CN207716544U - High-accuracy intelligent Cleanroom system - Google Patents
High-accuracy intelligent Cleanroom system Download PDFInfo
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- CN207716544U CN207716544U CN201721394351.0U CN201721394351U CN207716544U CN 207716544 U CN207716544 U CN 207716544U CN 201721394351 U CN201721394351 U CN 201721394351U CN 207716544 U CN207716544 U CN 207716544U
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- guide rail
- transverse slat
- shuffle box
- accuracy intelligent
- escape pipe
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Abstract
This case is related to a kind of high-accuracy intelligent Cleanroom system, including：Toilet, it is respectively arranged with from up to down into gas-bearing formation, working lining and reflux layer, the reflux layer includes the first transverse slat, the first transverse slat lower slide is arranged on the first guide rail, first transverse slat top is provided perpendicular to the second guide rail of first guide rail, sliding is provided with shuffle box on second guide rail, the ventilation upper box part is equipped with the ventilation mouth that can be opened or close, the side of the shuffle box is equipped with air inlet and gas outlet, and the side wall of the reflux layer is equipped with air inlet pipe and the first escape pipe；And air cleaner, it is connected to the air inlet pipe, the first escape pipe, the air cleaner includes the second escape pipe, and second escape pipe is connected to described into gas-bearing formation.The energy is saved in this case, and overall precision improves, and as the different needs of cleanliness factor can adjust the frequency that cleanliness factor measuring unit control shuffle box is cleared up.
Description
Technical field
The utility model is related to toilet field, more particularly to a kind of high-accuracy intelligent Cleanroom system.
Background technology
The development of toilet is maintained close ties with together with modern industry, sophisticated technology.Due to precision mechanics industry (such as gyro
The processing such as instrument, miniature bearing), requirement of the semi-conductor industry (such as large scale integrated circuit production) to environment, promote cleaning
The development of room technology.The country once counted, and the qualification rate of MOS circuit dies is produced only in the environment of the other requirement of no clean grade
10%-15%, 64 reservoirs only 2%.At present toilet is applied in the industry such as precision machinery, semiconductor, aerospace, atomic energy
It is fairly common.
Cleanroom system high energy consumption, and there is also the problems that precision is difficult to control for the Cleanroom system of large space.
Utility model content
One purpose of the utility model be solve at least the above or defect, and provide at least will be described later it is excellent
Point.
The utility model is to provide a kind of high-accuracy intelligent Cleanroom system there are one purpose, is measured by cleanliness factor
Air cleaning degree in unit judges difference zoning, it is found that when some region of cleanliness factor is not up to standard, by taking out shuffle box
It is moved to after vacuum at the corresponding blow vent in the region, top in jacking cylinder is empty so that seal ring seal blow vent and ventilation mouth
Gas clearing machine opens the second escape pipe and injects pure air into gas-bearing formation, working lining so that working lining is higher by a level pressure than the external world
Qiang Hou opens ventilation mouth, and by the air suction air exchange case not up to standard in corresponding zoning, after closing ventilation mouth, jacking cylinder declines,
Shuffle box is moved to initial place and is connected to air cleaner, by air cleaner first by the gas mistake not up to standard in shuffle box
Filter, discharge, and to forming draft in shuffle box further after cleaning are finally again taken out shuffle box by air cleaner true
Sky prepares operation next time, in this way, by accurately targetedly clearing up, saves the energy, and overall precision improves, and with
The different of cleanliness factor to need that the frequency that cleanliness factor measuring unit control shuffle box is cleared up can be adjusted.
For this purpose, technical solution provided by the utility model is：
A kind of high-accuracy intelligent Cleanroom system, including：
Toilet is respectively arranged with from up to down into gas-bearing formation, working lining and reflux layer, and the reflux layer includes first horizontal
Plate, the first transverse slat lower slide are arranged on the first guide rail, and first transverse slat top is provided perpendicular to described first
Second guide rail of guide rail, on second guide rail sliding be provided with shuffle box, the ventilation upper box part equipped with can open or
The ventilation mouth of closing, the side of the shuffle box are equipped with air inlet and gas outlet, the side wall of the reflux layer be equipped with air inlet pipe with
First escape pipe；And
Air cleaner is connected to the air inlet pipe, the first escape pipe, and the air cleaner includes the second outlet
Pipe, second escape pipe are connected to described into gas-bearing formation；
Wherein, it is consistent with the shuffle box top planes size, shape to be divided into several bottoms for the working lining
Separate, it is each described to separate bottom and offer blow vent corresponding with the ventilation mouth, it is each described in separate in be provided with cleaning
Spend measuring unit.
Preferably, first transverse slat is fixedly connected with the telescopic end of the first cylinder, and first cylinder is fixed on institute
It states on reflux layer side wall.
