFAOYSA-L persulfate group Chemical group S(=O)(=O)([O-])OOS(=O)(=O)[O-] JRKICGRDRMAZLK-UHFFFAOYSA-L 0.000 description 2
- 238000007781 pre-processing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- LCPVQAHEFVXVKT-UHFFFAOYSA-N 2-(2,4-difluorophenoxy)pyridin-3-amine Chemical compound NC1=CC=CN=C1OC1=CC=C(F)C=C1F LCPVQAHEFVXVKT-UHFFFAOYSA-N 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000001464 adherent effect Effects 0.000 description 1
- 229910001870 ammonium persulfate Inorganic materials 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 1
- 238000001739 density measurement Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- JEGUKCSWCFPDGT-UHFFFAOYSA-N h2o hydrate Chemical compound O.O JEGUKCSWCFPDGT-UHFFFAOYSA-N 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- -1 hydrogen ions Chemical class 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- ZMLDXWLZKKZVSS-UHFFFAOYSA-N palladium tin Chemical compound [Pd].[Sn] ZMLDXWLZKKZVSS-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000005375 photometry Methods 0.000 description 1
- 239000012286 potassium permanganate Substances 0.000 description 1
- USHAGKDGDHPEEY-UHFFFAOYSA-L potassium persulfate Chemical compound [K+].[K+].[O-]S(=O)(=O)OOS([O-])(=O)=O USHAGKDGDHPEEY-UHFFFAOYSA-L 0.000 description 1
- 238000004313 potentiometry Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- CHQMHPLRPQMAMX-UHFFFAOYSA-L sodium persulfate Substances [Na+].[Na+].[O-]S(=O)(=O)OOS([O-])(=O)=O CHQMHPLRPQMAMX-UHFFFAOYSA-L 0.000 description 1
- AKHNMLFCWUSKQB-UHFFFAOYSA-L sodium thiosulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=S AKHNMLFCWUSKQB-UHFFFAOYSA-L 0.000 description 1
- 239000012086 standard solution Substances 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B1/00—Electrolytic production of inorganic compounds or non-metals
- C25B1/01—Products
- C25B1/22—Inorganic acids
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B1/00—Electrolytic production of inorganic compounds or non-metals
- C25B1/01—Products
- C25B1/28—Per-compounds
- C25B1/29—Persulfates
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B15/00—Operating or servicing cells
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B15/00—Operating or servicing cells
- C25B15/02—Process control or regulation
- C25B15/021—Process control or regulation of heating or cooling
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B15/00—Operating or servicing cells
- C25B15/02—Process control or regulation
- C25B15/023—Measuring, analysing or testing during electrolytic production
- C25B15/025—Measuring, analysing or testing during electrolytic production of electrolyte parameters
- C25B15/027—Temperature
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B15/00—Operating or servicing cells
- C25B15/08—Supplying or removing reactants or electrolytes; Regeneration of electrolytes
- C25B15/087—Recycling of electrolyte to electrochemical cell
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
- C25B9/00—Cells or assemblies of cells; Constructional parts of cells; Assemblies of constructional parts, e.g. electrode-diaphragm assemblies; Process-related cell features
- C25B9/13—Single electrolytic cells with circulation of an electrolyte
Definitions
- the present invention relates to a startup method for a system for manufacturing an electrolytic sulfuric acid solution suitable for an etching process that is performed prior to the washing and modification of the surfaces of various materials, in particular performed prior to the plating process for the surfaces of plastic materials.
- Sulfuric acid solution containing a persulfuric acid component such as peroxomonosulfuric acid or peroxodisulfuric acid has extremely strong oxidizing properties. Using this strong oxidizing properties, sulfuric acid solution containing a persulfuric acid component is used for washing and surface modification of various materials such as metals, silicon, glass, and plastics.
- Sulfuric acid solution containing a persulfuric acid component can be generated by electrolyzing a solution composed mainly of a sulfuric acid component.
- a system for manufacturing an oxidizing solution containing a persulfuric acid component generated by electrolyzing the solution composed mainly of a sulfuric acid component (the oxidizing solution may be referred to as an electrolytic sulfuric acid solution, hereinafter) is composed, for example, of a storage tank that stores the electrolytic sulfuric acid solution, an electrolytic cell and a DC power source, a pipe equipped with a circulation pump for circulating the solution between the storage tank and the electrolytic cell, a heater and/or heat exchanger for heating/cooling the circulating liquid, and other necessary components.
