CN207363319U - Energy-saving high-cleanness, high Cleanroom system - Google Patents
Energy-saving high-cleanness, high Cleanroom system Download PDFInfo
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- CN207363319U CN207363319U CN201721171951.0U CN201721171951U CN207363319U CN 207363319 U CN207363319 U CN 207363319U CN 201721171951 U CN201721171951 U CN 201721171951U CN 207363319 U CN207363319 U CN 207363319U
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Abstract
The utility model discloses a kind of energy-saving high-cleanness, high Cleanroom system, including：Cleanroom structures system, it includes toilet room, porous raised floor, interior clean partition room, Airshower chamber, buffering corridor and return air passageway；Air handling system, it includes air-conditioner outdoor unit, unit, wind turbine filter unit, upper return air plenum chamber and lower return air plenum chamber is handled in air conditioning chamber；And intelligence control system, it includes touch control screen and controller.The energy-saving high-cleanness, high Cleanroom system of the utility model, energy consumption is low, control accuracy is high, the high-cleanness, high of clean room air can be effectively ensured, while the field such as nanometer, microelectronics, biology, life science high-cleanness, high grade toilet's related process parameters are met, realize the energy-saving of system, system energy consumption is reduced, has saved operating cost.
Description
Technical field
Toilet's technology field is the utility model is related to, more particularly to a kind of energy-saving high-cleanness, high Cleanroom system.
Background technology
With the development of science and technology, research of the people to fields such as nanometer, microelectronics, biology, life sciences is also more next
More extensive many colleges and universities and scientific research institution are all put into the research in these high-grade, precision and advanced fields with going deep into, for science and technology not
Disconnected development is made that tremendous contribution.In the research of these most advanced branches of science, in addition to this professional scientific knowledge, one is ground with this
It is the uniformity, reliability and final successful important guarantee hand for ensureing result of study to study carefully the research environment that technique matches
Section.The toilet of high-cleanness, high grade and be this means important avatar, the cleanliness factor of these toilets generally will
Higher than ISO5 grades, the index such as temperature, relative humidity, noise, antistatic, anti-shielding properties has harsh requirement, this is just to clean
The strict requirements that the construction and operation of clean room propose.Present Cleanroom system generally existing problems with：Expenditure of construction and
Operating cost is all quite high；Clean indoor cleanliness factor is difficult to rank deficient, it is difficult to meets user demand.So need now
A kind of energy-saving high-cleanness, high Cleanroom system, is meeting the field such as nanometer, microelectronics, biology, life science high-cleanness, high etc.
While level toilet's related process parameters, realize the energy-saving of system, reduce system energy consumption, save operating cost.
Utility model content
The technical problem to be solved by the utility model is to for above-mentioned deficiency of the prior art, there is provided a kind of energy saving
Type high-cleanness, high Cleanroom system.
In order to solve the above technical problems, the technical solution adopted in the utility model is：A kind of energy-saving high-cleanness, high is clean
Chamber system, including：
Cleanroom structures system, it include toilet room, be erected at it is porous overhead on toilet's room floors
Floor, the interior clean partition room being arranged on the porous raised floor, the wind leaching being arranged at toilet's room entrances
Room, the buffering corridor for being arranged on the porous raised floor and being connected with the Airshower chamber and it is arranged on the toilet room
The return air passageway of interior sidepiece；
Air handling system, it includes air-conditioner outdoor unit, the multiple air-conditionings being arranged at intervals on the raised floor bottom surface
Indoor processing unit, the wind turbine filter unit for being arranged at the interior clean partition ceiling portion, be arranged at the wind turbine filter unit
On upper return air plenum chamber and the lower return air plenum chamber that is arranged on the raised floor bottom surface；
And intelligence control system, it includes touch control screen and controller.
Preferably, the interior clean partition room include being erected on the raised floor and rear and front end respectively with it is described
The two pieces of lateral partition plates and be connected to described two lateral partition plates tops and front and rear two that the front and rear metope in toilet room is tightly connected
The top spacer that end is tightly connected with the front and rear metope in the toilet room respectively.
Preferably, return air chamber is formed between the lower section of the porous raised floor and the toilet room；Described two
The lateral partition plate of block, top spacer, the front and rear metope and raised floor in toilet room separate room, institute around the interior cleaning is formed
State interior clean partition room to connect with the return air chamber of lower section by the porous raised floor of its bottom, in the interior clean partition room
Air is by the porous raised floor downwardly into the return air chamber.
