CN111457494B

CN111457494B - Quick clean-up system of pollution source pollution gas in clean room

Info

Publication number: CN111457494B
Application number: CN202010252728.9A
Authority: CN
Inventors: 杨志成; 方羽琛; 王丰周; 倪辉
Original assignee: Beijing Union University
Current assignee: Beijing Union University
Priority date: 2020-04-01
Filing date: 2020-04-01
Publication date: 2021-08-27
Anticipated expiration: 2040-04-01
Also published as: CN111457494A

Abstract

The invention discloses a quick cleaning system for pollution source polluted gas in a clean room. A plurality of photoelectric sensor groups are arranged in the gap of the pore plate of the elevated floor. The device layer is internally provided with an air suction pipeline, a connection pipeline, a guide rail and a guide rail driving device, the air suction pipeline is connected with the guide rail driving device and can be installed on the two parallel guide rails in a translation mode, the air suction pipeline is located below the raised floor, the connection pipeline is fixedly installed in the device layer, the connection pipeline is located below the air suction pipeline and is perpendicularly and alternately arranged with the air suction pipeline, and one end of the connection pipeline is connected with a compression motor. The elevated floor, the air suction pipeline, the connecting pipeline, the compression motor and the interlayer air return channel are communicated together to form a channel for discharging polluted air generated by a pollution source in the clean area. The photoelectric sensor group, the air suction pipeline, the guide rail driving device and the compression motor are connected with the controller. The invention can rapidly remove the pollution source in the clean room, in particular to the polluted air generated by the mobile pollution source.

Description

Quick clean-up system of pollution source pollution gas in clean room

Technical Field

The invention relates to a system for quickly removing pollution sources in clean rooms such as electronic clean plants, in particular to a system for quickly removing pollution gas generated by a mobile pollution source, and belongs to the technical field of pollution cleaning equipment.

Background

The pollution sources in clean rooms of electronic clean factories and the like mainly comprise people, various processed materials, processing equipment and the like. When a new pollution source is added, the traditional clearing method is to increase the air return frequency of an air conditioning system or increase the output of dozens of FFUs (self-powered fan filter units), and for local pollution generated by a mobile pollution source, the same treatment method is adopted, so that not only can the pollution gas not be quickly cleared, but also the energy consumption of the FFUs is increased. Therefore, the research on how to remove the pollution sources, especially the mobile pollution sources, accurately and quickly has become a hot spot in the industry. Therefore, it is an urgent problem to design a device capable of rapidly removing air polluted by pollution sources, especially air polluted by mobile pollution sources such as walking people, moving vehicles and products on a production line.

Disclosure of Invention

The invention aims to provide a quick cleaning system for pollution source polluted air in a clean room, which can quickly clean the polluted air generated by the pollution source in the clean room, particularly a mobile pollution source.

In order to achieve the purpose, the invention adopts the following technical scheme:

the utility model provides a clean indoor pollution source pollutant gas clears away system fast, toilet include bearing wall and raised floor, are equipped with intermediate layer return air passageway in the bearing wall, and the below on raised floor is the equipment layer, and the top on raised floor is clean district, and the top in clean district is the furred ceiling layer, installs a plurality of FFUs, its characterized in that below the furred ceiling layer: a plurality of photoelectric sensor groups are arranged in gaps of the pore plate of the elevated floor; the device layer is internally provided with an air suction pipeline, a connection pipeline, a guide rail and a guide rail driving device, the air suction pipeline is connected with the guide rail driving device and can be installed on the two parallel guide rails in a translation mode, the air suction pipeline is positioned below the raised floor, the connection pipeline is fixedly installed in the device layer, the connection pipeline is positioned below the air suction pipeline and is vertically crossed with the air suction pipeline, and one end of the connection pipeline is connected with a compression motor; the elevated floor, the air suction pipeline, the connecting pipeline, the compression motor and the interlayer air return channel are communicated together to form a channel for discharging polluted air generated by a pollution source in the clean area; the photoelectric sensor group, the air suction pipeline, the guide rail driving device and the compression motor are connected with the controller.

