EP4042138A4 - Adaptateur de porte-échantillon pour l'évaluation de la durabilité mécanique de films minces et procédé d'évaluation de la qualité de durabilité mécanique de films minces par l'intermédiaire de cet adaptateur - Google Patents

Adaptateur de porte-échantillon pour l'évaluation de la durabilité mécanique de films minces et procédé d'évaluation de la qualité de durabilité mécanique de films minces par l'intermédiaire de cet adaptateur Download PDF

Info

Publication number
EP4042138A4
EP4042138A4 EP20944050.2A EP20944050A EP4042138A4 EP 4042138 A4 EP4042138 A4 EP 4042138A4 EP 20944050 A EP20944050 A EP 20944050A EP 4042138 A4 EP4042138 A4 EP 4042138A4
Authority
EP
European Patent Office
Prior art keywords
adapter
evaluation
thin films
mechanical durability
quality
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP20944050.2A
Other languages
German (de)
English (en)
Other versions
EP4042138A1 (fr
Inventor
Radim CTVRTLÍK
Petr BOHÁC
Jan TOMÁSTÍK
Miroslav Hrabovský
Lubomír Jastrabík
Lukás VÁCLAVEK
Karel Cvrk
Miroslav Veselský
Petr Abrhám
Václav Koula
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Univerzita Palackeho V Olomouci
Original Assignee
Univerzita Palackeho V Olomouci
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univerzita Palackeho V Olomouci filed Critical Univerzita Palackeho V Olomouci
Publication of EP4042138A1 publication Critical patent/EP4042138A1/fr
Publication of EP4042138A4 publication Critical patent/EP4042138A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • G01N29/11Analysing solids by measuring attenuation of acoustic waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/14Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object using acoustic emission techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/24Probes
    • G01N29/2437Piezoelectric probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/02Details
    • G01N3/04Chucks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/40Investigating hardness or rebound hardness
    • G01N3/42Investigating hardness or rebound hardness by performing impressions under a steady load by indentors, e.g. sphere, pyramid
    • G01N3/46Investigating hardness or rebound hardness by performing impressions under a steady load by indentors, e.g. sphere, pyramid the indentors performing a scratching movement
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/56Investigating resistance to wear or abrasion
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • G01N2021/8812Diffuse illumination, e.g. "sky"
    • G01N2021/8816Diffuse illumination, e.g. "sky" by using multiple sources, e.g. LEDs
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0001Type of application of the stress
    • G01N2203/0005Repeated or cyclic
    • G01N2203/0007Low frequencies up to 100 Hz
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0058Kind of property studied
    • G01N2203/0076Hardness, compressibility or resistance to crushing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/026Specifications of the specimen
    • G01N2203/0262Shape of the specimen
    • G01N2203/0278Thin specimens
    • G01N2203/0282Two dimensional, e.g. tapes, webs, sheets, strips, disks or membranes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/04Chucks, fixtures, jaws, holders or anvils
    • G01N2203/0447Holders for quick insertion/removal of test pieces
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/01Indexing codes associated with the measuring variable
    • G01N2291/015Attenuation, scattering
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/023Solids
    • G01N2291/0237Thin materials, e.g. paper, membranes, thin films
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/025Change of phase or condition
    • G01N2291/0258Structural degradation, e.g. fatigue of composites, ageing of oils

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
  • Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
EP20944050.2A 2020-07-10 2020-08-24 Adaptateur de porte-échantillon pour l'évaluation de la durabilité mécanique de films minces et procédé d'évaluation de la qualité de durabilité mécanique de films minces par l'intermédiaire de cet adaptateur Withdrawn EP4042138A4 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CZ2020405A CZ308746B6 (cs) 2020-07-10 2020-07-10 Nástavec držáku vzorků pro hodnocení mechanické odolnosti tenkých vrstev a způsob hodnocení kvality mechanické odolnosti tenkých vrstev pomocí tohoto nástavce
PCT/CZ2020/000039 WO2022007985A1 (fr) 2020-07-10 2020-08-24 Adaptateur de porte-échantillon pour l'évaluation de la durabilité mécanique de films minces et procédé d'évaluation de la qualité de durabilité mécanique de films minces par l'intermédiaire de cet adaptateur

