EP4133513A1 - Source de rayons x et système et procédé de génération de rayonnement de rayons x - Google Patents

Source de rayons x et système et procédé de génération de rayonnement de rayons x

Info

Publication number
EP4133513A1
EP4133513A1 EP21717064.6A EP21717064A EP4133513A1 EP 4133513 A1 EP4133513 A1 EP 4133513A1 EP 21717064 A EP21717064 A EP 21717064A EP 4133513 A1 EP4133513 A1 EP 4133513A1
Authority
EP
European Patent Office
Prior art keywords
core
waveguide
ray source
ray
core section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP21717064.6A
Other languages
German (de)
English (en)
Inventor
Malte VASSHOLZ
Tim Salditt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Georg August Universitaet Goettingen
Original Assignee
Georg August Universitaet Goettingen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Georg August Universitaet Goettingen filed Critical Georg August Universitaet Goettingen
Publication of EP4133513A1 publication Critical patent/EP4133513A1/fr
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/064—Details of the emitter, e.g. material or structure
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • G21K1/062—Devices having a multilayer structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H01J35/116—Transmissive anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/086—Target geometry

Definitions

  • the present invention relates to an X-ray source, a system for generating X-rays and a method for generating X-rays.
  • a cathode opposite it typically a hot cathode
  • electrons are released and accelerated in the electric field between the hot cathode and the X-ray anode.
  • the metal target When striking the metal target occur in Wesentli ⁇ chen two processes through which the kinetic energy of the electrons is converted into X-ray radiation ⁇ .
  • the impinging electrons are slowed down in the field of the atomic nuclei of the X-ray anode, so that part of their kinetic energy is converted into electromagnetic radiation, known as bremsstrahlung.
  • the impinging electrons have sufficient kinetic energy to remove electrons from one of the inner electron shells of the metal target atoms. When the resulting gap in the respective electron shell is filled by an electron from an outer shell, X-rays characteristic of this transition are emitted.
  • the intensity of the X-ray radiation in particular the brilliance, increases with the current of the electrons hitting the X-ray anode.
  • the number of electrons released at the cathode is therefore usually increased.
  • this has a higher heat input into the homogeneous anode X-ray result is limited so that the increase of brilliance especially with solid metal targets of Rönt ⁇ genanode.
  • conventional X-ray sources generally emit X-rays over a solid angle of 4p sr.
  • n l-6 + iß
  • an x-ray source with the features of claim 1, a system for generating x-ray radiation with the features of claim 14 and a method for generating x-ray radiation with the features of claim 15.
  • the X-ray source has at least one waveguide for X-rays, which has a core and a cladding surrounding the core.
  • the X-ray source can be an X-ray target, in particular an X-ray anode.
  • the x-ray source can further comprise a substrate, wherein the waveguide can be carried by the substrate.
  • the waveguide of the x-ray source can be self-supporting. At least a portion of the waveguide is adapted to emit x-ray radiation ⁇ animals, when the part of the waveguide is bombarded with electrons.
  • the X-ray source is particularly adapted to generate the X-rays directly in Wel ⁇ lenleiter (ie, in the core or in the jacket) in order au without spreading ßer Halb irradiate the waveguide directly into the nucleus.
  • the x-ray source is advantageously set up to emit the x-ray radiation generated by spontaneous emission directly in the waveguide / in the modes of the waveguide.
  • the waveguide modes can be excited without the X-ray radiation exciting the waveguide modes having to propagate outside the waveguide before the excitation.
  • the X-ray source is vorteilhaf ⁇ ingly adapted to X-ray radiation directed, in particular in the longitudinal direction or the main direction of extension of the waveguide to emit.
  • the electrons can each have an energy of at least 100 eV, at least 500 eV, at least IkeV or at least 5 keV.
  • the part of the waveguide can be designed in various ways.
  • the portion preferably includes the conductor waves ⁇ the first core portion.
  • the first Kernab ⁇ cut so configured to emit X-rays when bombarded with electrons.
  • the spontaneous emission occurs in the core of the wave conductor itself, that is, the X-ray radiation is advantageously generated in the core of the shafts ⁇ conductor itself.
  • the first core section preferably has a volume that is smaller, in particular by more than 50%, than the second core section. As described in detail below, the first core portion may be formed thinner than the second Kernab ⁇ cut.
  • the part of the waveguide contains the entire core, i.e. that the entire core of the waveguide belongs to the part of the waveguide intended for bombardment.
