CN111457530A - Concealed rapid cleaning system for mobile pollution source polluted gas in clean room - Google Patents
Concealed rapid cleaning system for mobile pollution source polluted gas in clean room Download PDFInfo
- Publication number
- CN111457530A CN111457530A CN202010252732.5A CN202010252732A CN111457530A CN 111457530 A CN111457530 A CN 111457530A CN 202010252732 A CN202010252732 A CN 202010252732A CN 111457530 A CN111457530 A CN 111457530A
- Authority
- CN
- China
- Prior art keywords
- annular
- speed increaser
- floor
- vent hole
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F7/00—Ventilation
- F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/50—Control or safety arrangements characterised by user interfaces or communication
- F24F11/56—Remote control
- F24F11/58—Remote control using Internet communication
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/70—Control systems characterised by their outputs; Constructional details thereof
- F24F11/72—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure
- F24F11/74—Control systems characterised by their outputs; Constructional details thereof for controlling the supply of treated air, e.g. its pressure for controlling air flow rate or air velocity
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/89—Arrangement or mounting of control or safety devices
Abstract
The invention discloses a concealed rapid cleaning system for mobile pollution source polluted gas in a clean room. The toilet includes bearing wall and raised floor, is equipped with intermediate layer return air passageway in the bearing wall, and raised floor below is the equipment layer, and raised floor top is clean district, and clean district top is the furred ceiling, installs FFU below the furred ceiling, and raised floor includes floor supporter and orifice plate. A plurality of detection sensors are arranged in the gap of the pore plate, and each detection sensor is arranged along the moving path of the mobile pollution source in the clean room; an annular speed increaser is arranged right below or around the lower part of each detection sensor, the annular speed increaser is arranged at the bottom of the cylindrical vent hole of the floor support body, an annular nozzle which sprays air downwards is formed on the annular speed increaser, the nozzle is opposite to the orifice of the vent hole up and down, and the diameters of the nozzle and the orifice of the vent hole are consistent. The detection sensor and the annular speed increaser are connected with the controller. The invention can rapidly remove the polluted gas generated by the mobile pollution source in the clean room.
Description
Technical Field
The invention relates to a system which is applied to clean rooms such as electronic clean plants and the like, assists an FFU to quickly remove polluted gas generated by indoor mobile pollution sources and is installed in a hidden manner, and belongs to the technical field of pollution cleaning equipment.
Background
The pollution sources in clean rooms of electronic clean factories and the like mainly comprise people, various processed materials, processing equipment and the like. The removal of the polluted gas generated by processing equipment and the like fixed in a clean room is usually realized by adopting an FFU (fan filter unit with power) arranged below a suspended ceiling, but when a new pollution source, namely a mobile pollution source, is added in the room, if the traditional FFU removal method is continuously adopted, the output of the FFU can only be increased. Or the return air frequency of the existing air conditioning system is increased, but the effect is not good. From practical implementation, it can be found that, for local pollution generated by a mobile pollution source, if a treatment method of increasing the output of the FFU is adopted, not only can the polluted gas not be rapidly removed, but also the energy consumption of the FFU is increased. Therefore, on the basis of the existing FFU, the design of equipment capable of quickly removing air polluted by mobile pollution sources such as people walking, moving vehicles and products on a production line is a problem which needs to be solved urgently at present.
Disclosure of Invention
The invention aims to provide a concealed quick cleaning system for mobile pollution source polluted gas in a clean room, which can quickly clean the polluted gas generated by the mobile pollution source in the clean room.
In order to achieve the purpose, the invention adopts the following technical scheme:
the utility model provides a hidden quick clearance system of mobile contamination source pollution gas in toilet, the toilet includes bearing wall and overhead floor, be equipped with intermediate layer return air passageway in the bearing wall, the below on overhead floor is the equipment layer, the top on overhead floor is clean district, the top in clean district is the furred ceiling, install a plurality of FFUs below the furred ceiling, the circulation that offers on the bearing wall between furred ceiling and the equipment layer ventilates hole and intermediate layer return air passageway and link up mutually, overhead floor includes the floor supporter and is located the orifice plate above the floor supporter, its characterized in that: a plurality of detection sensors are arranged in the gap of the pore plate, and each detection sensor is arranged along the moving path of the mobile pollution source in the clean room; an annular speed increaser which drives FFU airflow to rapidly flow downwards through airflow generated by the speed increaser is arranged right below or around the lower part of each detection sensor, wherein: the annular speed increaser is arranged at the bottom of the cylindrical vent hole of the floor support body, an annular nozzle which sprays air downwards is formed on the annular speed increaser, the nozzle is opposite to the orifice of the vent hole up and down, and the diameters of the nozzle and the orifice are consistent; a channel for discharging polluted gas generated by a mobile pollution source in a clean area is formed among the FFU, the pore plate, the vent hole of the floor support, the annular speed increaser, the equipment layer and the interlayer air return channel; the detection sensor and the annular speed increaser are connected with the controller.
