EP4012139A4 - Clean room capable of inhibiting gaseous molecular pollutant from diffusing - Google Patents

Clean room capable of inhibiting gaseous molecular pollutant from diffusing Download PDF

Info

Publication number
EP4012139A4
EP4012139A4 EP20851748.2A EP20851748A EP4012139A4 EP 4012139 A4 EP4012139 A4 EP 4012139A4 EP 20851748 A EP20851748 A EP 20851748A EP 4012139 A4 EP4012139 A4 EP 4012139A4
Authority
EP
European Patent Office
Prior art keywords
diffusing
clean room
gaseous molecular
room capable
molecular pollutant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP20851748.2A
Other languages
German (de)
French (fr)
Other versions
EP4012139A1 (en
Inventor
Chuanyan LI
Peng Li
Jiangbiao WANG
Xinshang ZHANG
Shouwen SHENG
Hongmei XIAO
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
China Electronics Engineering Design Institute Co Ltd
SY Technology Engineering and Construction Co Ltd
Original Assignee
China Electronics Engineering Design Institute Co Ltd
SY Technology Engineering and Construction Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by China Electronics Engineering Design Institute Co Ltd, SY Technology Engineering and Construction Co Ltd filed Critical China Electronics Engineering Design Institute Co Ltd
Publication of EP4012139A1 publication Critical patent/EP4012139A1/en
Publication of EP4012139A4 publication Critical patent/EP4012139A4/en
Pending legal-status Critical Current

Links

Classifications

    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04H—BUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
    • E04H1/00—Buildings or groups of buildings for dwelling or office purposes; General layout, e.g. modular co-ordination or staggered storeys
    • E04H1/12—Small buildings or other erections for limited occupation, erected in the open air or arranged in buildings, e.g. kiosks, waiting shelters for bus stops or for filling stations, roofs for railway platforms, watchmen's huts or dressing cubicles
    • E04H1/1277—Shelters for decontamination
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04H—BUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
    • E04H5/00—Buildings or groups of buildings for industrial or agricultural purposes
    • E04H5/02—Buildings or groups of buildings for industrial purposes, e.g. for power-plants or factories
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/89—Arrangement or mounting of control or safety devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/02—Ducting arrangements
    • F24F13/0227—Ducting arrangements using parts of the building, e.g. air ducts inside the floor, walls or ceiling of a building
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
    • F24F7/08—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit with separate ducts for supplied and exhausted air with provisions for reversal of the input and output systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/0001—Control or safety arrangements for ventilation
    • F24F2011/0002—Control or safety arrangements for ventilation for admittance of outside air
    • F24F2011/0005—Control or safety arrangements for ventilation for admittance of outside air to create underpressure in a room, keeping contamination inside
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2110/00—Control inputs relating to air properties
    • F24F2110/40—Pressure, e.g. wind pressure

Landscapes

  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Ventilation (AREA)
  • Separation Of Gases By Adsorption (AREA)
EP20851748.2A 2019-08-09 2020-07-24 Clean room capable of inhibiting gaseous molecular pollutant from diffusing Pending EP4012139A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201910736090.3A CN110439332B (en) 2019-08-09 2019-08-09 Clean room
PCT/CN2020/104616 WO2021027528A1 (en) 2019-08-09 2020-07-24 Clean room capable of inhibiting gaseous molecular pollutant from diffusing

Publications (2)

Publication Number Publication Date
EP4012139A1 EP4012139A1 (en) 2022-06-15
EP4012139A4 true EP4012139A4 (en) 2022-09-28

Family

ID=68434331

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20851748.2A Pending EP4012139A4 (en) 2019-08-09 2020-07-24 Clean room capable of inhibiting gaseous molecular pollutant from diffusing

Country Status (4)

Country Link
EP (1) EP4012139A4 (en)
KR (1) KR20220035264A (en)
CN (1) CN110439332B (en)
WO (1) WO2021027528A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110439332B (en) * 2019-08-09 2024-09-03 世源科技工程有限公司 Clean room
CN111457530A (en) * 2020-04-01 2020-07-28 北京联合大学 Concealed rapid cleaning system for mobile pollution source polluted gas in clean room
EP3912649B1 (en) * 2020-05-19 2023-10-25 SEIWO Technik GmbH Modular protective area and pass-through for same
US20230032454A1 (en) * 2021-07-29 2023-02-02 Taiwan Semiconductor Manufacturing Company Ltd. Makeup air handling unit in semiconductor fabrication building and method for cleaning air using the same
CN113607765B (en) * 2021-08-03 2024-04-12 亚翔系统集成科技（苏州）股份有限公司 Pollution source searching method based on bad products in semiconductor production line
CN114099194B (en) * 2021-10-25 2023-09-08 北京机械设备研究所 Positive pressure isolation cabin
CN115095187B (en) * 2022-03-24 2023-10-03 成都格力新晖医疗装备有限公司 Mobile laboratory and cabin mechanism thereof
CN116105251B (en) * 2023-03-14 2024-01-05 通威微电子有限公司 Purifying equipment for semiconductor factory building

