CN107560024A - High-precision high evenness Cleanroom system - Google Patents
High-precision high evenness Cleanroom system Download PDFInfo
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- CN107560024A CN107560024A CN201710824169.2A CN201710824169A CN107560024A CN 107560024 A CN107560024 A CN 107560024A CN 201710824169 A CN201710824169 A CN 201710824169A CN 107560024 A CN107560024 A CN 107560024A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
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Abstract
The invention discloses a kind of high-precision high evenness Cleanroom system, including：Cleanroom structures system, it includes toilet room, porous raised floor, interior clean cut-off room, Airshower chamber, buffering corridor and return air passageway；Air handling system, it includes air-conditioner outdoor unit, unit and blower fan filter unit is handled in air conditioning chamber；And intelligence control system, it includes being integrated with the touch control screen of control main frame and multiple detection means.The present invention is simple and reliable for structure, energy consumption is low, control accuracy is high, the air uniformity is high, intelligence degree is high, and the air quality in toilet can be effectively ensured, meet the needs of user, have highly application value.
Description
Technical field
The present invention relates to toilet's technology field, more particularly to a kind of high-precision high evenness Cleanroom system.
Background technology
With the development of science and technology, research of the people to fields such as nanometer, microelectronics, biology, life sciences is also more next
More extensive many colleges and universities and scientific research institution are all put into the research in these high-grade, precision and advanced fields with going deep into, for science and technology not
Disconnected development is made that tremendous contribution.In the research of these most advanced branches of science, handle outside this professional scientific knowledge, one is ground with this
It is the uniformity, reliability and final successful important guarantee hand for ensureing result of study to study carefully the research environment that technique matches
Section.High accuracy, high evenness, high-cleanness, high grade toilet and be this means important avatar, these toilets
Cleanliness factor will typically be higher than ISO5 levels, to the temperature accuracy in space, the uniformity, the precision of relative humidity, uniformity etc.
It is it is required that higher.For parameter index as experiment, conventional toilet needs very big air quantity to ensure the stability of parameter,
This just needs to configure large-scale purification air-conditioning unit and supporting implementation, occupies very big auxiliary space, complicated, and cost is high
It is high.So a kind of high control accuracy, air uniformity height, the cleaning that system architecture is simple and reliable, operating cost is low are needed now
Chamber system.
The content of the invention
In view of the above-mentioned deficiencies in the prior art, the technical problem to be solved by the present invention is that it is high to provide a kind of high accuracy
Uniformity Cleanroom system.
In order to solve the above technical problems, the technical solution adopted by the present invention is：A kind of system of high-precision high evenness toilet
System, including：
Cleanroom structures system, it include toilet room, be erected at it is porous overhead on toilet's room floors
Floor, the interior clean cut-off room being arranged on the porous raised floor, the wind leaching being arranged at toilet's room entrances
Room, the buffering corridor for being arranged on the porous raised floor and being connected with the Airshower chamber and it is arranged on the toilet room
The return air passageway of interior sidepiece；
Air handling system, it includes air-conditioner outdoor unit, the multiple air-conditionings being arranged at intervals on the raised floor bottom surface
Indoor processing unit and the blower fan filter unit for being arranged at the interior clean cut-off ceiling portion；
And intelligence control system, it includes being integrated with the touch control screen of control main frame and multiple is arranged on the air conditioning chamber
Detection means on interior processing unit；
Wherein, unit is handled in the air conditioning chamber includes shell and the blower fan being arranged in the shell, surface cooler, heating
Device, humidifier, solidifying water pond, drainage pump for condensated water, controller；The detection means includes temperature sensor and humidity sensor；
The control main frame includes acquisition module, processing module and control module.
Preferably, the blower fan filter unit includes blower fan and high efficiency particle air filter, for by outdoor fresh air and room
It is indoor that interior clean cut-off is blown into after interior return air filtering.
Preferably, the cover top portion that unit is handled in the air conditioning chamber is provided with roller and for driving the roller to move
Dynamic motor；The raised floor bottom is provided with some slide rails for being used to coordinate processing unit in the installation air conditioning chamber, institute
State processing unit in air conditioning chamber to be arranged on the slide rail by the way that roller cooperation thereon is projecting, the motor drives the roller
Roll, and drive processing unit in the air conditioning chamber to be moved back and forth on the slide rail.