  • the second core section can in fact be absent and the entire core can be formed by the first core section, i.e. the core can have any of the features of the first core section explained here.
  • the spontaneous emission takes place in the core of the waveguide itself, i.e. the X-ray radiation is advantageously generated in the core of the waveguide itself.
  • the portion of the waveguide at least a portion of the shell, in particular ⁇ sondere the whole jacket containing.
  • the jacket in particular the choice of material
  • the part of the cladding can emit X-rays from the part of the cladding, in particular directly, into the core of the waveguide at the interface with the core.
  • the distance between the respective emitting atom in the cladding and the core is in particular smaller than the width of an evanescent wave.
  • X-ray source Unlike conventional X-ray sources is in the inventive X-ray source therefore not required generated outside the waveguide Rönt ⁇ -radiation than usually complicated and lossy X-ray optics into the waveguide to couple to the the forming in fashions to encourage. Rather, by means of the x-ray source according to the invention, essentially directed x-ray radiation can be generated in the waveguide itself.
  • the X-ray treatment is thus de facto emitted directly from the first core section or the interface between cladding and core into the X-ray waveguide modes. It preferably includes bremsstrahlung and characteristic X-ray radiation.
  • the waveguide extends in a main direction of extent (longitudinal direction) along which the modes of the X-ray radiation are formed, propagate in the waveguide and / or emerge from the waveguide.
  • the waveguide can be one or two dimensional. If the waveguide is a two-dimensional waveguide, the longitudinal axis of the waveguide, in particular the central longitudinal axis of the core, can run in this main direction of extent.
  • the two-dimensional waveguide can have a (substantially) circular, oval, polygonal, rectangular or square cross section. If, on the other hand, the waveguide is a one-dimensional waveguide with two main extension directions defining a main extension plane, the waveguide can extend along this main extension plane.
  • the longitudinal axis may be in the Haupterstre ⁇ ckungsebene in this case. Analogously to the entire waveguide, this also applies to the substrate, the core, the first core section, the second core section and / or the cladding.
  • one-dimensional waveguides can, in accordance with the general use of this term in the field of X-ray physics, be those waveguides that restrict / guide the electromagnetic wave of X-rays in one dimension.
  • the electromagnetic wave in the waveguide can propagate along two dimensions in one plane and the modes can only be formed in a direction perpendicular thereto.
  • One-dimensional waveguides can therefore also be referred to as planar waveguides or layered waveguides.
  • Two-dimensional waveguides (also referred to as channel waveguides), on the other hand, can restrict the electromagnetic wave in two dimensions, so that the electromagnetic wave can only propagate along one dimension and the modes are formed in two directions perpendicular to this dimension.
  • the longitudinal axis of the waveguide can be straight or at least partially ge ⁇ curves, provided the curvature of the waveguide is such that at least a part (at least 30%) of the propagie- in the core of the waveguide.
  • the resulting X-ray radiation always remains in the core with total reflection on the cladding until it emerges from the core at an end of the waveguide that exits in the longitudinal direction.
  • the waveguide has a beam-splitting section at which the core is divided into at least two separate core legs.
  • the angle of the core is preferably selected ⁇ leg of the core so that the core entering into the core leg propagating X-rays under total reflection on the shell in the core leg. It is noted that all numerical values and value ranges explained here for the decrement and the attenuation coefficient apply to X-ray photons with an energy of 10EV.
  • Containing the material of the core or at least the first core portion or be ⁇ is composed of first atoms / n of chemical elements having a first atomic number
  • the material of the second core portion includes or consists of second atoms / n che ⁇ mixer elements having a second atomic number
  • the material of the shell contains or consists of third atoms of chemical elements with a third atomic number, the second atomic number preferably deviating from the first and / or third atomic number.
  • the first atomic number is selected to be as large as possible. In particular, the first atomic number can be greater than the second atomic number.
  • the first atomic number at least 14, at least 16, at least 18, at least 20 or at least 22
  • the second atomic number is at most 16, at most 14, at most 12, at most 10 or at most 9, or at most 8.
  • the material of the core of the waveguide, the first / second core section or the cladding contains the first, second or third atoms, these can each be in molecules, in particular metal-semiconductor compounds, nanoparticles, clusters and / or colloids can be distributed in the respective material.
  • the material of the entire core or at least the first Kernab ⁇ section may include a first electron density
  • the material of the second core portion, a second electron density and the material of the jacket have a third electron density.
  • the second electron density preferably deviates from the first and / or third electron density.