Preferably, the return air passageway is in the offside of the Airshower chamber, return air passageway lower end and the return air
Chamber connects, and upper end is connected to the upper return air plenum chamber；The buffering corridor bottom is connected with the return air chamber, and top is connected to
The upper return air plenum chamber；Air in the return air chamber is eased up by the return air passageway to be washed away corridor and is back to the upper return air
In plenum chamber.
Preferably, hermatic door is provided with the lateral partition plate being connected on the interior clean partition room with the Airshower chamber.
Preferably, unit is handled in the air conditioning chamber includes wind turbine, surface cooler, heater, humidifier, solidifying water pond and cold
Condensate draining pump, the air-conditioner outdoor unit are connected with handling unit in the air conditioning chamber, and the air-conditioner outdoor unit is the air-conditioning
Indoor processing unit provides refrigerant.
Preferably, the wind turbine filter unit includes wind turbine and high efficiency particle air filter, for by outdoor fresh air and room
It is indoor that interior clean partition is blown into after interior return air filtering.
Preferably, handled in the air conditioning chamber on unit and be additionally provided with detection device, the detection device includes temperature
Sensor, humidity sensor, dust sensor.
Preferably, covering is provided with airstrainer on the bottom surface of the porous raised floor.
Preferably, the airstrainer includes PTFE fiber layer, polyethersulfone membranes layer, the Nano carbon fibers set gradually
Tie up layer of cloth, polyphenylene sulfide fibre layer, bamboo, glass layer and nonwoven layer.
The utility model includes at least following beneficial effect：
1) the energy-saving high-cleanness, high Cleanroom system of the utility model, by setting Airshower chamber before clean partition room inside
Between buffering, the dust particle adhered on clean indoor occupant body can be effectively removed into, the place of clean partition room in reduction
Reason meets, and reduces energy consumption, while can also improve the interior clean indoor cleanliness factor of partition；
2) by the way that wind turbine, surface cooler, heater, humidifier, solidifying water pond and drainage pump for condensated water centralized integrated are set
Under porous raised floor, directly being cooled down to clean indoor air-flow, heated, dehumidified, humidify etc. is handled, and can be greatly reduced
System resistance, while the energy loss for avoiding pipeline transportation from bringing, can substantially reduce the operation energy consumption of system；
3) clean indoor air is monitored and controlled in real time by intelligence control system, can guarantee that clean indoor
The high-cleanness, high of air, while energy consumption can also be saved；
4) by setting filter screen, deep purifying can be carried out to clean indoor air, improves the cleanliness factor of room air.
5) the utility model energy consumption is low, control accuracy is high, and the high-cleanness, high of clean room air can be effectively ensured, and has very
High application value.
Brief description of the drawings
Fig. 1 is the structure diagram of the positive apparent direction of the energy-saving high-cleanness, high Cleanroom system of the utility model；
Fig. 2 is the top view of the energy-saving high-cleanness, high Cleanroom system of the utility model；
Fig. 3 is the sectional view of the thickness direction of the filter screen of the utility model.
Description of reference numerals：
1-toilet room；2-porous raised floor；3-interior clean partition room；4-Airshower chamber；5-buffering corridor；
6-return air passageway；7-air-conditioner outdoor unit；Unit is handled in 8-air conditioning chamber；9-wind turbine filter unit；10-go up return air static pressure
Case；11-lower return air plenum chamber；12-return air chamber；13-hermatic door；14-filter screen；30-lateral partition plate；31-top every
Plate；140-PTFE fiber layer；141-polyethersulfone membranes layer；142-carbon nano-fiber layer of cloth；143-polyphenylene sulfide fibre layer；
144-bamboo；145-glass layer；146-nonwoven layer.
Embodiment
The utility model is described in further detail with reference to embodiment, to make those skilled in the art's reference say
Bright book word can be implemented according to this.
It should be appreciated that such as " having ", "comprising" and " comprising " term used herein do not allot one or more
The presence or addition of a other elements or its combination.
