CN207501315U - High-precision high evenness Cleanroom system - Google Patents
High-precision high evenness Cleanroom system Download PDFInfo
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- CN207501315U CN207501315U CN201721172508.5U CN201721172508U CN207501315U CN 207501315 U CN207501315 U CN 207501315U CN 201721172508 U CN201721172508 U CN 201721172508U CN 207501315 U CN207501315 U CN 207501315U
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Abstract
The utility model discloses a kind of high-precision high evenness Cleanroom system, including：Cleanroom structures system, including toilet room, porous raised floor, interior clean partition room, Airshower chamber, buffering corridor and return air passageway；Air handling system, including handling unit and wind turbine filter unit in air-conditioner outdoor unit, air conditioning chamber；And intelligence control system, including the touch control screen for being integrated with control host and multiple detection devices.The utility model is simple and reliable for structure, low energy consumption, control accuracy is high, the air uniformity is high, intelligence degree is high, and clean indoor air quality can be effectively ensured, meet the needs of users, have highly application value.
Description
Technical field
The utility model is related to toilet's technology field, more particularly to a kind of high-precision high evenness Cleanroom system.
Background technology
With the development of science and technology, people are also more next to the research in the fields such as nanometer, microelectronics, biology, life science
More extensive many colleges and universities and scientific research institution are all put into the research in these high-grade, precision and advanced fields with going deep into, for science and technology not
Disconnected development is made that tremendous contribution.It in the research of these most advanced branches of science, handles outside the scientific knowledge of this profession, one is ground with this
It is the consistency for ensureing result of study, reliability and final successful important guarantee hand to study carefully the research environment that technique matches
Section.In high precision, high evenness, high-cleanness, high grade toilet and be this means important avatar, these toilets
Cleanliness factor generally will be higher than ISO5 grades, in space temperature accuracy, the uniformity, precision, the uniformity of relative humidity etc.
It is more demanding.For parameter index as experiment, conventional toilet needs very big air quantity to ensure the stability of parameter,
This just needs to configure large-scale purification air-conditioning unit and mating implementation, occupies very big auxiliary space, complicated, of high cost
It is high.So the cleaning that a kind of control accuracy is high, the air uniformity is high, system structure is simple and reliable, operating cost is low is needed now
Chamber system.
Utility model content
The technical problem to be solved by the utility model is to the deficiencies in for the above-mentioned prior art, provide a kind of high-precision
Spend high evenness Cleanroom system.
In order to solve the above technical problems, the technical solution adopted in the utility model is：A kind of high-precision high evenness is clean
Chamber system, including：
Cleanroom structures system, including toilet room, be erected at it is porous overhead on toilet's room floors
Floor, the interior clean partition room being arranged on the porous raised floor, the wind leaching being set at toilet's room entrances
Room, the buffering corridor for being arranged on the porous raised floor and being connected with the Airshower chamber and it is arranged on the toilet room
The return air passageway of interior side；
Air handling system, including air-conditioner outdoor unit, the multiple air-conditionings being arranged at intervals on the raised floor bottom surface
Indoor processing unit and the wind turbine filter unit for being set to the interior clean partition ceiling portion；
And intelligence control system, including being integrated with the touch control screen of control host and multiple being arranged on the air conditioning chamber
Detection device on interior processing unit；
Wherein, unit is handled in the air conditioning chamber and includes shell and the wind turbine being arranged in the shell, surface cooler, heating
Device, humidifier, solidifying water pond, drainage pump for condensated water, controller；The detection device includes temperature sensor and humidity sensor；
The control host includes acquisition module, processing module and control module.
Preferably, the wind turbine filter unit includes wind turbine and high efficiency particle air filter, for by outdoor fresh air and room
It is indoor that interior clean partition is blown into after interior return air filtering.
Preferably, the cover top portion that unit is handled in the air conditioning chamber is provided with idler wheel and for the idler wheel to be driven to move
Dynamic motor；The raised floor bottom is provided with several sliding rails installed for cooperation and unit is handled in the air conditioning chamber, institute
It states processing unit in air conditioning chamber to be arranged on the sliding rail by the way that idler wheel cooperation thereon is projecting, the motor drives the idler wheel
It rolls, and processing unit in the air conditioning chamber is driven to be moved back and forth on the sliding rail.