- Patent Document 1 describes, as a method of manufacturing the electrolytic sulfuric acid using such a system, a technique for manufacturing the electrolytic sulfuric acid to be applied to an etching process for a resin surface performed for plating the surface of a plastic material.
- Patent Document 1 further describes generating a persulfuric acid solution such as peroxodisulfuric acid through filling a cell with sulfuric acid having a predetermined concentration in the initial state and energizing an anode and a cathode with a predetermined current from a DC power source unit to electrolyze the sulfuric acid.
- a persulfuric acid solution such as peroxodisulfuric acid
- Patent Document 1 also describes, as a comparative example, an example in which a mixed solution of sulfuric acid and hydrogen peroxide is used as substitute for the electrolytic sulfuric acid solution to etch the surface of an ABS resin, and teaches that the comparative example allows a plating film to be formed, but has a problem in the long-term stability of the process due to the consumption of hydrogen peroxide.
- the washing and modification processes for the surfaces of various materials using an electrolytic sulfuric acid solution is a very effective method in terms of the influence on environment.
- the system for manufacturing an electrolytic sulfuric acid solution is not in a state in which the washing and modification processes can be immediately performed for the surfaces of various materials, such as during initial startup of the system after its completion, during startup of the system after replacement of the electrolytic sulfuric acid solution, or during re-startup of the system when the concentration of persulfuric acid that is an effective component in the electrolytic sulfuric acid solution decreases due to shutdown of the system.
- such a problem is that, in a manufacturing line for plated components that uses an electrolytic sulfuric acid solution for the etching process for the resin surface performed to plate the plastic material surface, the electrolysis has to be continued until liquid properties for providing effective etching effects can be obtained while circulating the sulfuric acid solution adjusted to a predetermined concentration through the electrolytic cell after re-startup when replacing the etchant due to periodic check of the etching tank, etc. or after re-startup of the electrolytic sulfuric acid solution manufacturing system; therefore, it takes a long time to start manufacturing plated components, and a large amount of energy is consumed before starting to manufacture plated products.
- Such problems are particularly conspicuous when the amount of solution held in the electrolytic sulfuric acid solution manufacturing system is large, such as when the volume of an etching tank for a pre-plating preprocess is large.
- the present invention has been made in view of the above problems, and an object of the present invention is to provide a startup method for an electrolytic sulfuric acid solution manufacturing system that can complete, in a short time, the startup of the system for manufacturing an electrolytic sulfuric acid solution containing a persulfuric acid component generated by electrolyzing sulfuric acid and can reduce the energy consumption.
- the present invention provides a startup method for an electrolytic sulfuric acid solution manufacturing system, the system manufacturing an oxidizing solution containing a persulfuric acid component generated by electrolyzing a solution composed mainly of a sulfuric acid component, the startup method comprising: adding hydrogen peroxide water to all or part of the solution composed mainly of the sulfuric acid component present in the system to adjust oxidizing power of the solution composed mainly of the sulfuric acid component to an enhanced state; and supplying the solution to an electrolytic cell to perform electrolysis (Invention 1).
- startup of the system may preferably take place either during an initial operation after completion of the system, or after replacement of the oxidizing solution containing the persulfuric acid component in the system, or during an operation after the concentration of the persulfuric acid component in the oxidizing solution stored in the system decreases due to shutdown of the system (Invention 2).
- the oxidant concentration (persulfuric acid concentration) of the solution composed mainly of the sulfuric acid component held in the system is lower than the target oxidant concentration of the oxidizing solution.
- the oxidizing solution having the target oxidant concentration can be produced in a short time through adding hydrogen peroxide water to the solution composed mainly of the sulfuric acid component in the system to adjust the oxidizing power to an enhanced state and then performing the electrolysis in the electrolytic cell.
- the solution composed mainly of a sulfuric acid component held in the system encompasses not only a solution that contains no persulfuric acid component but also an oxidizing solution in a state in which the oxidant concentration (persulfuric acid concentration) decreases to a value lower than a target value.
- the startup method may preferably comprise further adding sulfuric acid and/or water to all or part of the solution composed mainly of the sulfuric acid component present in the system (Invention 3).
- both the oxidant concentration and the sulfuric acid concentration of the solution composed mainly of the sulfuric acid component present in the system can be respective suitable concentrations for the intended processing.
