CN208887023U - A kind of toilet - Google Patents
A kind of toilet Download PDFInfo
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- CN208887023U CN208887023U CN201821266745.2U CN201821266745U CN208887023U CN 208887023 U CN208887023 U CN 208887023U CN 201821266745 U CN201821266745 U CN 201821266745U CN 208887023 U CN208887023 U CN 208887023U
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- air
- corrosion coupon
- wind pushing
- pushing mechanism
- supply passage
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Abstract
The utility model discloses a kind of toilet, including clean room and ceiling, ceiling is equipped with a plurality of wind pushing mechanisms；The inside of wind pushing mechanism has air-supply passage, be additionally provided with the one-to-one testing agency of the air-supply passage of wind pushing mechanism, testing agency include the corrosion coupon contacted with the corrosive gas for flowing through its corresponding air-supply passage and detect corrosion coupon unit for electrical property parameters detection unit.The utility model passes through setting corrosion coupon and detection unit, determine whether the air-flow that corrosion coupon is contacted contains corrosive gas, such as contain corrosive gas, can the board below out-of-blast mechanism in time work, preventing a greater amount of corrosive gas from entering in clean room and being located at below contaminated wind pushing mechanism, product is contaminated on board, since wind pushing mechanism is covered with the top of clean room and different corrosion coupon contacts the air-flow of different channel designs substantially, therefore, it can be realized the comprehensive and accuracy of detection.
Description
Technical field
The utility model relates to clear production fields, and in particular to a kind of toilet.
Background technique
Toilet is meant all controls the parameters such as air purity, temperature, humidity, pressure, noise as needed
The preferable space of airtightness, the development of toilet and modern industry, sophisticated technology close ties are together.Due to precision machinery work
Industry (such as gyroscope, miniature bearing are processed), requirement of the semi-conductor industry (such as large scale integrated circuit production) to environment, promote
Into the development of toilet's technology.The country once counted, and MOS circuit die is produced in the environment of the other requirement of no clean grade
Qualification rate only 10% ~ 15%, 64 be reservoir only 2%.It is applied in the industry such as precision machinery, semiconductor, aerospace, atomic energy at present
Toilet is fairly common.
Toilet in the prior art includes clean room, for the supply air system of clean room conveying fresh air and to cleaning
The detection system that corrosive gas is detected in space, clean room top are equipped with ceiling, and supply air system includes being distributed in
Multiple wind pushing mechanisms of ceiling, wind pushing mechanism include air-supply passage, certain driving air-flow flow through air-supply passage fan assembly and
To the filter assemblies that the air-flow for flowing through air-supply passage is filtered, wind pushing mechanism be usually FFU device or including FFU device and
Chemical filter, the effect of FFU device are air-supply and filtering larger particles pollutant, and the effect of chemical filter is filtering corrosive
Property gas, when detection system detects the corrosive gas in clean room, the method for generalling use monitoring is supervised in real time
Then the corrosive gas surveyed in clean room passes through collected gas that is, to multiple sampled points are arranged in clean room
Pipeline is sent to analytical equipment, and analytical equipment is analyzed gas to measure and whether contain corrosive gas in gas, is such as contained,
The work for then stopping the board of sampled point position in time prevents product contaminated.
However, arranged in clean room multiple sampled points and by pipeline sample then carry out gas analysis exist with
Lower defect: firstly, being limited to the length of pipeline, can not accomplish the toilet of large area comprehensive covering of sampled point, can not
Accomplish comprehensive monitoring；Secondly as every analytical equipment connects multiple and different sampled points, preceding road can be remained in analytical equipment
The air-flow of analysis not can guarantee the purity of rear trace analysis gas, monitoring inaccuracy；Again, since every analytical equipment can connect
The pipeline connect is limited, so the sampled point of connection is also limited, needs to be equipped with more analytical equipments, analytical equipment instrument
Valuableness, it is at high cost.In conclusion using a method for point monitoring, it is difficult to accomplish the comprehensive and accuracy of monitoring and with high costs.
