EP4043733B1 - Vakuumpumpe mit separat ansteuerbaren lüftern - Google Patents

Vakuumpumpe mit separat ansteuerbaren lüftern Download PDF

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Publication number
EP4043733B1
EP4043733B1 EP22179625.3A EP22179625A EP4043733B1 EP 4043733 B1 EP4043733 B1 EP 4043733B1 EP 22179625 A EP22179625 A EP 22179625A EP 4043733 B1 EP4043733 B1 EP 4043733B1
Authority
EP
European Patent Office
Prior art keywords
electric motor
pump
vacuum pump
motor
fan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP22179625.3A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP4043733A3 (de
EP4043733A2 (de
Inventor
Gabriel Bergmann
Jannik GERMANN
Thomas Cromm
Gernot Bernhardt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP22179625.3A priority Critical patent/EP4043733B1/de
Publication of EP4043733A2 publication Critical patent/EP4043733A2/de
Priority to JP2022211122A priority patent/JP7450015B2/ja
Publication of EP4043733A3 publication Critical patent/EP4043733A3/de
Priority to KR1020230010929A priority patent/KR20230173574A/ko
Application granted granted Critical
Publication of EP4043733B1 publication Critical patent/EP4043733B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/007—General arrangements of parts; Frames and supporting elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C11/00—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations
    • F04C11/005—Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston type; Pumping installations of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/06—Silencing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F04D25/166—Combinations of two or more pumps ; Producing two or more separate gas flows using fans
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/053—Shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/402—Plurality of electronically synchronised motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/60—Shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/808—Electronic circuits (e.g. inverters) installed inside the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/86—Detection