Publications (2)

Publication Number Publication Date
EP4042138A1 EP4042138A1 (fr) 2022-08-17
EP4042138A4 true EP4042138A4 (fr) 2022-11-09

Family

ID=75488665

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20944050.2A Withdrawn EP4042138A4 (fr) 2020-07-10 2020-08-24 Adaptateur de porte-échantillon pour l'évaluation de la durabilité mécanique de films minces et procédé d'évaluation de la qualité de durabilité mécanique de films minces par l'intermédiaire de cet adaptateur

Country Status (3)

Country Link
EP (1) EP4042138A4 (fr)
CZ (1) CZ308746B6 (fr)
WO (1) WO2022007985A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113358509A (zh) * 2021-05-07 2021-09-07 上海交通大学 一种全自动玻璃表面抗磨损性能测试装置及方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992022805A1 (fr) * 1991-06-08 1992-12-23 Renishaw Transducer Systems Limited Appareil d'analyse de surface
WO1996010737A1 (fr) * 1994-09-30 1996-04-11 Renishaw Plc Procedes et appareils d'essais de penetration, de rayure ou tribologiques
US5587532A (en) * 1995-01-12 1996-12-24 The United States Of America As Represented By The Secretary Of The Army Method of measuring crack propagation in opaque materials
RU2147737C1 (ru) * 1998-07-07 2000-04-20 Комсомольский-на-Амуре государственный технический университет Устройство для испытания материалов
US20110239767A1 (en) * 2010-04-06 2011-10-06 Varel International Ind., L.P. Acoustic Emission Toughness Testing Having Smaller Noise Ratio
CZ305833B6 (cs) * 2014-12-02 2016-03-30 Fyzikální ústav AV ČR, v.v.i. Nástavec držáku zkušebních vzorků k zařízení pro provádění vrypové zkoušky
EP3267177A1 (fr) * 2016-07-08 2018-01-10 Anton Paar TriTec SA Procédé d'évaluation automatisée de surface

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5909020B2 (ja) * 2012-03-27 2016-04-26 ハイジトロン, インク.Hysitron, Inc. 顕微鏡対物レンズ機械検査機器
US9752969B2 (en) * 2014-04-09 2017-09-05 Bruker Nano Inc. Universal mechanical tester for measuring friction and wear characteristics of materials
US10258239B2 (en) * 2017-05-30 2019-04-16 Vishal Khosla Method for in-line testing and surface analysis of test material with participation of raman spectroscopy

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992022805A1 (fr) * 1991-06-08 1992-12-23 Renishaw Transducer Systems Limited Appareil d'analyse de surface
WO1996010737A1 (fr) * 1994-09-30 1996-04-11 Renishaw Plc Procedes et appareils d'essais de penetration, de rayure ou tribologiques
US5587532A (en) * 1995-01-12 1996-12-24 The United States Of America As Represented By The Secretary Of The Army Method of measuring crack propagation in opaque materials
RU2147737C1 (ru) * 1998-07-07 2000-04-20 Комсомольский-на-Амуре государственный технический университет Устройство для испытания материалов
US20110239767A1 (en) * 2010-04-06 2011-10-06 Varel International Ind., L.P. Acoustic Emission Toughness Testing Having Smaller Noise Ratio
CZ305833B6 (cs) * 2014-12-02 2016-03-30 Fyzikální ústav AV ČR, v.v.i. Nástavec držáku zkušebních vzorků k zařízení pro provádění vrypové zkoušky
EP3267177A1 (fr) * 2016-07-08 2018-01-10 Anton Paar TriTec SA Procédé d'évaluation automatisée de surface