Preferably, the air-conditioner outdoor unit is connect with handling unit in the air conditioning chamber, and the air-conditioner outdoor unit is institute
It states and unit offer refrigerant is provided in air conditioning chamber；The controller and the wind turbine, surface cooler, heater, humidifier, solidifying water pond,
Drainage pump for condensated water and motor are electrically connected, and the controller is also electrically connected with the air-conditioner outdoor unit and detection device.
Preferably, the temperature sensor and humidity sensor difference detector where air conditioning chamber in handle unit it is attached
The temperature value and humidity value of near air, the acquisition module acquire the temperature sensing on processing unit in the air conditioning chamber
The testing result of device and humidity sensor；The control module is used for in the air-conditioner outdoor unit and the corresponding air conditioning chamber
Processing unit is controlled.
Preferably, return air plenum chamber is provided on the wind turbine filter unit, the raised floor bottom surface is provided with
Lower return air plenum chamber.
Preferably, the interior clean partition room include being erected on the raised floor and rear and front end respectively with it is described
The two pieces of lateral partition boards and be connected to described two lateral partition boards tops and front and rear two that the front and rear metope in toilet room is tightly connected
The top spacer that end is tightly connected respectively with the front and rear metope in the toilet room.The lower section of the porous raised floor and institute
It states and forms return air chamber between toilet room；Described two pieces lateral partition boards, top spacer, toilet room front and rear metope and height
Frame floor passes through the porous raised floor of its bottom and lower section around the interior clean partition room, the interior clean partition room is formed
Return air chamber connection, the air in the interior clean partition room is by the porous raised floor downwardly into the return air chamber
It is interior.
Preferably, return air chamber is formed between the lower section of the porous raised floor and the toilet room；Described two
The lateral partition board of block, top spacer, the front and rear metope in toilet room and raised floor separate room, institute around the interior cleaning is formed
It states interior clean partition room to connect with the return air chamber of lower section by the porous raised floor of its bottom, in the interior clean partition room
Air is by the porous raised floor downwardly into the return air chamber.
Preferably, the return air passageway is in the offside of the Airshower chamber, return air passageway lower end and the return air
Chamber connects, and upper end is connected to the upper return air plenum chamber；The buffering corridor bottom is connected with the return air chamber, and top is connected to
The upper return air plenum chamber；Air in the return air chamber is eased up by the return air passageway to be washed away corridor and flows back into the upper return air
In plenum chamber.
Preferably, hermatic door is provided on the lateral partition board being connect on the interior clean partition room with the Airshower chamber.
The utility model includes at least following advantageous effect：
1) by the way that wind turbine, surface cooler, heater, humidifier, solidifying water pond and drainage pump for condensated water centralized integrated are set
Under porous raised floor, the processing such as directly cool down to clean indoor air-flow, heated, being dehumidified, being humidified, and can effectively improve
Air-controlled precision and the uniformity, while system resistance can also can be greatly reduced, and be avoided that the energy that pipeline transportation is brought
Loss reduces the operation energy consumption of system；
2) clean indoor air is monitored and controlled in real time by intelligence control system, can guarantee clean indoor
The cleanliness factor and control accuracy of air；
3) by setting sliding rail and idler wheel, making to handle unit in air conditioning chamber can persistently move back and forth on sliding rail, can be into one
Step improves the accuracy and uniformity to air themperature and humid control；
4) the utility model is simple and reliable for structure, low energy consumption, control accuracy is high, the air uniformity is high, intelligence degree is high,
Clean indoor air quality can be effectively ensured, meet the needs of users, have highly application value.
Description of the drawings
Fig. 1 is the structure diagram of the positive apparent direction of the high-precision high evenness Cleanroom system of the utility model；
Fig. 2 is the bottom view of the porous raised floor of the utility model；
Fig. 3 is the structure diagram that unit is handled in the air conditioning chamber of the utility model.