Definitions

  • the present invention relates to a vacuum pump, in particular a rotary vane vacuum pump, according to the preamble of claim 1.
  • Such a generic vacuum pump is essentially of the type DE 10 2006 058 842 A1 out. Comparable vacuum pumps are described in the publications EP 2 071 186 A2 and DE 10 2006 058 843 A1 described.
  • the pump shaft of the pump stage is usually detachably connected to the motor shaft of the electric motor in order to be driven by it.
  • a fan is mounted on the free end of the motor shaft, which can be used to cool the electric motor while the pump is in operation.
  • a fan can also be mounted on the free end of the pump shaft, so that the pump stage can also be cooled during operation of the pump.
  • the invention is therefore based on the object of specifying a fan concept for a vacuum pump, in particular a rotary vane vacuum pump, with which the maintenance effort of a vacuum pump of the type described above can be reduced, while additionally ensuring that the vacuum pump is cooled independently of the pump operation.
  • the at least one pump stage is contained in a pump housing and the first electric motor, which drives the pump stage, is contained in a motor housing which extends in an axial continuation of the pump housing.
  • Both the pump housing and the motor housing each have a first end and a second end opposite the first end in the axial direction, the first end of the pump housing being at least indirectly connected to the first end of the motor housing.
  • the pump housing and the motor housing are therefore arranged essentially coaxially in axial continuation of one another, with a fan being provided at the second end of the pump housing and fastened there.
  • a (different) fan is provided at the second end of the motor housing and attached there. The fan(s) can thus be attached to the respective housing of the vacuum pump as part of the final assembly after the pump housing has been installed on the motor housing.
  • each fan can therefore be kept as prefabricated components, which are only installed as a unit on the vacuum pump during final assembly in particular the pump housing or the motor housing.
  • each fan including its second electric motor, can be contained in a respective fan cover that serves as a type of housing and is attached to the respective second end of the pump housing or the motor housing as part of the final assembly of the vacuum pump.
  • the fans and in particular their second electric motors can be controlled independently of the first electric motor, which makes it possible, for example, to continue cooling the vacuum pump after it has been switched off.
  • the vacuum pump can be cooled during its operation regardless of the speed of the first electric motor. For example, if the temperature of the vacuum pump rises excessively during operation, the second electric motor can be operated at a higher speed than the first electric motor, which makes it possible to cool the vacuum pump more than if a corresponding fan was fixed in a conventional manner the motor and/or pump shaft is mounted.
  • the efficiency of the vacuum pump can be improved compared to a conventional vacuum pump in which the fan(s) is fixed on the pump shaft and /or the motor shaft of the first electric motor is/are mounted.
  • the pump shaft is formed in one piece with the motor shaft. This is made possible by the fact that, in contrast to a conventional vacuum pump, no shaft bushings are required according to the invention. In order to be able to assemble this, it is necessary for conventional vacuum pumps for assembly reasons to releasably connect the pump shaft to the motor shaft. Since, according to the invention, such shaft bushings are eliminated, it is thus possible to form the pump shaft and the motor shaft of the first electric motor in one piece with one another. However, if necessary, the pump shaft and the motor shaft of the first electric motor can also be detachably connected to one another in a vacuum pump according to the invention.
  • the respective second electric motor can be controlled using a specially designed control module, such as a frequency converter. According to a further embodiment, it can be provided that the respective second electric motor is also energized by means of a frequency converter that controls the first electric motor, in particular independently of the first electric motor.
  • the frequency converter also controls the second electric motor of a fan independently of the second electric motor of another fan.
  • the two fans can therefore not only be powered independently of the first electric motor, but also independently of each other.
  • the frequency converter can therefore only have a single current input and several current outputs that can be controlled independently of one another within the framework of a closed control loop, the first electric motor being connected to one of the multiple current outputs, whereas each of the second electric motors of the respective fans is connected to another of the multiple current outputs.
  • a control unit which controls the frequency converter and in particular its current outputs, whereby the control unit can be set up in such a way that it controls the current output of the frequency converter, to which the respective second electric motor of the fan is connected, depending on the power consumption of the first electric motor, the temperature of the frequency converter, in particular its power electronics, the temperature of the electric motor and / or the temperature of the at least one pump stage.
  • the power consumption of the first electric motor can be monitored and reported back to the control unit, so that it can, for example, operate the respective fan or its second electric motor at a maximum speed as soon as the power consumption of the first electric motor exceeds a predetermined upper threshold value.