Preferably, first transverse slat bottom constitutes first straight line motor with first guide rail.
Preferably, the bottom of second guide rail and the shuffle box constitutes second straight line motor, the second straight line
Motor is electrically connected with the cleanliness factor measuring unit.
Preferably, first cylinder or first straight line motor are electrically connected with the cleanliness factor measuring unit.
Preferably, the height of the working lining accounts for the ratio of toilet's height>60%.
Preferably, the height of the shuffle box accounts for the ratio of the height of the working lining>30%.
Preferably, first guide rail is erected on raising plate, and the raising plate lower part is equipped with jacking cylinder.
Preferably, it is equipped with sealing ring above the ventilation mouth or below the blow vent.
The utility model includes at least following advantageous effect：Judge the air in different zonings by cleanliness factor measuring unit
Clean level, it is found that it is corresponding by being moved to the region after vacuumizing shuffle box when some region of cleanliness factor is not up to standard
At blow vent, in jacking cylinder top so that seal ring seal blow vent with ventilation mouth, air cleaner open the second escape pipe to
Pure air is injected into gas-bearing formation, working lining so that after working lining is higher by certain pressure intensity than the external world, ventilation mouth is opened, by corresponding area
Interior air suction air exchange case not up to standard is drawn, after closing ventilation mouth, jacking cylinder declines, and shuffle box is moved to initial place and air
Clearing machine is connected to, by air cleaner first by gas filtration not up to standard, the discharge in shuffle box, and to being formed in shuffle box
Shuffle box further after cleaning, is finally vacuumized the operation prepared next time by draft by air cleaner again, in this way,
By accurately targetedly clearing up, the energy is saved, overall precision improves, and as the different of cleanliness factor need to adjust
The frequency that clean and tidy cleanliness measuring unit control shuffle box is cleared up.
Description of the drawings
Fig. 1 is the schematic top plan view of high-accuracy intelligent Cleanroom system；
Fig. 2 is the sectional view at A-A in Fig. 1；
Fig. 3 is the enlarged diagram at A in Fig. 2；
Fig. 4 is the top cross section schematic diagram of high-accuracy intelligent Cleanroom system.
Specific implementation mode
The utility model is described in further detail below by embodiment, to enable those skilled in the art's reference say
Bright book word can be implemented according to this.
Such as " have " it should be appreciated that used herein, "comprising" and " comprising " term are not precluded one or more
The presence or addition of a other elements or combinations thereof.
In conjunction with shown in Fig. 1-4, there are following examples：
A kind of high-accuracy intelligent Cleanroom system, including：
Toilet is respectively arranged with from up to down into gas-bearing formation 100, working lining 200 and reflux layer 300, the reflux layer
300 include the first transverse slat 310, and 310 lower slide of the first transverse slat is arranged on the first guide rail 320, first transverse slat 310
Top is provided perpendicular to the second guide rail 330 of first guide rail 320, is slided on second guide rail 330 and is provided with ventilation
Case 340,340 top of the shuffle box are equipped with the ventilation mouth 341 that can be opened or close, and the side of the shuffle box 340 is set
There are air inlet and gas outlet, the side wall of the reflux layer 300 to be equipped with air inlet pipe 350 and the first escape pipe 360；And
Air cleaner 400 is connected to the air inlet pipe 350, the first escape pipe 360, and the air cleaner 400 wraps
The second escape pipe 410 is included, second escape pipe 410 is connected to described into gas-bearing formation 100；
Wherein, the working lining 200 is divided into several bottoms and 340 top planes size of the shuffle box, shape are equal
Consistent separates, each described to separate bottom and offer blow vent 210 corresponding with the ventilation mouth 341, it is each described in separate
In be provided with cleanliness factor measuring unit.
First transverse slat 310 is fixedly connected with the telescopic end of the first cylinder, and first cylinder is fixed on the reflux
On 300 side wall of layer.
First transverse slat, 310 bottom constitutes first straight line motor with first guide rail 320.
Second guide rail 330 and the bottom of the shuffle box 340 constitute second straight line motor, the second straight line motor
It is electrically connected with the cleanliness factor measuring unit.
First cylinder or first straight line motor are electrically connected with the cleanliness factor measuring unit.
The height of the working lining 200 accounts for the ratio of toilet's height>60%.
The height of the shuffle box 340 accounts for the ratio of the height of the working lining 200>30%.
First guide rail 320 is erected on raising plate 370, and 370 lower part of the raising plate is equipped with jacking cylinder 380.
341 top of the ventilation mouth is equipped with sealing ring 342.
