CN208720383U - Toilet - Google Patents

Toilet Download PDF

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Publication number
CN208720383U
CN208720383U CN201821266088.1U CN201821266088U CN208720383U CN 208720383 U CN208720383 U CN 208720383U CN 201821266088 U CN201821266088 U CN 201821266088U CN 208720383 U CN208720383 U CN 208720383U
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CN
China
Prior art keywords
corrosion coupon
testing agency
toilet according
toilet
space
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CN201821266088.1U
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Chinese (zh)
Inventor
杨政谕
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L&K ENGINEERING (SUZHOU) Co Ltd
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L&K ENGINEERING (SUZHOU) Co Ltd
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Priority to CN201821266088.1U priority Critical patent/CN208720383U/en
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Publication of CN208720383U publication Critical patent/CN208720383U/en
Priority to TW108210319U priority patent/TWM590997U/en
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  • Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)

Abstract

The utility model discloses a kind of toilets, including the air-supply space set gradually from top to bottom, ceiling, clean room, raised floor and return air space, the ceiling is divided into a plurality of blow zones, the raised floor is divided into a plurality of exhaust zones, the blow zones are arranged up and down correspondingly with the exhaust zone and corresponding formation cylindrical space between the two, the toilet further includes and the one-to-one testing agency of the cylindrical space, the testing agency includes the detection unit of the corrosion coupon contacted with the corrosive gas for flowing through its corresponding cylindrical space and the detection corrosion coupon unit for electrical property parameters.The aggrieved area's detection method in toilet disclosed by the utility model can be realized the comprehensive and accuracy of corrosive gas detection and save cost.