  • the control unit can operate the respective fan or its second electric motor at a minimum speed.
  • the control unit can set the respective second electric motor or the respective current output between these two threshold values of the frequency converter to which the respective second electric motor of the fan is connected, depending on the size of the power consumption of the first electric motor, for example based on a linear relationship between the power consumption of the first electric motor and the respective motor speed.
  • the temperature of the frequency converter in particular its power electronics, the temperature of the first electric motor and / or the temperature of the at least one pump stage can be monitored by means of a respective temperature sensor, the temperatures monitored in this way being able to be reported back to the control unit, so that they can regulate the respective second electric motor or the respective current output of the frequency converter, to which the respective second electric motor of the fan is connected, depending on the respectively monitored temperature.
  • the respective temperature can be reported back to the control unit, so that it can, for example, operate the respective fan or its second electric motor at a maximum speed as soon as the respective monitored temperature exceeds a predetermined upper temperature threshold.
  • the control unit can operate the respective fan or its second electric motor at a minimum speed. Between these two temperature threshold values, the control unit can regulate the respective second electric motor or the respective current output of the frequency converter to which the respective second electric motor is connected, depending on the size of the respective monitored temperature, for example on the basis of a linear relationship between the respective monitored temperature and the respective engine speed. As soon as only one of the respective monitored temperatures exceeds the upper temperature threshold, the respective fan or its second electric motor is operated at the maximum speed.
  • the vacuum pump Figures 1 and 2 is designed in the manner of a rotary vane vacuum pump and includes a stator 11 in which a working space 13 is formed.
  • An eccentrically installed rotor 15 is arranged in the working space 13 and can be driven in a direction of rotation D about its axis of rotation running perpendicular to the image plane by means of a first electric motor 50, see FIG Fig.3 .
  • several slides 17 are arranged to be movable in the radial direction.
  • the slides 17 are biased by springs 19, which push the slides 17 outwards in radial directions. Alternatively, it can be provided that the slides 17 are not biased by springs, but only move outwards due to centrifugal force.
  • the slides 17 slide along the inner wall 20 of the stator 11 delimiting the working space 13.
  • the slides 17 divide the working space 13 into several chambers in a manner known per se.
  • the stator 11 and the rotor 15 form a pump stage 56 for pumping fluid, for example air, from a recipient (not shown) connected to an inlet 21 to an outlet 23.
  • the underlying pump mechanism corresponds to that known per se in rotary vane vacuum pumps pump mechanism used, which is explained below.
  • the pump stage 56 with the stator 11 and the rotor 15 is normally located up to a certain level in an operating medium that is contained in a sump surrounding the stator 11 (not shown).
  • the operating medium is in particular an oil, by means of which all moving parts of the pump are lubricated and the space under the outlet valve 25 and the gap between the inlet 21 and the outlet 23 are sealed.
  • the operating medium also seals the gap between the slides 17 and the inner wall 20.
  • the operating fluid ensures an optimal temperature balance in the vacuum pump through heat transport.
  • a downstream oil mist separator 29 separates the pumped gas from the oil and prevents operating oil from escaping at the exhaust.
  • an HV safety valve 27 for example a check valve, is arranged in the inlet 21, which is designed in a manner known per se in such a way that, in the event of a desired or unintentional standstill of the pump, it protects the inlet 21 from the recipient connected to the inlet 21 (not shown). This means that no operating fluid can be used when the pump is at a standstill reach the recipient.
  • the HV safety valve 27 opens with a slight delay, for example after the pressure in the pump has reached the pressure in the recipient, in order to avoid that operating fluid is drawn from the pump into the recipient due to a negative pressure in the recipient.
  • the motor housing 52 is arranged in the axial continuation of a pump housing 54 forming the stator 11 and is connected to it.
  • the pump housing takes the previously referred to Fig. 1 and 2 pump stage 56 described.
  • the pump stage 56 and in particular its rotor 15 is thus driven by the first electric motor 50, including its motor shaft 60 (see the Fig. 5 ) in one piece with the pump shaft 58 (see the Fig. 2 and 5 ) is connected, on which the rotor 15 is mounted.
  • the two interconnected housings 52, 54 (motor housing 52, pump housing 54) are in the Fig. 3 illustrated embodiment is mounted in a concave recess of a bearing housing 62, which contains the drive electronics for the vacuum pump and in particular a frequency converter 64 (see the Fig. 5 ), which, among other things, is used to control the first electric motor 50.
  • the rotary vane vacuum pump shown has two fans 66, each of which is driven by a second electric motor 68, for which purpose the respective fan 66 is mounted on the motor shaft 70 of the respective second electric motor 68.