Preferably, the air-conditioner outdoor unit is connected with handling unit in the air conditioning chamber, and the air-conditioner outdoor unit is institute
State and unit offer refrigerant is provided in air conditioning chamber；The controller and the blower fan, surface cooler, heater, humidifier, solidifying water pond,
Drainage pump for condensated water and motor electrically connect, and the controller also electrically connects with the air-conditioner outdoor unit and detection means.
Preferably, processing unit is attached in the air conditioning chamber where temperature sensor and humidity sensor the difference detector
The temperature value and humidity value of near air, the acquisition module gather the TEMP handled in the air conditioning chamber on unit
The testing result of device and humidity sensor, the processing module is by the testing result and predetermined temperature value and humidity value
It is compared；The control module is according to the comparative result of the processing module to the air-conditioner outdoor unit and the corresponding sky
Indoor processing unit is adjusted to be controlled.
Preferably, return air plenum chamber is provided with the blower fan filter unit, the raised floor bottom surface is provided with
Lower return air plenum chamber.
Preferably, the interior clean cut-off room include being erected on the raised floor and rear and front end respectively with it is described
The two pieces of lateral dividing plates and be connected to described two lateral dividing plates tops and front and rear two that the front and rear metope in toilet room is tightly connected
The top spacer that end is tightly connected with the front and rear metope in the toilet room respectively.The lower section of the porous raised floor and institute
State and form return air chamber between toilet room；Described two pieces lateral dividing plates, top spacer, the front and rear metope and height in toilet room
Frame floor passes through the porous raised floor of its bottom and lower section around the interior clean cut-off room, the interior clean cut-off room is formed
Return air chamber connection, the air in the interior clean cut-off room is by the porous raised floor downwardly into the return air chamber
It is interior.
Preferably, return air chamber is formed between the lower section of the porous raised floor and the toilet room；Described two
The lateral dividing plate of block, top spacer, the front and rear metope and raised floor in toilet room separate room, institute around the interior cleaning is formed
State interior clean cut-off room to connect with the return air chamber of lower section by the porous raised floor of its bottom, in the interior clean cut-off room
Air is by the porous raised floor downwardly into the return air chamber.
Preferably, the return air passageway is in the offside of the Airshower chamber, return air passageway lower end and the return air
Chamber connects, and upper end is communicated to the upper return air plenum chamber；The buffering corridor bottom is connected with the return air chamber, and top is communicated to
The upper return air plenum chamber；Air in the return air chamber washes away corridor and is back to the upper return air by the way that the return air passageway is gentle
In plenum chamber.
Preferably, hermatic door is provided with the lateral dividing plate being connected on the interior clean cut-off room with the Airshower chamber.
The present invention comprises at least following beneficial effect：
1) by the way that blower fan, surface cooler, heater, humidifier, solidifying water pond and drainage pump for condensated water centralized integrated are set
Under porous raised floor, the processing such as directly cooled to the air-flow in toilet, heated, being dehumidified, being humidified, and can be effectively improved
Air-controlled precision and the uniformity, while SR can also can be greatly reduced, and it is avoided that the energy that pipeline transportation is brought
Loss, reduce the operation energy consumption of system；
2) air in toilet is monitored and controlled in real time by intelligence control system, can guarantee that in toilet
The cleanliness factor and control accuracy of air；
3) by setting slide rail and roller, processing unit in air conditioning chamber is persistently moved back and forth on slide rail, one can be entered
Step is improved to air themperature and the accuracy and uniformity of humid control；
4) present invention is simple and reliable for structure, energy consumption is low, control accuracy is high, the air uniformity is high, intelligence degree is high, can have
Effect ensures the air quality in toilet, meets the needs of user, has highly application value.
Brief description of the drawings
Fig. 1 is the structural representation of the positive apparent direction of the high-precision high evenness Cleanroom system of the present invention；
Fig. 2 is the upward view of the porous raised floor of the present invention；
Fig. 3 is the structural representation that unit is handled in the air conditioning chamber of the present invention.