As shown in Figs. 1-3, a kind of energy-saving high-cleanness, high Cleanroom system of the present embodiment, it is characterised in that including：It is clean
Clean room structural system, it includes toilet room 1, the porous raised floor 2 being erected on 1 ground of toilet room, is arranged on
Interior cleaning on porous raised floor 2 separates room 3, is arranged at the Airshower chamber 4 of 1 inlet of toilet room, is arranged on porous height
The buffering corridor 5 connected on frame floor 2 and with Airshower chamber 4 and the return air passageway 6 for the sidepiece being arranged in toilet room 1；
Air handling system, it includes air-conditioner outdoor unit 7, is arranged at intervals in multiple air conditioning chambers on raised floor bottom surface
Processing unit 8, the wind turbine filter unit 9 for being arranged at interior clean 3 top of partition room, the last time being arranged on wind turbine filter unit 9
Wind plenum chamber 10 and the lower return air plenum chamber 11 being arranged on raised floor bottom surface；
And intelligence control system, it includes touch control screen and controller.
Wind turbine filter unit 9 includes wind turbine and high efficiency particle air filter, for by after outdoor fresh air and indoor return air filtering
It is blown into interior clean partition room 3.Wind turbine filter unit 9 is connected with outside by intake stack.
Intensive setting perforate on porous raised floor 2, so that air passes through.
Interior clean partition room 3 includes being erected at front-back wall of on the raised floor and rear and front end respectively with toilet room 1
Two pieces of lateral partition plates 30 that face is tightly connected and be connected at the top of two lateral partition plates 30 and rear and front end respectively with toilet room 1
Front and rear metope be tightly connected top spacer 31.Return air chamber is formed between the lower section and toilet room 1 of porous raised floor 2
12；Two pieces of lateral partition plates 30, top spacer 31, toilet room 1 front and rear metope and raised floor around formed it is interior it is clean every
Disconnected room 3, interior clean partition room 3 are connected by the porous raised floor 2 of its bottom with the return air chamber 12 of lower section, interior clean partition room
Air in 3 is by porous raised floor 2 downwardly into return air chamber 12.The direction of arrow in attached drawing 1 represents air flow
Direction.
Wherein, interior clean partition room 3 keeps sealing except the base, by the interior clean wind turbine filter machine for separating the top of room 3
The air that group 9 enters are behind interior clean partition room 3, by the interior clean porous raised floor 2 for separating 3 bottom of room to flowing down
It is dynamic.Lateral partition plate 30 uses transparent material, and the sidepiece metope in toilet room 1 also selects transparent material.
Return air passageway 6 is in the offside of Airshower chamber 4, and 6 lower end of return air passageway is connected with return air chamber 12, and upper end is connected to last time
Wind plenum chamber 10；Buffering 5 bottom of corridor is connected with return air chamber 12, and top is connected to return air plenum chamber 10；In return air chamber 12
Air washes away corridor 5 and is back in upper return air plenum chamber 10 by the way that return air passageway 6 is gentle.Upper 10 surface of return air plenum chamber is provided with confession
The through hole that air enters.
Wherein, air enters interior clean partition room 3 through wind turbine filter unit 9, then separates the porous of 3 bottom of room from interior cleaning
Raised floor 2 flow to return air chamber 12 after downwards, and the air in return air chamber 12 is flowed to both sides, and the air of side passes through return air passageway
6 back up supreme return air plenum chamber 10, and the air of opposite side after buffering corridor 5 by being back in upper return air plenum chamber 10.
Indoor return air and outdoor fresh air enter upper return air plenum chamber 10 jointly, and reenter interior cleaning by wind turbine filter unit 9 again
Separate room 3, form air circulation.
Hermatic door 13 is provided with the lateral partition plate 30 being connected on interior clean partition room 3 with Airshower chamber 4.Pass through hermatic door 13
Into interior clean partition room 3.
Wherein, between buffering before set Airshower chamber 4, can effectively be removed into the dust grain adhered on clean indoor occupant body
Son, reduces the load of dust particles between buffering, and then reduces the required air quantity of cleaning system, realizes energy saving purpose.Due to
It is just to open operation that Airshower chamber 4 only enters in personnel, and operation energy consumption is very low.By by the air return system and buffering of toilet
Between combine, the air buffering is handled using the return air of toilet, required air quantity between buffering, realizes energy saving mesh
's.And the dust particle for entering on clean indoor personnel's body and adhering to can be further removed between buffering, clean partition in guarantee
Cleanliness factor in room 3.