  • the material of the first core portion is more advantageous ⁇ selected so that it (analogous to the higher atomic number of the first Kernab ⁇ section) has the highest possible electron density, which may in particular be higher than the second electron density.
  • the first electron density is preferably at least 1100 hereby christvor ⁇ e / nm 3, at least 1500 e / nm 3, at least 2000 e / nm 3 or at least 2200 e / Nm 3.
  • the second electron density is characterizedvorzugswei ⁇ se most 1000 e / nm 3, more than 850 e / nm 3 or more than 750 s / Nm 3.
  • the material of the first core section, the second core section and the jacket can each be homogeneous, i. that is, each of these components can consist solely of the same chemical element.
  • the material of the first core section, the second core section or the jacket can be configured as a mixture (in particular as an alloy or as a ceramic).
  • the material of the first core section is a metal, in particular a transition metal.
  • the material of the first core section contains or is preferably cobalt, copper, molybdenum, nickel,
  • the first core portion is a metal (in particular Sprintsme ⁇ tall) containing metal alloy.
  • the second core section is preferably made partially or entirely from a different material than the first core section.
  • the second core portion serves in particular the unhindered Ausbrei ⁇ processing the X-ray radiation generated in the waveguide, so that the Dämpfungskoeffi coefficient bk2 of the second core portion to X-radiation, preferably a lower value having as the damping coefficient bki the first core portion and / or than the damping coefficient ß M of the shell.
  • a non-metal, in particular a semiconductor, is therefore preferred as the material for the second core section.
  • the material of the second core section preferably contains or is preferably a gas, air, carbon (in particular diamond, amorphous or polycrystalline DLC (diamond-like carbon)), boron, boron carbide, beryllium, aluminum, magnesium or silicon around.
  • the second core section can, however, be part of the vacuum and therefore essentially empty.
  • vacuum is also valid as a material and what is explained here for material is also valid for vacuum as the second core section.
  • the first core portion on the lateral boundary surface preferably by vapor deposition or ALD (atomic layer deposition), or deposited the X-ray emission is performed from the shell itself.
  • the substrate can be made of the same or a different material than the jacket.
  • the substrate of diamond, DLC, germanium, gallium arsenide and / or silicon for example in the form of a silicon wafer Herge ⁇ represents be.
  • These substrate materials have, in particular when the substrate is monocrystalline , a relatively high surface quality and a high thermal conductivity.
  • the jacket can be formed in one piece (integrally), in particular monolithically (ie, “from a single cast”) with the substrate.
  • the monolithically one-piece configuration of substrate and jacket is particularly possible if the substrate / jacket material is porous. each pore forms a core of the Wellenlei ⁇ ters.
  • the value of the decrement d of the material of the first core section is preferably approximately equal to or greater than the value of the decrement d of the material of the second core section.
  • the value of the decrement of the material of the first Kernab ⁇ section can exceed the value of the decrement of the material of the second core portion by at least 20%, at least 50% or at least 100%.
  • the decrement d of the material of the first core section is preferably at least 1 ⁇ 10 7 , at least 5 ⁇ 10 7 , at least 1 ⁇ 10 6 or at least 5 ⁇ 10 6 .
  • the decrement of the material of the second core portion more than 5xl0 5, Hoechsmann ⁇ is preferably least 3xl0 5, at most 5 or at most lxlO 5xl0.
  • the Dekre ⁇ element d of the material of the jacket is at least lxlO 7, at least 5xl0 7, at least 6 or at least 5xl0 lxlO. 6
  • the decrement values and / or electron density values mentioned in this text can apply to X-ray photons with an energy of 10 keV.
  • the waveguide can extend over part or the entire substrate, in particular it can be as long as the substrate in the longitudinal direction.
  • the core of the waveguide can be essentially as long as the cladding in the longitudinal direction.
  • the first core section is preferably in the longitudinal direction, in particular by up to 1 mm, shorter or as long as the second core section and / or the cladding, so that the formation and emission of the modes are not disturbed.
  • the first core section has a plurality of separate subsections, for example spaced apart from one another in the longitudinal or transversal direction .
  • the first core portion is preferably thinner than the second core portion.
  • the extension of the first core section in the transverse direction is less than the extension of the second core section in the transverse direction.
  • the first core portion in the second core portion is embedded, so that in Transver ⁇ salides may lie at any point along the longitudinal axis of the waveguide on both sides of the first core portion, a portion of the second core portion.