Reference sign：
1-toilet room；2-porous raised floor；3-interior clean partition room；4-Airshower chamber；5-buffering corridor；
6-return air passageway；7-air-conditioner outdoor unit；Unit is handled in 8-air conditioning chamber；9-wind turbine filter unit；10-upper return air static pressure
Case；11-lower return air plenum chamber；12-return air chamber；13-hermatic door；14-sliding rail；30-lateral partition board；31-top spacer；
80-shell；81-idler wheel.
Specific embodiment
The utility model is described in further detail with reference to embodiment, those skilled in the art's reference to be enabled to say
Bright book word can be implemented according to this.
It should be appreciated that such as " having ", "comprising" and " comprising " term used herein do not allot one or more
The presence or addition of a other element or combinations.
As shown in Figs. 1-3, a kind of high-precision high evenness Cleanroom system of the present embodiment, including：
Cleanroom structures system, including toilet room 1, be erected at it is porous overhead on 1 ground of toilet room
Plate 2, the Airshower chamber 4 for being set to 1 inlet of toilet room, is set the interior clean partition room 3 being arranged on porous raised floor 2
It puts on porous raised floor 2 and the buffering corridor 5 connected with Airshower chamber 4 and the side being arranged in toilet room 1 is returned
Wind passageway 6；
Air handling system including air-conditioner outdoor unit 7, is arranged at intervals in multiple air conditioning chambers on raised floor bottom surface
Processing unit 8 and the wind turbine filter unit 9 for being set to interior clean 3 top of partition room；
And intelligence control system, including being integrated with the touch control screen of control host and multiple being arranged on air conditioning chamber Nei Chu
Manage the detection device on unit 8；
Wherein, in air conditioning chamber handle unit 8 include shell 80 and be arranged in shell 80 wind turbine, surface cooler, heater,
Humidifier, solidifying water pond, drainage pump for condensated water, controller；Detection device includes temperature sensor and humidity sensor；Control host
Including acquisition module, processing module and control module.
Wind turbine filter unit 9 include wind turbine and high efficiency particle air filter, for will outdoor fresh air and indoor return air filtering after
It is blown into interior clean partition room 3.Wind turbine filter unit 9 is connected with outside by intake stack.It is set on wind turbine filter unit 9
There is upper return air plenum chamber 10, raised floor bottom surface is provided with lower return air plenum chamber 11.
Intensive setting trepanning on porous raised floor 2, so that air passes through.
80 top of shell that unit 8 is handled in air conditioning chamber is provided with idler wheel 81 and the motor for idler wheel 81 to be driven to move；
Raised floor bottom is provided with several sliding rails 14 for processing unit 8 in cooperation installation air conditioning chamber, and unit 8 is handled in air conditioning chamber
It is arranged on sliding rail 14 by the way that the cooperation of idler wheel 81 thereon is projecting, motor driving idler wheel 81 rolls, and drive in air conditioning chamber and handle
Unit 8 moves back and forth on sliding rail 14.Idler wheel 81 is fastened on sliding rail 14, so as to make to handle unit 8 in air conditioning chamber slidably
It is connected on sliding rail 14.
Air-conditioner outdoor unit 7 is connect with handling unit 8 in air conditioning chamber, and air-conditioner outdoor unit 7 is provided for processing unit 8 in air conditioning chamber
Refrigerant；Controller is electrically connected with wind turbine, surface cooler, heater, humidifier, solidifying water pond, drainage pump for condensated water and motor, control
Device is also electrically connected with air-conditioner outdoor unit 7 and detection device.
The temperature of air in air conditioning chamber where temperature sensor and humidity sensor difference detector near processing unit 8
Angle value and humidity value, acquisition module acquire the detection knot of the temperature sensor and humidity sensor in air conditioning chamber on processing unit 8
Testing result and predetermined temperature value and humidity value are compared by fruit, processing module；Control module is according to processing module
Comparison result in air-conditioner outdoor unit 7 and corresponding air conditioning chamber handle unit 8 control.Control to air-conditioner outdoor unit 7
Mainly control the start and stop of air-conditioner outdoor unit 7；Include control fan delivery, control system to the control that unit 8 is handled in air conditioning chamber
Cold, control heating amount, control humidification amount etc., to realize the adjusting of temperature and humidity.It is integrated with the touch control of control host
Screen is electrically connected with controller and detection device, and controller can be controlled by touch control screen, utilize touch control screen
Input the temperature value and humidity value of setting, at the same touch control screen implement to show mean temperature in current toilet room 1 and
Humidity value.The control host of touch control screen acquires the testing result of each detection device, and calculate in toilet room 1
The equal humidity value of average temperature value peace.