Description

Toilet
Technical field
The utility model relates to clear production fields, and in particular to a kind of toilet.
Background technique
Toilet is meant all controls the parameters such as air purity, temperature, humidity, pressure, noise as needed The preferable space of airtightness, the development of toilet and modern industry, sophisticated technology close ties are together.Due to precision machinery work Industry (such as gyroscope, miniature bearing are processed), requirement of the semi-conductor industry (such as large scale integrated circuit production) to environment, promote Into the development of toilet's technology.The country once counted, and MOS circuit die is produced in the environment of the other requirement of no clean grade Qualification rate only 10%~15%, 64 be reservoir only 2%.At present in the industry such as precision machinery, semiconductor, aerospace, atomic energy It is fairly common using toilet.
Toilet in the prior art includes clean room, ceiling and raised floor, and ceiling is equipped with a plurality of Blow zones, each blow zones include at least one wind pushing mechanism, and raised floor is equipped with a plurality of exhaust zones, and wind pushing mechanism is usually FFU device or including FFU device and chemical filter, the effect of FFU device are air-supply and filtering larger particles pollutant, are changed The effect for learning filter is that filtering corrosive gas generallys use a little when detecting to the corrosive gas in clean room Then corrosive gas in the method real-time monitoring clean room of monitoring will that is, to multiple sampled points are arranged in clean room Collected gas is sent by pipeline to analytical equipment, and whether analytical equipment is analyzed gas to measure in gas containing corruption Corrosion gas, such as contains, then stops the work of the board of sampled point position in time, prevents product contaminated.
However, the above method has the following deficiencies: firstly, be limited to the length of pipeline, for large area toilet without Method accomplishes comprehensive covering of sampled point, can not accomplish comprehensive monitoring;Secondly as every analytical equipment connects multiple and different adopt Sampling point, the air-flow of trace analysis before remaining in analytical equipment not can guarantee the purity of rear trace analysis gas, monitoring inaccuracy; Again, it since the pipeline that every analytical equipment can connect is limited, so the sampled point of connection is also limited, needs to match Standby more analytical equipments, analytical equipment expensive equipment are at high cost.In conclusion being difficult to accomplish to monitor using the method for point monitoring Comprehensive and accuracy and with high costs.
Summary of the invention
The purpose of the utility model is to provide a kind of toilets, can be realized the comprehensive and accurate of corrosive gas detection Property and save cost.
In order to achieve the above objectives, the technical solution adopted in the utility model is: a kind of toilet, including from top to bottom successively Air-supply space, ceiling, clean room, raised floor and the return air space of setting, the ceiling are divided into a plurality of send Wind area, the raised floor are divided into a plurality of exhaust zones, and the blow zones and the exhaust zone are arranged up and down correspondingly And corresponding formation cylindrical space between the two, the toilet further include and the one-to-one detection machine of the cylindrical space Structure, the testing agency include described in the corrosion coupon contacted with the corrosive gas for flowing through its corresponding cylindrical space and detection The detection unit of corrosion coupon unit for electrical property parameters.
In above-mentioned technical proposal, the corrosion coupon is testing resistance, and the detection unit is measuring resistance circuit.
In above-mentioned technical proposal, the corrosion coupon and the detection unit form Wheatstone bridge measuring resistance circuit, institute State testing resistance of the corrosion coupon as the Wheatstone bridge measuring resistance circuit.
In above-mentioned technical proposal, the corrosion coupon and the detection unit form resistance measurement with voltammetry circuit, the corruption Lose testing resistance of the test piece as the resistance measurement with voltammetry circuit.
Above, the corrosion coupon is a kind of conductor or semiconductor with certain resistance value, with corrosive gas It can corrode after contact, cause the resistance value of itself that can change.Exactly this point is utilized in the core of the application, leads to The variation of the resistance value of excessive erosion test piece itself, cooperation detection unit whether there is to detect corrosive gas.
As for the shape of corrosion coupon, piece shape, bar shaped, stick or other shapes commonly used in the art, this Shen can be Please with no restriction.
In above-mentioned technical proposal, the testing agency includes at least one described corrosion coupon, and the testing agency sets At least one in the air-supply space, the ceiling, the clean room, the raised floor and the return air space Place.That is, a corrosion coupon can be used in testing agency corresponding to each cylindrical space, multiple corrosion examinations also can be used Piece, the quantity and installation site of corrosion coupon used in testing agency corresponding to different cylindrical spaces can be identical, can also With difference.
In above-mentioned technical proposal, each blow zones include at least one wind pushing mechanism.I.e. each blow zones can wrap A wind pushing mechanism is included, also may include multiple wind pushing mechanisms.
In above-mentioned technical proposal, the wind pushing mechanism is FFU device or the wind pushing mechanism includes FFU device and change Learn filter.
In above-mentioned technical proposal, the corrosion coupon of the testing agency is set on the ceiling, the testing agency with The wind pushing mechanism shares same single-chip microcontroller.
In above-mentioned technical proposal, the single-chip microcontroller wireless telecommunications of the detection unit of the testing agency and the testing agency.
In above-mentioned technical proposal, the corrosion coupon is iron plate, copper sheet, silver strip or semiconductor.The semiconductor is, for example, Silicon, germanium, GaAs etc..
Since above-mentioned technical proposal is used, the utility model has the advantage that compared with prior art
(1) toilet disclosed by the utility model corrosion coupon and flows through column by setting corrosion coupon and detection unit The corrosive gas in shape space contacts, and detection unit detects the unit for electrical property parameters of corrosion coupon, is joined according to corrosion coupon electrical property Several variations, and then whether the air-flow for determining that corrosion coupon is contacted contains corrosive gas, such as contains corrosive gas, can mention It wakes up and notices or reinforce to monitor the ambient condition of the board in cylindrical space, prevent a greater amount of corrosive gas from entering clean room In and be located on the board that product is contaminated, on the one hand, since testing agency is not limited by pipeline, can largely arrange, each Testing agency is monitored a region of clean room, and comprehensive, another party to realize detection is monitored by compartmentalization Face, different corrosion coupons contact different air-flows, and air-flow will not intersect, and therefore, can be realized the accuracy of detection, in addition, by It is checked in using circuit and single-chip microcontroller, is not needed expensive analytical equipment, greatly reduce monitoring cost;
(2) toilet disclosed by the utility model, the single-chip microcontroller of testing agency and the one-chip machine common of wind pushing mechanism, can be big It is big to save cost;