  • the first core section can therefore be arranged at a distance from the jacket.
  • the first core section or the entire first core section when viewed in a cross-sectional plane and / or when viewed in a longitudinal section plane containing the longitudinal axis through the waveguide is preferably arranged in the center of the second core section.
  • the X-ray photons generated in the first core section can be on for uniform excitation of the modes of the waveguide advantageously transversely in the middle generates ⁇ the.
  • the first core section can be partially or completely in contact with the jacket, as a result of which the heat dissipation from the first core section can be improved.
  • the cladding is thinner on a side of the core facing away from the substrate than on a side of the core facing the substrate.
  • this configuration can ensure a low roughness of the interface between the cladding and the core, which improves the total reflection on the cladding and thus increases the intensity of the X-rays emerging from the waveguide can be.
  • the electrons can more easily penetrate the relatively thin area of the cladding on the side of the core facing away from the substrate in order to generate X-rays in the first core section. It goes without saying, however, that in this case too, electrons along the longitudinal axis of the Waveguide in these can be initiated to generate teristic on the first core portion cha ⁇ radiation and bremsstrahlung.
  • the first core section is preferably at most 20 nm, at most 15 nm, at most 10 nm or at most 5 nm thick.
  • the second core section is overall preferably at least 10 nm thick, at least 20 nm thick, at least 30 nm thick or at least 40 nm thick and / or at most 150 nm thick, 200 nm thick, 300 nm thick or 400 nm thick.
  • a first section of the jacket that is between the core and the substrate angeord ⁇ net preferably has a thickness of at least 5 nm, or at least 15 nm or at least 30 nm.
  • a second section of the cladding which is arranged on the side of the core opposite the substrate, can be at most 100 nm thick, at most 40 nm thick, at most 30 nm thick, at most 20 nm thick, at most 15 nm, at most 10 nm or at most 5 nm be fat. The thinner this second section of the cladding, the fewer electrons are advantageously absorbed in the cladding and thus outside the core in the case of transverse radiation.
  • the thickness of the first core portion than 50% can Hoechsmann ⁇ least 30%, at most 15% or at most 10% of the thickness of the second Kernab ⁇ -section, respectively.
  • the thickness of the second section of the jacket, which is arranged on the side of the core opposite the substrate, can also be at most 100%, at most 50%, at most 30%, at most 15% or at most 10% of the thickness of the second core section.
  • Above Illustrated to the thickness applies to both single and two-dimensional waveguide, wherein the thickness at two ⁇ dimensional waveguides of the respective extension in the radial direction corresponds (with respect to the longitudinal axis of the waveguide) and corresponds to the thickness in the one-dimensional waveguides of the respective extension in the transverse direction.
  • An X-ray source with a one-dimensional waveguide can be produced, for example, by means of physical vapor deposition, in particular by means of laser beam evaporation, or thin-film technology (for example magnetron sputtering).
  • the first section of the jacket (for example copper) is most preferably applied to the substrate (for example silicon wafer) with a thickness of approximately 40 nm.
  • the substrate for example silicon wafer
  • a first portion of the second core portion such as a carbon layer, in particular in the form of slide ⁇ mant or DLC
  • the first core section (for example as a cobalt layer) can again be formed on this with a thickness of approximately 2 nm.
  • a second part of the second core portion (for example, from the same mate rial ⁇ as the first part of the second core portion) may be disposed nm with a thickness of about 40 again.
  • a second portion of the shell may be on the two ⁇ th part of the core portion on the opposite side of the substrate angeord ⁇ net and preferably a thickness of about 5 nm have.
  • the term “approximately” can mean a range of +/- 100% of the respective value.
  • the X-ray source can have a single (one-dimensional or two-dimensional) waveguide or several waveguides. If the x-ray source has a plurality of waveguides, it can essentially be designed as a substrate with a waveguide stack carried by the substrate. Each of the waveguide, the waveguide ses stacks may include one or more of the above-described shopping ⁇ times of having at least one waveguide. Preferably, the plurality of waveguides are periodically arranged in the transverse direction. All waveguides can be designed in the same way. Alternatively, it is conceivable that the total thickness of the respective waveguide decreases with increasing distance from the substrate. It goes without saying that all of the waveguides described here are for X-rays, ie are set up to guide X-rays along the longitudinal axis.
  • a two-dimensional (channel) waveguide stack can be designed as an arrangement of (parallel and / or cylindrical) pores etched into the substrate or into the cladding.
  • the substrate / the jacket can be a metal or a semiconductor.