The invention has the advantages that:
the invention adds a ring-shaped speed increaser cleaning mode on the basis of the traditional FFU cleaning mode, can realize the purpose of quickly cleaning pollution gas generated by mobile pollution sources, such as people walking, moving vehicles, products on a production line and the like, greatly improves the pollution discharge speed of a clean room, avoids large-scale FFU starting, reduces the energy consumption of a system and saves the cost.
In addition, the invention is integrally installed in the raised floor, is hidden in installation, does not influence the installation of other indoor equipment, has simple and practical structure and low installation threshold, and is suitable for different clean room requirements.
Drawings
FIG. 1 is a schematic view of the installation of the concealed rapid decontamination system for mobile contamination source contaminated gas in a clean room according to the present invention.
Fig. 2 is a schematic view of the ring type speed increaser mounted on the floor support.
Fig. 3 is a partial structural view of the ring type speed increaser.
Fig. 4 is a schematic jet view of the ring type speed increaser.
FIG. 5 is a schematic view of a toroidal speed increaser with a spiral speed increasing tube.
Detailed Description
The concealed type quick cleaning system for the mobile pollution source in the clean room is used for cleaning the pollution gas generated by the mobile pollution source in the clean room. As shown in fig. 1, the clean room includes a bearing wall 40 and an elevated floor 30, an interlayer air return channel 41 is arranged in the bearing wall 40, an equipment layer 50 is arranged below the elevated floor 30, a clean area 90 is arranged above the elevated floor 30, a ceiling 10 is arranged above the clean area 90, a plurality of FFUs (self-powered fan filter devices) 20 are installed below the ceiling 10, the ceiling 10 and the equipment layer 50 are communicated with each other through a circulation ventilation hole 42 arranged on the bearing wall 40 and the interlayer air return channel 41, as shown in fig. 1, the circulation ventilation holes 42 are arranged at the upper and lower parts of the bearing wall 40 on each side, and the elevated floor 30 includes a floor support 32 and a pore plate 31 arranged on the floor support 32.
As shown in fig. 1 to 5, for the hidden rapid cleaning system for mobile pollution source polluted gas in a clean room of the present invention, a plurality of detection sensors 60 are installed in the gap of the hole plate 31, that is, a plurality of detection sensors 60 are installed in the hole plate 31, each detection sensor 60 is arranged along the moving path of the mobile pollution source in the clean room, that is, the moving path of the mobile pollution source in the clean room is preset, and the detection sensor 60 is used for detecting whether the mobile pollution source exists in a certain area in the moving path on the raised floor 30; an annular speed increaser 70 which utilizes the Venturi principle to drive the FFU20 to accelerate the air flow downwards in the clean room by the self-generated small air flow is arranged right below or around the lower part of each detection sensor 60, wherein: the annular speed increaser 70 is arranged at the bottom of the cylindrical vent hole 320 of the floor support body 32, the annular speed increaser 70 is provided with an annular nozzle 72 which sprays air downwards, the nozzle 72 is opposite to the opening of the vent hole 320 in the vertical direction, and the diameters of the nozzle 72 and the vent hole 320 are consistent; a passage for discharging polluted gas generated by a mobile pollution source in a clean area is formed among the FFU20, the pore plate 31, the vent hole 320 of the floor support 32, the annular speed increaser 70, the equipment layer 50 and the interlayer return air passage 41; the detection sensor 60 and the ring type speed increaser 70 are connected with a controller (not shown in the figure) on site or remotely in a wired or wireless mode.
In the present invention, the structure of the clean room is prior art in the field, and therefore, the elevated floor 30 and the FFU20 are prior art decoration parts or devices, and the present invention is characterized in that the detection sensor 60 and the ring-type speed increaser 70 are installed in the elevated floor 30.