The invention has the advantages that:

the invention can quickly remove the polluted air generated by the pollution sources in the clean room, particularly the polluted air generated by mobile pollution sources such as people walking, moving vehicles, products on a production line and the like, avoids the increase of energy consumption of an FFU (fan filter unit with power), can increase the indoor air flow on the basis of avoiding the increase of return air volume, ensures that the polluted air in the clean room is quickly removed, and avoids the pollution to the clean room.

Drawings

FIG. 1 is a schematic view of the installation of the system for rapidly removing pollutant gas from pollution sources in a clean room according to the present invention.

Fig. 2 is a schematic view showing the installation position relationship between the suction duct and the connection duct.

Fig. 3 is a schematic top view of the suction duct.

Fig. 4 is a schematic sectional view taken along line a-a of fig. 3.

Fig. 5 is a schematic top view of a docking conduit.

Fig. 6 is a schematic sectional view taken along line B-B of fig. 5.

Fig. 7 is a schematic composition diagram of the docking linkage.

Detailed Description

As shown in fig. 1, the system for rapidly removing pollutant gas from a pollution source in a clean room of the present invention is used for removing pollutant gas discharged from a fixed or mobile pollution source in the clean room. The clean room includes bearing wall 40 and raised floor 30, is equipped with intermediate layer return air passageway 41 in the bearing wall 40, and the below on raised floor 30 is equipment layer 50, and the top on raised floor 30 is clean district 60, and the top in clean district 60 is furred ceiling layer 10, installs a plurality of FFUs (from the fan filter equipment of taking power) 20 below furred ceiling layer 10. In the present invention, the structure of the clean room is conventional in the art, and therefore, the raised floor 30 and the FFU 20 are conventional decorative parts or devices in the art, which will not be described in detail.

As shown in fig. 1 to 7, the system for rapidly removing pollutant gas from pollution source in clean room of the present invention comprises a photoelectric sensor group, a suction pipe 70, a docking pipe 80, a guide rail 90, a guide rail driving device (not shown in the figure), and a compression motor 100, wherein: a plurality of photoelectric sensor groups are arranged in the gap of the pore plate of the raised floor 30, and each photoelectric sensor group can be composed of one photoelectric sensor 110 or a plurality of photoelectric sensors 110 which are arranged together; the device layer 50 is internally provided with an air suction pipeline 70, a connecting pipeline 80, guide rails 90 and a guide rail driving device, the air suction pipeline 70 is connected with the guide rail driving device and can be installed on the two parallel guide rails 90 in a translation mode, the guide rails 90 are fixedly installed on the bearing wall 40, the air suction pipeline 70 is positioned below the raised floor 30, the connecting pipeline 80 is fixedly installed in the device layer 50, the connecting pipeline 80 is positioned below the air suction pipeline 70 and is vertically crossed with the air suction pipeline 70, and one end of the connecting pipeline 80 is connected with a compression motor 100; the elevated floor 30, the air suction pipeline 70, the connecting pipeline 80, the compression motor 100 and the interlayer air return channel 41 are communicated together to form a channel for discharging polluted air generated by a pollution source in the clean area 60; the photosensor array, suction line 70, rail drive and compression motor 100 are wired or wirelessly connected to a controller (not shown) that may be located on-site or remotely.

In practical design, the compression motor 100 may be installed on the load-bearing wall 40 or in the sandwiched return air channel 41, and the load-bearing wall 40 should be designed with corresponding ventilation holes for discharging the polluted air from the connecting pipe 80 to the sandwiched return air channel 41 through the compression motor 100.

In practical design, all the sets of photosensors are arranged in a matrix within the raised floor 30, and one set of photosensor sets is used to detect whether a contamination source is present in a certain rectangular area on the raised floor 30.

As shown in fig. 2 to 4, the air suction duct 70 includes a rectangular parallelepiped air suction box 71, a plurality of air suction ports 72 are formed at the top of the air suction box 71, the air suction ports 72 are arranged in a straight line, a baffle plate 73 is rotatably mounted on each air suction port 72, and an air outlet 79 is formed at the bottom of the air suction box 71.