  • the pores can be produced, for example, by self-assembly. They can also be coated, in particular by means of atomic layer deposition (ALD).
  • a proposed here system for generating X-rays comprises a vacuum container, disposed in the vacuum container, in detail above be ⁇ required x-ray source and, disposed in the vacuum container Elektronenquel ⁇ le, which is adapted to emit electrons into the vacuum and (axial and / or transversal with respect to the longitudinal direction of the waveguide) on the X-ray source, in particular to radiate on the part of the waveguide intended for electron bombardment.
  • the vacuum container can be an X-ray tube.
  • an electron source is, for example, an X-ray cathode (for example in the form of a hot cathode) in question, which is adapted to dispense into the vacuum on application of an electrical voltage ⁇ rule electrons.
  • a negative potential is preferably applied to the X-ray cathode.
  • the Rönt ⁇ gene source preferably forms part of the X-ray anode or the anode and is earthed or applied to an at least relative to the X-ray cathode positive potential.
  • the potentials of the X-ray cathode and X-ray anode are chosen so that electrons in the electric field between the X-ray cathode and the X-ray anode are accelerated to an energy of at least 100 eV, at least 500 eV, at least IkeV or at least 5 keV.
  • the X-ray source is arranged vorzugswei ⁇ se so that the electrons propagate transverse to or along the longitudinal axis of the waveguide before they hit the waveguide, in particular the part of the waveguide, are incident.
  • the X-ray source bombar ⁇ -founded electrons can first pass through the second portion of the shell and the second part of the second core portion, before they can impinge on the first core portion.
  • the electrons can already generate X-rays there and emit them into the waveguide.
  • the electrons can generate X-rays at the latest in the first core section and release them into the core. In this respect, the X-ray radiation is emitted directly and immediately in the waveguide modes.
  • the method proposed here for generating x-rays comprises the steps of providing an x-ray source described in detail above or a described system containing the x-ray source for generating x-rays and irradiating the x-ray source, in particular the part of the waveguide (intended for bombardment with electrons) to generate-radiation with radiation and / or of bombarding the X-ray source, in particular of (for bombardment provided) part of the waveguide, with electrons to the Rönt ⁇ .
  • the irradiation of the x-ray source with radiation can include one or more of the following: irradiation with x-ray radiation, irradiation with synchrotron radiation, irradiation with ions, irradiation with high-energy ions, irradiation with laser pulses, irradiation with ultrashort and / or focused laser pulses.
  • irradiation with x-ray radiation irradiation with synchrotron radiation
  • irradiation with ions irradiation with high-energy ions
  • laser pulses irradiation with laser pulses
  • ultrashort and / or focused laser pulses irradiation with ultrashort and / or focused laser pulses.
  • Waveguide X-ray radiation can be generated by means of X-ray fluorescence.
  • FIG. 1 shows a first embodiment of an X-ray source in a schematic partial cross-sectional view
  • FIG. 2 shows the X-ray source from FIG. 1 in perspective in a measurement setup for characterizing its emission properties
  • FIG. 3a shows a course of the value of the decrement d over the cross section of the X-ray source from FIG. 1;
  • FIG. 3b shows a diagram of the intensity of the X-ray radiation over the Flöhenwin angle 0 f for the X-ray source from FIG. 1;
  • FIG. 4 shows several diagrams of the measured and simulated intensity of the X-ray radiation over the flea angle 0 f for the X-ray source from FIG. 1 at different positions of the bombardment with electrons;
  • FIG. 5 shows the X-ray source from FIG. 1 with radiation of X-rays in the form of plane waves for X-ray fluorescence at different flea angles 0PW;
  • FIGS. 7a and 7b show a second embodiment of an X-ray source in a detailed perspective view and an overall perspective view, this X-ray source having several one-dimensional waveguides;
  • Figure 8 Measurement and simulation results for the X-ray fluorescence
  • FIGS. 7a / 7b shows the intensity distribution in the X-ray source from FIGS. 7a / 7b with several waveguides when focused synchrotron radiation is irradiated at different flea angles 0 f ;
  • FIG. 9 shows a measurement result for the energy distribution of the X-ray radiation from the X-ray source according to FIGS. 7a / 7b as a function of the flea angle 0 f when the X-ray source is bombarded with electrons;
  • FIG. 10 shows measurement results for the intensity distribution of the X-rays in a third embodiment of an X-ray source when the X-ray source is bombarded with electrons at different distances from the exit of the waveguide;
  • FIGS. 11a and 11b show a fourth embodiment of an X-ray source with several two-dimensional waveguides in partial perspective views.