Wherein, it handles and is respectively provided on unit 8 there are one detection device in each air conditioning chamber, the two uniquely corresponds to；Detection dress
The temperature and humidity for detecting the air in the air conditioning chamber residing for it near processing unit 8 is put, is handled on unit 8 in the air conditioning chamber
Controller carries out accordingly controlling work according to testing result, to adjust the temperature that the air near unit 8 is handled in the air conditioning chamber
And humidity, it is allowed to reach required value.Processing unit 8 individually detects and adjusts the air of its near zone in each air conditioning chamber, makes
Arrival claimed range, indoor temperature, the accurate control of humidity and the uniformity of height can be effectively ensured.When indoor temperature, wet
When degree meets the requirements, the operating parameter of processing unit 8 and air-conditioner outdoor unit 7 in controller regulating air-conditioning room, to save energy consumption.
For handling unit in single chamber to the control of temperature, process is controlled to be described in detail it：
User presets the temperature range or temperature value of requirement by touch control screen, and activation system works；
The temperature range of setting or temperature value are transmitted to the controller on indoor processing unit by control host；
The testing result of temperature sensor in acquisition module acquisition air conditioning chamber in controller on processing unit 8；
Collected testing result and predetermined temperature value are compared by processing module；
Control module forms control instruction according to the comparison result of processing module, and according to control instruction to air-conditioner outdoor unit
7 and corresponding air conditioning chamber in processing unit 8 controlled.
Wherein, when range or setting value of the temperature of detection higher than setting, controller control outdoor unit starts, for interior
Unit surface cooler provides refrigerant；And surface cooler and blower fan work are controlled, increase flows through air quantity and the refrigerant pressure of surface cooler to drop
Low temperature, until the temperature value of temperature sensor detection is reduced to the range of setting.When the temperature of detection is less than the range set
Or during setting value, controller control outdoor unit is out of service, and heater is controlled to work, to increase temperature, until temperature sensing
The temperature value of device detection is increased to the range of setting.When the temperature of detection is in the range or setting value of setting, controller control
Outdoor unit processed is out of service, and processing unit 8 in air conditioning chamber is controlled to be stopped, to save energy consumption.
It is identical with temperature control to the control principle of air humidity.Processing unit 8 individually works in each air conditioning chamber,
Control the temperature and humidity of the air near it；Unit 8 is handled in indoor multiple air conditioning chambers to work at the same time, it is indoor to ensure
Temperature and humidity reaches requirement.Air-controlled precision and the uniformity can be effectively improved.
And it is backhauled on its corresponding sliding rail 14 under the motor driving of processing unit 8 on it in each air conditioning chamber
Dynamic, sliding rail 14 is arranged to line slide rail 14 or endless glide 14, and Fig. 2 shows a kind of schematic diagrames of the sliding rail of ring form, empty
Indoor processing unit 8 is adjusted persistently to be moved back and forth on sliding rail 14；Handled in air conditioning chamber air of the unit 8 in its motion range into
Row detection and efficiently adjust, so as to enable in air conditioning chamber handle unit 8 accurately detect and adjust it is each in its control range
On the one hand the air in corner can increase the effective air conditioning control range that unit 8 is handled in each air conditioning chamber, the opposing party
Face, processing unit 8 detects in ceaselessly moving and adjusts the air everywhere in its control range in air conditioning chamber, can be into one
Step improves the accuracy and uniformity to air themperature and humid control.
Controller controls the speed of motor and start and stop etc..In use, it need to generally keep processor in air conditioning chamber
Group 8 is in relatively low uniform motion, to keep stablizing relatively for surrounding flow.