Description of reference numerals：
1-toilet room；2-porous raised floor；3-interior clean cut-off room；4-Airshower chamber；5-buffering corridor；
6-return air passageway；7-air-conditioner outdoor unit；Unit is handled in 8-air conditioning chamber；9-blower fan filter unit；10-go up return air static pressure
Case；11-lower return air plenum chamber；12-return air chamber；13-hermatic door；14-slide rail；30-lateral dividing plate；31-top spacer；
80-shell；81-roller.
Embodiment
With reference to embodiment, the present invention is described in further detail, to make those skilled in the art with reference to specification
Word can be implemented according to this.
It should be appreciated that such as " having ", "comprising" and " comprising " term used herein do not allot one or more
The presence or addition of individual other elements or its combination.
As Figure 1-3, a kind of high-precision high evenness Cleanroom system of the present embodiment, including：
Cleanroom structures system, it include toilet room 1, be erected on the ground of toilet room 1 it is porous overheadly
Plate 2, the interior clean cut-off room 3 being arranged on porous raised floor 2, it is arranged at the Airshower chamber 4 of the porch of toilet room 1, sets
Put on porous raised floor 2 and the buffering corridor 5 connected with Airshower chamber 4 and the sidepiece that is arranged in toilet room 1 return
Wind passageway 6；
Air handling system, it includes air-conditioner outdoor unit 7, is arranged at intervals in multiple air conditioning chambers on raised floor bottom surface
Processing unit 8 and the blower fan filter unit 9 for being arranged at the interior clean top of cut-off room 3；
And intelligence control system, it includes being integrated with the touch control screen of control main frame and multiple is arranged on air conditioning chamber Nei Chu
Manage the detection means on unit 8；
Wherein, in air conditioning chamber handle unit 8 include shell 80 and be arranged in shell 80 blower fan, surface cooler, heater,
Humidifier, solidifying water pond, drainage pump for condensated water, controller；Detection means includes temperature sensor and humidity sensor；Control main frame
Including acquisition module, processing module and control module.
Blower fan filter unit 9 includes blower fan and high efficiency particle air filter, for by after outdoor fresh air and indoor return air filtering
It is blown into interior clean cut-off room 3.Blower fan filter unit 9 is connected with outside by intake stack.Set on blower fan filter unit 9
There is upper return air plenum chamber 10, raised floor bottom surface is provided with lower return air plenum chamber 11.
Intensive setting perforate on porous raised floor 2, so that air passes through.
The top of shell 80 that unit 8 is handled in air conditioning chamber is provided with roller 81 and the motor for driving roller 81 to move；
Raised floor bottom is provided with some slide rails 14 for being used to coordinate processing unit 8 in installation air conditioning chamber, and unit 8 is handled in air conditioning chamber
Coordinate to hang upside down by roller 81 thereon and be arranged on slide rail 14, motor driving roller 81 rolls, and drives in air conditioning chamber and handle
Unit 8 moves back and forth on slide rail 14.Roller 81 is fastened on slide rail 14, so that it is slidable that unit 8 is handled in air conditioning chamber
It is connected on slide rail 14.
Air-conditioner outdoor unit 7 is connected with handling unit 8 in air conditioning chamber, and air-conditioner outdoor unit 7 is that processing unit 8 provides in air conditioning chamber
Refrigerant；Controller electrically connects with blower fan, surface cooler, heater, humidifier, solidifying water pond, drainage pump for condensated water and motor, control
Device also electrically connects with air-conditioner outdoor unit 7 and detection means.
The temperature of the air near unit 8 is handled in air conditioning chamber where temperature sensor and humidity sensor difference detector
Angle value and humidity value, acquisition module gather the detection knot of the temperature sensor and humidity sensor that are handled in air conditioning chamber on unit 8
Fruit, processing module is by testing result compared with predetermined temperature value and humidity value；Control module is according to processing module
Comparative result in air-conditioner outdoor unit 7 and corresponding air conditioning chamber handle unit 8 be controlled.Control to air-conditioner outdoor unit 7
Mainly control the start and stop of air-conditioner outdoor unit 7；Include control fan delivery, control system to the control that unit 8 is handled in air conditioning chamber
Cold, control heating amount, control humidification amount etc., to realize the regulation of temperature and humidity.It is integrated with the touch control of control main frame
Screen electrically connects with controller and detection means, controller can be controlled by touch control screen, utilizes touch control screen
Input the temperature value and humidity value of setting, at the same touch control screen implement to show mean temperature in current toilet room 1 and
Humidity value.The control main frame of touch control screen gathers the testing result of each detection means, and calculates in toilet room 1
The equal humidity value of average temperature value peace.