- the startup method may preferably comprise: a concentration adjustment step of adding the hydrogen peroxide water, sulfuric acid, and/or water in response to a measured value of a sulfuric acid concentration and/or a persulfuric acid concentration in the solution composed mainly of the sulfuric acid component present in the system; an electrolytic processing step of electrolyzing the solution in response to the measured value of each concentration so that the persulfuric acid concentration becomes a target value; and a temperature adjustment step of heating or cooling the solution in response to a measured value of temperature so that the temperature of the oxidizing solution becomes a target value (Invention 4).
- the oxidizing solution containing a persulfuric acid component having a persulfuric acid concentration, a sulfuric acid concentration, and a temperature suitable for the intended processing can be efficiently supplied in a short time after the startup of the system.
- the system may preferably comprise: a storage tank that stores the oxidizing solution; an electrolytic cell that processes the oxidizing solution; a circulation pipe provided with a liquid feed mechanism for circulating the solution between the storage tank and the electrolytic cell; a control mechanism that controls the temperature of the oxidizing solution in the storage tank and/or the temperature of the solution supplied to the electrolytic cell; a hydrogen peroxide addition mechanism; and an addition mechanism for sulfuric acid and/or water (Invention 5).
- the solution composed mainly of the sulfuric acid component is electrolyzed in the electrolytic cell to generate an oxidizing solution containing a persulfuric acid component, the oxidizing solution is stored in the storage tank, the oxidizing solution is circulated between the storage tank and the electrolytic cell, and the temperature control is performed when the desired oxidant concentration and sulfuric acid concentration are achieved.
- the oxidizing solution which contains the persulfuric acid component having the desired sulfuric acid concentration, persulfuric acid concentration, and temperature, to be manufactured.
- the electrolytic sulfuric acid solution manufacturing system when the electrolytic sulfuric acid solution manufacturing system is started up, it is possible to significantly reduce the time and energy consumption required for startup of the electrolytic sulfuric acid solution manufacturing system through adding the hydrogen peroxide water from the hydrogen peroxide water addition mechanism to the solution composed mainly of the sulfuric acid component present in the system to bring the persulfuric acid concentration of the oxidizing solution close to the target value, adding the sulfuric acid and/or water from the addition mechanism for sulfuric acid and/or water thereby to adjust the sulfuric acid concentration to prepare a liquid to be electrolyzed, and supplying this to the electrolytic cell for electrolytic processing.
- the startup method for an electrolytic sulfuric acid solution manufacturing system of the present invention it is possible to significantly reduce the time and energy consumption required for startup of the electrolytic sulfuric acid solution manufacturing system through adding hydrogen peroxide water to all or part of the solution composed mainly of the sulfuric acid component, which is present in the system when the electrolytic sulfuric acid solution manufacturing system is started up, to adjust the oxidizing power of the solution composed mainly of the sulfuric acid component to an enhanced state and then performing the electrolysis in the electrolytic cell.
- the electrolytic sulfuric acid solution to be manufactured is an oxidizing solution that contains a persulfuric acid component generated by electrolyzing a solution composed mainly of a sulfuric acid component.
- peroxodisulfuric acid is generated in accordance with Reaction Formula (1) as below. 2HSO 4 - ⁇ H 2 S 2 O 8 +2e - ... (1)
- the electrolytic liquid of sulfuric acid contains mixed oxidizing substances such as peroxodisulfuric acid, peroxomonosulfuric acid (here, peroxodisulfuric acid and peroxomonosulfuric acid are collectively referred to as persulfuric acid), and hydrogen peroxide. All of these have strong oxidizing power.
- FIG. 1 illustrates an electrolytic sulfuric acid solution manufacturing system according to a first embodiment to which the startup method for an electrolytic sulfuric acid solution manufacturing system of the present invention can be applied.
- an electrolytic sulfuric acid solution manufacturing system 1 includes a storage tank 2 that receives an electrolytic sulfuric acid solution 3 and a heater 4 as a temperature control mechanism disposed in the storage tank 2.
- the storage tank 2 is provided with a circulation pipe 5 that exits from the bottom portion of the storage tank 2 and returns to the storage tank 2.
