EP4012139A4 - Reinraum mit fähigkeit zur verhinderung von gasförmigen molekularen verunreinigungen durch diffusion - Google Patents

Reinraum mit fähigkeit zur verhinderung von gasförmigen molekularen verunreinigungen durch diffusion Download PDF

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Publication number
EP4012139A4
EP4012139A4 EP20851748.2A EP20851748A EP4012139A4 EP 4012139 A4 EP4012139 A4 EP 4012139A4 EP 20851748 A EP20851748 A EP 20851748A EP 4012139 A4 EP4012139 A4 EP 4012139A4
Authority
EP
European Patent Office
Prior art keywords
diffusing
clean room
gaseous molecular
room capable
molecular pollutant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP20851748.2A
Other languages
English (en)
French (fr)
Other versions
EP4012139A1 (de
Inventor
Chuanyan LI
Peng Li
Jiangbiao WANG
Xinshang ZHANG
Shouwen SHENG
Hongmei XIAO
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
China Electronics Engineering Design Institute Co Ltd
SY Technology Engineering and Construction Co Ltd
Original Assignee
China Electronics Engineering Design Institute Co Ltd
SY Technology Engineering and Construction Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by China Electronics Engineering Design Institute Co Ltd, SY Technology Engineering and Construction Co Ltd filed Critical China Electronics Engineering Design Institute Co Ltd
Publication of EP4012139A1 publication Critical patent/EP4012139A1/de
Publication of EP4012139A4 publication Critical patent/EP4012139A4/de
Pending legal-status Critical Current

Links

Classifications

    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04H—BUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
    • E04H1/00—Buildings or groups of buildings for dwelling or office purposes; General layout, e.g. modular co-ordination or staggered storeys
    • E04H1/12—Small buildings or other erections for limited occupation, erected in the open air or arranged in buildings, e.g. kiosks, waiting shelters for bus stops or for filling stations, roofs for railway platforms, watchmen's huts or dressing cubicles
    • E04H1/1277—Shelters for decontamination
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04H—BUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
    • E04H5/00—Buildings or groups of buildings for industrial or agricultural purposes
    • E04H5/02—Buildings or groups of buildings for industrial purposes, e.g. for power-plants or factories
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/89—Arrangement or mounting of control or safety devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/02—Ducting arrangements
    • F24F13/0227—Ducting arrangements using parts of the building, e.g. air ducts inside the floor, walls or ceiling of a building
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
    • F24F7/08—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit with separate ducts for supplied and exhausted air with provisions for reversal of the input and output systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/0001—Control or safety arrangements for ventilation
    • F24F2011/0002—Control or safety arrangements for ventilation for admittance of outside air
    • F24F2011/0005—Control or safety arrangements for ventilation for admittance of outside air to create underpressure in a room, keeping contamination inside
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2110/00—Control inputs relating to air properties
    • F24F2110/40—Pressure, e.g. wind pressure

Landscapes

  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Ventilation (AREA)
  • Separation Of Gases By Adsorption (AREA)
EP20851748.2A 2019-08-09 2020-07-24 Reinraum mit fähigkeit zur verhinderung von gasförmigen molekularen verunreinigungen durch diffusion Pending EP4012139A4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201910736090.3A CN110439332B (zh) 2019-08-09 2019-08-09 一种洁净室
PCT/CN2020/104616 WO2021027528A1 (zh) 2019-08-09 2020-07-24 一种抑制气体分子污染物扩散的洁净室

Publications (2)

Publication Number Publication Date
EP4012139A1 EP4012139A1 (de) 2022-06-15
EP4012139A4 true EP4012139A4 (de) 2022-09-28

Family

ID=68434331

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20851748.2A Pending EP4012139A4 (de) 2019-08-09 2020-07-24 Reinraum mit fähigkeit zur verhinderung von gasförmigen molekularen verunreinigungen durch diffusion

Country Status (4)

Country Link
EP (1) EP4012139A4 (de)
KR (1) KR102758887B1 (de)
CN (1) CN110439332B (de)
WO (1) WO2021027528A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110439332B (zh) * 2019-08-09 2024-09-03 世源科技工程有限公司 一种洁净室
CN111457530A (zh) * 2020-04-01 2020-07-28 北京联合大学 洁净室内移动污染源污染气隐藏式快速清除系统
EP3912649B1 (de) * 2020-05-19 2023-10-25 SEIWO Technik GmbH Modularer schutzraum sowie durchreiche für einen schutzraum
US12140342B2 (en) * 2021-07-29 2024-11-12 Taiwan Semiconductor Manufacturing Company Ltd. Makeup air handling unit in semiconductor fabrication building and method for cleaning air using the same
CN113607765B (zh) * 2021-08-03 2024-04-12 亚翔系统集成科技（苏州）股份有限公司 一种基于半导体生产线中不良产品的污染源查找方法
CN114099194B (zh) * 2021-10-25 2023-09-08 北京机械设备研究所 一种正压隔离舱
CN115095187B (zh) * 2022-03-24 2023-10-03 成都格力新晖医疗装备有限公司 移动实验室及其舱体机构
CN116105251B (zh) * 2023-03-14 2024-01-05 通威微电子有限公司 半导体厂房净化设备