As shown in fig. 2, 5 and 6, the connection pipeline 80 includes a rectangular connection box 81, a plurality of connection ports 82 are formed in the top of the connection box 81, the connection ports 82 are linearly arranged, a connection cover 83 is rotatably mounted on each connection port 82, and an air suction port 88 for communicating with an air pipe of the compression motor 100 is formed in one end of the connection box 81. Normally, the opening size of the connection port 82 is designed to be the same as the opening size of the air inlet 72.

When the air suction duct 70 is driven by the guide rail driving device to move in a stepwise translational manner on the guide rail 90 to a position and stop, the air suction port 72 on the air suction duct 70 is opened and vertically faces the photoelectric sensor group that detects the pollution source, and at the same time, the air outlet 79 on the air suction duct 70 vertically faces a connection port 82 on the connection duct 80 that is opened, so that the polluted air generated by the pollution source in the clean area 60 is discharged into the interlayer return air duct 41 through the orifice plate of the raised floor 30, the air suction port 72, the air suction box 71, the air outlet 79, the connection port 82, the connection box 81, the air suction port 88 and the compression motor 100 under the action of the compression motor 100.

In other words, each air suction port 72 of the air suction duct 70 and each connection port 82 of the connection duct 80 form a point coordinate system, so that the air suction duct 70 can scan and position the raised floor 30 for the pollution source appearing in the clean room by the photoelectric sensor set, and then directly discharge the polluted air generated by the pollution source by the connection duct 80, the compression motor 100, and the like.

In the present invention, the rail driving device is a device known in the art, and can be installed near the on-site rail 90, and the translation of the suction duct 70 on the rail 90 can be performed by a chain drive, a belt drive, a wheel drive or a traction type pneumatic drive, without limitation.

For the suction duct 70, the baffle 73 is rotatably mounted on the rotating shaft 76 through the collar 74, the rotating shaft 76 is mounted on one side of the suction port 72 on the suction box 71, the collar 74 is fixedly connected with the baffle 73, besides the collar 74, the collar 74 is also fixedly connected with the linking plate 75, an L-shape can be formed between the baffle 73 and the linking plate 75, the linking plate 75 is connected with the rotation driving mechanism 78 through the gear 77, wherein: the linking plate 75 drives the collar 74 to rotate on the rotating shaft 76 under the driving of the rotating driving mechanism 78 through the gear 77, so as to drive the baffle 73 to open the suction port 72 and close the suction port 72 at the position of the suction port 72, and the air outlet 79 is usually designed at the bottom of one end of the suction box 71.

Based on the command sent by the controller, the rotation driving mechanism 78 operates to drive the gear 77 to rotate, and the gear 77 drives the linking plate 75 and the baffle plate 73 to rotate around the rotating shaft 76 by the collar 74, so as to complete the opening and closing of the baffle plate 73, i.e. complete the opening and closing operation of the air suction port 72.

In the present invention, the rotation driving mechanism 78 is a well-known device in the art, and can be driven by gears, etc., without limitation.

For the pipeline 80 of plugging into, the lid 83 of plugging into rotationally installs on the axis of rotation 86 through the lantern ring 84, and the axis of rotation 86 is installed on one side of the mouth 82 of plugging into on the box 81 of plugging into, and the lantern ring 84 except with the lid 83 fixed connection of plugging into, lantern ring 84 still fixedly connected with lid handle 85, can form a style of calligraphy between lid handle 85 and the lid 83 of plugging into, and the clutch 87 of plugging into is installed to lid handle 85 top, wherein: the cover handle 85 is driven by the mechanical driving of the docking linkage 87 to drive the collar 84 to rotate on the rotating shaft 86, so as to drive the docking cover 83 to open the docking port 82 and close the docking port 82 at the position of the docking port 82, and the suction port 88 is usually designed on the side of one end of the docking box 81.