In the present invention, the orifice plate 31 may be adapted to allow gas to pass therethrough from top to bottom under the influence of the FFU 20.
In the present invention, the floor support 32 is generally rectangular parallelepiped, the floor support 32 is composed of a plurality of unit supports having a cube shape, the length and width of each unit support are generally 1.2 m, and the height is not limited, but the floor support 32 has a certain mechanical strength. The floor support 32 is generally provided with a vent hole 320, the upper and lower openings of the vent hole 320 have the same diameter, and the top of the vent hole 320 is generally provided with an airflow guide slope surface 3201, as shown in fig. 2. The floor support 32 is a well-known structure in existing raised floors and will not be described in detail.
As shown in fig. 2 to 4, the ring-type speed increaser 70 includes a ring-shaped closed air chamber 71, a nozzle 72 for blowing air downward is provided at the bottom of the closed air chamber 71, the closed air chamber 71 is connected with a high-speed fan 75 via a pipe 74, and a control end of the high-speed fan 75 is connected with a corresponding control end of a controller, wherein: the airtight air chamber 71 is located directly below the ventilation hole 320 of the floor support 32, or the airtight air chamber 71 is disposed around the bottom opening periphery of the ventilation hole 320 of the floor support 32.
In actual installation, the ring-shaped speed increaser 70 may be provided with a fixed connector at the outer periphery thereof, and the ring-shaped speed increaser 70 is fixed to the floor support 32 by a bolt.
In the present invention, the high speed fan 75 can be a brushless DC motor, such as a brushless DC motor with a DC voltage of 12V-24V and a rotation speed of 10000rad/min-16000 rad/min.
As shown in fig. 4, an annular short straight nozzle 73 for ejecting a guide air flow (as indicated by an arrow in fig. 4) extends downward from the bottom of the closed air chamber 71, and the opening width of a nozzle 72 formed downward from the short straight nozzle 73 is about 1 mm.
The operating principle of the ring-type speed increaser 70 is the venturi effect. When the device works, the micro high-speed fan 75 rotates at a high speed, air is rapidly inflated to the annular closed air chamber 71 through the pipeline 74, the pressure in the closed air chamber 71 is increased, and accordingly the air is rapidly ejected from the annular nozzle 72, negative pressure is formed near the inner wall of the nozzle 72, namely, high-speed flowing induced airflow is ejected from the nozzle 72, and negative pressure is formed at the bottom of the vent hole 320, so that large airflow (shown by an arrow in fig. 3) generated by the FFU20 is driven by small induced airflow when the large airflow passes through the vent hole 320 downwards, namely, the large airflow rapidly flows downwards to the direction of the nozzle 72 under the influence of the negative pressure for supplement, the purpose of rapidly removing polluted air is achieved, and meanwhile, the device has.
When the height of the floor support 32 is high, the speed of the atmospheric air generated by the FFU20 is reduced when it passes through the raised floor 30, and the speed of the atmospheric air when it passes through the vent hole 320 is affected, so as to enhance the design of the ring-type speed increaser 70, as shown in fig. 5, specifically, the periphery of the vent hole 320 of the floor support 32 is provided with the spiral speed increasing duct 80, the top end of the spiral speed increasing duct 80 is closed, and the bottom end of the spiral speed increasing duct 80 is communicated with the top of the closed air chamber 71 of the ring-type speed increaser 70.
In practical design, the periphery of the ventilation hole 320 of the floor support 32 can be designed with a cavity (not shown) for accommodating the spiral speed increasing pipe 80.
The design of the spiral type speed-increasing pipeline 80 can further increase the volume of the gas filled in the closed air chamber 71, so as to further enhance the negative pressure intensity formed near the inner wall of the nozzle 72, and enable the nozzle 72 to jet faster induced airflow, thereby more powerfully driving the atmospheric flow generated by the FFU20 to rapidly flow downwards when the atmospheric flow passes through the vent hole 320, and achieving the purpose of rapidly cleaning the polluted gas in the clean room.
In the present invention, the detection sensor 60 is a far infrared sensor, a photoelectric switch, an ultrasonic radar, or the like that can sense the approach of a moving person or object and can emit a signal.