Wherein, handled in each air conditioning chamber on unit 8 and be provided with a detection means, both uniquely correspond to；Detection dress
The temperature and humidity of the air in air conditioning chamber of the detection residing for it near processing unit 8 is put, in the air conditioning chamber on processing unit 8
Controller carries out corresponding control work according to testing result, to adjust the temperature that the air near unit 8 is handled in the air conditioning chamber
And humidity, it is allowed to reach required value.Processing unit 8 individually detects and adjusts the air of its near zone in each air conditioning chamber, makes
Arrival claimed range, indoor temperature, the accurate control of humidity and the uniformity of height can be effectively ensured.When indoor temperature, wet
When degree meets the requirements, the operational factor of unit 8 and air-conditioner outdoor unit 7 is handled in controller regulating air-conditioning room, to save energy consumption.
Exemplified by unit is handled in single chamber to the control of temperature, its control process is described in detail：
User presets the temperature range or temperature value of requirement by touch control screen, and activation system is operated；
Control main frame transmits the temperature range of setting or temperature value to the controller on indoor processing unit；
The testing result of the temperature sensor on unit 8 is handled in acquisition module collection air conditioning chamber in controller；
Processing module is by the testing result collected compared with predetermined temperature value；
Control module forms control instruction according to the comparative result of processing module, and according to control instruction to air-conditioner outdoor unit
7 and corresponding air conditioning chamber in processing unit 8 be controlled.
Wherein, when the temperature of detection is higher than the scope or setting value set, controller control outdoor unit starts, for interior
Unit surface cooler provides refrigerant；And surface cooler and blower fan work are controlled, increase flows through air quantity and the refrigerant pressure of surface cooler to drop
Low temperature, until the temperature value of temperature sensor detection is reduced to the scope of setting.When the temperature of detection is less than the scope set
Or during setting value, controller control outdoor unit is out of service, and controls heater to work, to raise temperature, until TEMP
The temperature value of device detection is increased to the scope of setting.When the temperature of detection is in the scope or setting value of setting, controller control
Outdoor unit processed is out of service, and controls processing unit 8 in air conditioning chamber to be stopped, to save energy consumption.
It is identical with temperature control to the control principle of air humidity.Processing unit 8 is individually operated in each air conditioning chamber,
Control the temperature and humidity of the air near it；Processing unit 8 works simultaneously in indoor multiple air conditioning chambers, to ensure indoor
Temperature and humidity, which reaches, to be required.Air-controlled precision and the uniformity can be effectively improved.
And unit 8 is handled in each air conditioning chamber under motor driving thereon, backhauled on its corresponding slide rail 14
Dynamic, slide rail 14 is arranged to line slide rail 14 or endless glide 14, and Fig. 2 shows a kind of schematic diagram of the slide rail of ring form, empty
Indoor processing unit 8 is adjusted persistently to be moved back and forth on slide rail 14；Air of the unit 8 in its range of movement is handled in air conditioning chamber to enter
Row detection and efficiently regulation so that the air conditioning chamber in processing unit 8 accurately can detect and adjust it is each in its control range
The air in corner, it on the one hand can increase the effective air adjustment control range that unit 8 is handled in each air conditioning chamber, the opposing party
Face, unit 8 is handled in air conditioning chamber in ceaselessly moving, detects and adjusts the air everywhere in its control range, one can be entered
Step is improved to air themperature and the accuracy and uniformity of humid control.
Controller is controlled to the speed of motor and start and stop etc..In use, it need to typically keep processor in air conditioning chamber
Group 8 is in relatively low uniform motion, to keep the relatively stable of surrounding flow.
Interior clean cut-off room 3 includes being erected at front-back wall of on the raised floor and rear and front end respectively with toilet room 1
Two pieces of lateral dividing plates 30 that face is tightly connected and be connected at the top of two lateral dividing plates 30 and rear and front end respectively with toilet room 1
Front and rear metope be tightly connected top spacer 31.