  • Figure 12 shows a fifth embodiment of an X-ray source with a eindimen dimensional waveguide, wherein the X-ray source is formed as a rotating anode ⁇ .
  • the FIGS. 1 and 2 show an X-ray source 10 which, in this variant, has a substrate 20 and a waveguide 30 for X-rays carried by the substrate 20.
  • the waveguide 30 includes a core 32 having a first core portion 34 and a second core portion 36 and a core 32 at least from ⁇ sectionally surrounding jacket 40. As shown in Fig. 2 can be seen, it is at the waveguide 30 by a one-dimensional waveguide.
  • the jacket 40 is a layer formed directly on the substrate 20.
  • a first section 41 of the jacket 40 is formed as a layer on the substrate 20.
  • a first part 37 of the second core section 36 is also formed as a layer.
  • the first core portion 34 is formed as a layer on the first part 37 of the second section Kernab ⁇ 36th In the transverse direction y perpendicular to the longitudinal axis A of the waveguide 30 running in the longitudinal direction z, a second part 38 of the second core section 36 covers the first core section 34 and a second section 42 of the cladding 40 in turn covers the second part 38 of the second core section 36 Layers are each in contact with one another (preferably essentially over the entire area). 1 shows the waveguide 30 in a longitudinal section containing the longitudinal axis A along the plane E shown in FIG.
  • the substrate is in this case a silicon wafer, but it may alternatively be made of a different material, which is adapted to an X-ray ⁇ wear waveguide.
  • the first section 41 of the jacket 40 is an approximately 40 nm thick copper layer
  • the first part 37 and the second part 38 of the second Kernab ⁇ section 36 is each an approximately 20 nm thick carbon layer (here for example DLC, diamond-like carbon)
  • the first core portion 34 is approximately 2 nm thick co ⁇ balt harsh
  • the second portion 42 of the shell layer is an about 5 nm thick copper ⁇ .
  • other metals, in particular transition metals, or metal alloys containing the respective metal can also be used as the material of the first core section 34 and / or of the jacket 40.
  • the second core portion 36 come as a mate rial ⁇ also other non-metals, in particular semiconductors, in question.
  • the first core section 34 is thus thinner in the transverse direction y than any of the other layers.
  • the first core section 34 is thinner than the second core section 36.
  • the first section 41 of the jacket 40 is thicker than the second section of the jacket 42 in order to ensure that the interface roughness between the first section 41 of the jacket 40 and the first Part 37 of the second core section 36 for improved total reflection on the cladding 40 is low.
  • electrons 52 can relatively easily penetrate into the core 32 of the waveguide 30 with this structure if they are radiated transversely to the waveguide 30 in the negative y-direction, as shown in FIG. 1.
  • a comparatively intensive X-ray emission from the X-ray source 10 is reali ⁇ Siert.
  • the value of the decrement d of the material of the first core section 34 lies between the value of the decrement d of the material of the cladding 40 (or at least one of the sections 41 and 42) and the value of the decrement d of the material of the second core section 36 (or at least one of the parts 37 and 38). It is preferred here that the value of the decrement d of the material of the jacket 40 (or at least one of the sections 41 and 42) is greater than the value of the decrement d of the material of the second core section 36 (or at least one of the parts 37 and 38), so that the formation of the modes in the waveguide 30 is disturbed as little as possible.
  • the first core section and the second core section The following decrement values apply to the above mentioned X-ray photon energy: copper 1.62 x 10 5 ; Carbon (amorphous) 4.57 x 10 6 ; Cobalt 1.67 x 10 5 (see Fig. 3a).
  • source 10 of FIG. 1 has a two-dimensional waveguide whose core and cladding in cross section perpendicular to the longitudinal axis A is substantially (circular) ringför ⁇ mig are configured.
  • this modified X-ray source looks as shown in FIG. 1.
  • what has been explained here applies analogously to the X-ray source 10 with a one-dimensional waveguide 30 for the modified X-ray source with a two-dimensional waveguide.
  • FIG. 1 it is shown schematically that the electrons 52 propagate essentially in the negative y-direction before they strike the X-ray source 10.
  • the electron beam is focused on a part of the first core section 34.
  • the elevation angle, 0r, dependent intensity distribution of the X-rays shown in FIG. 3b can be determined.