When no new mobile pollution source is added in the clean room, the FFU20 on the suspended ceiling 10 works normally.
When people, a transport vehicle and other mobile pollution sources (the mobile pollution sources need to move along a set moving path) appear in a clean room, and the mobile pollution sources pass through one or more detection sensors 60 in the gap of the pore plate 31, the detection sensors 60 detect the newly added mobile pollution sources and feed back position information of the newly added mobile pollution sources to the controller, so that the controller controls corresponding annular speed increasers 70 right below or around the detection sensors 60 to work (if a spiral speed increasing pipeline 80 is designed, the annular speed increasers 70 work together with the spiral speed increasing pipeline 80), the high-speed fans 75 of the annular speed increasers 70 operate, and jet induced air flow downwards at high speed through the nozzles 72, so that negative pressure is formed at the bottoms of the vent holes 320 where the cylindrical speed increasers 70 are located, further, large air flow is sent downwards from the FFU20, and then enters the vent holes 320 of the floor support body 32 through the pore plate 31, the air flows downwards rapidly under the driving action of the negative pressure to enter the equipment layer 50, then flows into the interlayer air return channel 41, and is discharged and removed through the suspended ceiling 10, so that the purpose of rapidly cleaning polluted air in the clean room is achieved, namely, the air flows circularly flow and are discharged among the FFU20, the pore plate 31, the air vent 320 of the floor support 32, the annular speed increaser 70, the equipment layer 50, the interlayer air return channel 41 and the suspended ceiling 10, and the direction of the air flow formed by the air flowing in the clean room when the polluted air is removed is shown in fig. 1.
Based on the mode of removing the polluted gas, the invention can carry out real-time detection on the mobile polluted source in the clean room, and when the mobile polluted source is detected, the polluted gas removing operation is directly carried out on the mobile polluted source.
The invention has the advantages that:
according to the invention, on the basis of the traditional FFU clearing mode, an annular speed increaser clearing mode is added, so that the purpose of quickly clearing polluted gas generated by mobile pollution sources, such as walking people, moving vehicles, products on a production line and the like, can be realized, the pollution discharge speed of a clean room is greatly improved, the large-scale FFU starting is avoided, the system energy consumption is reduced, and the cost is saved.
The invention adopts the technical scheme that the annular speed increaser is arranged at the position where the mobile pollution source passes through, and can effectively suck out polluted gas instead of increasing the blowing of the annular speed increaser by only depending on the FFU on the annular speed increaser. It can be found from practical implementation that the FFU blow has an obvious disadvantage that the air volume blown by the FFU is large, so that the air pressure in the clean room is relatively increased first, and then the air pressure is stable, therefore, the rapid removal effect of the polluted air is not ideal, but if the annular speed increaser is used in an auxiliary manner, the defect of the FFU is well overcome by the 'suction' of the annular speed increaser, so that the air pressure in the clean room can be rapidly stabilized, and the rapid removal effect of the polluted air is better.
On the basis of the FFU, the invention achieves the purpose of saving energy while quickly removing the polluted gas generated by the moving pollution source by utilizing the Venturi principle and the mode that the small airflow generated by the annular speed increaser drives the big airflow generated by the FFU through the auxiliary design of the annular speed increaser.
In addition, the invention is integrally installed in the raised floor, is hidden in installation, does not influence the installation of other indoor equipment, has simple and practical structure and low installation threshold, and is suitable for different clean room requirements.
The above description is of the preferred embodiment of the present invention and the technical principles applied thereto, and it will be apparent to those skilled in the art that any changes and modifications based on the equivalent changes and simple substitutions of the technical solutions of the present invention are within the protection scope of the present invention without departing from the spirit and scope of the present invention.