- the circulation pipe 5 is provided with a circulation pump 6 as a liquid feed mechanism, a heat exchanger 7 for cooling as a temperature control mechanism, and an electrolytic cell 8 connected to a DC power source 9 in this order from the outlet side (base end side).
- An anode electrode 8A, a bipolar electrode 8B, and a cathode electrode 8C are provided in the electrolytic cell 8.
- a method of manufacturing the electrolytic sulfuric acid solution 3 using the electrolytic sulfuric acid solution manufacturing system 1 as described above will then be described.
- a solution composed mainly of sulfuric acid is put into the storage tank 2 and supplied to the electrolytic cell 8 through the circulation pipe 5 by the circulation pump 6.
- the solution composed mainly of sulfuric acid is energized with a predetermined current from the DC power source 9 to electrolyze the solution, thereby manufacturing an oxidizing solution (electrolytic sulfuric acid solution 3) containing a persulfuric acid component such as peroxodisulfuric acid generated by the electrolysis.
- an oxidizing solution electrolytic sulfuric acid solution 3
- the electrolytic sulfuric acid solution 3 is returned to the storage tank 2 through the circulation pipe 5, and this is repeated for circulation.
- the current amount in the electrolytic cell 8 may be controlled so that the concentration of persulfuric acid such as peroxodisulfuric acid generated by the electrolytic sulfuric acid solution 3 becomes a desired concentration in accordance with the processing using the electrolytic sulfuric acid solution 3.
- intended processing such as etching of a resin molded article may be performed.
- the electrolytic sulfuric acid solution manufacturing system 1 when the electrolytic sulfuric acid solution manufacturing system 1 is started up, specifically, such as during an initial operation after completion of the electrolytic sulfuric acid solution manufacturing system 1, after replacement of the electrolytic sulfuric acid solution 3 in the system 1, or during an operation after the concentration of the persulfuric acid component in the electrolytic sulfuric acid solution 3 stored in the system decreases due to shutdown of the system 1, the electrolytic sulfuric acid solution 3 stored in the storage tank 2 cannot be used without any modification because the concentration of the persulfuric acid component is lower than a target concentration for the desired processing.
- adjustment is performed so that the desired persulfuric acid concentration and sulfuric acid concentration are reached in a short time when starting up the electrolytic sulfuric acid solution manufacturing system 1 (concentration adjustment step).
- This adjustment may include, for example, adding hydrogen peroxide water and, if necessary, further adding sulfuric acid and/or water, thereby manufacturing a liquid to be electrolyzed in which respective ratios (concentrations) are adjusted.
- persulfuric acid concentration can be adjusted by mixing sulfuric acid and hydrogen peroxide to generate a persulfuric acid (peroxomonosulfuric acid) component having strong oxidizing properties through a reaction of Formula (4) as below.
- hydrogen peroxide water having any concentration, such as 35 wt% hydrogen peroxide water used as a general industrial chemical, can be used, but it may be preferred to use a high-concentration hydrogen peroxide water because it requires only a small additive amount to achieve a desired value of the oxidant concentration in the electrolytic sulfuric acid solution 3, and general industrial chemicals and EL grade chemicals for electronics industries can be used properly.
- the sulfuric acid used in the reaction of the above formula (4) may preferably have a concentration of 70 to 98 wt%, but general industrial chemicals and EL grade chemicals for electronics industries can be used properly.
- the liquid has to be diluted, but if hydrogen peroxide water is used for this dilution, the oxidizing properties of the liquid to be electrolyzed may become unduly high, so in such a case, it may be preferred to add water for dilution.
- City water such as tap water can be used for diluting sulfuric acid, but it may be desired to use pure water to avoid various cations and anions from being mixed in, and ultrapure water can also be used depending on the target objects applied to washing or modification of the surfaces of various materials.
- the method of adding these components is not particularly limited, but a preferred method may include preliminarily dissolving concentrated sulfuric acid in water in accordance with the final concentration of sulfuric acid, filling the storage tank 2 of the electrolytic sulfuric acid solution manufacturing system 1 with the sulfuric acid solution, and slowly mixing hydrogen peroxide water to prepare the liquid to be electrolyzed while paying attention to sudden reactions. Additionally or alternatively, another method may be employed to fill the storage tank 2 with the liquid to be electrolyzed, which is obtained by separately mixing a concentration-adjusted sulfuric acid solution and hydrogen peroxide water. In the stage of this operation, the circulation pump 6 is operated and the electrolytic cell 8 is energized to start electrolysis of the circulating liquid (liquid to be electrolyzed).