Unit 8 is handled in air conditioning chamber includes wind turbine, surface cooler, heater, humidifier, solidifying water pond and drainage pump for condensated water,
Air-conditioner outdoor unit 7 is connected with handling unit 8 in air conditioning chamber, and air-conditioner outdoor unit 7 provides refrigerant to handle unit 8 in air conditioning chamber.It is empty
Adjust and detection device is additionally provided with indoor processing unit 8, detection device includes temperature sensor, humidity sensor, dust sensing
Device.
Wherein, temperature sensor, humidity sensor, dust sensor are respectively used to detect in the air conditioning chamber residing for it and handle
Temperature, humidity and the dust content of air near unit 8.Unit 8 is handled in air conditioning chamber for the temperature and humidity to air
Processing is adjusted.Controller handles unit 8 with detection device, air conditioning chamber and air-conditioner outdoor unit 7 is electrically connected.Controller root
According to the temperature sensor and the detected value of humidity sensor that are handled in each air conditioning chamber on unit 8 and air themperature set in advance
With the difference of the scope of the requirement of humidity, processing unit 8 and air-conditioner outdoor unit 7 in the air conditioning chamber are controlled, until the sky
The detected value of the temperature sensor on indoor processing unit 8 and humidity sensor is adjusted to reach desired scope.
Specifically, by taking temperature control as an example：The temperature range of requirement, and activation system are preset by touch control screen
Work；Scope of the neighbouring temperature higher than setting is detected when handling the temperature sensor on unit 8 in a certain air conditioning chamber
When, controller control air-conditioner outdoor unit 7 starts, provides refrigerant to handle the surface cooler of unit 8 in air conditioning chamber；And control surface cooler
And wind turbine, the air quantity for flowing through surface cooler and refrigerant pressure are adjusted to reduce temperature, until the temperature value of temperature sensor detection reaches
To the scope of setting；Controller constantly contrasts the detected value of temperature sensor with setting range, and to processor in air conditioning chamber
Group 8 carries out constantly control adjustment, so that the temperature handled in air conditioning chamber near unit 8 is remained in claimed range.It is indoor
Multiple air conditioning chambers in processing unit 8 work at the same time, indoor temperature is controlled.
Similarly, when being controlled to the indoor humidity in toilet, controller is according to Humidity Detection result constantly to surface cooler
It is adjusted with humidifier etc., indoor humidity is remained at claimed range.
Wherein, partition is provided with processor in multiple air conditioning chambers, and is arranged near heating sources, each air conditioning chamber Nei Chu
Manage and a detection device be set on unit 8, and both are unique corresponding, controller extracts the testing result of detection device, and pair with
Uniquely processor is controlled the detection device in corresponding air conditioning chamber.Controller in indoor multiple air conditioning chambers to handling unit
8 are carried out at the same time control respectively, the indoor temperature and humidity in toilet is maintained in the range of requirement.In each air conditioning chamber
Processing unit 8 individually detect and adjust the air of its near zone, be allowed to reach claimed range, can be effectively ensured indoor temperature,
The accurate control of humidity and the uniformity of height.When indoor temperature, humidity meet the requirements, controller regulating air-conditioning room Nei Chu
The operating parameter of unit 8 and air-conditioner outdoor unit 7 is managed, to save energy consumption.
By the way that wind turbine, surface cooler, heater, humidifier, solidifying water pond and drainage pump for condensated water centralized integrated are arranged on
Under porous raised floor 2, directly being cooled down to clean indoor air-flow, heated, dehumidified, humidify etc. is handled, and can be greatly reduced
System resistance, while the energy loss for avoiding pipeline transportation from bringing, can substantially reduce the operation energy consumption of system.
Covering is provided with airstrainer 14 on the bottom surface of porous raised floor 2.Airstrainer 14 is included by porous height
PTFE fiber layer 140 that 2 bottom surface of frame floor is set gradually downwards, polyethersulfone membranes layer 141, carbon nano-fiber layer of cloth 142, polyphenyl
Sulfide fibers layer 143, bamboo 144, glass layer 145 and nonwoven layer 146.PTFE fiber layer 140 is close to porous
The bottom surface of raised floor 2, remainder layer are set gradually thereunder.Airstrainer 14 carries out filtration treatment to the air flowed through,
The dust and pollutant in air are removed, improves the cleanliness factor of room air.