In the utility model, the processing operation process of above-mentioned processing module, control module, controller etc. is only in this reality
With the conventional selection on novel architecture basics, the utility model does not carry out any improvement to its processing method.
Interior clean partition room 3 includes being erected at front-back wall of on the raised floor and rear and front end respectively with toilet room 1
Two pieces of lateral partition boards 30 that face is tightly connected and be connected at the top of two lateral partition boards 30 and rear and front end respectively with toilet room 1
Front and rear metope be tightly connected top spacer 31.
Return air chamber 12 is formed between the lower section of porous raised floor 2 and toilet room 1；Two pieces of lateral partition board 30, tops
Partition board 31, the front and rear metope in toilet room 1 and raised floor pass through around interior clean partition room 3, interior clean partition room 3 is formed
The porous raised floor 2 of its bottom is connected with the return air chamber 12 of lower section, and the air in interior clean partition room 3 passes through porous overhead
Plate 2 is downwardly into return air chamber 12.
Wherein, interior clean partition room 3 keeps sealing except the base, by the interior clean wind turbine filter machine for separating 3 top of room
The air that group 9 enters are behind interior clean partition room 3, by the interior clean porous raised floor 2 for separating 3 bottom of room to flowing down
It is dynamic.For lateral partition board 30 using transparent material, the side metope in toilet room 1 also selects transparent material.
Return air passageway 6 is in the offside of Airshower chamber 4, and 6 lower end of return air passageway is connected with return air chamber 12, and upper end is connected to last time
Wind plenum chamber 10；Buffering 5 bottom of corridor is connected with return air chamber 12, and top is connected to return air plenum chamber 10；In return air chamber 12
Air washes away corridor 5 and flows back into upper return air plenum chamber 10 by the way that return air passageway 6 is gentle.Upper 1010 surface of return air plenum chamber is provided with
The through hole entered for air.
Return air passageway 6 is in the offside of Airshower chamber 4, and 6 lower end of return air passageway is connected with return air chamber 12, and upper end is connected to last time
Wind plenum chamber 10；Buffering 5 bottom of corridor is connected with return air chamber 12, and top is connected to return air plenum chamber 10；In return air chamber 12
Air washes away corridor 5 and flows back into upper return air plenum chamber 10 by the way that return air passageway 6 is gentle.
Wherein, air enters interior clean partition room 3 through wind turbine filter unit 9, then separates the porous of 3 bottom of room from interior cleaning
Raised floor 2 flow to return air chamber 12 after downwards, and the air in return air chamber 12 is flowed to both sides, and the air of side passes through return air passageway
6 back up supreme return air plenum chamber 10, and the air of opposite side after buffering corridor 5 by flowing back into upper return air plenum chamber 10.
Indoor return air and outdoor fresh air enter upper return air plenum chamber 10, and reenter interior cleaning using wind turbine filter unit 9 jointly
Separate room 3, form air circulation.Arrow direction in attached drawing 1 represents air-flow direction.
Hermatic door 13 is provided on the lateral partition board 30 being connect on interior clean partition room 3 with Airshower chamber 4.Pass through hermatic door 13
Into interior clean partition room 3.
Wherein, between buffering before set Airshower chamber 4, can effectively remove into the dust grain adhered on clean indoor occupant body
Son reduces the load of dust particles between buffering, and then reduces the required air quantity of cleaning system, realizes energy-efficient purpose.Due to
It is just to open operation that Airshower chamber 4 only enters in personnel, and operation energy consumption is very low.By by the air return system and buffering of toilet
Between combine, handled using air of the return air of toilet between buffering, required air quantity between buffering realizes energy saving mesh
's.And the dust particle for entering and adhering on clean indoor personnel's body can be further removed between buffering, clean partition in guarantee
Cleanliness factor in room 3.