  • the respective fan 66 including the second electric motor 68 driving it, is mounted in a fan cover 72, which has an opening 88 closed by a grille 86 for sucking in fresh air, see also the Fig. 3 .
  • the motor shaft 70 of the respective second electric motor is neither connected to the first motor shaft 60 of the first electric motor 50, which drives the pump stage 56, nor to the pump shaft 58 of the pump stage 56.
  • the two fans 66 or the respective fan covers 72 are attached to the two ends of the motor housing 52 and the pump housing 54 that are opposite one another in the axial direction. There is therefore no drive-effective connection between the respective second motor shaft 70 and the drive of the pump stage 26. Rather, the two second electric motors 68 are controlled independently of the first electric motor 50 driving the pump stage 56.
  • the frequency converter 64 has a plurality of independently controllable current outputs 74, 76, 78, the first electric motor 50 being connected to the first current output 74 and the two second electric motors 68 being connected to the second and third current output 76, 78 of the frequency converter 64.
  • the frequency converter 64 can therefore power the two second electric motors 68 of the two fans 66 independently of one another.
  • the frequency converter 64 only has one output for the fan control, so that both fans are controlled in the same way.
  • the frequency converter 64 can also power the first electric motor 50 independently of the two second electric motors 68.
  • the two second electric motors 68 of the two fans 66 can be energized via the second or third current output 76, 78 of the frequency converter 64 so that they run at a maximum speed.
  • the respective fan 66 or its second electric motor 68 can be operated at a minimum speed.
  • the respective second electric motor 68 or the respective current output 76, 78 can be regulated depending on the size of the power consumption of the first electric motor 50, for example based on a linear relationship between the power consumption of the first electric motor 50 and the respective engine speed.
  • the power consumption of the first electric motor 50 can be monitored by means of a power monitoring unit 80, the power consumption monitored in this way being able to be reported back to a control unit 90 controlling the frequency converter 64 for regulating the two current outputs 76, 78, which can also be part of the frequency converter 64 itself.
  • the control unit 90 can thus regulate the two current outputs 76, 78 depending on the power consumption of the first electric motor 50.
  • the temperatures of the frequency converter 64, in particular its power electronics, the first electric motor 50 and the pump stage 56 can be monitored in a corresponding manner by means of temperature sensors 82, 84, 85, the temperatures monitored in this way being transmitted to the frequency converter 64 or the one controlling it Control unit 90 can be reported back so that it can regulate the two current outputs 76, 78 depending on the monitored temperatures of the frequency converter 64, in particular its power electronics, the first electric motor 50 and / or the pump stage 56.
  • the vacuum pump Due to the fact that the rotary vane vacuum pump according to the invention has two fans 66, each driven by a second electric motor 68, for cooling the vacuum pump, the vacuum pump can therefore be cooled as required and in particular independently of the speed of the pump stage 56. Due to the fact that unlike that in the Fig.
  • the fans 66 are arranged on the motor or pump shaft 60, 58 led out of the pump housing 54 or the motor housing 52, in the rotary vane vacuum pump according to the invention the fans 66 from the motor or the Pump shaft 60, 58 are decoupled and are driven by their own electric motor 68, the fans 66 can therefore be controlled completely independently of the current power consumption of the first electric motor 50 driving the pump stage 56, which makes it possible, for example, to control the fans 66 after the pump stage has been switched off 56 to continue running in order to be able to cool the pump.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP22179625.3A 2022-06-17 2022-06-17 Vakuumpumpe mit separat ansteuerbaren lüftern Active EP4043733B1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP22179625.3A EP4043733B1 (de) 2022-06-17 2022-06-17 Vakuumpumpe mit separat ansteuerbaren lüftern
JP2022211122A JP7450015B2 (ja) 2022-06-17 2022-12-28 個別に制御可能なファンを備える真空ポンプ
KR1020230010929A KR20230173574A (ko) 2022-06-17 2023-01-27 별도로 제어되는 팬을 구비한 진공 펌프

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP22179625.3A EP4043733B1 (de) 2022-06-17 2022-06-17 Vakuumpumpe mit separat ansteuerbaren lüftern

Publications (3)

Publication Number Publication Date
EP4043733A2 EP4043733A2 (de) 2022-08-17
EP4043733A3 EP4043733A3 (de) 2023-01-04
EP4043733B1 true EP4043733B1 (de) 2024-03-27

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP22179625.3A Active EP4043733B1 (de) 2022-06-17 2022-06-17 Vakuumpumpe mit separat ansteuerbaren lüftern

Country Status (3)

Country Link
EP (1) EP4043733B1 (ja)
JP (1) JP7450015B2 (ja)
KR (1) KR20230173574A (ja)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006058842A1 (de) * 2006-12-13 2008-06-19 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Lüfter
DE102006058843A1 (de) * 2006-12-13 2008-06-19 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102006058840B4 (de) 2006-12-13 2021-01-14 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102007059938A1 (de) * 2007-12-12 2009-06-18 Pfeiffer Vacuum Gmbh Vakuumpumpe und Verfahren zum Betrieb

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