Summary of the invention
The purpose of the utility model is to provide a kind of toilets, can be realized the comprehensive and accurate of corrosive gas detection
Property and save cost.
In order to achieve the above objectives, the technical solution adopted in the utility model is: a kind of toilet, including clean room and day
Card, the ceiling are equipped with a plurality of wind pushing mechanisms；The inside of the wind pushing mechanism has air-supply passage,
Wherein: being additionally provided with and the one-to-one testing agency of the air-supply passage of the wind pushing mechanism, testing agency's packet
Include the corrosion coupon contacted with the corrosive gas for flowing through its corresponding air-supply passage and the detection corrosion coupon electrical property ginseng
Several detection units.
Above, the corrosion coupon is a kind of conductor or semiconductor with certain resistance value, with corrosive gas
It can corrode after contact, cause the resistance value of itself that can change.Exactly this point is utilized in the core of the application, leads to
The variation of the resistance value of excessive erosion test piece itself, cooperation detection unit whether there is to detect corrosive gas.
As for the shape of corrosion coupon, piece shape, bar shaped, stick or other shapes commonly used in the art, this Shen can be
Please with no restriction.
In above-mentioned technical proposal, a plurality of wind pushing mechanisms are clouded in the top of the clean room.
In above-mentioned technical proposal, the corrosion coupon is testing resistance, and the detection unit is measuring resistance circuit.
In above-mentioned technical proposal, the corrosion coupon and the detection unit form Wheatstone bridge measuring resistance circuit, institute
State testing resistance of the corrosion coupon as the Wheatstone bridge measuring resistance circuit.
In above-mentioned technical proposal, the corrosion coupon and the detection unit form resistance measurement with voltammetry circuit, the corruption
Lose testing resistance of the test piece as the resistance measurement with voltammetry circuit.
In above-mentioned technical proposal, the corrosion coupon is set to the air-flow input side of the wind pushing mechanism.
In above-mentioned technical proposal, in the air-supply passage be equipped with certain driving air-flow flow through the air-supply passage fan unit and
To the filter element that the air-flow for flowing through the air-supply passage is filtered, the fan unit of the wind pushing mechanism and the detection machine
The detection unit of structure shares same single-chip microcontroller.
In above-mentioned technical proposal, the wind pushing mechanism is FFU device or the wind pushing mechanism includes FFU device and change
Learn filter.
Above, when wind pushing mechanism is FFU device, air-supply passage of the channel design of FFU device as wind pushing mechanism,
Fan unit of the fan unit of FFU device as wind pushing mechanism, filtering of the high efficiency particulate air filter of FFU device as wind pushing mechanism
Unit；
When wind pushing mechanism includes FFU device and chemical filter, the channel design of FFU device and leading to for chemical filter
The air-supply passage of road structure composition wind pushing mechanism, fan unit of the fan unit of FFU device as wind pushing mechanism, FFU device
High efficiency particulate air filter and chemical filter filter element composition wind pushing mechanism filter element.
In above-mentioned technical proposal, the corrosion coupon and the FFU apparatus moduleization be arranged or the corrosion coupon with
The chemical filter modularization setting.
In above-mentioned technical proposal, the corrosion coupon is iron plate, copper sheet, silver strip or semiconductor.Above-mentioned semiconductor is, for example,
Silicon, germanium, GaAs etc..