Return air chamber 12 is formed between the lower section and toilet room 1 of porous raised floor 2；Two pieces of lateral dividing plate 30, tops
Dividing plate 31, the front and rear metope and raised floor in toilet room 1 pass through around interior clean cut-off room 3, interior clean cut-off room 3 is formed
The porous raised floor 2 of its bottom connects with the return air chamber 12 of lower section, and the air in interior clean cut-off room 3 passes through porous overhead
Plate 2 is downwardly into return air chamber 12.
Wherein, interior clean cut-off room 3 keeps sealing except the base, by the interior clean blower fan filter machine for separating the top of room 3
The air that group 9 enters are behind interior clean cut-off room 3, by the interior clean porous raised floor 2 for separating the bottom of room 3 to flowing down
It is dynamic.Lateral dividing plate 30 uses transparent material, and the sidepiece metope in toilet room 1 also selects transparent material.
Return air passageway 6 is in the offside of Airshower chamber 4, and the lower end of return air passageway 6 connects with return air chamber 12, and upper end is communicated to last time
Wind plenum chamber 10；The buffering bottom of corridor 5 connects with return air chamber 12, and top is communicated to return air plenum chamber 10；In return air chamber 12
Air washes away corridor 5 and is back in upper return air plenum chamber 10 by the way that return air passageway 6 is gentle.The upper surface of return air plenum chamber 1010 is provided with
The through hole entered for air.
Return air passageway 6 is in the offside of Airshower chamber 4, and the lower end of return air passageway 6 connects with return air chamber 12, and upper end is communicated to last time
Wind plenum chamber 10；The buffering bottom of corridor 5 connects with return air chamber 12, and top is communicated to return air plenum chamber 10；In return air chamber 12
Air washes away corridor 5 and is back in upper return air plenum chamber 10 by the way that return air passageway 6 is gentle.
Wherein, air enters interior clean cut-off room 3 through blower fan filter unit 9, then separates the porous of the bottom of room 3 from interior cleaning
Raised floor 2 flow to return air chamber 12 after downwards, and the air in return air chamber 12 flows to both sides, and the air of side passes through return air passageway
6 back up supreme return air plenum chamber 10, and the air of opposite side after buffering corridor 5 by being back in upper return air plenum chamber 10.
Indoor return air and outdoor fresh air enter upper return air plenum chamber 10 jointly, and reenter interior cleaning by blower fan filter unit 9 again
Separate room 3, form air circulation.The direction of arrow in accompanying drawing 1 represents air-flow direction.
Hermatic door 13 is provided with the lateral dividing plate 30 being connected on interior clean cut-off room 3 with Airshower chamber 4.Pass through hermatic door 13
Into interior clean cut-off room 3.
Wherein, between buffering before set Airshower chamber 4, can effectively be removed into the dust grain adhered on clean indoor occupant body
Son, the load of dust particles between buffering is reduced, and then reduce the air quantity required for cleaning system, realize the purpose of energy-conservation.Due to
It is just to open operation that Airshower chamber 4 only enters in personnel, and operation energy consumption is very low.By by the air return system and buffering of toilet
Between combine, the air buffering is handled using the return air of toilet, between buffering required for air quantity, realize energy-conservation mesh
's.And can further it be removed between buffering into the dust particle adhered on personnel's body in toilet, clean cut-off in guarantee
Cleanliness factor in room 3.
During the high-precision high evenness Cleanroom system work of the present invention：It is quiet that outdoor fresh air and indoor return air enter upper return air
Case 10 is pressed, then flows into blower fan filter unit 9, interior clean cut-off is downwardly into after the filtration treatment of blower fan filter unit 9 through air
Room 3, then flow downwardly to return air chamber 12 from the interior clean porous raised floor 2 for separating the bottom of room 3；Through being arranged in return air chamber 12
Unit 8 is handled in multiple air conditioning chambers on porous raised floor 2 to handle, and after carrying out temperature and humidity regulation, is flowed to both sides；One
The air of side backs up supreme return air plenum chamber 10 by return air passageway 6；The air of opposite side after buffering corridor 5 by flowing back
Into upper return air plenum chamber 10；Indoor return air and outdoor fresh air enter back into return air plenum chamber 10, form air circulation.