(3) toilet disclosed by the utility model, corrosion coupon are set to the air-flow input side of blow zones and the gas of exhaust zone Input side is flowed, corrosive gas can be made as more as possible and be attached on corrosion coupon in time, improves detection efficiency.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of toilet disclosed by the utility model;
Fig. 2 is the schematic diagram of Wheatstone bridge measuring resistance circuit disclosed by the utility model;
Fig. 3 is the schematic diagram of resistance measurement with voltammetry circuit disclosed by the utility model.
Wherein: 10, blow space, 20, ceiling;21, wind pushing mechanism;30, clean room;40, raised floor;50, it returns Wind space;60, corrosion coupon.
Specific embodiment
The utility model is further described with reference to the accompanying drawings and embodiments:
Embodiment one
Referring to Fig. 1, as shown in legend therein, a kind of toilet, including set gradually from top to bottom air-supply space 10, Ceiling 20, clean room 30, raised floor 40 and return air space 50, ceiling 20 is divided into a plurality of blow zones, overhead Floor 40 is divided into a plurality of exhaust zones, and blow zones are arranged up and down correspondingly with exhaust zone and corresponding formation between the two Cylindrical space, toilet further include including and flowing through its institute with the one-to-one testing agency of cylindrical space, each testing agency The corrosion coupon 60 of the corrosive gas contact of corresponding cylindrical space and the detection unit of detection 60 unit for electrical property parameters of corrosion coupon.
Above, corrosion coupon 60 is testing resistance, and detection unit is measuring resistance circuit, corrosion coupon 60 and detection unit Form Wheatstone bridge measuring resistance circuit, testing resistance of the corrosion coupon 60 as Wheatstone bridge measuring resistance circuit.
By taking favour stone balanced bridge as an example, principle is as shown in Fig. 2, measuring resistance R0, R1, R2 and testing resistance RX are linked to be four Side shape, each side are known as an arm of suspension bridge, in the indirect power supply E of diagonal A and C, in the indirect galvanometer of diagonal B and D.Cause This electric bridge is made of 4 arms, power supply and galvanometer three parts, after switch KE is connected with KG, has electric current logical in each branch It crosses, galvanometer branch has play a part of to link up two branches of ABC and ADC.As a bridge, therefore it is known as " electric bridge ".Suitably The size for adjusting R0, R1 and R2, can make do not have electric current to pass through on bridge, that is, pass through galvanometric electric current IG=0, at this moment, B, D two The potential of point is equal.This state of electric bridge is known as equilibrium state.At this moment the potential difference between A, B is equal to A, the potential between D Difference, the potential difference between B, C are equal to D, and the potential difference between C is determined if the electric current in ABC branch is respectively I1 and I2 by ohm It restrains
I1RX=I2R1;
I1R0=I2R2;
Two formulas are divided by, and are obtained
RX/R0=R1/R2 (1)
(1) formula is known as the equilibrium condition of electric bridge, is obtained by (1) formula
RX=(R1/R2) R0 (2)
The resistance value size of testing resistance can be acquired according to formula (2).
Above, wind pushing mechanism 21 is FFU device or wind pushing mechanism 21 includes FFU device and chemical filter.
Preferably, each testing agency includes two corrosion coupons 60 at ceiling 20 and 40 liang of raised floor, Each blow zones include a wind pushing mechanism 21, wind pushing mechanism 21 be FFU device or wind pushing mechanism 21 include FFU device and Chemical filter.The corrosion coupon 60 of testing agency is set on the ceiling, and testing agency shares same with wind pushing mechanism 21 Single-chip microcontroller, corrosion coupon 40 are iron plate, copper sheet, silver strip or semiconductor.
In actual use, the operation of wind pushing mechanism 21 and adjusting and the electricity to be measured of control detection unit are controlled by single-chip microcontroller The calculating of resistance value is hindered, monitors the unit for electrical property parameters of the corrosion coupon of each testing agency, testing agencies as described in some The unit for electrical property parameters of corrosion coupon persistently changes according to a trend, then judges cylindrical space corresponding to the testing agency For aggrieved area, such as a certain cylindrical space is aggrieved area, reminds the ambient condition for noticing or reinforcing to monitor board in aggrieved area in time. For example, then sentencing when the real-time resistance value of corrosion coupon is in positive change relative to initial resistance value (real-time resistance value constantly rises) Disconnected the contacted air-flow of testing resistance contains corrosive gas.Since corrosion coupon has a longer life expectancy, can be used long Time, therefore, when being monitored every time, real-time resistance value when requiring to start with test piece test is compared.
Embodiment two
Remaining is the same as example 1, the difference is that, corrosion coupon 60 and detection unit form resistance measurement with voltammetry Circuit, testing resistance of the corrosion coupon 60 as resistance measurement with voltammetry circuit.Principle is as shown in Figure 3.
Resistance measurement with voltammetry is the common methods that testing resistance is directly measured using ammeter and voltmeter, by utilizing portion Parallel circuit Ohm's law: R=U/I measures resistance value.The electric current under this voltage through unknown resistance is measured with ammeter, so The resistance value for calculating unknown resistance afterwards, is roughly divided into two kinds, ammeter inner connection and external ammeter, so-called external inscribed, as Ammeter connects in the outside or the inside of voltmeter, the specific steps are as follows:
(1) pointer of ammeter A and voltmeter V is adjusted to zero graduation, and in kind, adjusting slide rheostat is connected by circuit diagram The resistance value of R ' most big end;
(2) closure switch S, adjusts the slide plate of slide rheostat R ' to appropriate location, respectively the registration I of read current Table A, The registration U of voltmeter V;
(3) value of R is calculated according to formula R=U/I.
According to the above method, the electric current and both end voltage in the slide plate change testing resistance of slide rheostat are adjusted, it is survey more The value of several groups of R.
Embodiment three
Remaining is any identical as embodiment one or two, the difference is that, above-mentioned detection unit is ohmmeter or multimeter.
Example IV
Remaining is any identical as embodiment one to three, the difference is that, each testing agency can also include a corruption Test piece or more than two corrosion coupons are lost, corrosion coupon is set to air-supply space, ceiling, clean room, raised floor and returns Any position in wind space.
Embodiment five
Remaining is any identical as embodiment one to four, the difference is that, the detection unit of testing agency and single-chip microcontroller without Line communication.
The foregoing description of the disclosed embodiments can be realized professional and technical personnel in the field or using originally practical new Type.Various modifications to these embodiments will be readily apparent to those skilled in the art, and determine herein The General Principle of justice can be realized in other embodiments without departing from the spirit or scope of the present utility model.Cause This, the present invention will not be limited to the embodiments shown herein, and is to fit to and principles disclosed herein The widest scope consistent with features of novelty.