  • Such measurement can for example be carried out by electrons with an energy of 35 keV from an electron source for X-ray microtomography (here: an electron ⁇ source from the X-ray source MetalJet® D2 Company Excillum AB, Kista, Sweden) by means of electron optics (here, the Electron optics from the same X-ray source Metal Jet® D2 from Excillum AB, Kista, Sweden) focused on an approximately 10 ⁇ m large spot at a distance Dz of approximately 1 mm from the exit end 54 of the waveguide 30 along the longitudinal axis A onto the grounded X-ray source 10 will.
  • the X-ray anode of the MetalJet® D2 has been replaced by the X-ray source 10.
  • X-ray radiation can be in the first core portion 34 of the waveguide 30 and / or in the casing 40, in particular in the second section 42 of the jacket 40, it ⁇ be generated and coupled directly into the core 32 of the waveguide 30th The fig.
  • the X-ray radiation leaves the waveguide 30 not only at its end 54 exiting in the longitudinal direction z, but also, as indicated in FIG.
  • Fig. 4 shows four charts with measurement and simulation results, from which it is clear that the elevation angle dependence of the intensity distribution of the Rönt ⁇ -radiation varies with the distance Dz and also depends on whether the X-ray radiation from the mantle of copper or the first core portion from Cobalt originates.
  • the diagrams also show that the simulation results agree with the corresponding measurement results.
  • the upper left diagram from FIG. 4 shows the measured emission of the Ka and Kß transitions of the material of the first core section 34 in the event of electron bombardment (curve 82) and in the event of excitation by means of X-ray or synchrotron radiation (curve 84) together with the corresponding simulation ( Curve 86).
  • the diagram at the top right shows the measured emission of the Ka line of the material of the shell 40 with electron bomb ⁇ bardement (curve 88) and with excitation by means of X-ray or synchrotron radiation (curve 90) and the corresponding simulation (curve 92).
  • the lower two diagrams from FIG. 4 show the measured and the calculated intensity distribution of the X-ray emission from the thin cobalt layer (first core section 34) for a distance Dz of 35 ⁇ m and 350 ⁇ m.
  • the simulation results confirm the measurements.
  • the excitation of the modes and their propagation in the X-ray source, in particular in the waveguide, can be calculated by means of finite difference simulation based on the reciprocity theorem.
  • the finite difference simulation can, as described in the scientific publication by L. Melchior and T. Salditt, "Finite difference methods for stationary and time-dependent x-ray propagation", Opt. Express, 25: 32090, 2017, 5, this simulation assumes a plane wave 94 irradiated at an elevation angle 0PW 6a for irradiation at different elevation angles 0PW the probability distribution for the exit of an X-ray photon emitted at a certain point at a corresponding elevation angle 0 f can be seen from the X-ray source.
  • FIGS. 7a and 7b An X-ray source 10 with a plurality of one-dimensional waveguides 30 is shown in FIGS. 7a and 7b shown.
  • Each waveguide 30 can have any, in particular all, features of the waveguide 30 from the x-ray source 10.
  • the waveguides 30 are positioned on the substrate 20 as a waveguide stack. Together angren ⁇ collapsing waveguide 30 of the boundary between them can share a portion of the shell is in the range. That is, a core 32 of a second waveguide 30 can directly adjoin the second section 42 of the cladding 40 of a first waveguide 30 adjacent to the substrate.
  • the materials of the X-ray source 10 from FIG. 7 can be the materials of the X-ray source 10 from FIG. 1.
  • n 50.
  • FIG. 8 shows a distribution of the iron-K fluorescence on a detector M ⁇ NCH3 (from the Paul Scherrer Institute, Villigen, Switzerland; see M. Ramilli et al, “Measurements with M ⁇ NCH, a 25pm pixel pitch hybrid pixel detector ", J. Instrum., 12: C01071- C01071, 2017, the disclosure of which relating to the M ⁇ NCH detector is hereby incorporated by reference).
  • this distribution intensity shows peaks and modeling as a function of the exit angle (elevation angle) 0 f .
  • the figure b) shows the corresponding cumulative intensity distribution as a function of the exit angle (elevation angle).
  • the dependence of the intensity distribution over the exit angle of the distance Dz is shown in the figure c).
  • the figure d) shows, finally, a substantial coincidence of the measurement results with entspre ⁇ sponding simulation results based
  • FIG. 9 by means of the X-ray sources 10 disclosed here , for which the X-ray source 10 from FIG. 7 with the preferred layer sequence is representative, not only characteristic ones when the X-ray source 10 is bombarded with electrons X-rays (in Fig. 9: Fe-Ka-radiation 96, Ni-Ka-radiation 97, Ni-Kß-radiation 98), but also bremsstrahlung 99 emitted.