Claims (5)
1. The utility model provides a hidden quick clearance system of mobile contamination source pollution gas in toilet, the toilet includes bearing wall and overhead floor, be equipped with intermediate layer return air passageway in the bearing wall, the below on overhead floor is the equipment layer, the top on overhead floor is clean district, the top in clean district is the furred ceiling, install a plurality of FFUs below the furred ceiling, the circulation that offers on the bearing wall between furred ceiling and the equipment layer ventilates hole and intermediate layer return air passageway and link up mutually, overhead floor includes the floor supporter and is located the orifice plate above the floor supporter, its characterized in that: a plurality of detection sensors are arranged in the gap of the pore plate, and each detection sensor is arranged along the moving path of the mobile pollution source in the clean room; an annular speed increaser which drives FFU airflow to rapidly flow downwards through airflow generated by the speed increaser is arranged right below or around the lower part of each detection sensor, wherein: the annular speed increaser is arranged at the bottom of the cylindrical vent hole of the floor support body, an annular nozzle which sprays air downwards is formed on the annular speed increaser, the nozzle is opposite to the orifice of the vent hole up and down, and the diameters of the nozzle and the orifice are consistent; a channel for discharging polluted gas generated by a mobile pollution source in a clean area is formed among the FFU, the pore plate, the vent hole of the floor support, the annular speed increaser, the equipment layer and the interlayer air return channel; the detection sensor and the annular speed increaser are connected with the controller.
2. The concealed rapid decontamination system for mobile contaminant sources in a clean room of claim 1, further comprising:
the annular speed increaser comprises an annular closed air chamber, the bottom of the closed air chamber is provided with a nozzle which sprays air downwards, the closed air chamber is connected with a high-speed fan through a pipeline, and the annular speed increaser comprises: the closed air chamber is positioned right below the vent hole of the floor support body, or the closed air chamber is arranged around the periphery of the bottom hole of the vent hole of the floor support body.
3. The concealed rapid decontamination system for mobile contaminant sources in clean rooms according to claim 2, further comprising:
the bottom of the closed air chamber extends downwards to form an annular short straight spraying channel for spraying induced airflow, and the width of the nozzle formed by the downward short straight spraying channel is 1 mm.
4. The concealed rapid decontamination system for mobile contaminant sources in clean rooms according to claim 2, further comprising:
the periphery of the vent hole of the floor support body is provided with a spiral speed-increasing pipeline, one end of the spiral speed-increasing pipeline is closed, and the other end of the spiral speed-increasing pipeline is communicated with the top of the closed air chamber of the annular speed-increasing device.
5. The concealed rapid decontamination system for mobile contaminant sources in a clean room according to any one of claims 1 to 4, further comprising:
the detection sensor is a far infrared sensor, a photoelectric switch or an ultrasonic radar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010252732.5A CN111457530A (en) | 2020-04-01 | 2020-04-01 | Concealed rapid cleaning system for mobile pollution source polluted gas in clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010252732.5A CN111457530A (en) | 2020-04-01 | 2020-04-01 | Concealed rapid cleaning system for mobile pollution source polluted gas in clean room |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111457530A true CN111457530A (en) | 2020-07-28 |
Family
ID=71685806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010252732.5A Pending CN111457530A (en) | 2020-04-01 | 2020-04-01 | Concealed rapid cleaning system for mobile pollution source polluted gas in clean room |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111457530A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113607765A (en) * | 2021-08-03 | 2021-11-05 | 亚翔系统集成科技（苏州）股份有限公司 | Pollution source searching method based on poor products in semiconductor production line |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08285343A (en) * | 1995-04-18 | 1996-11-01 | Hitachi Plant Eng & Constr Co Ltd | Air conditioner for clean room |
| DE59405568D1 (en) * | 1993-08-28 | 1998-05-07 | Meissner & Wurst | Clean room system |