- the additive amount of hydrogen peroxide water, sulfuric acid, and water may be determined based on the results of measuring the properties of the electrolytic sulfuric acid solution 3 at startup.
- an oxidant concentration meter and/or a sulfuric acid concentration meter may be installed in the storage tank 2 and/or the circulation pipe 5, and the additive amount of hydrogen peroxide water, sulfuric acid, or pure water may be determined based on the measurement results.
- an operation for increasing the persulfuric acid concentration (oxidant concentration) may be performed to add hydrogen peroxide water and, if necessary, sulfuric acid and/or water.
- the method of measuring the persulfuric acid concentration is not particularly limited, provided that it is a method capable of measuring a correct value, and an absorption photometry method, a redox titration method, a Raman spectrometric method, a polarographic method, a potentiometric method, etc. can be used.
- the method of measuring the sulfuric acid concentration is not particularly limited, provided that it is a method capable of measuring a correct value, and a density measurement method, a neutralization titration method, an ultrasonic propagation velocity measurement method, a pack testing method, etc. can be used.
- the sulfuric acid solution (liquid to be electrolyzed) in which the persulfuric acid concentration (oxidant concentration) is improved is supplied to the electrolytic cell 8 and electrolyzed, and the electrolysis is continued, if necessary while circulating the solution, until and the persulfuric acid concentration and the sulfuric acid concentration reach the target values (electrolytic processing step). Furthermore, the temperature of the electrolytic sulfuric acid solution 3 in the storage tank 2 may be adjusted to the target temperature by heating with the heater 4 so as to reach a desired temperature (temperature adjustment step).
- a second embodiment of the present invention will then be described.
- the second embodiment exhibits the same effects as those in the previously described first embodiment except that the electrolytic sulfuric acid solution manufacturing system 1 is different.
- FIG. 2 illustrates an electrolytic sulfuric acid solution manufacturing system according to the second embodiment to which the startup method for an electrolytic sulfuric acid solution manufacturing system of the present invention can be applied.
- the electrolytic sulfuric acid solution manufacturing system 1 is provided with a storage tank 2 that receives an electrolytic sulfuric acid solution 3, a pipe 5A that exits from the bottom portion of the storage tank 2 and communicates with an intermediate tank 10, and a pipe 5B that returns from the intermediate tank 10 to the storage tank 2.
- the pipe 5A is provided with a liquid feed pump 6A as a liquid feed mechanism while the pipe 5B is provided with a liquid feed pump 6B as a liquid feed mechanism and a heat exchanger 7A for cooling as a temperature control mechanism.
- the bottom portion of the intermediate tank 10 is provided with a circulation pipe 5C that exits from the bottom portion of the intermediate tank 10 and returns to the intermediate tank 10.
- the circulation pipe 5C is provided with a circulation pump 6C as a liquid feed mechanism, a heat exchanger 7B for cooling as a temperature control mechanism, and an electrolytic cell 8 connected to a DC power source 9 in this order from the outlet side (base end side).
- An anode electrode 8A, a bipolar electrode 8B, and a cathode electrode 8C are provided in the electrolytic cell 8.
- a method of manufacturing the electrolytic sulfuric acid solution 3 using the electrolytic sulfuric acid solution manufacturing system 1 as described above will then be described.
- a solution composed mainly of sulfuric acid is put into the intermediate tank 10 and supplied from the intermediate tank 10 to the electrolytic cell 8 through the circulation pipe 5C by the circulation pump 6C, and the electrolytic cell 8 is energized with a predetermined current from the DC power source 9 to electrolyze the solution composed mainly of sulfuric acid, thereby manufacturing an oxidizing solution (electrolytic sulfuric acid solution 3) containing a persulfuric acid component such as peroxodisulfuric acid.
- the oxidizing solution (electrolytic sulfuric acid solution 3) may be preferably cooled by the heat exchanger 7B for cooling.
- the electrolytic sulfuric acid solution 3 is returned to the intermediate tank 10 through the circulation pipe 5C and supplied from the pipe 5B to the storage tank 2 by the liquid feed pump 6B.
- it may be preferred to heat the electrolytic sulfuric acid solution 3 by the heat exchanger 7A for heating so that the temperature of the electrolytic sulfuric acid solution 3 becomes a desired temperature in accordance with the processing using the electrolytic sulfuric acid solution 3.