  • FIGS. 11A and 11B An X-ray source 10 with a plurality of two-dimensional waveguides 30 is shown in FIGS. 11A and 11B, the first core portion of each of the Clearly ⁇ ness has been omitted for clarity.
  • Each of the two-dimensional waveguide 30 may be any here, in particular all, features of the waveguide 30 from the X-ray source 10 having ⁇ .
  • the two-dimensional waveguides 30 can be formed periodically within a section with an optionally essentially hexagonal base area in the transverse plane (the xy plane).
  • the waveguides 30 can be embodied in the substrate 20 in an essentially cylindrically symmetrical manner and / or can be arranged at essentially the same distances from one another.
  • 11 a and 11 b also show that the electrons 52 can be irradiated onto the X-ray source 10 in the longitudinal direction (along the axis z).
  • the x-ray radiation 50 also leaves the x-ray source on the exit side in the longitudinal direction.
  • FIG. 12 A further variant of an X-ray source 10 having a one-dimensional Wellenlei ⁇ ter 30, here in the form of a rotating anode, is depicted in Fig. 12.
  • the electrons here preferably strike the waveguide parallel to the axis of rotation of the rotating anode.
  • the first core section has been omitted for the sake of clarity.
  • the waveguide 30 of the x-ray source from FIG. 12 can have any, in particular all, features of the waveguide 30 from the x-ray source 10.
  • Rota ⁇ X-ray source tion 10 moves the place in the coordinate system of the rotating X-ray source 10 at which the electrons 52 of the first core portion ren 34 bombardie ⁇ , used along a circular path, so that advantageously larger electron currents and correspondingly higher X-ray intensities can be achieved.
  • the X-ray sources described here are set up to emit radiation in one or more angular ranges with dimensions below approximately 10 mrad.
  • the efficiency of the generation of the X-ray radiation is significantly higher with erfindungsge MAESSEN X-ray sources than in conventional systems for the generation of X-ray radiation, in which the X-ray radiation is generated outside the waveguide and then coupled into a waveguide.
  • the X ⁇ sources according to the present invention therefore are distinguished not only by a small and compact design but also by high brilliance.
  • the X-ray source according to the invention accordingly has a comparatively high phase space density and coherence. Therefore, the present invention enables various X-ray analyzes (for example by means of X-ray microtomography) to be carried out in the laboratory, for which synchrotron sources were previously necessary.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • X-Ray Techniques (AREA)

Abstract

L'invention concerne une source de rayons X (10) comprenant au moins un guide d'ondes (30) pour un rayonnement de rayons X, le ou les guides d'ondes (30) présentent un noyau (32) et un boîtier (40) entourant le noyau (32), et au moins une partie du guide d'ondes (30) est conçue pour émettre un rayonnement de rayons X (50), si la partie du guide d'ondes (30) est bombardée par des électrons (52). L'invention concerne également un système de génération d'un rayonnement de rayons X comprenant une source de rayons X de ce type, et un procédé de génération d'un rayonnement de rayons X au moyen d'une source de rayons X de ce type ou d'un tel système.
EP21717064.6A 2020-04-08 2021-04-07 Source de rayons x et système et procédé de génération de rayonnement de rayons x Pending EP4133513A1 (fr)

Applications Claiming Priority (2)

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DE102020109906.1A DE102020109906B4 (de) 2020-04-08 2020-04-08 Röntgenquelle sowie System und Verfahren zur Erzeugung von Röntgenstrahlung
PCT/EP2021/059013 WO2021204846A1 (fr) 2020-04-08 2021-04-07 Source de rayons x et système et procédé de génération de rayonnement de rayons x

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EP4133513A1 true EP4133513A1 (fr) 2023-02-15

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DE102010002778B4 (de) 2010-03-11 2012-03-22 Georg-August-Universität Göttingen Stiftung Öffentlichen Rechts Konfokaler Multilamellenröntgenwellenleiter, sowie Verfahren zu seiner Herstellung und Verfahren zur Abbildung
JP5783785B2 (ja) 2010-06-02 2015-09-24 キヤノン株式会社 Ｘ線導波路
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WO2021204846A1 (fr) 2021-10-14
DE102020109906A1 (de) 2021-10-14

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