Since above-mentioned technical proposal is used, the utility model has the advantage that compared with prior art
(1) toilet disclosed by the utility model, by setting corrosion coupon and detection unit, corrosion coupon is sent with flowing through
The corrosive gas in wind channel contacts, and detection unit detects the unit for electrical property parameters of corrosion coupon, is joined according to corrosion coupon electrical property
Several variations, and then whether the air-flow for determining that corrosion coupon is contacted contains corrosive gas, such as contains corrosive gas, can mention
It wakes up and notices or reinforce to monitor the ambient condition of the board below wind pushing mechanism, prevent a greater amount of corrosive gas from entering clean sky
Between in and be located at below contaminated wind pushing mechanism that product is contaminated on board, on the one hand, since wind pushing mechanism is covered with cleaning substantially
The top in space, therefore, testing agency corresponding to each wind pushing mechanism can be to one of clean room corresponding to the wind pushing mechanism
A region is monitored, and is monitored by compartmentalization to realize the comprehensive of detection, and on the other hand, different corrosion coupon contacts are different
The air-flow of air-supply, air-flow will not intersect, and therefore, can be realized the accuracy of detection, in addition, due to using circuit and single-chip microcontroller into
Row checks, does not need expensive analytical equipment, greatly reduces monitoring cost；
(2) toilet disclosed by the utility model, corrosion coupon are set to the air-flow input side of blower fan filtering component, can make corruption
Corrosion gas is as more as possible and is attached on corrosion coupon in time, improves detection efficiency；
(3) toilet disclosed by the utility model, testing agency and FFU device or chemical filter modularization are arranged, side
Just it installs, and application easy to spread.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of toilet disclosed by the utility model；
Fig. 2 is the top view of Section A-A in Fig. 1；
Fig. 3 is the schematic diagram of Wheatstone bridge measuring resistance circuit disclosed by the utility model；
Fig. 4 is the schematic diagram of resistance measurement with voltammetry circuit disclosed by the utility model.
Wherein: 1, clean room；2, ceiling；3, wind pushing mechanism；4, corrosion coupon.
Specific embodiment
The utility model is further described with reference to the accompanying drawings and embodiments:
Embodiment one
Referring to Fig. 1 and Fig. 2, as shown in legend therein, a kind of toilet, including clean room 1 and ceiling 2, smallpox
Plate 2 is equipped with a plurality of wind pushing mechanisms 3, and the inside of wind pushing mechanism 3 has air-supply passage (not regarding out in figure), is additionally provided with and blows
The one-to-one testing agency of the air-supply passage of mechanism 3, the testing agency include and flow through the corrosion of its corresponding air-supply passage
Property gas contact corrosion coupon 4 and detection 4 unit for electrical property parameters of corrosion coupon detection unit (not regarded out in figure).
Above, corrosion coupon 4 is testing resistance, and detection unit is measuring resistance circuit, corrosion coupon 4 and groups of sensor elements
At Wheatstone bridge measuring resistance circuit, testing resistance of the corrosion coupon as Wheatstone bridge measuring resistance circuit.
By taking favour stone balanced bridge as an example, principle is as shown in figure 3, measuring resistance R0, R1, R2 and testing resistance RX are linked to be
Quadrangle, each side are known as an arm of suspension bridge, in the indirect power supply E of diagonal A and C, in the indirect galvanometer of diagonal B and D.
Therefore electric bridge is made of 4 arms, power supply and galvanometer three parts, after switch KE is connected with KG, has electric current in each branch
Pass through, galvanometer branch has play a part of to link up two branches of ABC and ADC.As a bridge, therefore it is known as " electric bridge ".It is suitable
It when the size for adjusting R0, R1 and R2, can make there is no electric current to pass through on bridge, that is, pass through galvanometric electric current IG=0, at this moment, B, D
The potential of two o'clock is equal.This state of electric bridge is known as equilibrium state.At this moment the potential difference between A, B is equal to A, the electricity between D
Potential difference, the potential difference between B, C are equal to D, the potential difference between C, if the electric current in ABC branch is respectively I1 and I2, by ohm
Law obtains
I1RX=I2R1；
I1R0=I2R2；
Two formulas are divided by, and are obtained
RX/R0=R1/R2 (1)
(1) formula is known as the equilibrium condition of electric bridge, is obtained by (1) formula
RX=(R1/R2) R0 (2)
The resistance value size of testing resistance can be acquired according to formula (2).
Above, the fan unit (not regarding out in figure) that certain driving air-flow flows through the air-supply passage is equipped in above-mentioned air-supply passage
With the filter element (not regarded out in figure) being filtered to the air-flow for flowing through the air-supply passage.