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2022007985A1 *

Also Published As

Publication number Publication date
WO2022007985A1 (fr) 2022-01-13
EP4042138A1 (fr) 2022-08-17
CZ2020405A3 (cs) 2021-04-21
CZ308746B6 (cs) 2021-04-21

Similar Documents

Publication Publication Date Title
EP4042138A4 (fr) Adaptateur de porte-échantillon pour l'évaluation de la durabilité mécanique de films minces et procédé d'évaluation de la qualité de durabilité mécanique de films minces par l'intermédiaire de cet adaptateur
EP4254015A4 (fr) Procédé et appareil d'évaluation de précision de positionnement
EP4117333A4 (fr) Procédé et appareil de mesure
EP4075682A4 (fr) Procédé et appareil de mesure de canal
EP3948254A4 (fr) Procédés et appareil pour effectuer des mesures d'échantillons en utilisant la lumière visible sur des échantillons manipulés avec des ondes acoustiques
EP4081106A4 (fr) Dispositif capteur pour mesure optique de propriétés biologiques
EP4133816A4 (fr) Procédés et appareil d'activation et de désactivation d'intervalle de mesure pour des mesures de positionnement
EP4085237A4 (fr) Appareil et procédé de réduction d'interférence dans une sonde de spectroscopie optique comprenant un faisceau échantillon collimaté
EP4096280A4 (fr) Procédé et appareil de mesure
EP4136764A4 (fr) Procédé et appareil pour mesurer un faisceau et établir un rapport associé
EP4102900A4 (fr) Procédé et appareil d'élimination d'observation indirecte pour une valeur de mesure de temps d'arrivée, et terminal
EP4206648A4 (fr) Procédé d'étalonnage de de mesure de force de support de palier de pont en service en fonction d'une détermination précise du coefficient de frottement
EP4108159A4 (fr) Procédé d'inspection de caractéristiques visuelles, procédé de détermination de caractéristiques d'un filtre optique, filtre optique, ensemble d'éléments optiques pour inspection de caractéristiques visuelles, et image d'inspection de caractéristiques visuelles
EP3683593B8 (fr) Appareil de mesure à résonance magnétique nucléaire et procédé de commande de rotation de tube d'échantillon
EP4246444A4 (fr) Procédé et appareil de traitement de données pour un mode de compensation de bande latérale de décalage adaptatif d'échantillon
EP4201052A4 (fr) Appareil optique pour améliorer la sensibilité de caméra et la mise en correspondance de perspectives identiques
TWI799738B (zh) 附設薄膜之晶圓的膜厚分布之測定方法
EP4137814A4 (fr) Dispositif de mesure optique et système d'analyse de la qualité de l'eau
EP4110173A4 (fr) Guidage d'image volumétrique pour un sectionnement et une analyse de pathologie améliorés d'échantillons de tissu
TWI851165B (zh) 光學測量設備及光學測量方法
EP4258727A4 (fr) Appareil et procédé de mesure
EP4011495A4 (fr) Appareil d'essai de culture cellulaire rapide ayant une épaisseur de film fluide constante
AU2023902405A0 (en) Sample holding apparatus and testing methods for underwater impact testing
EP4091264A4 (fr) Procédé et appareil pour recevoir une mesure de faisceau spécifique à une unité et établir un rapport
EP3996583A4 (fr) Systèmes et procédés permettant de déterminer la résistance antimicrobienne d'un échantillon à l'aide d'une topographie de surface déterminée à partir de données d'imagerie optique

Legal Events

Date Code Title Description
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE

PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20220428

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

A4 Supplementary search report drawn up and despatched

Effective date: 20221011

RIC1 Information provided on ipc code assigned before grant

Ipc: G01N 19/06 20060101ALI20221005BHEP

Ipc: G01N 21/88 20060101ALI20221005BHEP

Ipc: G01N 29/14 20060101ALI20221005BHEP

Ipc: G01N 3/46 20060101ALI20221005BHEP

Ipc: G01N 3/56 20060101AFI20221005BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20230509

DAV Request for validation of the european patent (deleted)
DAX Request for extension of the european patent (deleted)