Claims (10)

1. a kind of toilet, including set gradually from top to bottom air-supply space, ceiling, clean room, raised floor and Return air space, the ceiling are divided into a plurality of blow zones, and the raised floor is divided into a plurality of exhaust zones, the air-supply Area arranges up and down correspondingly with the exhaust zone and corresponding formation cylindrical space between the two,
It is characterized in that, the toilet further includes and the one-to-one testing agency of the cylindrical space, the testing agency Including the corrosion coupon and the detection corrosion coupon electrical property contacted with the corrosive gas for flowing through cylindrical space corresponding to it The detection unit of parameter.
2. toilet according to claim 1, which is characterized in that the corrosion coupon is testing resistance, and the detection is single Member is measuring resistance circuit.
3. toilet according to claim 2, which is characterized in that the corrosion coupon and the detection unit composition favour this Energization bridge measuring resistance circuit, testing resistance of the corrosion coupon as the Wheatstone bridge measuring resistance circuit.
4. toilet according to claim 2, which is characterized in that the corrosion coupon and the detection unit form volt-ampere Method measuring resistance circuit, testing resistance of the corrosion coupon as the resistance measurement with voltammetry circuit.
5. toilet according to claim 1, which is characterized in that the testing agency includes at least one described corrosion examination Piece, and the testing agency is set to the air-supply space, the ceiling, the clean room, the raised floor and institute It states at least one in return air space.
6. toilet according to claim 1, which is characterized in that each blow zones include at least one pressure fan Structure.
7. toilet according to claim 6, which is characterized in that the wind pushing mechanism is FFU device or the air-supply Mechanism includes FFU device and chemical filter.
8. toilet according to claim 6, which is characterized in that the corrosion coupon of the testing agency is set to the smallpox On plate, the testing agency and the wind pushing mechanism share same single-chip microcontroller.
9. toilet according to claim 1, which is characterized in that the detection unit of the testing agency and the detection machine The single-chip microcontroller wireless telecommunications of structure.
10. toilet according to claim 1, which is characterized in that the corrosion coupon is iron plate, copper sheet, silver strip or half Conductor.
CN201821266088.1U 2018-08-07 2018-08-07 Toilet Active CN208720383U (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201821266088.1U CN208720383U (en) 2018-08-07 2018-08-07 Toilet
TW108210319U TWM590997U (en) 2018-08-07 2019-08-05 Cleanroom

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821266088.1U CN208720383U (en) 2018-08-07 2018-08-07 Toilet

Publications (1)

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CN208720383U true CN208720383U (en) 2019-04-09

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Application Number Title Priority Date Filing Date
CN201821266088.1U Active CN208720383U (en) 2018-08-07 2018-08-07 Toilet

Country Status (2)

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CN (1) CN208720383U (en)
TW (1) TWM590997U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111457530A (en) * 2020-04-01 2020-07-28 北京联合大学 Concealed rapid cleaning system for mobile pollution source polluted gas in clean room
CN111457494A (en) * 2020-04-01 2020-07-28 北京联合大学 Quick clean-up system of pollution source pollution gas in clean room

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111457530A (en) * 2020-04-01 2020-07-28 北京联合大学 Concealed rapid cleaning system for mobile pollution source polluted gas in clean room
CN111457494A (en) * 2020-04-01 2020-07-28 北京联合大学 Quick clean-up system of pollution source pollution gas in clean room
CN111457494B (en) * 2020-04-01 2021-08-27 北京联合大学 Quick clean-up system of pollution source pollution gas in clean room

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Publication number Publication date
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