| CN204460472U (en) * | 2014-12-25 | 2015-07-08 | 世源科技工程有限公司 | air treatment system |
| CN205002269U (en) * | 2015-09-21 | 2016-01-27 | 周兴旭 | Balanced system is inductiond to cold and hot air current section in toilet |
| CN105276720A (en) * | 2015-11-17 | 2016-01-27 | 中国电子系统工程第四建设有限公司 | Modularization clean room unit device |
| CN205189939U (en) * | 2015-12-14 | 2016-04-27 | 山东科技大学 | Mining annular is drawn and is penetrated dust pelletizing system |
| CN205383738U (en) * | 2016-02-23 | 2016-07-13 | 周宏� | Toilet's dust pollution sources location discernment and automatic processing apparatus |
| CN106440169A (en) * | 2016-10-17 | 2017-02-22 | 兰州大学 | Indoor air automatic ventilating system |
| CN207363319U (en) * | 2017-09-13 | 2018-05-15 | 中天道成（苏州）洁净技术有限公司 | Energy-saving high-cleanness, high Cleanroom system |
| CN208720383U (en) * | 2018-08-07 | 2019-04-09 | 亚翔系统集成科技（苏州）股份有限公司 | Toilet |
| CN110439332A (en) * | 2019-08-09 | 2019-11-12 | 世源科技工程有限公司 | A kind of toilet |
-
2020
- 2020-04-01 CN CN202010252732.5A patent/CN111457530A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE59405568D1 (en) * | 1993-08-28 | 1998-05-07 | Meissner & Wurst | Clean room system |
| JPH08285343A (en) * | 1995-04-18 | 1996-11-01 | Hitachi Plant Eng & Constr Co Ltd | Air conditioner for clean room |
| CN204460472U (en) * | 2014-12-25 | 2015-07-08 | 世源科技工程有限公司 | air treatment system |
| CN205002269U (en) * | 2015-09-21 | 2016-01-27 | 周兴旭 | Balanced system is inductiond to cold and hot air current section in toilet |
| CN105276720A (en) * | 2015-11-17 | 2016-01-27 | 中国电子系统工程第四建设有限公司 | Modularization clean room unit device |
| CN205189939U (en) * | 2015-12-14 | 2016-04-27 | 山东科技大学 | Mining annular is drawn and is penetrated dust pelletizing system |
| CN205383738U (en) * | 2016-02-23 | 2016-07-13 | 周宏� | Toilet's dust pollution sources location discernment and automatic processing apparatus |
| CN106440169A (en) * | 2016-10-17 | 2017-02-22 | 兰州大学 | Indoor air automatic ventilating system |
| CN207363319U (en) * | 2017-09-13 | 2018-05-15 | 中天道成（苏州）洁净技术有限公司 | Energy-saving high-cleanness, high Cleanroom system |
| CN208720383U (en) * | 2018-08-07 | 2019-04-09 | 亚翔系统集成科技（苏州）股份有限公司 | Toilet |
| CN110439332A (en) * | 2019-08-09 | 2019-11-12 | 世源科技工程有限公司 | A kind of toilet |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113607765A (en) * | 2021-08-03 | 2021-11-05 | 亚翔系统集成科技（苏州）股份有限公司 | Pollution source searching method based on poor products in semiconductor production line |
| CN113607765B (en) * | 2021-08-03 | 2024-04-12 | 亚翔系统集成科技（苏州）股份有限公司 | Pollution source searching method based on bad products in semiconductor production line |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR200427932Y1 (en) | Air curtain apparatus for subway station | |
| CN111457530A (en) | Concealed rapid cleaning system for mobile pollution source polluted gas in clean room | |
| KR102473982B1 (en) | Robot cleaner including plasma sterilizing module | |
| JP2017062092A (en) | Air cleaner | |
| CN107185911A (en) | A kind of induction type Airshower chamber | |
| CN201731587U (en) | Device for collecting smoke from top part of smoking room | |
| CN206286309U (en) | Pollutant catabolic gene room | |
| CN204074624U (en) | Automatic induction gate-type Airshower chamber | |
| KR101883498B1 (en) | Air Injection collecting dust removal equipment | |
| JPH08200758A (en) | Ventilating method and parking place ventilating system | |
| KR101240456B1 (en) | Apparatus for air purification and ventilating in underground structures ,and method for control of that | |
| CN202570673U (en) | Single-person single-blowing air shower room based on fingerprint information acquisition system | |
| CN106613309A (en) | Air film building bacterium room | |
| CN111457494B (en) | Quick clean-up system of pollution source pollution gas in clean room | |
| CN111036014B (en) | Dust collector of artificial board drying system | |
| CN108036425A (en) | Ozone removes the robot of formaldehyde | |
| KR102210161B1 (en) | Hybrid air purification system | |
| CN207086472U (en) | A kind of induction type Airshower chamber | |
| CN203610255U (en) | Paint mist purification system in high and large space | |
| CN2686707Y (en) | Efficient one-way air raining chamber | |
| JPH02295879A (en) | Elevator device for clean room | |
| KR100963852B1 (en) | Ijector-exhaust of deodorizer | |
| KR20130083148A (en) | Air shower apparatus | |
| KR100917258B1 (en) | Central dust collection vacuum cleaning system with horizental type dust collector | |
| CN205815353U (en) | A kind of industrial dust collector |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20200728 |
|
| WD01 | Invention patent application deemed withdrawn after publication |