As shown in fig. 7, the docking linkage 87 includes a main connecting rod 873, a plurality of sub connecting rods 874 are connected to the main connecting rod 873, each sub connecting rod 874 is connected with a locking tongue 875, a transverse spring mechanism 877 is installed on each locking tongue 875, a moving contact 871 is arranged beside each locking tongue 875, a static contact 872 is arranged below each moving contact 871, a static contact 872 is arranged at each docking port 82, each static contact 872 is located above the corresponding cover handle 85, a moving contact column 8710 is connected to each moving contact 871, a vertical spring mechanism 876 is installed on each moving contact column 8710, wherein:

for the oppositely arranged bolt 875 and movable contact 871, the opposite ends of the bolt 875 and the movable contact 871 are provided with inclined surfaces which are parallel to each other;

when the suction pipe 70 moves on the guide rail 90 to a position stopping above a connection cover 83 of the connection pipe 80, the movable contact 871 at the connection port 82 where the connection cover 83 is located is pressed to move downward to drive the lower fixed contact 872 to move downward, and the movable contact 871 pushes the corresponding lock tongue 875 to move horizontally and then is located below the lock tongue 875 to be locked, and since the main connecting rod 873 synchronously drives all the lock tongues 875 to move horizontally through the auxiliary connecting rods 874, while one movable contact 871 is locked by one lock tongue 875, the other lock tongues 875 are in a state of releasing the respective opposite movable contact 871, that is, only the movable contact 871 rolled by the suction pipe 70 is located below the lock tongue 875 and is locked by the lock tongue 875, that is, the connection linkage 87 can effectively ensure that only one fixed contact 872 acts, wherein the downward moved fixed contact 872 pushes the cover handle 85 downward to drive the connection cover 83 to turn upward and open, the connection cover 83 extends into the suction box 71 of the suction duct 70 from the air outlet 79, so that the connection duct 80 is communicated with the suction duct 70 through the connection port 82 where the connection cover 83 is located, under the action of the compression motor 100, the detected polluted air generated by the pollution source is discharged into the interlayer return air channel 41 through the pore plate of the raised floor 30, the air suction port 72, the suction box 71, the air outlet 79, the connection port 82, the connection box 81, the air suction port 88 and the compression motor 100 and is discharged out, and the connection covers 83 on the other connection ports 82 are not turned upwards to open, and the connection ports 82 corresponding to the connection covers are continuously sealed.

Further, the cross spring mechanism 877 includes a fixing seat 8772 fixed on the locking tongue 875 and a pressing ring 8773 sleeved on the locking tongue 875 and capable of translating, a return cross spring 8771 is connected between the pressing ring 8773 and the fixing seat 8772, wherein: when the movable contact 871 pushes the translational latch 875 to lock, the return cross spring 8771 is in compression, and conversely, when the movable contact 871 is released by the latch 875, the return cross spring 8771 returns.

Further, the vertical spring mechanism 876 includes a fixing seat 8762 fixed to the moving contact column 8710 and a pressing ring 8763 sleeved on the moving contact column 8710 and capable of moving vertically, the pressing ring 8763 is located below the fixing seat 8762, and a reset vertical spring 8761 is connected between the pressing ring 8763 and the fixing seat 8762, wherein: when the movable contact 871 moves downwards and is locked by the locking dog 875, the reset vertical spring 8761 is in a compressed state, and on the contrary, when the movable contact 871 is released by the locking dog 875, the reset vertical spring 8761 resets.