- the current amount in the electrolytic cell 8 may be controlled so that the concentration of persulfuric acid such as peroxodisulfuric acid generated by the electrolytic sulfuric acid solution 3 becomes a desired concentration in accordance with the processing using the electrolytic sulfuric acid solution 3. Then, using the electrolytic sulfuric acid solution 3, intended processing such as etching of a resin molded article may be performed.
- hydrogen peroxide water and, if necessary, sulfuric acid and/or water may be added as in the previously described first embodiment.
- the positions at which the hydrogen peroxide water, sulfuric acid, and/or water are added are not particularly limited, and they can be added to the storage tank 2, the intermediate tank 10, the pipes 5A and 5B, the circulation pipe 5C, etc., but may be generally added to the intermediate tank 10.
- the method of addition is also not particularly limited, and a general-purpose method such as addition using a pump can be applied.
- the liquid to be electrolyzed is prepared by adding hydrogen peroxide water to the sulfuric acid solution
- the electrolytic sulfuric acid solution 3 is made by circulating the liquid to be electrolyzed between the intermediate tank 10 and the electrolytic cell 8 until the liquid has the oxidizing power close to the oxidizing properties required for various processes including a modification process, and then the electrolytic sulfuric acid solution 3 can be adjusted to a predetermined temperature and supplied to the storage tank 2; therefore, the storage tank 2 can be used as a processing tank without any modification.
- the electrolytic sulfuric acid solution 3 can be manufactured in parallel with the desired processing in the storage tank 2.
- the storage tank 2 can be used as an etching tank in a plated component manufacturing line that uses an electrolytic sulfuric acid solution for a resin surface etching process performed for plating the surface of a plastic material.
- the electrolytic sulfuric acid solution 3 having desired concentrations of persulfuric acid and sulfuric acid can be obtained in a short time through preparing the liquid to be electrolyzed having enhanced oxidizing properties by adding hydrogen peroxide water and, if necessary, sulfuric acid and/or water during startup of the electrolytic sulfuric acid solution manufacturing system 1 and energizing the electrolytic cell 8 to perform electrolysis of the liquid to be electrolyzed, and the startup of the electrolytic sulfuric acid solution manufacturing system can be completed in a short time.
- persulfates such as sodium persulfate, potassium persulfate, and ammonium persulfate or other similar salts are not added, and therefore cationic components other than hydrogen ions caused by persulfates are not mixed into the electrolytic sulfuric acid solution. Furthermore, there can also be obtained an effect that handling is easy because only a liquid is added.
- the startup method for an electrolytic sulfuric acid solution manufacturing system of the present invention has been heretofore described with reference to the accompanying drawings, the present invention is not limited to the above embodiments, and various modifications are possible.
- the means for adding sulfuric acid, hydrogen peroxide water, and water may be assisted by a calculation/control means such as a personal computer that controls respective additive amounts to optimum values based on the measurement results of the sulfuric acid concentration meter and the oxidant concentration meter, and the addition of sulfuric acid, hydrogen peroxide water, and water and/or the control of the electrolysis time (circulation time) for the electrolytic cell 8 may be automated.
- the sulfuric acid concentration, persulfuric acid concentration, and temperature of the electrolytic sulfuric acid solution 3 can be varied in accordance with the object to be processed.
- a sulfuric acid concentration of 78 wt%, a persulfuric acid concentration of 7 g/L as S 2 O 8 , and a temperature of 60°C were set as the liquid properties of the electrolytic sulfuric acid solution 3 containing a persulfuric acid component used for resin etching as preprocessing for plating an ABS resin molded article, and the electrolytic sulfuric acid solution 3 was manufactured by the following steps using the electrolytic sulfuric acid solution manufacturing system 1 illustrated in FIG.1 .
- the electrolytic cell 8 was energized with a current of 20 A applied between the anode electrode 8A and the cathode electrode 8C from the DC power source 9 to perform electrolysis of the circulating sulfuric acid solution.
- As the anode electrode 8A, the cathode electrode 8C, and the bipolar electrode 8B electrodes obtained by forming diamond films on the surfaces of silicon wafers (diamond electrodes) were used.