During the high-precision high evenness Cleanroom system work of the utility model：Outdoor fresh air and indoor return air enter last time
Wind plenum chamber 10, then wind turbine filter unit 9 is flowed into, through air interior cleaning is downwardly into after 9 filtration treatment of wind turbine filter unit
Separate room 3, then return air chamber 12 is flowed downwardly to from the interior clean porous raised floor 2 for separating 3 bottom of room；Through setting in return air chamber 12
It puts processing unit 8 in multiple air conditioning chambers on porous raised floor 2 to handle, after carrying out temperature and humidity adjusting, to two effluents
It is dynamic；The air of side backs up supreme return air plenum chamber 10 by return air passageway 6；The air of opposite side is by buffering corridor 5
After flow back into return air plenum chamber 10；Indoor return air and outdoor fresh air enter back into return air plenum chamber 10, form air circulation.
In the description of the present invention, it is to be appreciated that term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width
Degree ", " thickness ", " on ", " under ", "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outer ", " suitable
The orientation or position relationship of the instructions such as hour hands ", " counterclockwise ", " axial direction ", " radial direction ", " circumferential direction " are based on orientation shown in the drawings
Or position relationship, be for only for ease of description the utility model and simplify description rather than instruction or imply signified device or
Element must have specific orientation, with specific azimuth configuration and operation, therefore it is not intended that limit to the utility model
System.
Although the embodiment of the utility model is disclosed as above, it is not restricted in specification and embodiment
Listed utilization, it can be applied to various fields suitable for the present invention completely, for those skilled in the art,
Other modification is easily implemented, therefore without departing from the general concept defined in the claims and the equivalent scope, this reality
Specific details is not limited to novel.
Claims (10)
1. a kind of high-precision high evenness Cleanroom system, which is characterized in that including：
Cleanroom structures system, including toilet room, the porous raised floor being erected on toilet's room floors,
The interior cleaning being arranged on the porous raised floor separates room, the Airshower chamber being set at toilet's room entrances, sets
It the buffering corridor putting on the porous raised floor and connected with the Airshower chamber and is arranged in the toilet room
The return air passageway of side；
Air handling system, including in air-conditioner outdoor unit, the multiple air conditioning chambers being arranged at intervals on the raised floor bottom surface
Processing unit and the wind turbine filter unit for being set to the interior clean partition ceiling portion；
And intelligence control system, including being integrated with the touch control screen of control host and multiple being arranged on the air conditioning chamber Nei Chu
Manage the detection device on unit；
Wherein, in the air conditioning chamber handle unit include shell and be arranged in the shell wind turbine, surface cooler, heater,
Humidifier, solidifying water pond, drainage pump for condensated water, controller；The detection device includes temperature sensor and humidity sensor；It is described
Host is controlled to include acquisition module, processing module and control module.
2. high-precision high evenness Cleanroom system according to claim 1, which is characterized in that the wind turbine filter unit
It is indoor for interior clean partition will to be blown into after outdoor fresh air and indoor return air filtering including wind turbine and high efficiency particle air filter.
3. high-precision high evenness Cleanroom system according to claim 1, which is characterized in that handled in the air conditioning chamber
The cover top portion of unit is provided with idler wheel and the motor for driving the idler wheel movement；If the raised floor bottom is provided with
It does and the sliding rail that unit is handled in the air conditioning chamber is installed for coordinating, processing unit is matched by idler wheel thereon in the air conditioning chamber
It closes to hang upside down and be arranged on the sliding rail, the motor drives the idler wheel to roll, and processing unit in the air conditioning chamber is driven to exist
It is moved back and forth on the sliding rail.
4. high-precision high evenness Cleanroom system according to claim 3, which is characterized in that the air-conditioner outdoor unit with
Unit connection is handled in the air conditioning chamber, the air-conditioner outdoor unit provides refrigerant to handle unit in the air conditioning chamber；The control
Device processed is electrically connected with the wind turbine, surface cooler, heater, humidifier, solidifying water pond, drainage pump for condensated water and motor, the control
Device processed is also electrically connected with the air-conditioner outdoor unit and detection device.
5. high-precision high evenness Cleanroom system according to claim 4, which is characterized in that the temperature sensor and
The temperature value and humidity value of air in air conditioning chamber where humidity sensor difference detector near processing unit, the acquisition
Module acquires the testing result of the temperature sensor and humidity sensor in the air conditioning chamber on processing unit；The control
Module is used to control handling unit in the air-conditioner outdoor unit and the corresponding air conditioning chamber.