When the device is used, in a clean room, for a mobile pollution source, when the mobile pollution source passes through the upper part of the area where the photoelectric sensor group is located, the situation that a newly added pollution source exists and is located above the photoelectric sensor group is indicated, then the position information of the pollution source is fed back to the controller by the photoelectric sensor group, the controller controls the guide rail driving device, and the guide rail driving device drives the air suction pipeline 70 to do stepping translation motion on the two guide rails 90. When the air suction port 72 on the air suction duct 70 is moved to the position and stops right below the photoelectric sensor group, the controller controls the rotary driving mechanism 78, and then drives the baffle 73 to rotate around the rotary shaft 76 through the gear 77, the linkage plate 75 and the collar 74, so that the baffle 73 is turned downwards, and the air suction port 72 is opened. Meanwhile, the air outlet 79 of the air suction pipeline 70 moves and stops above a connection cover 83 of the connection pipeline 80, under the action of the connection linkage 87, only the connection cover 83 turns upwards, the connection cover 83 extends into the air suction box body 71 of the air suction pipeline 70, a connection port 82 where the connection cover 83 is located is in an open state, and then the connection pipeline 80 is communicated with the air suction pipeline 70 through the connection port 82 where the connection cover 83 is located and the air outlet 79. At this time, the compression motor 100 is started, and the polluted air generated by the mobile pollution source is directly discharged into the interlayer return air passage 41 through the orifice plate of the raised floor 30, the air suction port 72, the air suction box 71, the air outlet 79, the connection port 82, the connection box 81, the air suction port 88 and the compression motor 100 by the action of the compression motor 100, and is finally discharged and cleaned.

For the fixed pollution source in the clean room, the area of the fixed pollution source is detected by the photoelectric sensor group, so that one air suction port 72 of the air suction pipeline 70 is driven to move to the position below the fixed pollution source at regular time, and the fixed pollution source is cleaned in the same manner based on the above-mentioned manner for cleaning the pollution gas discharged by the movable pollution source.

Therefore, based on the mode of removing the polluted gas, the invention can carry out real-time detection on the polluted source in the clean room, and when the polluted source is detected, the polluted source is directly subjected to polluted gas removing operation.

In practice, the present invention can be operated with the FFU 20 to remove contaminants from a source of contaminants in a clean room, as shown in FIG. 1, which shows the direction of the air flow in the clean room as the air flows through the clean room.

The invention has the advantages that:

1. the invention can quickly remove the polluted air generated by the pollution sources in the clean room, particularly the polluted air generated by mobile pollution sources such as people walking, moving vehicles, products on a production line and the like, avoids the increase of energy consumption of an FFU (fan filter unit with power), can increase the indoor air flow on the basis of avoiding the increase of return air volume, ensures that the polluted air in the clean room is quickly removed, and avoids the pollution to the clean room.

2. The invention is mainly formed by a mechanical structure, is arranged below an elevated floor in a clean room, has low installation threshold, reliable operation and simple and convenient operation, and is suitable for the quick cleaning requirements of different clean rooms.

The above description is of the preferred embodiment of the present invention and the technical principles applied thereto, and it will be apparent to those skilled in the art that any changes and modifications based on the equivalent changes and simple substitutions of the technical solutions of the present invention are within the protection scope of the present invention without departing from the spirit and scope of the present invention.

Claims

1. The utility model provides a clean indoor pollution source pollutant gas clears away system fast, toilet include bearing wall and raised floor, are equipped with intermediate layer return air passageway in the bearing wall, and the below on raised floor is the equipment layer, and the top on raised floor is clean district, and the top in clean district is the furred ceiling layer, installs a plurality of FFUs, its characterized in that below the furred ceiling layer: a plurality of photoelectric sensor groups are arranged in gaps of the pore plate of the elevated floor; all the photoelectric sensor groups are arranged in a matrix form in the raised floor; the device layer is internally provided with an air suction pipeline, a connection pipeline, a guide rail and a guide rail driving device, the air suction pipeline is connected with the guide rail driving device and can be installed on the two parallel guide rails in a translation mode, the air suction pipeline is positioned below the raised floor, the connection pipeline is fixedly installed in the device layer, the connection pipeline is positioned below the air suction pipeline and is vertically crossed with the air suction pipeline, and one end of the connection pipeline is connected with a compression motor; when the air suction pipeline moves in place in the stepping mode on the guide rail and stops, an air suction port on the air suction pipeline is in an open state and is vertically opposite to a photoelectric sensor group for detecting a pollution source, and meanwhile, an air outlet on the air suction pipeline is vertically opposite to a connecting port in the open state on the connecting pipeline, so that polluted air generated by the pollution source in a clean area is discharged through a channel formed by the common communication of the elevated floor, the air suction pipeline, the connecting pipeline, the compression motor and the interlayer air return channel under the action of the compression motor; the photoelectric sensor group, the air suction pipeline, the guide rail driving device and the compression motor are connected with the controller.