From the above mentioned, the air cleaning degree in different zonings is judged by cleanliness factor measuring unit, finds a certain region
Cleanliness factor it is not up to standard when, by being moved to after vacuumizing shuffle box at the corresponding blow vent in the region, pushed up in jacking cylinder
So that seal ring seal blow vent and ventilation mouth, it is clean to being injected into gas-bearing formation, working lining that air cleaner opens the second escape pipe
Air so that after working lining is higher by certain pressure intensity than the external world, open ventilation mouth, the air not up to standard sucking in corresponding zoning is changed
Gas tank, after closing ventilation mouth, jacking cylinder declines, and shuffle box is moved to initial place and is connected to air cleaner, net by air
Change prow first by gas filtration not up to standard, the discharge in shuffle box, and in shuffle box formed draft further clean after,
Finally shuffle box is vacuumized by air cleaner again and prepares operation next time, in this way, by accurately targetedly
The energy is saved in cleaning, and overall precision improves, and as the different of cleanliness factor need that the control of cleanliness factor measuring unit can be adjusted
The frequency that shuffle box is cleared up.
It is not only in the description and the implementation although the embodiments of the present invention have been disclosed as above
Listed utilization.It can be applied to various fields suitable for the present invention completely.For those skilled in the art,
Other modifications may be easily implemented.Therefore without departing from the general concept defined in the claims and the equivalent scope, this reality
It is not limited to specific details and legend shown and described herein with novel.
Claims (9)
1. a kind of high-accuracy intelligent Cleanroom system, which is characterized in that including：
Toilet is respectively arranged with from up to down into gas-bearing formation, working lining and reflux layer, and the reflux layer includes the first transverse slat,
The first transverse slat lower slide is arranged on the first guide rail, and first transverse slat top is provided perpendicular to first guide rail
The second guide rail, on second guide rail sliding be provided with shuffle box, the ventilation upper box part is equipped with can open or close
Ventilation mouth, the side of the shuffle box is equipped with air inlet and gas outlet, and the side wall of the reflux layer is equipped with air inlet pipe and first
Escape pipe；And
Air cleaner is connected to the air inlet pipe, the first escape pipe, and the air cleaner includes the second escape pipe, institute
The second escape pipe is stated to be connected into gas-bearing formation with described；
Wherein, the working lining is divided into that several bottoms and the shuffle box top planes size, shape is consistent separates,
It is each described to separate bottom and offer blow vent corresponding with the ventilation mouth, it is each it is described separate in be provided with cleanliness factor and measure
Unit.
2. high-accuracy intelligent Cleanroom system according to claim 1, which is characterized in that first transverse slat and first
The telescopic end of cylinder is fixedly connected, and first cylinder is fixed on the reflux layer side wall.
3. high-accuracy intelligent Cleanroom system according to claim 2, which is characterized in that first transverse slat bottom with
First guide rail constitutes first straight line motor.
4. high-accuracy intelligent Cleanroom system according to claim 1, which is characterized in that second guide rail with it is described
The bottom of shuffle box constitutes second straight line motor, and the second straight line motor is electrically connected with the cleanliness factor measuring unit.
5. the high-accuracy intelligent Cleanroom system according to claim 2 or 3, which is characterized in that first cylinder
Or first straight line motor is electrically connected with the cleanliness factor measuring unit.
6. high-accuracy intelligent Cleanroom system according to claim 1, which is characterized in that the height of the working lining accounts for
The ratio of toilet's height>60%.
7. high-accuracy intelligent Cleanroom system according to claim 6, which is characterized in that the height of the shuffle box accounts for
The ratio of the height of the working lining>30%.
8. high-accuracy intelligent Cleanroom system according to claim 1, which is characterized in that first guide rail is erected at
On raising plate, the raising plate lower part is equipped with jacking cylinder.
9. high-accuracy intelligent Cleanroom system according to claim 8, which is characterized in that above the ventilation mouth or
Sealing ring is equipped with below the blow vent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721394351.0U CN207716544U (en) | 2017-10-26 | 2017-10-26 | High-accuracy intelligent Cleanroom system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721394351.0U CN207716544U (en) | 2017-10-26 | 2017-10-26 | High-accuracy intelligent Cleanroom system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207716544U true CN207716544U (en) | 2018-08-10 |
Family
ID=63060515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721394351.0U Active CN207716544U (en) | 2017-10-26 | 2017-10-26 | High-accuracy intelligent Cleanroom system |
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| Country | Link |
|---|---|
| CN (1) | CN207716544U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111457494A (en) * | 2020-04-01 | 2020-07-28 | 北京联合大学 | Quick clean-up system of pollution source pollution gas in clean room |
-
2017
- 2017-10-26 CN CN201721394351.0U patent/CN207716544U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111457494A (en) * | 2020-04-01 | 2020-07-28 | 北京联合大学 | Quick clean-up system of pollution source pollution gas in clean room |
| CN111457494B (en) * | 2020-04-01 | 2021-08-27 | 北京联合大学 | Quick clean-up system of pollution source pollution gas in clean room |
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