In the description of the invention, it is to be understood that term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width ",
" thickness ", " on ", " under ", "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outer ", " up time
The orientation or position relationship of the instruction such as pin ", " counterclockwise ", " axial direction ", " radial direction ", " circumference " be based on orientation shown in the drawings or
Position relationship, it is for only for ease of and describes the present invention and simplify description, rather than indicates or imply that signified device or element must
There must be specific orientation, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.
Although embodiment of the present invention is disclosed as above, it is not restricted in specification and embodiment listed
With it can be applied to various suitable the field of the invention completely, can be easily for those skilled in the art
Other modification is realized, therefore under the universal limited without departing substantially from claim and equivalency range, it is of the invention and unlimited
In specific details.
Claims (10)
- A kind of 1. high-precision high evenness Cleanroom system, it is characterised in that including：Cleanroom structures system, it include toilet room, the porous raised floor being erected on toilet's room floors, The interior cleaning being arranged on the porous raised floor separates room, the Airshower chamber being arranged at toilet's room entrances, set The buffering corridor putting on the porous raised floor and connected with the Airshower chamber and it is arranged in the toilet room The return air passageway of sidepiece；Air handling system, it includes air-conditioner outdoor unit, in the multiple air conditioning chambers being arranged at intervals on the raised floor bottom surface Processing unit and the blower fan filter unit for being arranged at the interior clean cut-off ceiling portion；And intelligence control system, it includes being integrated with the touch control screen of control main frame and multiple is arranged on the air conditioning chamber Nei Chu Manage the detection means on unit；Wherein, in the air conditioning chamber handle unit include shell and be arranged in the shell blower fan, surface cooler, heater, Humidifier, solidifying water pond, drainage pump for condensated water, controller；The detection means includes temperature sensor and humidity sensor；It is described Control main frame includes acquisition module, processing module and control module.
- 2. high-precision high evenness Cleanroom system according to claim 1, it is characterised in that the blower fan filter unit It is indoor for interior clean cut-off will to be blown into after outdoor fresh air and indoor return air filtering including blower fan and high efficiency particle air filter.
- 3. high-precision high evenness Cleanroom system according to claim 1, it is characterised in that handled in the air conditioning chamber The cover top portion of unit is provided with roller and the motor for driving the roller movement；If the raised floor bottom is provided with Do and the slide rail that unit is handled in the air conditioning chamber is installed for coordinating, processing unit is matched somebody with somebody by roller thereon in the air conditioning chamber Close to hang upside down and be arranged on the slide rail, the motor drives the roller to roll, and drives processing unit in the air conditioning chamber to exist Moved back and forth on the slide rail.
- 4. high-precision high evenness Cleanroom system according to claim 3, it is characterised in that the air-conditioner outdoor unit with Unit connection is handled in the air conditioning chamber, the air-conditioner outdoor unit provides refrigerant to handle unit in the air conditioning chamber；The control Device processed electrically connects with the blower fan, surface cooler, heater, humidifier, solidifying water pond, drainage pump for condensated water and motor, the control Device processed also electrically connects with the air-conditioner outdoor unit and detection means.
- 5. high-precision high evenness Cleanroom system according to claim 4, it is characterised in that the temperature sensor and The temperature value and humidity value of the air near unit, the collection are handled in air conditioning chamber where humidity sensor difference detector Module gathers the testing result of the temperature sensor and humidity sensor that are handled in the air conditioning chamber on unit, the processing Module is by the testing result compared with predetermined temperature value and humidity value；The control module is according to the processing The comparative result of module is controlled to handling unit in the air-conditioner outdoor unit and the corresponding air conditioning chamber.
- 6. high-precision high evenness Cleanroom system according to claim 1, it is characterised in that the blower fan filter unit On be provided with return air plenum chamber, the raised floor bottom surface is provided with lower return air plenum chamber.