- the electrode areas of the anode electrode 8A and the cathode electrode 8C were both set to 5.2 dm 2 . Then, the circulating liquid (sulfuric acid solution) passed through the electrolytic cell 8 was returned to the storage tank 2.
- the persulfuric acid concentration in the circulating liquid was appropriately measured, and the electrolysis in the electrolytic cell 8 was continued while circulating the liquid until the properties of the circulating liquid would reach the liquid properties used for etching set as above, thereby manufacturing the electrolytic sulfuric acid solution 3.
- the electrolytic sulfuric acid solution 3 in the storage tank 2 was heated to a set temperature (60°C) using an electric heater (heater 4) installed in the storage tank 2.
- the persulfuric acid concentration was obtained from the difference between the oxidant concentration measured by an iodine titration method and the oxidant concentration measured by a permanganic acid titration method.
- the iodine titration method refers to a method that includes adding KI to a small amount of a measurement target liquid to liberate I 2 , titrating the I 2 with a Na 2 S 2 O 3 standard solution to obtain the amount of I 2 , and obtaining an oxidant concentration from the amount of I 2 , and the total oxidant component concentration is measured.
- the permanganic acid titration refers to a measurement method in which a small amount of a measurement target liquid is titrated with potassium permanganate, and only the hydrogen peroxide concentration in the measurement target liquid can be obtained.
- the persulfuric acid concentration is calculated by subtracting the oxidant concentration corresponding to the hydrogen peroxide concentration from the total oxidant concentration obtained by the iodine titration method.
- Etching was performed by immersing an ABS resin test piece (BULKSAM TM-25, available from Techno-UMG Co., Ltd.: 40 mm ⁇ 130 mm ⁇ t3 mm) in the electrolytic sulfuric acid solution 3 manufactured as described above for 10 minutes. Specifically, the test piece attached to a jig was immersed in the storage tank 2. Then, the etched test piece was immersed in warm water at 50°C for 10 minutes, and then washed with water and further immersed in a neutralizing liquid (concentrated hydrochloric acid 50 mL/L, 35°C) for 1 minute.
- a neutralizing liquid concentrated hydrochloric acid 50 mL/L, 35°C
- the test piece was immersed in a palladium-tin colloidal catalyst liquid (palladium concentration 0.11 g/L, tin concentration 10.7 g/L, concentrated hydrochloric acid 180 mL/L, 40°C) for 2 minutes, washed with water, and then immersed in an activation liquid (concentrated hydrochloric acid 100 mL/L, 40°C) for 10 minutes to perform the activation process.
- an activation liquid concentrated hydrochloric acid 100 mL/L, 40°C
- the plating process was performed by immersing the test piece in an electroless nickel plating liquid (nickel concentration 8.0 g/L, pH 9.0, 40°C) for 15 minutes. It has been confirmed that silver-colored nickel plating is deposited on the entire surface of the test piece subjected to the plating process step.
- a sulfuric acid concentration of 78 wt%, a persulfuric acid concentration of 7 g/L as S 2 O 8 , and a temperature of 60°C were set as the liquid properties of the electrolytic sulfuric acid solution 3 containing a persulfuric acid component used for resin etching as preprocessing for plating an ABS resin molded article, and the electrolytic sulfuric acid solution 3 was manufactured by the following steps using the same electrolytic sulfuric acid solution manufacturing system 1 as in Comparative Example 1.
- the electrolytic cell 8 was energized under the same conditions as in Comparative Example 1 described above, and the circulating liquid passed through the electrolytic cell 8 was returned to the storage tank 2. During this operation, the persulfuric acid concentration in the circulating liquid was appropriately measured, and the electrolysis was continued until the properties of the circulating liquid would reach the liquid properties used for etching set as above, thereby manufacturing the electrolytic sulfuric acid solution 3. In this operation, the electrolytic sulfuric acid solution 3 in the storage tank 2 was heated to a set temperature (60°C) using an electric heater (heater 4) installed in the storage tank 2.
- the ABS resin test piece was subjected to the etching process and pre-plating process under the same conditions as in Comparative Example 1 and then further subjected to the plating process. As in Comparative Example 1, it has been confirmed that silver-colored nickel plating is deposited on the entire surface of the test piece subjected to the plating process step.
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PCT/JP2020/034959 WO2021234978A1 (fr) | 2020-05-18 | 2020-09-15 | Procédé de démarrage pour système de fabrication de solution électrolytique d'acide sulfurique |
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