Wherein, PTFE fiber layer 140 has outstanding absorption property and good mechanical performance, can largely absorb in air
Dust and multiple harmful substances, moreover it is possible to effectively improve the intensity of filter screen 14；143 porosity of polyphenylene sulfide fibre layer is high, receives
Dirt amount is big, resistance to pressure is good, can recoil and high-temperature sterilization, can carry out in-depth filtration to air；Carbon nano-fiber layer of cloth 142 have compared with
Good absorption property, moreover it is possible to which effectively enhancing folds the toughness and wearability of strainer, is positioned in internal layer, can significantly improve filtering
The mechanical strength of net 14, extends its service life；Polyethersulfone membranes layer 141 can carry out in-depth filtration to air；Bamboo
144 have superpower adsorption capacity, have absorption, discomposing effect well to harmful substance and dust, can effectively eliminate peculiar smell；Glass
Glass fibrous layer 145 further purifies air, it is ensured that air quality；Nonwoven layer 146 forms outer layer protection.By successively
Set PTFE fiber layer 140, polyethersulfone membranes layer 141, carbon nano-fiber layer of cloth 142, polyphenylene sulfide fibre layer 143, bamboo charcoal fine
Layer 144, glass layer 145 and nonwoven layer 146 are tieed up, makes the filter screen 14 that there is extremely strong air purification effect, at the same time also
With higher mechanical strength, and service life is grown.
In the utility model, only the structure of airstrainer 14 is improved, and and for airstrainer 14
Used specific material carries out any improvement in itself.Its layers of material shows as its intrinsic performance.
During the energy-saving high-cleanness, high Cleanroom system work of the utility model：Outdoor fresh air and indoor return air enter last time
Wind plenum chamber 10, then wind turbine filter unit 9 is flowed into, through air interior cleaning is downwardly into after 9 filtration treatment of wind turbine filter unit
Separate room 3, then flow downward from the interior clean porous raised floor 2 for separating 3 bottom of room, by being set on porous raised floor 2
Filter screen 14 filter, then flow to return air chamber 12；Through the multiple air conditioning chambers being arranged on porous raised floor 2 in return air chamber 12
Interior processing unit 8 is handled, and after carrying out temperature and humidity adjusting, is flowed to both sides；The air of side by return air passageway 6 back up
It flow to return air plenum chamber 10；The air of opposite side after buffering corridor 5 by being back in upper return air plenum chamber 10；Indoor return air
Upper return air plenum chamber 10 is entered back into outdoor fresh air, forms air circulation.
In the description of the utility model, it is to be understood that term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width
Degree ", " thickness ", " on ", " under ", "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outer ", " suitable
The orientation or position relationship of the instruction such as hour hands ", " counterclockwise ", " axial direction ", " radial direction ", " circumferential direction " are based on orientation shown in the drawings
Or position relationship, be for only for ease of description the utility model and simplify and describe, rather than instruction or imply signified device or
Element must have specific orientation, with specific azimuth configuration and operation, therefore it is not intended that limit to the utility model
System.
Although the embodiment of the utility model is disclosed as above, it is not restricted in specification and embodiment
Listed utilization, it can be applied to the field of various suitable the utility model completely, for those skilled in the art,
Other modification is easily achieved, therefore under the universal limited without departing substantially from claim and equivalency range, this reality
Specific details is not limited to new.
Claims (10)
- A kind of 1. energy-saving high-cleanness, high Cleanroom system, it is characterised in that including：Cleanroom structures system, it include toilet room, the porous raised floor being erected on toilet's room floors, The interior cleaning being arranged on the porous raised floor separates room, the Airshower chamber being arranged at toilet's room entrances, sets The buffering corridor putting on the porous raised floor and connected with the Airshower chamber and it is arranged in the toilet room The return air passageway of sidepiece；Air handling system, it includes air-conditioner outdoor unit, in the multiple air conditioning chambers being arranged at intervals on the raised floor bottom surface Processing unit, the wind turbine filter unit for being arranged at the interior clean partition ceiling portion, be arranged on the wind turbine filter unit Upper return air plenum chamber and the lower return air plenum chamber being arranged on the raised floor bottom surface；And intelligence control system, it includes touch control screen and controller.
- 2. energy-saving high-cleanness, high Cleanroom system according to claim 1, it is characterised in that the interior clean partition room Two be tightly connected respectively with the front and rear metope in the toilet room including being erected on the raised floor and rear and front end The lateral partition plate of block and it is connected at the top of described two lateral partition plates and the rear and front end front and rear metope with the toilet room respectively The top spacer of sealed connection.