- 7. high-precision high evenness Cleanroom system according to claim 1, it is characterised in that the interior clean cut-off room Two be tightly connected respectively with the front and rear metope in the toilet room including being erected on the raised floor and rear and front end The lateral dividing plate of block and it is connected at the top of described two lateral dividing plates and the rear and front end front and rear metope with the toilet room respectively The top spacer of sealed connection；Return air chamber is formed between the lower section of the porous raised floor and the toilet room；It is described Two pieces of lateral dividing plates, top spacer, the front and rear metope and raised floor in toilet room separate room around the interior cleaning is formed, The interior clean cut-off room is connected by the porous raised floor of its bottom with the return air chamber of lower section, in the interior clean cut-off room Air by the porous raised floor downwardly into the return air chamber.
- 8. high-precision high evenness Cleanroom system according to claim 7, it is characterised in that the porous raised floor Lower section and the toilet room between form return air chamber；Before described two pieces lateral dividing plates, top spacer, toilet rooms Metope and raised floor pass through the porous overhead of its bottom around the interior clean cut-off room, the interior clean cut-off room is formed afterwards Floor connects with the return air chamber of lower section, the air in the interior clean cut-off room by the porous raised floor downwardly into In the return air chamber.
- 9. high-precision high evenness Cleanroom system according to claim 8, it is characterised in that the return air passageway is in The offside of the Airshower chamber, return air passageway lower end connect with the return air chamber, and upper end is communicated to the upper return air plenum chamber； The buffering corridor bottom connects with the return air chamber, and top is communicated to the upper return air plenum chamber；Sky in the return air chamber Gas washes away corridor and is back in the upper return air plenum chamber by the way that the return air passageway is gentle.
- 10. high-precision high evenness Cleanroom system according to claim 7, it is characterised in that the interior clean cut-off Hermatic door is provided with the lateral dividing plate being connected on room with the Airshower chamber.
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| CN201710824169.2A CN107560024B (en) | 2017-09-13 | 2017-09-13 | High-precision high-uniformity clean room system |
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| CN201710824169.2A CN107560024B (en) | 2017-09-13 | 2017-09-13 | High-precision high-uniformity clean room system |
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| CN107560024B CN107560024B (en) | 2023-04-14 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109317346A (en) * | 2018-01-16 | 2019-02-12 | 苏州艾尔科机电工程有限公司 | A kind of New-air purifying system between spraying |
| CN109869830A (en) * | 2019-03-01 | 2019-06-11 | 苏州洪昇新能源科技有限公司 | A kind of professional clean room air purging system |
| CN110284737A (en) * | 2019-07-23 | 2019-09-27 | 中国电子工程设计院有限公司 | A kind of clear production plant layout structure |
| CN111457494A (en) * | 2020-04-01 | 2020-07-28 | 北京联合大学 | Quick clean-up system of pollution source pollution gas in clean room |
| CN112032872A (en) * | 2020-07-21 | 2020-12-04 | 中电科工程建设有限公司 | Air purification system of clean factory building of electron industry |
| WO2022262553A1 (en) * | 2021-06-17 | 2022-12-22 | Intelligent Precision Micro-Systems Limited | Clean room module |
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| CN109317346A (en) * | 2018-01-16 | 2019-02-12 | 苏州艾尔科机电工程有限公司 | A kind of New-air purifying system between spraying |
| CN109869830A (en) * | 2019-03-01 | 2019-06-11 | 苏州洪昇新能源科技有限公司 | A kind of professional clean room air purging system |
| CN110284737A (en) * | 2019-07-23 | 2019-09-27 | 中国电子工程设计院有限公司 | A kind of clear production plant layout structure |
| CN111457494A (en) * | 2020-04-01 | 2020-07-28 | 北京联合大学 | Quick clean-up system of pollution source pollution gas in clean room |
| CN111457494B (en) * | 2020-04-01 | 2021-08-27 | 北京联合大学 | Quick clean-up system of pollution source pollution gas in clean room |
| CN112032872A (en) * | 2020-07-21 | 2020-12-04 | 中电科工程建设有限公司 | Air purification system of clean factory building of electron industry |
| CN112032872B (en) * | 2020-07-21 | 2022-02-01 | 中电科工程建设有限公司 | Air purification system of clean factory building of electron industry |
| WO2022262553A1 (en) * | 2021-06-17 | 2022-12-22 | Intelligent Precision Micro-Systems Limited | Clean room module |
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