Above, wind pushing mechanism 3 is FFU device or wind pushing mechanism 3 includes FFU device and chemical filter, works as air-supply
When mechanism 3 is FFU device, the fan unit of air-supply passage of the channel design of FFU device as wind pushing mechanism 3, FFU device is made
For the fan unit of wind pushing mechanism 3, filter element of the high efficiency particulate air filter of FFU device as wind pushing mechanism 3；When wind pushing mechanism 3
Including FFU device and when chemical filter, the channel design of FFU device and the channel design of chemical filter form wind pushing mechanism
3 air-supply passage, fan unit of the fan unit of FFU device as wind pushing mechanism 3, the high efficiency particulate air filter of FFU device and change
Learn the filter element of the filter element composition wind pushing mechanism 3 of filter.
Preferably, a plurality of wind pushing mechanisms 3 are uniformly clouded in the top of clean room 1, and corrosion coupon 4 is set to pressure fan
The air-flow input side of structure 3, corrosion coupon 4 are iron plate, copper sheet, silver strip or semiconductor, the fan unit and detection machine of wind pushing mechanism 3
The detection unit of structure shares same single-chip microcontroller (not regarding out in figure), and corrosion coupon 4 and FFU apparatus moduleization are arranged, or corrosion
Test piece 4 and chemical filter modularization are arranged.
In actual use, the operation of fan unit 20 and adjusting and the electricity to be measured of control detection unit are controlled by single-chip microcontroller
Hinder resistance value calculating, the unit for electrical property parameters of each corrosion coupon of real-time monitoring, as some corrosion coupon unit for electrical property parameters according to
One trend persistently changes, then judges in the gas flowed through in air-supply passage corresponding to the corrosion coupon containing being corrosive
Gas, the FFU for the wind pushing mechanism closed where the flowed through air-supply passage of corrosive gas in time simultaneously stop board below the FFU
Work.For example, when the real-time resistance value of corrosion coupon is in positive change relative to initial resistance value (real-time resistance value constantly rises),
Then judge that the contacted air-flow of testing resistance contains corrosive gas.Since corrosion coupon has a longer life expectancy, ratio can be used
Longer time, therefore, when being monitored every time, real-time resistance value when requiring to start with test piece test is compared.
Embodiment two
Remaining is the same as example 1, the difference is that, corrosion coupon 4 and detection unit composition resistance measurement with voltammetry electricity
Road, testing resistance of the corrosion coupon 4 as resistance measurement with voltammetry circuit.Principle is as shown in Figure 4
Resistance measurement with voltammetry is the common methods that testing resistance is directly measured using ammeter and voltmeter, by utilizing portion
Parallel circuit Ohm's law: R=U/I measures resistance value.The electric current under this voltage through unknown resistance is measured with ammeter, so
The resistance value for calculating unknown resistance afterwards, is roughly divided into two kinds, ammeter inner connection and external ammeter, so-called external inscribed, as
Ammeter connects in the outside or the inside of voltmeter, the specific steps are as follows:
(1) pointer of ammeter A and voltmeter V is adjusted to zero graduation, and in kind, adjusting slide rheostat is connected by circuit diagram
The resistance value of R ' most big end；
(2) closure switch S, adjusts the slide plate of slide rheostat R ' to appropriate location, respectively the registration I of read current Table A,
The registration U of voltmeter V,
(3) value of R is calculated according to formula R=U/I.
According to the above method, the electric current and both end voltage in the slide plate change testing resistance of slide rheostat are adjusted, it is survey more
The value of several groups of R.
Embodiment three
Remaining is identical as embodiment one or two, the difference is that, above-mentioned detection unit is ohmmeter or multimeter.
The foregoing description of the disclosed embodiments can be realized professional and technical personnel in the field or using originally practical new
Type.Various modifications to these embodiments will be readily apparent to those skilled in the art, and determine herein
The General Principle of justice can be realized in other embodiments without departing from the spirit or scope of the present utility model.Cause
This, the present invention will not be limited to the embodiments shown herein, and is to fit to and principles disclosed herein
The widest scope consistent with features of novelty.