6. high-precision high evenness Cleanroom system according to claim 1, which is characterized in that the wind turbine filter unit
On be provided with return air plenum chamber, the raised floor bottom surface is provided with lower return air plenum chamber.
7. high-precision high evenness Cleanroom system according to claim 6, which is characterized in that the interior clean partition room
Two be tightly connected respectively with the front and rear metope in the toilet room including being erected on the raised floor and rear and front end
It the lateral partition board of block and is connected at the top of described two lateral partition boards and the rear and front end front and rear metope with the toilet room respectively
The top spacer of sealed connection；Return air chamber is formed between the lower section of the porous raised floor and the toilet room；It is described
Two pieces of lateral partition boards, top spacer, the front and rear metope in toilet room and raised floor separate room around the interior cleaning is formed,
The interior clean partition room is connected by the porous raised floor of its bottom with the return air chamber of lower section, in the interior clean partition room
Air by the porous raised floor downwardly into the return air chamber.
8. high-precision high evenness Cleanroom system according to claim 7, which is characterized in that the porous raised floor
Lower section and the toilet room between form return air chamber；Before described two pieces lateral partition boards, top spacer, toilet rooms
Metope and raised floor pass through the porous overhead of its bottom around the interior clean partition room, the interior clean partition room is formed afterwards
Floor is connected with the return air chamber of lower section, the air in the interior clean partition room by the porous raised floor downwardly into
In the return air chamber.
9. high-precision high evenness Cleanroom system according to claim 8, which is characterized in that the return air passageway is in
The offside of the Airshower chamber, return air passageway lower end are connected with the return air chamber, and upper end is connected to the upper return air plenum chamber；
The buffering corridor bottom is connected with the return air chamber, and top is connected to the upper return air plenum chamber；Sky in the return air chamber
Gas is eased up by the return air passageway to be washed away corridor and flows back into the upper return air plenum chamber.
10. high-precision high evenness Cleanroom system according to claim 7, which is characterized in that the interior clean partition
Hermatic door is provided on the lateral partition board being connect on room with the Airshower chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721172508.5U CN207501315U (en) | 2017-09-13 | 2017-09-13 | High-precision high evenness Cleanroom system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721172508.5U CN207501315U (en) | 2017-09-13 | 2017-09-13 | High-precision high evenness Cleanroom system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207501315U true CN207501315U (en) | 2018-06-15 |
Family
ID=62498681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721172508.5U Active CN207501315U (en) | 2017-09-13 | 2017-09-13 | High-precision high evenness Cleanroom system |
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| Country | Link |
|---|---|
| CN (1) | CN207501315U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107560024A (en) * | 2017-09-13 | 2018-01-09 | 中天道成（苏州）洁净技术有限公司 | High-precision high evenness Cleanroom system |
| CN108870582A (en) * | 2018-07-14 | 2018-11-23 | 中国电子系统工程第二建设有限公司 | A kind of anti-pollution diffusion system for toilet |
| CN115003962A (en) * | 2019-11-18 | 2022-09-02 | 茶山面板全球有限公司 | Hybrid clean room system and manufacturing method thereof |
-
2017
- 2017-09-13 CN CN201721172508.5U patent/CN207501315U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107560024A (en) * | 2017-09-13 | 2018-01-09 | 中天道成（苏州）洁净技术有限公司 | High-precision high evenness Cleanroom system |
| CN107560024B (en) * | 2017-09-13 | 2023-04-14 | 中天道成（苏州）洁净技术有限公司 | High-precision high-uniformity clean room system |
| CN108870582A (en) * | 2018-07-14 | 2018-11-23 | 中国电子系统工程第二建设有限公司 | A kind of anti-pollution diffusion system for toilet |
| CN108870582B (en) * | 2018-07-14 | 2024-02-23 | 中国电子系统工程第二建设有限公司 | Pollution-prevention diffusion system for clean room |
| CN115003962A (en) * | 2019-11-18 | 2022-09-02 | 茶山面板全球有限公司 | Hybrid clean room system and manufacturing method thereof |
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