- 3. energy-saving high-cleanness, high Cleanroom system according to claim 2, it is characterised in that the porous raised floor Lower section and the toilet room between form return air chamber；Before described two pieces lateral partition plates, top spacer, toilet rooms Metope and raised floor pass through the porous overhead of its bottom around the interior clean partition room, the interior clean partition room is formed afterwards Floor is connected with the return air chamber of lower section, the air in the interior clean partition room by the porous raised floor downwardly into In the return air chamber.
- 4. energy-saving high-cleanness, high Cleanroom system according to claim 3, it is characterised in that the return air passageway is in The offside of the Airshower chamber, return air passageway lower end are connected with the return air chamber, and upper end is connected to the upper return air plenum chamber； The buffering corridor bottom is connected with the return air chamber, and top is connected to the upper return air plenum chamber；Sky in the return air chamber Gas is eased up by the return air passageway to be washed away corridor and is back in the upper return air plenum chamber.
- 5. energy-saving high-cleanness, high Cleanroom system according to claim 2, it is characterised in that the interior clean partition room Hermatic door is provided with the upper lateral partition plate being connected with the Airshower chamber.
- 6. energy-saving high-cleanness, high Cleanroom system according to claim 1, it is characterised in that handled in the air conditioning chamber Unit includes wind turbine, surface cooler, heater, humidifier, solidifying water pond and drainage pump for condensated water, the air-conditioner outdoor unit and the sky Indoor processing unit connection is adjusted, the air-conditioner outdoor unit provides refrigerant to handle unit in the air conditioning chamber.
- 7. energy-saving high-cleanness, high Cleanroom system according to claim 1, it is characterised in that the wind turbine filter unit It is indoor for interior clean partition will to be blown into after outdoor fresh air and indoor return air filtering including wind turbine and high efficiency particle air filter.
- 8. energy-saving high-cleanness, high Cleanroom system according to claim 1, it is characterised in that handled in the air conditioning chamber Detection device is additionally provided with unit, the detection device includes temperature sensor, humidity sensor, dust sensor.
- 9. energy-saving high-cleanness, high Cleanroom system according to claim 1, it is characterised in that the porous raised floor Bottom surface on covering be provided with airstrainer.
- 10. energy-saving high-cleanness, high Cleanroom system according to claim 9, it is characterised in that the airstrainer Including PTFE fiber layer, polyethersulfone membranes layer, carbon nano-fiber layer of cloth, polyphenylene sulfide fibre layer, the bamboo charcoal fiber set gradually Layer, glass layer and nonwoven layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721171951.0U CN207363319U (en) | 2017-09-13 | 2017-09-13 | Energy-saving high-cleanness, high Cleanroom system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721171951.0U CN207363319U (en) | 2017-09-13 | 2017-09-13 | Energy-saving high-cleanness, high Cleanroom system |
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| Publication Number | Publication Date |
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| CN207363319U true CN207363319U (en) | 2018-05-15 |
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ID=62348424
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| CN201721171951.0U Active CN207363319U (en) | 2017-09-13 | 2017-09-13 | Energy-saving high-cleanness, high Cleanroom system |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107687272A (en) * | 2017-09-13 | 2018-02-13 | 中天道成（苏州）洁净技术有限公司 | Energy-saving high-cleanness, high Cleanroom system |
| CN109208944A (en) * | 2018-09-13 | 2019-01-15 | 王勤梅 | A kind of clean room of fast reaction |
| CN109631219A (en) * | 2018-11-13 | 2019-04-16 | 冠恒建设工程有限公司 | The decoration method of Multi-function cleaning room |
| CN111457530A (en) * | 2020-04-01 | 2020-07-28 | 北京联合大学 | Concealed rapid cleaning system for mobile pollution source polluted gas in clean room |
-
2017
- 2017-09-13 CN CN201721171951.0U patent/CN207363319U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107687272A (en) * | 2017-09-13 | 2018-02-13 | 中天道成（苏州）洁净技术有限公司 | Energy-saving high-cleanness, high Cleanroom system |
| CN109208944A (en) * | 2018-09-13 | 2019-01-15 | 王勤梅 | A kind of clean room of fast reaction |
| CN109631219A (en) * | 2018-11-13 | 2019-04-16 | 冠恒建设工程有限公司 | The decoration method of Multi-function cleaning room |
| CN111457530A (en) * | 2020-04-01 | 2020-07-28 | 北京联合大学 | Concealed rapid cleaning system for mobile pollution source polluted gas in clean room |
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