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2177501A (en) * 1985-06-28 1987-01-21 Kajima Corp Clean room
GB2321862A (en) * 1997-02-07 1998-08-12 Fuji Electric Co Ltd Fan filter unit with separate access means to ventilation fan and gas absorption filter
US5922095A (en) * 1997-03-20 1999-07-13 Acoustiflo, Llc Air handling system for buildings and clean rooms
WO2001018323A1 (en) * 1999-09-07 2001-03-15 Speedfam-Ipec Corporation Clean room and method
US20140196419A1 (en) * 2012-10-30 2014-07-17 Shenzhen China Star Optoelectronics Technology Co., Ltd. Fan filter unit and air purification system for dust-free room
CN105987433A (en) * 2014-12-25 2016-10-05 世源科技工程有限公司 Air treatment system

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2811600B2 (en) * 1990-05-15 1998-10-15 須賀工業株式会社 Heat pipe heat exchanger
JPH05149591A (en) * 1991-04-30 1993-06-15 Nippon Steel Corp Manufacturing facility for manufacturing semiconductor device and clean room
JPH0694260A (en) * 1992-09-09 1994-04-05 Nippon Steel Corp Air-conditioning system
CN1329696C (en) * 2005-08-22 2007-08-01 无锡华润微电子有限公司 Flow pattern of air conditioning and purifying system in cleaning room
JP4805013B2 (en) * 2006-05-16 2011-11-02 エーザイ・アール・アンド・ディー・マネジメント株式会社 Supply / exhaust management control device for clean room
CN101503916B (en) * 2009-03-30 2011-03-23 云南白药集团股份有限公司 Modularized factory building structure
CN204402090U (en) * 2014-10-29 2015-06-17 中国医药集团重庆医药设计院 Avoid the biological medicine mill construction of the stream of people, logistics intersection
CN105135566B (en) * 2015-09-09 2017-12-26 同济大学 A kind of pollutant partitioning system and its application method based on air guided flowing principle
CN105289203A (en) * 2015-11-10 2016-02-03 信利（惠州）智能显示有限公司 Gas molecular pollutant heat treatment unit
CN106245944B (en) * 2016-06-15 2018-08-17 高海 Analysis detection basic equipment laboratory building module
CN206385856U (en) * 2016-06-15 2017-08-08 高海 Low integrated level complete property analysis detection basic equipment laboratory building module
US10663189B2 (en) * 2016-11-19 2020-05-26 Harris Environmental Systems, Inc. Environmental room with reduced energy consumption
CN109253520B (en) * 2018-10-31 2024-05-03 石家庄学院 Clean zone ventilation system and pressure difference adjusting method
CN210713992U (en) * 2019-08-09 2020-06-09 世源科技工程有限公司 Clean room
CN110439332B (en) * 2019-08-09 2024-09-03 世源科技工程有限公司 Clean room

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2177501A (en) * 1985-06-28 1987-01-21 Kajima Corp Clean room
GB2321862A (en) * 1997-02-07 1998-08-12 Fuji Electric Co Ltd Fan filter unit with separate access means to ventilation fan and gas absorption filter
US5922095A (en) * 1997-03-20 1999-07-13 Acoustiflo, Llc Air handling system for buildings and clean rooms
WO2001018323A1 (en) * 1999-09-07 2001-03-15 Speedfam-Ipec Corporation Clean room and method
US20140196419A1 (en) * 2012-10-30 2014-07-17 Shenzhen China Star Optoelectronics Technology Co., Ltd. Fan filter unit and air purification system for dust-free room
CN105987433A (en) * 2014-12-25 2016-10-05 世源科技工程有限公司 Air treatment system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2021027528A1 *

Also Published As

Publication number Publication date
CN110439332A (en) 2019-11-12
KR20220035264A (en) 2022-03-21
CN110439332B (en) 2024-09-03
EP4012139A1 (en) 2022-06-15
WO2021027528A1 (en) 2021-02-18

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