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2177501A (en) * 1985-06-28 1987-01-21 Kajima Corp Clean room
GB2321862A (en) * 1997-02-07 1998-08-12 Fuji Electric Co Ltd Fan filter unit with separate access means to ventilation fan and gas absorption filter
US5922095A (en) * 1997-03-20 1999-07-13 Acoustiflo, Llc Air handling system for buildings and clean rooms
WO2001018323A1 (en) * 1999-09-07 2001-03-15 Speedfam-Ipec Corporation Clean room and method
US20140196419A1 (en) * 2012-10-30 2014-07-17 Shenzhen China Star Optoelectronics Technology Co., Ltd. Fan filter unit and air purification system for dust-free room
CN105987433A (zh) * 2014-12-25 2016-10-05 世源科技工程有限公司 空气处理系统

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JP2811600B2 (ja) * 1990-05-15 1998-10-15 須賀工業株式会社 ヒートパイプ式熱交換器
JPH05149591A (ja) * 1991-04-30 1993-06-15 Nippon Steel Corp 半導体デバイスを製造するための製造設備及びクリーンルーム
JPH0694260A (ja) * 1992-09-09 1994-04-05 Nippon Steel Corp 空調システム
CN1329696C (zh) * 2005-08-22 2007-08-01 无锡华润微电子有限公司 洁净室的空气调节、净化系统
JP4805013B2 (ja) * 2006-05-16 2011-11-02 エーザイ・アール・アンド・ディー・マネジメント株式会社 クリーンルーム用給排気管理制御装置
CN101503916B (zh) * 2009-03-30 2011-03-23 云南白药集团股份有限公司 一种模块化厂房结构
CN204402090U (zh) * 2014-10-29 2015-06-17 中国医药集团重庆医药设计院 避免人流、物流交叉的生物医药厂房结构
CN105135566B (zh) * 2015-09-09 2017-12-26 同济大学 一种基于空气定向流动原理的污染物隔断系统及其使用方法
CN105289203A (zh) * 2015-11-10 2016-02-03 信利（惠州）智能显示有限公司 一种气体分子污染物热处理单元
CN106245944B (zh) * 2016-06-15 2018-08-17 高海 分析检测基础装备实验室建筑模块
CN206385856U (zh) * 2016-06-15 2017-08-08 高海 低集成度成套性分析检测基础装备实验室建筑模块
US10663189B2 (en) * 2016-11-19 2020-05-26 Harris Environmental Systems, Inc. Environmental room with reduced energy consumption
CN109253520B (zh) * 2018-10-31 2024-05-03 石家庄学院 洁净区通风系统及压差调节方法
CN110439332B (zh) * 2019-08-09 2024-09-03 世源科技工程有限公司 一种洁净室
CN210713992U (zh) * 2019-08-09 2020-06-09 世源科技工程有限公司 一种洁净室

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2177501A (en) * 1985-06-28 1987-01-21 Kajima Corp Clean room
GB2321862A (en) * 1997-02-07 1998-08-12 Fuji Electric Co Ltd Fan filter unit with separate access means to ventilation fan and gas absorption filter
US5922095A (en) * 1997-03-20 1999-07-13 Acoustiflo, Llc Air handling system for buildings and clean rooms
WO2001018323A1 (en) * 1999-09-07 2001-03-15 Speedfam-Ipec Corporation Clean room and method
US20140196419A1 (en) * 2012-10-30 2014-07-17 Shenzhen China Star Optoelectronics Technology Co., Ltd. Fan filter unit and air purification system for dust-free room
CN105987433A (zh) * 2014-12-25 2016-10-05 世源科技工程有限公司 空气处理系统

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2021027528A1 *

Also Published As

Publication number Publication date
KR20220035264A (ko) 2022-03-21
CN110439332A (zh) 2019-11-12
KR102758887B1 (ko) 2025-01-23
CN110439332B (zh) 2024-09-03
EP4012139A1 (de) 2022-06-15
WO2021027528A1 (zh) 2021-02-18

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