2. The system for rapidly removing pollutant gas from clean room according to claim 1, wherein:

the air suction pipeline comprises a cuboid air suction box body, a plurality of air suction ports are formed in the top of the air suction box body, the air suction ports are linearly arranged, a baffle plate is rotatably mounted on each air suction port, and an air outlet is formed in the bottom of the air suction box body;

the pipeline of plugging into includes the box of plugging into of cuboid form, and the top of the box of plugging into has seted up a plurality of the mouth of plugging into, each the mouth linear arrangement of plugging into, every rotationally install a lid of plugging into on the mouth of plugging into, the box one end of plugging into seted up be used for with the extraction opening of compression motor's trachea intercommunication.

3. The system for rapidly removing pollutant gas from clean room according to claim 2, wherein:

the baffle passes through the lantern ring and rotationally installs in the axis of rotation, the axis of rotation install in on the box of breathing in on one side of induction port, the lantern ring except with baffle fixed connection still fixedly connected with interlock board, the interlock board is connected with rotation actuating mechanism via the gear, wherein: the interlocking plate drives the lantern ring to rotate on the rotating shaft under the driving of the rotating driving mechanism through the gear, so that the baffle is driven to open and close at the air suction port.

4. The system for rapidly removing pollutant gas from clean room according to claim 2, wherein:

the cover of plugging into rotationally installs in the axis of rotation through the lantern ring, the axis of rotation install in plug into on the box connect into on one side of mouth, the lantern ring except with plug into cover fixed connection outer fixedly connected with lid handle, the clutch of plugging into is installed to lid handle top, wherein: the cover handle drives the lantern ring to rotate on the rotating shaft under the mechanical drive of the connection linkage device, so that the connection cover is driven to open and close at the connection port.

5. The system for rapidly removing pollutant gas from clean room according to claim 4, wherein:

the linkage of plugging into includes the main connecting rod, is connected with a plurality of auxiliary connecting rods above the main connecting rod, and every auxiliary connecting rod is connected with a spring bolt, installs a horizontal spring mechanism on every spring bolt, and every spring bolt is other to be set up a moving contact, and the below of every moving contact sets up a static contact, every the mouth position of plugging into sets up a static contact, and every static contact is located correspondingly the top of lid handle, the higher authority of every moving contact is connected with a moving contact post, installs a perpendicular spring mechanism on every moving contact post, wherein:

for the oppositely arranged bolt and the moving contact, the opposite ends of the bolt and the moving contact are provided with inclined planes which are parallel to each other;

when the air suction pipeline moves on the guide rail step by step to a position stopping above a connection cover of the connection pipeline, a movable contact at the position of the connection port where the connection cover is located is pressed to move downwards to drive a fixed contact below the connection port to move downwards, the movable contact pushes a corresponding lock tongue to move horizontally and then is located below the lock tongue to be locked, and other lock tongues are in a state of releasing the respective opposite movable contacts, wherein the downward moving fixed contact pushes the cover handle downwards to drive the connection cover to turn upwards and open, and the connection cover extends into the air suction box body of the air suction pipeline from the air outlet, so that the connection pipeline is communicated with the air suction pipeline through the connection port where the connection cover is located.

6. The system for rapidly removing pollutant gas from clean room according to claim 5, wherein:

horizontal spring mechanism is including being fixed in fixing base and cover on the spring bolt are established the clamping ring that can translate on the spring bolt is connected a horizontal spring that resets between clamping ring and the fixing base, wherein: when the moving contact pushes the translational lock tongue to be locked, the reset transverse spring is in a compressed state;

erect spring mechanism and establish including being fixed in fixing base and cover on the movable contact post but vertical movement's clamping ring is connected a vertical spring that resets between clamping ring and the fixing base on the movable contact post, wherein: when the moving contact moves downwards and is locked by the lock tongue, the reset vertical spring is in a compressed state.