Claims (10)
1. a kind of toilet, including clean room (1) and ceiling (2), the ceiling (2) is equipped with a plurality of wind pushing mechanisms
(3)；The inside of the wind pushing mechanism (3) has air-supply passage,
It is characterized by: being additionally provided with the one-to-one testing agency of air-supply passage with the wind pushing mechanism (3), the detection machine
Structure includes the corrosion coupon (4) contacted with the corrosive gas for flowing through its corresponding air-supply passage and the detection corrosion coupon
(4) detection unit of unit for electrical property parameters.
2. toilet according to claim 1, which is characterized in that a plurality of wind pushing mechanisms (3) are clouded in described clean
The top of clear space (1).
3. toilet according to claim 1, which is characterized in that the corrosion coupon (4) is testing resistance, the detection
Unit is measuring resistance circuit.
4. toilet according to claim 3, which is characterized in that the corrosion coupon (4) and detection unit composition
Wheatstone bridge measuring resistance circuit, testing resistance of the corrosion coupon (4) as the Wheatstone bridge measuring resistance circuit.
5. toilet according to claim 3, which is characterized in that the corrosion coupon (4) and detection unit composition
Resistance measurement with voltammetry circuit, testing resistance of the corrosion coupon (4) as the resistance measurement with voltammetry circuit.
6. toilet according to claim 1, which is characterized in that the corrosion coupon (4) is set to the wind pushing mechanism
Air-flow input side.
7. toilet according to claim 1, which is characterized in that be equipped in the air-supply passage certain driving air-flow flow through it is described
The fan unit of air-supply passage and the filter element that the air-flow for flowing through the air-supply passage is filtered, the wind pushing mechanism
The detection unit of fan unit and the testing agency shares same single-chip microcontroller.
8. toilet according to claim 1, which is characterized in that the wind pushing mechanism (3) is FFU device or described
Wind pushing mechanism (3) includes FFU device and chemical filter.
9. toilet according to claim 8, which is characterized in that the corrosion coupon (4) and the FFU apparatus module
Setting or the corrosion coupon (4) and the chemical filter modularization are arranged.
10. toilet according to claim 1, which is characterized in that the corrosion coupon (4) be iron plate, copper sheet, silver strip or
Semiconductor.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821266745.2U CN208887023U (en) | 2018-08-07 | 2018-08-07 | A kind of toilet |
| TW108210320U TWM589276U (en) | 2018-08-07 | 2019-08-05 | A clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821266745.2U CN208887023U (en) | 2018-08-07 | 2018-08-07 | A kind of toilet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208887023U true CN208887023U (en) | 2019-05-21 |
Family
ID=66508311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821266745.2U Active CN208887023U (en) | 2018-08-07 | 2018-08-07 | A kind of toilet |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN208887023U (en) |
| TW (1) | TWM589276U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111397014A (en) * | 2020-03-23 | 2020-07-10 | 艾感科技(广东)有限公司 | Air dustproof management system and air quality detection system |
| CN113607766A (en) * | 2021-08-03 | 2021-11-05 | 亚翔系统集成科技（苏州）股份有限公司 | Pollution source searching method based on poor products in semiconductor production line |
-
2018
- 2018-08-07 CN CN201821266745.2U patent/CN208887023U/en active Active
-
2019
- 2019-08-05 TW TW108210320U patent/TWM589276U/en unknown
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111397014A (en) * | 2020-03-23 | 2020-07-10 | 艾感科技(广东)有限公司 | Air dustproof management system and air quality detection system |
| CN111397014B (en) * | 2020-03-23 | 2021-11-09 | 艾感科技(广东)有限公司 | Air dustproof management system and air quality detection system |
| CN113607766A (en) * | 2021-08-03 | 2021-11-05 | 亚翔系统集成科技（苏州）股份有限公司 | Pollution source searching method based on poor products in semiconductor production line |
| CN113607766B (en) * | 2021-08-03 | 2023-08-29 | 亚翔系统集成科技（苏州）股份有限公司 | Pollution source searching method based on bad products in semiconductor production line |
Also Published As
| Publication number | Publication date |
|---|---|
| TWM589276U (en) | 2020-01-11 |
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